KR20060080471A - 트레이 가이드 장치 - Google Patents
트레이 가이드 장치 Download PDFInfo
- Publication number
- KR20060080471A KR20060080471A KR1020050000951A KR20050000951A KR20060080471A KR 20060080471 A KR20060080471 A KR 20060080471A KR 1020050000951 A KR1020050000951 A KR 1020050000951A KR 20050000951 A KR20050000951 A KR 20050000951A KR 20060080471 A KR20060080471 A KR 20060080471A
- Authority
- KR
- South Korea
- Prior art keywords
- tray
- guide device
- roller
- guide
- moving member
- Prior art date
Links
- 238000000034 method Methods 0.000 claims description 10
- 230000006698 induction Effects 0.000 claims description 9
- 239000008187 granular material Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 10
- 239000011368 organic material Substances 0.000 description 9
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68309—Auxiliary support including alignment aids
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Discharge Of Articles From Conveyors (AREA)
Abstract
Description
Claims (7)
- 입상으로 이송되어 진입된 트레이와 접촉되면서 트레이의 입상을 유지하는 가이드부;상기 가이드부가 왕복이동되도록 연동 설치된 구동부;상기 구동부에 의해 이동되는 가이드부의 경로를 안내하는 유도부;가 구비되어 이루어진 트레이 가이드 장치.
- 제1항에 있어서,상기 가이드부는 트레이의 양측면에 배치되어 접촉되도록 배치된 다수의 롤러와, 이 롤러가 장착되어 왕복이동되도록 구동부와 연동 설치되고 이동경로가 안내되도록 유도부에 장착된 이동부재가 포함되어 이루어진 것을 특징으로 하는 트레이 가이드 장치.
- 제1항 또는 제2항에 있어서,상기 구동부는 상기 이동부재와 체결된 구동원이 포함되어 이루어진 것을 특징으로 하는 트레이 가이드 장치.
- 제1항 또는 제2항에 있어서,상기 유도부는 상기 이동부재의 이동경로를 안내하면서 이동부재가 감합된 레일이 포함되어 이루어진 것을 특징으로 하는 트레이 가이드 장치.
- 제2항에 있어서,입상으로 이송되어 진입된 트레이가 끼워지면서 트레이의 측면이 간헐적으로 접촉되게 롤러가 쌍립으로 배치ㆍ고정되어 이루어진 트레이 가이드 장치.
- 제5항에 있어서,상기 롤러는 트레이의 양측에 상호 대응되도록 배치된 것을 특징으로 하는 트레이 가이드 장치.
- 제5항에 있어서,상기 롤러는 트레이의 양측에 지그재그로 배치된 것을 특징으로 하는 트레이 가이드 장치.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050000951A KR100646943B1 (ko) | 2005-01-05 | 2005-01-05 | 트레이 가이드 장치 |
JP2005370958A JP2006191039A (ja) | 2005-01-05 | 2005-12-22 | トレイ移送装置 |
TW095100273A TWI275544B (en) | 2005-01-05 | 2006-01-04 | Apparatus for transferring a tray |
US11/325,465 US8020692B2 (en) | 2005-01-05 | 2006-01-05 | Apparatus for transferring a tray |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050000951A KR100646943B1 (ko) | 2005-01-05 | 2005-01-05 | 트레이 가이드 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060080471A true KR20060080471A (ko) | 2006-07-10 |
KR100646943B1 KR100646943B1 (ko) | 2006-11-23 |
Family
ID=37171795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050000951A KR100646943B1 (ko) | 2005-01-05 | 2005-01-05 | 트레이 가이드 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100646943B1 (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100726475B1 (ko) * | 2006-08-04 | 2007-06-12 | 이미지테크 주식회사 | 평판디스플레이용 기판의 박막화 장치 |
EP2123581A1 (en) * | 2007-03-07 | 2009-11-25 | Ulvac, Inc. | Vacuum device and method of conveying substrate |
KR101036123B1 (ko) * | 2010-06-10 | 2011-05-23 | 에스엔유 프리시젼 주식회사 | 박막 증착 장치 |
CN114104692A (zh) * | 2021-11-25 | 2022-03-01 | 济南二机床集团有限公司 | 一种立式工装板交换传输机构 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102549345B1 (ko) * | 2021-08-18 | 2023-06-29 | (주)디바이스이엔지 | 피세척물의 이송장치 |
-
2005
- 2005-01-05 KR KR1020050000951A patent/KR100646943B1/ko active IP Right Grant
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100726475B1 (ko) * | 2006-08-04 | 2007-06-12 | 이미지테크 주식회사 | 평판디스플레이용 기판의 박막화 장치 |
EP2123581A1 (en) * | 2007-03-07 | 2009-11-25 | Ulvac, Inc. | Vacuum device and method of conveying substrate |
EP2123581A4 (en) * | 2007-03-07 | 2013-12-25 | Ulvac Inc | VACUUM DEVICE AND METHOD FOR TRANSPORTING A SUBSTRATE |
KR101036123B1 (ko) * | 2010-06-10 | 2011-05-23 | 에스엔유 프리시젼 주식회사 | 박막 증착 장치 |
WO2011155652A1 (ko) * | 2010-06-10 | 2011-12-15 | 에스엔유 프리시젼 주식회사 | 박막 증착 장치 및 박막 증착 시스템 |
CN114104692A (zh) * | 2021-11-25 | 2022-03-01 | 济南二机床集团有限公司 | 一种立式工装板交换传输机构 |
Also Published As
Publication number | Publication date |
---|---|
KR100646943B1 (ko) | 2006-11-23 |
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