KR20080077040A - 직접성형 시스템 및 방법 - Google Patents
직접성형 시스템 및 방법 Download PDFInfo
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- KR20080077040A KR20080077040A KR1020077014683A KR20077014683A KR20080077040A KR 20080077040 A KR20080077040 A KR 20080077040A KR 1020077014683 A KR1020077014683 A KR 1020077014683A KR 20077014683 A KR20077014683 A KR 20077014683A KR 20080077040 A KR20080077040 A KR 20080077040A
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- substrate
- molding
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- 238000000465 moulding Methods 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 239000012778 molding material Substances 0.000 claims abstract description 34
- 238000001816 cooling Methods 0.000 claims description 48
- 229920002379 silicone rubber Polymers 0.000 claims description 16
- 239000004945 silicone rubber Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000007493 shaping process Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000011179 visual inspection Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
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- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 239000004944 Liquid Silicone Rubber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
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- 239000013536 elastomeric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
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- H—ELECTRICITY
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- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C2043/3433—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/50—Removing moulded articles
- B29C2043/5061—Removing moulded articles using means movable from outside the mould between mould parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/0022—Multi-cavity moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/02—Moulds or cores; Details thereof or accessories therefor with incorporated heating or cooling means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0016—Lenses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/4809—Loop shape
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Ophthalmology & Optometry (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
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Abstract
Description
Claims (21)
- 성형재료로 기판을 성형하는 성형시스템으로서,성형공정 이전에 성형재료가 분배되어 지는 복수개의 캐비티(cavity)를 갖는 센터 캐비티 플레이트로부터 열을 방출시키는 냉각장치가 구비되는 냉각/분배 스테이션과;상부 몰드 조임틀 및 하부 몰드 조임틀을 포함하며, 상기 센터 캐비티 플레이트를 상기 기판과 함께 상부 몰드 조임틀 및 하부 몰드 조임틀 사이에 배치하여 소정 시간 및 온도에서 성형할 수 있게 하는 몰딩 스테이션;을 포함하는 몰드 모듈(mold module)을 포함하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 냉각장치는,공기에 의한 냉각장치, 유체에 의한 냉각 시스템 또는 하나 이상의 펠티어 모듈을 갖는 냉각 시스템으로 구성된 그룹에서 선택되는 어느 하나인 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서,상기 몰드 조임틀들은 히터를 포함하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 성형시스템은,상기 기판을 입력 모듈로부터 상기 냉각/분배 스테이션의 플랫폼(platform) 상에 배치된 센터 캐비티 플레이트 위로 이송시키는 입력 파지부와;상기 성형된 기판을 상기 냉각/분배 스테이션의 플랫폼 상에 배치된 상기 센터 캐비티 플레이트로부터 출력 모듈로 이송시키는 출력 파지부;를 더욱 포함하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 성형시스템은,분배 헤드와;상기 성형 재료를 수용하는 용기와;상기 분배 헤드를 상기 성형 재료가 상기 센터 캐비티 플레이트의 캐비티 속으로 분배될 수 있는 위치로/위치로부터 이동시키는 전자-기계적 이송기구;를 구비하는 분배장치를 더욱 포함하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 성형시스템은,상기 기판을 온로드 트랙(onload track)으로 이송하는 온로더(onloader)와;상기 기판을 집어서 리드인 플레이트(lead-in plate) 위에 배치하는 트랙 및 파지부와;상기 기판을 배향시키는 리드인 플레이트와;상기 기판의 방향을 적절하게 유지시키는 로딩 플레이트(loading plate);를 포함하는 입력 모듈을 더욱 포함하는 것을 특징으로 하는 성형시스템.
- 제 6 항에 있어서,상기 로딩 플레이트는 상기 기판을 소정의 온도로 예열하는 가열장치을 포함하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 성형시스템은,상기 성형된 기판을 수용하는 언로딩 플레이트(unloading plate)와;상기 성형된 기판을 상기 언로딩 플레이트로부터 집어서 오프로드 트랙(offload track) 위에 배치하는 픽업 및 배치부와;상기 성형된 기판을 수용하는 오프로드 트랙과;상기 성형된 기판을 상기 시스템으로부터 제거되도록 준비시키는 오프로더(offloader);를 포함하는 출력 모듈을 더욱 포함하는 것을 특징으로 하는 성형시스템.
- 제 8 항에 있어서, 상기 오프로드 트랙은 성형된 기판을 검사하기 위한 시각적 검사장치를 포함하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서,상기 기판은 리드프레임(leadframe)인 것을 특징으로 하는 성형시스템.
- 제 10 항에 있어서,상기 리드프레임은 다수의 전자소자를 구비하는 것을 특징으로 하는 성형시스템.
- 제 11 항에 있어서,상기 전자소자는 LED인 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서,상기 성형재료는 실리콘 고무인 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 냉각/분배 스테이션은,플랫폼(platform)을 포함하여, 상기 냉각장치가 상기 플랫폼의 온도를 제어하도록 구성되며 상기 플랫폼은 분배공정 동안 상기 센터 캐비티 플레이트를 지지하도록 하는 것을 특징으로 하는 성형시스템.
- 제 1 항에 있어서, 상기 냉각/분배 스테이션은,상기 냉각장치에 의해 온도가 제어되는 냉각판과;분배공정 동안 상기 센터 캐비티 플레이트를 지지하는 지지수단;을 포함하는 것을 특징으로 하는 성형시스템.
- 성형재료로 기판을 성형하는 방법으로서,복수개의 캐비티가 구비된 센터 캐비티 플레이트를 준비하는 단계와;상기 센터 캐비티 플레이트를 지지판 위에 배치하는 단계와;상기 성형재료를 상기 캐비티에 분배하는 단계와;상기 기판을 상기 센터 캐비티 플레이트 상에 배치하여 캐비티와 정렬시키는 단계와;상기 기판 및 센터 캐비티 플레이트를 금형 속으로 이송하는 단계와;상기 기판을 소정의 기간 동안 소정의 온도에서 가압 및 성형하여 상기 성형재료를 성형 및 경화시키는 단계와;상기 성형된 기판 및 센터 캐비티 플레이트를 냉각판 위로 이송시켜 상기 센터 캐비티 플레이트를 냉각시키는 단계와;상기 성형된 기판을 상기 센터 캐비티 플레이트의 캐비티로부터 집어내는 단계;를 포함하는 기판 성형방법.
- 제 16 항에 있어서,상기 기판 성형방법은 상기 지지판과 상기 냉각판이 동일한 것임을 특징으로 하는 기판 성형방법.
- 제 16 항에 있어서,상기 기판은 리드프레임인 것을 특징으로 하는 기판 성형방법.
- 제 18 항에 있어서,상기 리드프레임은 다수의 전자소자를 구비하는 것을 특징으로 하는 기판 성형방법.
- 제 19 항에 있어서,상기 전자소자는 LED인 것을 특징으로 하는 기판 성형방법.
- 제 16 항에 있어서,상기 성형재료는 실리콘 고무인 것을 특징으로 하는 기판 성형방법.
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SG200700795-8 | 2007-01-31 | ||
SG200700795-8A SG144777A1 (en) | 2007-01-31 | 2007-01-31 | Direct molding system and process |
PCT/SG2007/000032 WO2008094124A1 (en) | 2007-01-31 | 2007-02-01 | Direct molding system and process |
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KR20080077040A true KR20080077040A (ko) | 2008-08-21 |
KR100887441B1 KR100887441B1 (ko) | 2009-03-10 |
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KR (1) | KR100887441B1 (ko) |
SG (1) | SG144777A1 (ko) |
TW (1) | TWI403000B (ko) |
WO (1) | WO2008094124A1 (ko) |
Cited By (1)
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KR101317617B1 (ko) * | 2011-11-04 | 2013-10-14 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Flip 칩 패키징 내에 몰딩된 언더필을 위한 장치 및 방법 |
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US10293542B2 (en) | 2014-06-27 | 2019-05-21 | Globe Machine Manufacturing Company | Slipper tool, system and method for using the slipper tool for molding |
US10994449B2 (en) | 2017-02-13 | 2021-05-04 | Lightweight Labs, Llc | Air impingement device, system and method for thermal processing and consolidation |
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JPH0758137A (ja) * | 1993-08-11 | 1995-03-03 | Toshiba Corp | 半導体モールド装置の部品検査方法及び半導体モールド装置 |
US6319739B1 (en) * | 2000-04-06 | 2001-11-20 | Advanced Micro Devices, Inc. | Mold compound selection for TSOP post mold cure processing |
US7344902B2 (en) * | 2004-11-15 | 2008-03-18 | Philips Lumileds Lighting Company, Llc | Overmolded lens over LED die |
-
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- 2007-02-01 WO PCT/SG2007/000032 patent/WO2008094124A1/en active Application Filing
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Cited By (3)
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KR101317617B1 (ko) * | 2011-11-04 | 2013-10-14 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Flip 칩 패키징 내에 몰딩된 언더필을 위한 장치 및 방법 |
KR101388753B1 (ko) * | 2011-11-04 | 2014-04-25 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Flip 칩 패키징 내에 몰딩된 언더필을 위한 장치 및 방법 |
US9412717B2 (en) | 2011-11-04 | 2016-08-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and methods for molded underfills in flip chip packaging |
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Publication number | Publication date |
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WO2008094124A1 (en) | 2008-08-07 |
SG144777A1 (en) | 2008-08-28 |
TWI403000B (zh) | 2013-07-21 |
KR100887441B1 (ko) | 2009-03-10 |
TW200910649A (en) | 2009-03-01 |
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