KR20090043146A - 무전해 주석도금액 불순물 제거장치 및 방법 - Google Patents
무전해 주석도금액 불순물 제거장치 및 방법 Download PDFInfo
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- KR20090043146A KR20090043146A KR1020070108846A KR20070108846A KR20090043146A KR 20090043146 A KR20090043146 A KR 20090043146A KR 1020070108846 A KR1020070108846 A KR 1020070108846A KR 20070108846 A KR20070108846 A KR 20070108846A KR 20090043146 A KR20090043146 A KR 20090043146A
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- Prior art keywords
- tin plating
- plating solution
- electroless tin
- electroless
- electrode plate
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1689—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
Abstract
Description
전류밀도 (ASD) | 시간 (hr) | 초기 Sb 농도 (ppm) | 초기 Cu 농도 (g/L) | 전극 내의 Sb 농도 | 전극 내의 Cu농도 | 최종Sb 농도(ppm) | 최종Cu 농도(g/L) |
0.05 | 12 | 200 | 0.5 | 3 % | 6 % | 150 | 0.4 |
24 | 200 | 0.5 | 5 % | 3 % | 100 | 0.4 | |
0.10 | 12 | 200 | 0.5 | 10 % | 15 % | 80 | 0.3 |
24 | 200 | 0.5 | 8 % | 14 % | 50 | 0.3 | |
0.50 | 12 | 100 | 0.5 | 7 % | 20 % | 80 | 0.1 |
24 | 100 | 0.5 | 8 % | 14 % | 30 | 0.2 | |
1.00 | 12 | 100 | 0.5 | 6 % | 16 % | 60 | 0.1 |
24 | 100 | 0.5 | 5 % | 18 % | 30 | 0.1 |
Claims (12)
- 상호 연통되도록 연속적으로 배치된 복수 개의 격실과;상기 격실 내에 배치되며 양극판 및 음극판을 포함하는 불순물제거부와;상기 불순물제거부에 전원을 공급하기 위한 전원공급부를 포함하며,상기 전원공급부로부터 공급되는 전류의 전류밀도는,0.05 A/d㎡ 이상 10 A/d㎡ 이하인 것을 특징으로 하는 무전해 주석도금액의 불순물 제거장치.
- 제 1 항에 있어서,상기 양극판은 주석 또는 백금 또는 티타늄 성분 중의 어느 하나를 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거장치.
- 제 1 항에 있어서,상기 음극판은 주석 또는 백금 또는 티타늄 성분 중의 어느 하나를 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거장치.
- 제 2 항 또는 3 항에 있어서,상기 전원공급부로부터 공급되는 전류밀도는,0.1 A/d㎡ 이상 1 A/d㎡ 이하인 것을 특징으로 하는 무전해 주석도금액의 불 순물 제거장치.
- 제 2 항 또는 3 항에 있어서,상기 무전해 주석도금액의 불순물 제거장치 내로 무전해 주석도금액을 보충하기 위한 무전해 주석도금액 보충부를 추가적으로 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거장치.
- 제 5 항에 있어서,상기 무전해 주석도금액 불순물 제거장치와 무전해 도금부 간의 무전해 주석도금액을 순환시키기 위한 무전해 주석도금액 순환부를 추가적으로 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거장치.
- 상호 연통되도록 연속적으로 배치된 복수 개의 격실 내로 무전해 주석도금액을 유입하는 단계;상기 격실 내에 배치되며 양극판 및 음극판을 포함하는 불순물제거부를 통해 상기 무전해 주석도금액을 통과시키는 단계를 포함하며,상기 불순물제거부에 공급되는 전류의 전류밀도는, 0.05 A/d㎡ 이상 10 A/d㎡ 이하인 것을 특징으로 하는 무전해 주석도금액의 불순물 제거방법.
- 제 7 항에 있어서,상기 양극판은 주석 또는 백금 또는 티타늄 성분 중의 어느 하나를 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거방법.
- 제 7 항에 있어서,상기 음극판은 주석 또는 백금 또는 티타늄 성분 중의 어느 하나를 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거방법.
- 제 8 항 또는 9 항에 있어서,상기 불순물제거부에 공급되는 전류의 전류밀도는,0.1 A/d㎡ 이상 1 A/d㎡ 이하인 것을 특징으로 하는 무전해 주석도금액의 불순물 제거방법.
- 제 8 항 또는 9 항에 있어서,상기 무전해 주석도금액의 불순물 제거장치 내로 무전해 주석도금액을 보충하기 위한 무전해 주석도금액 보충단계를 추가적으로 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거방법.
- 제 11 항에 있어서,상기 무전해 주석도금액을 무전해 도금부로 유출시키는 단계를 추가적으로 포함하는 것을 특징으로 하는 무전해 주석도금액의 불순물 제거방법.
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KR1020070108846A KR100934729B1 (ko) | 2007-10-29 | 2007-10-29 | 무전해 주석도금액 불순물 제거장치 및 방법 |
JP2008109128A JP2009108399A (ja) | 2007-10-29 | 2008-04-18 | 無電解錫めっき液の不純物除去装置及び方法 |
CNA2008100984151A CN101423939A (zh) | 2007-10-29 | 2008-05-26 | 用于化学镀锡溶液的杂质清除装置及清除方法 |
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KR1020070108846A KR100934729B1 (ko) | 2007-10-29 | 2007-10-29 | 무전해 주석도금액 불순물 제거장치 및 방법 |
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KR100934729B1 KR100934729B1 (ko) | 2009-12-30 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101114887B1 (ko) * | 2011-10-11 | 2012-03-06 | 주식회사 삼원알텍 | 금속의 아노다이징 처리과정에서 발생되는 금속성 불순물 제거용 여과장치 |
KR20200140407A (ko) * | 2018-05-09 | 2020-12-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 전기도금 시스템들에서 오염을 제거하기 위한 시스템들 및 방법들 |
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MX2022001408A (es) * | 2019-08-01 | 2022-04-11 | Aqua Metals Inc | Recuperación de metales a partir de electrolitos que contienen plomo. |
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JPH05320926A (ja) * | 1992-05-19 | 1993-12-07 | Mitsubishi Electric Corp | 無電解めっき液の再生方法 |
DE19719020A1 (de) * | 1997-05-07 | 1998-11-12 | Km Europa Metal Ag | Verfahren und Vorrichtung zum Regenerieren von Verzinnungslösungen |
JP4707941B2 (ja) * | 2003-09-02 | 2011-06-22 | アルメックスPe株式会社 | めっき処理装置およびめっき処理方法 |
KR100729445B1 (ko) * | 2004-10-22 | 2007-06-15 | 박수복 | 에이비에스 성형품 도금장치 및 그 도금장치의 도금액 조절방법 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101114887B1 (ko) * | 2011-10-11 | 2012-03-06 | 주식회사 삼원알텍 | 금속의 아노다이징 처리과정에서 발생되는 금속성 불순물 제거용 여과장치 |
KR20200140407A (ko) * | 2018-05-09 | 2020-12-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 전기도금 시스템들에서 오염을 제거하기 위한 시스템들 및 방법들 |
Also Published As
Publication number | Publication date |
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CN101423939A (zh) | 2009-05-06 |
JP2009108399A (ja) | 2009-05-21 |
KR100934729B1 (ko) | 2009-12-30 |
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