KR20090004701A - 판 형상의 피처리체의 냉각장치 및 냉각장치를 장착한열처리 시스템 - Google Patents

판 형상의 피처리체의 냉각장치 및 냉각장치를 장착한열처리 시스템 Download PDF

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Publication number
KR20090004701A
KR20090004701A KR1020080064201A KR20080064201A KR20090004701A KR 20090004701 A KR20090004701 A KR 20090004701A KR 1020080064201 A KR1020080064201 A KR 1020080064201A KR 20080064201 A KR20080064201 A KR 20080064201A KR 20090004701 A KR20090004701 A KR 20090004701A
Authority
KR
South Korea
Prior art keywords
cooling
hole
processed
processed object
plate
Prior art date
Application number
KR1020080064201A
Other languages
English (en)
Korean (ko)
Inventor
토시로 칸다
Original Assignee
에스펙 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스펙 가부시키가이샤 filed Critical 에스펙 가부시키가이샤
Publication of KR20090004701A publication Critical patent/KR20090004701A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/24—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J7/26—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space by flow of fluid through passages associated with tube or lamp
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133382—Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell
    • G02F1/133385—Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell with cooling means, e.g. fans

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Furnace Details (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
KR1020080064201A 2007-07-06 2008-07-03 판 형상의 피처리체의 냉각장치 및 냉각장치를 장착한열처리 시스템 KR20090004701A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007179003A JP4559454B2 (ja) 2007-07-06 2007-07-06 板状体冷却装置、熱処理システム
JPJP-P-2007-00179003 2007-07-06

Publications (1)

Publication Number Publication Date
KR20090004701A true KR20090004701A (ko) 2009-01-12

Family

ID=40213105

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080064201A KR20090004701A (ko) 2007-07-06 2008-07-03 판 형상의 피처리체의 냉각장치 및 냉각장치를 장착한열처리 시스템

Country Status (4)

Country Link
JP (1) JP4559454B2 (zh)
KR (1) KR20090004701A (zh)
CN (1) CN101338976B (zh)
TW (1) TWI431335B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5856890B2 (ja) * 2012-03-29 2016-02-10 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置
CN103626389B (zh) * 2012-08-29 2016-01-13 英属开曼群岛商精曜有限公司 降温装置及其操作方法
KR101802888B1 (ko) 2016-01-15 2017-12-29 주식회사 비아트론 순환 냉각 유닛을 갖는 열처리 시스템

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2782791B2 (ja) * 1989-06-06 1998-08-06 松下電器産業株式会社 リフロー装置
JP3274089B2 (ja) * 1997-08-19 2002-04-15 タバイエスペック株式会社 ハイブリッド型熱処理装置
JP4473814B2 (ja) * 2001-02-23 2010-06-02 株式会社タムラ製作所 加熱炉
US6938432B2 (en) * 2002-01-10 2005-09-06 Espec Corp. Cooling apparatus and a thermostat with the apparatus installed therein
JP2005079466A (ja) * 2003-09-02 2005-03-24 Furukawa Electric Co Ltd:The 冷却機構を備えたリフロー装置及び該リフロー装置を用いたリフロー炉

Also Published As

Publication number Publication date
JP4559454B2 (ja) 2010-10-06
CN101338976A (zh) 2009-01-07
TW200916850A (en) 2009-04-16
JP2009013031A (ja) 2009-01-22
CN101338976B (zh) 2011-07-20
TWI431335B (zh) 2014-03-21

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