KR20070053286A - 미립자 물질의 증발 대역으로의 전달 - Google Patents

미립자 물질의 증발 대역으로의 전달 Download PDF

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Publication number
KR20070053286A
KR20070053286A KR1020077006394A KR20077006394A KR20070053286A KR 20070053286 A KR20070053286 A KR 20070053286A KR 1020077006394 A KR1020077006394 A KR 1020077006394A KR 20077006394 A KR20077006394 A KR 20077006394A KR 20070053286 A KR20070053286 A KR 20070053286A
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KR
South Korea
Prior art keywords
particulate material
auger
container
organic
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020077006394A
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English (en)
Korean (ko)
Inventor
마이클 롱
제레미 매튜 그레이스
브루스 에드워드 코페
Original Assignee
이스트맨 코닥 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/945,940 external-priority patent/US7288285B2/en
Application filed by 이스트맨 코닥 캄파니 filed Critical 이스트맨 코닥 캄파니
Publication of KR20070053286A publication Critical patent/KR20070053286A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020077006394A 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달 Ceased KR20070053286A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/945,940 US7288285B2 (en) 2004-09-21 2004-09-21 Delivering organic powder to a vaporization zone
US10/945,940 2004-09-21
US11/134,654 2005-05-20
US11/134,654 US7501152B2 (en) 2004-09-21 2005-05-20 Delivering particulate material to a vaporization zone

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020127010306A Division KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법

Publications (1)

Publication Number Publication Date
KR20070053286A true KR20070053286A (ko) 2007-05-23

Family

ID=35759153

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020077006394A Ceased KR20070053286A (ko) 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달
KR1020127010306A Expired - Lifetime KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020127010306A Expired - Lifetime KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법

Country Status (5)

Country Link
US (1) US7501152B2 (https=)
EP (2) EP2239352B1 (https=)
JP (2) JP2008513964A (https=)
KR (2) KR20070053286A (https=)
WO (1) WO2006034019A2 (https=)

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US7993459B2 (en) * 2005-10-24 2011-08-09 Global Oled Technology Llc Delivering particulate material to a vaporization zone
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US20080254217A1 (en) * 2007-04-16 2008-10-16 Boroson Michael L Fine control of vaporized organic material
JP4974832B2 (ja) * 2007-09-10 2012-07-11 株式会社アルバック 蒸着源、蒸着装置
JP4996452B2 (ja) * 2007-12-28 2012-08-08 株式会社アルバック 成膜源、成膜装置
JP4974877B2 (ja) * 2007-12-28 2012-07-11 株式会社アルバック 成膜源、成膜装置
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US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
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US20100206234A1 (en) * 2009-02-17 2010-08-19 Michael Long Simplified powder feeding and vaporization apparatus
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JP4974036B2 (ja) 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
DE102011051260A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs
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DE102011051931A1 (de) 2011-07-19 2013-01-24 Aixtron Se Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes
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Also Published As

Publication number Publication date
JP2012229489A (ja) 2012-11-22
KR101348672B1 (ko) 2014-01-08
US20060062920A1 (en) 2006-03-23
EP1794345B1 (en) 2015-11-18
US7501152B2 (en) 2009-03-10
EP2239352A2 (en) 2010-10-13
EP2239352A3 (en) 2011-06-08
JP2008513964A (ja) 2008-05-01
EP2239352B1 (en) 2013-06-05
WO2006034019A2 (en) 2006-03-30
WO2006034019A3 (en) 2006-11-09
KR20120059628A (ko) 2012-06-08
JP5480332B2 (ja) 2014-04-23
EP1794345A2 (en) 2007-06-13

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