KR20070121434A - Apparatus for inspecting a cutting plane of a glass substrate - Google Patents

Abstract

An apparatus for inspecting a cut plane of a glass substrate is provided to inspect all cut planes of the glass substrate accurately and inspect glass substrates of various sizes with a simple operation. A substrate transfer unit transfers a plurality of glass substrates in a line. First and second photographing units photograph cut planes of facing front and rear sides of neighboring glass substrates in a tangential direction while the glass substrates are stationary. Third and fourth photographing units photograph the cut planes of the neighboring glass substrates in a vertical direction while the glass substrates are stationary. A camera transfer unit reciprocates the photographing units in a direction orthogonal to a transfer path of the glass substrates. A controller controls the substrate transfer unit and the camera transfer unit so that the photographing units move and photograph along the cut planes of the neighboring glass substrates by repeating the transfer and the stop of the glass substrates.

Description

Defect inspection device for glass substrate chamfering surface {APPARATUS FOR INSPECTING A CUTTING PLANE OF A GLASS SUBSTRATE}

1 is a schematic diagram showing a defect inspection apparatus of a glass substrate chamfering surface according to the present invention,

Figure 2 is a side view showing a defect inspection apparatus of the glass substrate chamfering surface according to the present invention,

3 is a cross-sectional view taken along line AA ′ of FIG. 2;

4 is a cross-sectional view taken along line BB ′ of FIG. 2;

5 is a block diagram showing a defect inspection apparatus of the glass substrate chamfering surface according to the present invention,

6A and 6B are schematic views showing a third photographing means according to the present invention, and FIG. 6A shows a case where the chamfered surface of the glass substrate is not defective, and FIG. 6B shows a case where the chamfered surface of the glass substrate is defective. One,

7A and 7B are images respectively photographed by the third photographing means in FIGS. 6A and 6B.

<Description of Symbols for Main Parts of Drawings>

110: substrate transfer means 111: transfer roller

112: floating bar 113: feed motor

121: first photographing means 122: second photographing means

123: third photographing means 124: fourth photographing means

125: fifth photographing means 126: sixth photographing means

127: seventh photographing means 128: eighth photographing means

130: camera transfer means 131: cart

132: linear motor 133: linear motor guide

140: control unit 150: display unit

160: recording position variable stage 161: fixed bracket

162: guide member 163: bracket transfer means

170: main body 180: defect detection unit

The present invention relates to a defect inspection apparatus of a glass substrate chamfered surface, and more particularly to a defect inspection apparatus of a glass substrate chamfered surface that can accurately inspect the defects on all chamfered surface of the glass substrate.

In general, glass substrates used in the manufacture of flat panel displays such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and electro luminescent (EL) are glass melting furnaces. It is manufactured by supplying the melted glass in the fusion molding machine, and is cut by the cutting machine to meet the primary specifications and transported to the processing process.

As the glass substrate is cut to a certain size in the processing process, chamfering surface is generated.

Chamfering surface of the glass substrate is a defect in the cutting process, for example, chamfering, over chamfering, chamfering, chamfering cracks and the like.

Since defects in the chamfered surface of the glass substrate may cause breakage and defect of the glass substrate in the process of processing the glass substrate, it is important to inspect the defects on the chamfered surface of the glass substrate.

Therefore, it is necessary to develop an apparatus capable of accurately performing defect inspection on glass substrate chamfered surfaces.

In particular, the defect inspection device of the glass substrate chamfering surface should be able to perform inspection switching of glass substrates of different sizes very simply and quickly by simple operation in consideration of various sizes of glass substrates. In view of this possibility, there is a need to minimize the physical contact to suppress the occurrence of defects during inspection.

The present invention is to solve the above-mentioned conventional problems, an object of the present invention can accurately inspect the defects on all chamfering surface of the glass substrate, it is possible to inspect the glass substrate of various sizes with a simple operation The present invention provides a defect inspection apparatus of a glass substrate chamfered surface that can easily and quickly switch inspection of another glass substrate and minimize the physical contact with the glass substrate to suppress the occurrence of defects during the inspection.

The present invention for realizing the above object is a device for inspecting a defect present on a chamfered surface of a glass substrate, comprising: a substrate transfer means for transferring a plurality of glass substrates in a row, and a glass substrate in a state in which the glass substrate is stopped; The first and second photographing means for respectively photographing the chamfered surfaces of the front and rear facing each other in the tangential direction, and the chamfered surfaces of the front and rear facing each other between the glass substrates in the state in which the glass substrate is stopped, in the vertical direction, respectively. The third and fourth photographing means for photographing, the camera conveying means for reciprocally conveying the first to fourth photographing means in a direction orthogonal to the glass substrate, and the first and second photographs by repeating the conveyance and stop of the glass substrate. A control unit for controlling the substrate transfer means and the camera transfer means so that the photographing means follows the chamfers on the front and rear sides facing each other between the glass substrates; 4 is characterized in that it comprises a display for displaying the images taken from the recording means to the outside.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.

1 is a schematic view showing a defect inspection apparatus of a glass substrate chamfering surface according to the present invention, Figures 2 and 5 are side shaving and block diagram showing a defect inspection apparatus of a glass substrate chamfering surface according to the present invention. As shown, the defect inspection apparatus 100 of the glass substrate chamfered surface according to the present invention face each other between the substrate transfer means 110 for transferring a plurality of glass substrate 1 and the stationary glass substrate 1 Front and rear chamfers 1a and 1 that face each other between the first and second photographing means 121 and 122 and the stationary glass substrate 1 which respectively photograph the front and rear chamfers 1a and 1b in a tangential direction. Camera transfer means for transferring the third and fourth photographing means (123, 124) for photographing 1b) in the vertical direction, and the first to fourth photographing means (121, 122, 123, 124) in a direction orthogonal to the conveying path of the glass substrate (1). 130, a control unit 140 controlling the substrate transfer means 110 and the camera transfer means 130, and a display unit configured to externally display the image photographed by the first to fourth photographing means 121, 122, 123, and 124. 150).

The substrate transfer means 110 transfers the plurality of glass substrates 1 in a row at a constant interval, and between the first and fourth photographing means between the glass substrates 1 by the control signal of the controller 150. Whenever the (121, 122, 123, 124) is positioned, the glass substrate 1 being transferred is stopped.

The substrate conveying means 110 may be a conveying means of various methods such as a conveyor belt or a roller, a plurality of conveying rollers 111 supporting the lower side of the glass substrate 1 in this embodiment shown in Figure 3 and 4 ), And a plurality of floating bars 112 for injecting air toward one surface of the glass substrate 1 so as to float the glass substrate 1 supported on the lower side to the transfer roller 111 in a tilted state. A plurality of first to fourth photographing means (121, 122, 123, 124) are respectively provided to be installed on both sides.

The conveying roller 111 is arranged on the conveying frame 114 so as to be rotatable in plural along the conveying path of the glass substrate 1, and from the conveying motor 113 (shown in FIG. 5) by a belt (not shown). It receives the rotational force and transfers the glass substrate 1 supported on the outer circumferential surface.

Floating bar 112 is formed with a plurality of unshown injection holes for injecting air in the longitudinal direction on one side, arranged in a plurality of horizontally up and down on the transfer frame 114, the arrangement direction is a vertical direction It has a slope of 5 ° to 15 ° based on this. Accordingly, the floating bar 112 is tilted by floating the glass substrate 1 on which the lower chamfer 1d is supported by the transfer roller 111 by the pressure of air injected from the injection hole (not shown). It is to be conveyed by the feed roller 111.

The first and second photographing means 121 and 122 tangentially chamfer the front and rear chamfers 1a and 1b facing each other between the glass substrates 1 while the glass substrate 1 is stopped. Each of the first and second cameras 121a and 122a and the first and second illuminations 121b and 122b for irradiating light to these photographing portions are photographed in the horizontal direction, respectively.

The first and second cameras 121a and 122a and the first and second illuminations 121b and 122b have the front and rear chamfers 1a and 1b facing each other between the glass substrates 1, and Located on each side.

The third and fourth photographing means 123 and 124 photograph front and rear chamfers 1a and 1b facing each other between the glass substrates 1 while the glass substrate 1 is stopped, respectively, in the vertical direction. And third and fourth cameras 123a and 124a and third and fourth lights 123b and 124b for irradiating light to these photographing sites.

The third and fourth cameras 123a and 124a are positioned perpendicular to the front and rear chamfering surfaces 1a and 1b facing each other between the glass substrates 1, and the third and fourth lights 123b and 124b are arranged in the third direction. And lenses (not shown) of the fourth cameras 123a and 124a to form an angle, for example, an angle within a range of 25 ° to 35 °.

As shown in FIG. 3, the camera transfer means 130 moves the first to fourth photographing means 121, 122, 123, and 124 in a direction orthogonal to the transfer path of the glass substrate 1. 122a, 123a and 124a are photographed along the front and rear chamfers 1a and 1b between the stationary glass substrates 1.

The camera transfer means 130 may be a transfer means of various methods such as a rotating motor, a cylinder, and the like. In this embodiment, the cart 131 on which the first to fourth photographing means 121, 122, 123, and 124 are fixed is mounted on the linear motor 132. Thereby, the glass substrate 1 is reciprocated along the linear motor guide 133 which is installed to be tilted in parallel with the front and rear chamfered surfaces 1a and 1b.

In the cart 131, the first to fourth cameras 121a, 122a, 123a, and 124a are fixed, respectively, and the first to fourth lights 121b, 122b, 123b, and 124b are bracketed to irradiate light to these shooting positions. It is fixed to 131a and 131b.

The fifth to eighth photographing means 125, 126, 127, 128 are provided to photograph the chamfered surfaces 1c, 1d on both sides of the glass substrate 1, that is, the upper and lower sides, during the glass substrate 1 transfer.

The fifth and sixth photographing means 125 and 126 are provided on both sides of the transfer path of the glass substrate 1, respectively, so that the chamfered surfaces 1c and 1d on both sides of the glass substrate 1 move in a tangential direction, that is, both chamfered surfaces 1c. 1d), and the fifth and sixth cameras 125a and 126a and the fifth and sixth cameras 125b and 126b irradiate light to these photographing positions. In addition, the fifth and sixth cameras 125a and 126a and the first and second illuminations 125b and 126b are positioned on both sides of the glass substrate 1 with the chamfered surfaces 1c and 1d on both sides thereof. .

The seventh and eighth photographing means 127 and 128 respectively photograph the chamfered surfaces 1c and 1d on both sides of the glass substrate 1 which are installed and moved on both sides of the transport path of the glass substrate 1, respectively. And seventh and eighth cameras 127a and 128a and seventh and eighth cameras 127b and 128b for irradiating light to these photographing positions.

Images taken from the fifth to eighth cameras 125a, 126a, 127a, and 128a are displayed to the outside by the display unit 150.

The photographing position variable stage 160 for changing the photographing positions of the fifth and seventh photographing means 125 and 127 may be further included in accordance with the width of the glass substrate 1.

As shown in FIG. 4, the photographing position variable stage 160 includes a fixing bracket 161 to which the fifth and seventh photographing means 125 and 127 are installed, and a fixing bracket 161 to the transfer path of the glass substrate 1. Guide member 162 for guiding to move in the vertical direction, and bracket transfer means 163 for moving the fixing bracket 161 along the guide member 162.

The fixing bracket 161 captures the upper chamfered surface 1c of the glass substrate 1 by the fifth and seventh cameras 125a and 127a and the fifth and seventh lights 125b and 127b. Are fixed to irradiate light.

Guide member 162 is a guide frame 162a is fixed to the upper portion of the main body 170 by the same slope as the glass substrate 1, a plurality of guide shafts (162b) slidingly coupled to one side of the fixing bracket 161 is The guide frame 162a is installed in the longitudinal direction.

The bracket conveying means 163 may be a conveying means such as a cylinder, and the like is screwed to the fixed bracket 161 in this embodiment is installed to be rotatably parallel to the guide shaft 162b on the guide frame (162a) A lead screw 163a and a drive motor 163b are installed on the guide frame 162a to rotate the lead screw 163a.

6 and the eighth photographing means 126 and 128 are fixed to the main body 170 by the bracket 171.

On the other hand, the third, fourth, seventh and eighth photographing means 123, 124, 127, 128 are rounded chamfers 1a, ..., 1d for inspecting the chamfers 1a, ..., 1d of the glass substrate 1; 1d) is scanned to obtain images from the third, fourth, seventh and eighth cameras 123a, 124a, 127a, 128a, wherein the chamfering surfaces 1a, .. In the absence of a defect in .1d), a black image comes in, while defects in the chamfered surfaces 1a, ..., 1d of the glass substrate 1, such as unchamfered, overchamfered, chamfered and broken chamfered. In the case of a light source, a real-time data processing can be performed by adopting a reflection dark field type illumination method for acquiring a bright image.

6 and 7 are drawings and photographs showing the third photographing means 123 for explaining the reflective dark field, for example. As shown in FIGS. 6A and 6B, the light scanned from the third illumination 123b is reflected through the chamfered surfaces 1a and 2a of the glass substrates 1 and 2, and is then reflected by the beam splitter 123c. Incident to the camera 123a. In this case, as shown in FIG. 6A, when the chamfered surface 1a of the glass substrate 1 is normally chamfered and there is no defect, the chamfered surface of the glass substrate 2 appears as a black image as shown in FIG. 7A. If 2a) has a defect by not being properly removed, it appears as a bright image as shown in FIG. 7B.

The controller 150 repeats the transfer and stop of the glass substrate 1 so that the first to fourth photographing means 121, 122, 123, and 124 face each other between the glass substrates 1 that are stopped during transfer. , While controlling the transfer motor 113 of the substrate transfer means 110 to follow the photographing along with (1b), and controls the linear motor 132 of the camera transfer means 130, respectively.

Meanwhile, the first to eighth lights 121b, 122b,..., 128b use LEDs and are respectively photographed by the first to eighth cameras 121a, 122a,..., 128a. The image is output to the display unit 150, and the display unit 150 displays these images to the outside through the screen to determine whether there is a defect.

In addition, the defect detection unit 180 may be included in order to obtain data about a defect from an image photographed by the first to eighth cameras 121a, 122a,..., 128a.

The defect detection unit 180 processes the images to image the number or size of defects present in the glass substrate 1 so that the defect detection unit 180 displays the data to the outside through the display unit 150.

The operation of the defect inspection apparatus of the glass substrate chamfered surface formed as described above is performed as follows.

The glass substrate 1 is floated in the tilted state by the air injected from the floating bar 112, and the lower side is supported by the feed roller 111 which is rotated by the drive of the transfer motor 113 to be transported.

The glass substrate 1 is transported in a row with the substrate transfer means 110 at a constant interval so that the fifth and sixth cameras 125a and 126a are opposite to each other when the glass substrates 1, 5, 8, 125, 126, 127, 128 are passed through. The upper and lower chamfered surfaces 1c and 1d of the glass substrate 1 are photographed in the tangential direction by the light irradiated from the fifth and sixth lights 125b and 126b positioned at the seventh and eighth cameras. Reference numerals 127a and 128a photograph the upper and lower chamfers 1c and 1d of the glass substrate 1 in the vertical direction by the light irradiated from the seventh and eighth lights 127b and 128b at an angle, respectively. .

When the glass substrate 1 passes through the fifth to eighth photographing means 125, 126, 127, 128, and the first to fourth photographing means 121, 122, 123, 124 are positioned between the glass substrates 1, the controller 140 moves the substrate transfer means 110. After stopping the drive of the transfer motor 113, the linear motor 132 of the camera transfer means 130 is driven so that the first to fourth photographing means (121, 122, 123, 124) with the cart 131 linear motor guide 133 By moving along, each of the adjacent glass substrates 1 moves along the chamfered surfaces 1a and 1b of the front and rear facing each other.

At this time, the first and second cameras 121a and 122a face each other between the glass substrates 1 by the light irradiated from the first and second lights 121b and 122b positioned on opposite sides. The entire front and rear chamfers 1a and 1b of the camera are photographed in a tangential direction, respectively, and the third and fourth cameras 123a and 124b are irradiated from the third and fourth lights 123b and 124b at an angle. The entire front and rear chamfering surfaces 1a and 1b between the adjacent glass substrates 1 are photographed in the vertical direction by light.

By repeating the above operation, all the glass substrates 1 transferred by the substrate transfer means 110 are photographed over the front, rear, and upper and lower chamfered surfaces 1a, ..., 1d. The images photographed by the first to eighth cameras 121, 122,..., 128 are output to the screen by the display unit 150 together with the defects, and the images are displayed through the image output through the display unit 150. Defects generated during the cutting process of the substrate 1, for example, chamfered, over chamfered, chamfered, cracked, etc., easy for all chamfered surfaces (1a, 1b, 1c, 1d) of the glass substrate 1 You can check it.

In addition, the images photographed by the first to eighth cameras 121, 122,..., 128 are respectively sent to the defect detection unit 150, and the chamfered surfaces 1a,. Of the glass substrate 1 by an image processing technique. If there are defects for ..., 1d), it is calculated as data such as the number and size of defects, and if necessary, the glass substrate 1 is determined to be defective when these data are equal to or greater than a preset value. Display to the outside through the display unit 150.

According to the preferred embodiment of the present invention as described above, all the chamfered surfaces (1a, ..., 1d) of the glass substrate 1 by the first to eighth photographing means (121, 122, ..., 128) In addition to photographing horizontally in the tangential direction and photographing vertically, defects on the chamfered surfaces 1a, ..., 1d can be accurately inspected.

In addition, it is possible to easily adjust the installation height of the fifth and seventh photographing means (125, 127) by the photographing position variable stage 160 to facilitate the inspection of the glass substrate 1 of various sizes.

Then, the glass substrate 1 is floated by the floating bar 112 to be transported to minimize physical contact with the glass substrate 1 during the inspection, thereby suppressing the occurrence of defects due to the chamfering inspection.

As described above, the defect inspection apparatus of the glass substrate chamfered surface according to the present invention can accurately inspect the defects on all chamfered surface of the glass substrate, and can inspect glass substrates of various sizes with a simple operation, the size is different The inspection of the glass substrate can be switched very easily and quickly, and the physical contact with the glass substrate can be minimized to suppress the occurrence of defects during the inspection.

What has been described above is just one embodiment for performing a defect inspection apparatus for the glass substrate chamfering surface according to the present invention, the present invention is not limited to the above embodiment, as claimed in the following claims Without departing from the gist of the present invention, anyone of ordinary skill in the art will have the technical spirit of the present invention to the extent that various modifications can be made.

Claims (6)

In the device for inspecting defects present in the chamfered surface of the glass substrate, A substrate transfer means for transferring a plurality of glass substrates in a row; First and second photographing means for photographing chamfers of the front and rear sides facing each other between the glass substrates in a tangential direction while the glass substrate is stopped; Third and fourth photographing means for photographing the chamfers of the front and rear facing each other between the glass substrates in the vertical direction while the glass substrate is stopped; Camera transfer means for reciprocating the first to fourth photographing means in a direction orthogonal to the glass substrate; By repeating the transfer and stop of the glass substrate to control the substrate transfer means and the camera transfer means so that the first to fourth photographing means to shoot along the chamfered front and rear facing each other between the glass substrates; With the control unit, A display unit for displaying an image taken from the first to fourth photographing means to the outside Defect inspection device of the glass substrate chamfering surface comprising a. The method of claim 1, The substrate transfer means, One surface of the glass substrate to support the lower side of the glass substrate and to float the glass substrates supported by the transfer roller and a plurality of transfer rollers for transferring the glass substrate by receiving rotational force from a transfer motor. A plurality of floating bars for injecting air toward the Being installed on both sides of the first to fourth photographing means, respectively. Defect inspection device of the glass substrate chamfering surface. The method of claim 1, The camera transfer means, Reciprocating movement of the cart to which the first to fourth photographing means is fixed along a linear motor guide installed in parallel with the front and rear chamfered surfaces facing each other between the glass substrates by a linear motor. Defect inspection device of the glass substrate chamfering surface. The method of claim 1, Fifth and sixth photographing means for photographing chamfered surfaces of both sides of the glass substrate, which are respectively installed and moved on both sides of the transport path of the glass substrate, in a tangential direction; And seventh and eighth photographing means for photographing the chamfered surfaces of both sides of the glass substrate, which are respectively installed and moved on both sides of the transfer path of the glass substrate, in the vertical direction. To display the image photographed by the fifth to eighth photographing means to the outside by the display unit Defect inspection device of the glass substrate chamfering surface. The method of claim 4, wherein And a photographing position variable step for changing a photographing position of the fifth and seventh photographing means corresponding to the width of the glass substrate, The photographing position variable stage, A fixing bracket to which the fifth and seventh photographing means are installed; A guide member for guiding the fixing bracket to move in a direction perpendicular to the transfer path of the glass substrate; Bracket transfer means for moving the fixed bracket along the guide member Defect inspection device of the glass substrate chamfering surface comprising a. The method of claim 4, wherein Defect detection unit for processing the image taken by the first to eighth photographing means to image the defects present in the glass substrate to be displayed to the outside through the display unit Defect inspection device of the glass substrate chamfering surface further comprising.

Images