KR20040081069A - 기판 맞붙이기 장치 - Google Patents

기판 맞붙이기 장치 Download PDF

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Publication number
KR20040081069A
KR20040081069A KR1020040017107A KR20040017107A KR20040081069A KR 20040081069 A KR20040081069 A KR 20040081069A KR 1020040017107 A KR1020040017107 A KR 1020040017107A KR 20040017107 A KR20040017107 A KR 20040017107A KR 20040081069 A KR20040081069 A KR 20040081069A
Authority
KR
South Korea
Prior art keywords
substrate
electrostatic chuck
vacuum chamber
vacuum
shaft
Prior art date
Application number
KR1020040017107A
Other languages
English (en)
Korean (ko)
Inventor
니시지마히로무
무라따사또시
이마이사또루
가와이사또루
Original Assignee
후지쯔 디스플레이 테크놀로지스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 후지쯔 디스플레이 테크놀로지스 코포레이션 filed Critical 후지쯔 디스플레이 테크놀로지스 코포레이션
Publication of KR20040081069A publication Critical patent/KR20040081069A/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B32B37/1009—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using vacuum and fluid pressure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/54—Arrangements for reducing warping-twist
KR1020040017107A 2003-03-14 2004-03-13 기판 맞붙이기 장치 KR20040081069A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00070335 2003-03-14
JP2003070335A JP4286562B2 (ja) 2003-03-14 2003-03-14 基板貼り合わせ装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020080039095A Division KR100908960B1 (ko) 2003-03-14 2008-04-28 기판 맞붙이기 장치

Publications (1)

Publication Number Publication Date
KR20040081069A true KR20040081069A (ko) 2004-09-20

Family

ID=33287113

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020040017107A KR20040081069A (ko) 2003-03-14 2004-03-13 기판 맞붙이기 장치
KR1020080039095A KR100908960B1 (ko) 2003-03-14 2008-04-28 기판 맞붙이기 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020080039095A KR100908960B1 (ko) 2003-03-14 2008-04-28 기판 맞붙이기 장치

Country Status (3)

Country Link
JP (1) JP4286562B2 (ja)
KR (2) KR20040081069A (ja)
TW (1) TWI286627B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100950746B1 (ko) * 2007-12-26 2010-04-05 주식회사 에이디피엔지니어링 임프린트 장치 및 임프린트 방법

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI478271B (zh) * 2007-08-10 2015-03-21 尼康股份有限公司 Substrate bonding device and substrate bonding method
KR101085116B1 (ko) * 2009-06-29 2011-11-18 에이피시스템 주식회사 기판 지지 모듈 및 기판 접합 장치
CN102545816B (zh) * 2010-12-17 2015-02-04 中微半导体设备(上海)有限公司 一种用于静电吸盘的多通道射频滤波器
JP2014066917A (ja) * 2012-09-26 2014-04-17 Hitachi High-Technologies Corp 板状体保持機構、基板貼り合わせ装置及び基板貼り合わせ方法
CN108724748A (zh) * 2018-05-24 2018-11-02 江苏金花朵电子科技有限公司 一种用于手机触摸屏的泡棉贴合装置
CN111314838B (zh) * 2020-02-25 2021-08-27 绍兴中芯集成电路制造股份有限公司 Mems麦克风器件的检测方法
KR102416236B1 (ko) * 2020-10-29 2022-07-05 (주)에스티아이 패널 고정용 다단 척 및 이를 이용한 디스플레이 라미네이션 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4041267B2 (ja) * 2000-06-29 2008-01-30 芝浦メカトロニクス株式会社 基板搬送装置および基板搬送方法
JP3577546B2 (ja) * 2001-02-08 2004-10-13 株式会社 日立インダストリイズ 基板の組立方法及び組立装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100950746B1 (ko) * 2007-12-26 2010-04-05 주식회사 에이디피엔지니어링 임프린트 장치 및 임프린트 방법

Also Published As

Publication number Publication date
JP4286562B2 (ja) 2009-07-01
TWI286627B (en) 2007-09-11
TW200424623A (en) 2004-11-16
JP2004279679A (ja) 2004-10-07
KR100908960B1 (ko) 2009-07-22
KR20080041173A (ko) 2008-05-09

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