KR20090053677A - 패턴 검사 장치 - Google Patents

패턴 검사 장치 Download PDF

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Publication number
KR20090053677A
KR20090053677A KR1020080087642A KR20080087642A KR20090053677A KR 20090053677 A KR20090053677 A KR 20090053677A KR 1020080087642 A KR1020080087642 A KR 1020080087642A KR 20080087642 A KR20080087642 A KR 20080087642A KR 20090053677 A KR20090053677 A KR 20090053677A
Authority
KR
South Korea
Prior art keywords
pattern
imaging
workpiece
reflective
work
Prior art date
Application number
KR1020080087642A
Other languages
English (en)
Korean (ko)
Inventor
겐타로 노모토
료조 마츠다
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20090053677A publication Critical patent/KR20090053677A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020080087642A 2007-11-22 2008-09-05 패턴 검사 장치 KR20090053677A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00302908 2007-11-22
JP2007302908A JP2009128158A (ja) 2007-11-22 2007-11-22 パターン検査装置

Publications (1)

Publication Number Publication Date
KR20090053677A true KR20090053677A (ko) 2009-05-27

Family

ID=40725709

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080087642A KR20090053677A (ko) 2007-11-22 2008-09-05 패턴 검사 장치

Country Status (4)

Country Link
JP (1) JP2009128158A (zh)
KR (1) KR20090053677A (zh)
CN (1) CN101441182A (zh)
TW (1) TW200923351A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8624201B2 (en) 2011-05-31 2014-01-07 Samsung Electronics Co., Ltd. Fluorescence detecting optical system and multi-channel fluorescence detection apparatus having the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481908B2 (ja) * 2009-04-02 2014-04-23 セイコーエプソン株式会社 画像読取装置およびその制御装置、プログラム、制御方法
CN102384908A (zh) * 2010-09-01 2012-03-21 台达电子工业股份有限公司 基板内部缺陷检查装置及方法
SE537987C2 (sv) * 2014-04-07 2016-01-12 Cgrain Ab Avbildningssystem för granulärt material med homogen bakgrund
JP7189417B2 (ja) * 2018-07-31 2022-12-14 澁谷工業株式会社 物品検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8624201B2 (en) 2011-05-31 2014-01-07 Samsung Electronics Co., Ltd. Fluorescence detecting optical system and multi-channel fluorescence detection apparatus having the same

Also Published As

Publication number Publication date
TW200923351A (en) 2009-06-01
CN101441182A (zh) 2009-05-27
JP2009128158A (ja) 2009-06-11

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