KR20030076413A - 광학적 정보기록매체와 그 제조방법 - Google Patents
광학적 정보기록매체와 그 제조방법 Download PDFInfo
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- KR20030076413A KR20030076413A KR10-2003-0017517A KR20030017517A KR20030076413A KR 20030076413 A KR20030076413 A KR 20030076413A KR 20030017517 A KR20030017517 A KR 20030017517A KR 20030076413 A KR20030076413 A KR 20030076413A
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- film
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- recording medium
- optical information
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- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
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Abstract
Description
Claims (30)
- 기판과 정보층을 포함하는 광학적 정보기록매체에 있어서,상기 정보층이 Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Cr, 및 0를 포함하는 제 1 유전체막과,상기 제 1 유전체막상에 형성되고, 레이저광의 조사에 의해 광학 특성이 가역적으로 변화하는 기록막과,상기 기록막상에 형성되고, Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Cr, 및 O를 포함하는 제 2 유전체막을 레이저광 입사측에서 이 순서로 포함하고 있고,상기 제 1 유전체막의 Cr 원자 농도가 적어도 6 at% 이상, 상기 제 2 유전체막의 Cr 원자 농도가 적어도 9 at% 이상이고, 또한 상기 제 2 유전체막의 Cr 원자 농도가 상기 제 1 유전체막의 Cr 원자 농도 보다도 큰 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항에 있어서, 상기 제 1 유전체막에 포함되는 M1, Cr, 및 O를 조성식 CrA1(M1)B1O(100-A1-B1)로 표기한 경우에, 상기 A1 및 B1이 6 < A1 < 29, 9 < B1 < 29이고,상기 제 2 유전체막에 포함되는 M1, Cr, 및 O를 조성식 CrA2(M1)B2O(100-A2-B2)로표기한 경우에, 상기 A2 및 B2가 11 < A2 < 32, 6 < B2 < 24인 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항에 있어서, 상기 제 1 유전체막이 Cr2O3와 (M1)O2로 이루어지는 제 1 혼합물을 포함하고, 상기 제 1 혼합물에 있어서 Cr2O3가 10mol% 이상 60mol% 이하이고,상기 제 2 유전체막이 Cr2O3와 (M1)O2로 이루어지는 제 2 혼합물을 포함하고, 상기 제 2 혼합물에 있어서 Cr2O3가 20mol% 이상 80mol% 이하이고,또한 상기 제 2 혼합물의 Cr2O3농도(mol%)가 상기 제 1 혼합물의 Cr2O3농도(mol%) 보다도 큰 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항에 있어서, 상기 제 1 유전체막의 Cr 원자 농도와 상기 제 2 유전체막의 Cr 원자 농도의 차가 3 at% 이상 15 at% 이하인 것을 특징으로 하는 광학적 정보기록매체.
- 기판과 정보층을 포함하는 광학적 정보기록매체에 있어서,상기 정보층이 Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Cr, Si, 및 O를 포함하는 제 1 유전체막과,상기 제 1 유전체막상에 형성되고, 레이저광의 조사에 의해 광학 특성이 가역적으로 변화하는 기록막과,상기 기록막상에 형성되고, Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Cr, Si, 및 O를 포함하는 제 2 유전체막을 레이저광 입사측에서 이 순서로 포함하고 있고,상기 제 1 유전체막의 Cr 원자 농도는 적어도 6 at% 이상, 상기 제 2 유전체막의 Cr 원자 농도는 적어도 9 at% 이상이고, 또한 상기 제 2 유전체막의 Si 원자 농도가 상기 제 1 유전체막의 Si 원자 농도 보다도 작은 것을 특징으로 하는 광학적 정보기록매체.
- 제 5 항에 있어서, 상기 제 2 유전체막의 Cr 원자 농도가 상기 제 1 유전체막의 Cr 원자 농도 보다도 큰 것을 특징으로 하는 광학적 정보기록매체.
- 제 5 항에 있어서, 상기 제 1 유전체막에 포함되는 M1, Cr, Si, 및 O를 조성식 SiC3CrA3M1B3O(100-A3-B3-C3)으로 표기한 경우에, 상기 A3, B3, 및 C3가 6 < A3 < 32, 1 < B3, 1 < C3 < 13이고,상기 제 2 유전체막에 포함되는 M1, Cr, Si, 및 O를 조성식 SiC4CrA4M1B4O(100-A4-B4-C4)로 표기한 경우에, 상기 A4, B4, 및 C4가 11 < A4 < 35, 1 < B4, O < C4 < 11인 것을 특징으로 하는 광학적 정보기록매체.
- 제 7 항에 있어서, 상기 A3 및 A4가 A3 < A4인 것을 특징으로 하는 광학적 정보기록매체.
- 제 5 항에 있어서, 상기 제 1 유전체막이 SiO2와 Cr2O3와 (M1)O2로 이루어지는 제 1 혼합물을 포함하고, 상기 제 1 혼합물에 있어서,SiO2: 5mol% 이상 40mol% 이하,Cr2O3: 10mol% 이상 70mol% 이하,SiO2+ Cr2O3: 15mol% 이상 95mol% 이하이고,상기 제 2 유전체막이 SiO2와 Cr2O3와 (M1)O2로 이루어지는 제 2 혼합물을 포함하고, 상기 제 2 혼합물에 있어서,SiO2: 35mol% 이하,Cr2O3: 20mol% 이상 80mol% 이하,SiO2+ Cr2O3: 20mol%를 넘고, 95mol% 이하이고,또한 상기 제 2 유전체막의 SiO2농도(mol%)가 상기 제 1 유전체막의 SiO2농도(mol%) 보다도 작은 것을 특징으로 하는 광학적 정보기록매체.
- 제 9 항에 있어서, 상기 제 2 혼합물의 Cr2O3농도(mol%)가 상기 제 1 혼합물의 Cr2O3농도(mol%) 보다도 큰 것을 특징으로 하는 광학적 정보기록매체.
- 제 5 항에 있어서, 상기 제 1 유전체막의 Si 원자 농도와 상기 제 2 유전체막의 Si 원자 농도의 차가 1 at% 이상 10 at% 이하인 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 상기 정보층이 다수 형성된 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 상기 기록막이 Sb 및 Bi 중에서 선택되는 적어도 한 쪽의 원소(M2)와, Ge와, Te를 포함하고, 상기 M2, Ge, 및 Te를 조성식 Gea(M2)bTe3+a로 표기한 경우에, 0 < a ≤60, 1.5 ≤b ≤7인 것을 특징으로 하는 광학적 정보기록매체.
- 제 13 항에 있어서, 상기 Gea(M2)bTe3+a에서, 상기 Ge의 적어도 일부가 Sn 및 Pb 중에서 선택되는 적어도 한 쪽의 원소(M3)로 치환되어 있는 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 상기 기록막이 Sb 및 Bi 중에서 선택되는 적어도 한 쪽의 원소(M2)와, Si, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Se, Zr, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Ta, W, Os, Ir, Pt, Gd, Td, Dy 및 Au 중에서 선택되는 적어도 하나의 원소(M4)와, Ge와, Te를 포함하고, 상기 M2, M4, Ge, 및 Te를 조성식(Gea(M2)bTe3+a)100-C(M4)c로 표기한 경우에, 0 < a ≤60, 1.5 ≤b ≤7, 0 < c ≤20인 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 상기 기록막이 Sb와, Te와, Ag, In, Ge, Sn, Se, Bi, Au 및 Mn 중에서 선택되는 적어도 하나의 원소(M5)를 포함하고, 상기 Sb, Te, 및 M5를 조성식(SbdTe100-d)100-e(M5)e로 표기한 경우에, 50 ≤d ≤95, 0 < e ≤20인 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 상기 정보층이 상기 제 1 유전체막의 레이저광 입사측에, 상기 제 1 유전체막에 접하게 형성된 보호막을 추가로 포함하고,상기 보호막이 TiO2, ZrO2, HfO2, ZnO, Nb2O5, Ta2O5, SiO2, Al2O3, Bi2O3, C-N, Ti-N, Zr-N, Nb-N, Ta-N, Si-N, Ge-N, Cr-N, Al-N, Ge-Si-N, Ge-Cr-N, ZnS, 및 SiC 중에서 선택되는 적어도 하나를 포함하는 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 상기 정보층이 상기 제 2 유전체막의 레이저광 입사측과 반대측에 형성된 반사막을 추가로 포함하고,상기 반사막이 Ag, Au, Cu 및 Al 중에서 선택되는 적어도 하나의 원소를 포함하는 것을 특징으로 하는 광학적 정보기록매체.
- 제 18 항에 있어서, 상기 정보층이 상기 반사막의 레이저광 입사측과 반대측에, 상기 반사막에 접하게 형성된 투과율 조정막을 추가로 포함하고,상기 투과율 조정막이 TiO2, ZrO2, HfO2, ZnO, Nb2O5, Ta2O5, SiO2, Al2O3, Bi2O3, Ti-N, Zr-N, Nb-N, Ta-N, Si-N, Ge-N, Cr-N, Al-N, Ge-Si-N, Ge-Cr-N 및 ZnS 중에서 선택되는 적어도 하나를 포함하는 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항 또는 제 5 항에 있어서, 제 1 정보층∼제 n 정보층(n은 2이상의 자연수)이 레이저광 입사측에서 이 순서로 적층된 다층 구조의 광학적 정보기록매체이고, 상기 제 1 정보층∼제 n 정보층 중 적어도 하나가 상기 정보층인 것을 특징으로 하는 광학적 정보기록매체.
- 제 20 항에 있어서, 상기 제 1 정보층이 상기 정보층인 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항에 있어서, 상기 제 1 유전체막이 추가로 Si를 포함하는 것을 특징으로 하는 광학적 정보기록매체.
- 제 1 항의 광학적 정보기록매체를 제조하는 방법에 있어서,적어도 Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Cr, 및 O를 포함하는 제 1 스퍼터링 타겟을 이용하여, 스퍼터링에 의해 제 1 유전체막을 성막하는 공정과,레이저광의 조사에 의해 광학 특성이 가역적으로 변화하는 기록막을 성막하는 공정과,적어도 Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Cr, 및 O를 포함하는 제 2 스퍼터링 타겟을 이용하여, 스퍼터링에 의해 제 2 유전체막을 성막하는 공정을 포함하고,상기 제 2 스퍼터링 타겟의 Cr 원자 농도가 상기 제 1 스퍼터링 타겟의 Cr 원자 농도 보다 큰 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 제 23 항에 있어서, 상기 제 1 스퍼터링 타겟에 포함되는 M1, Cr, 및 O를 조성식 CrD1M1E1O100-D1-E1로 표기한 경우에, 상기 D1 및 E1이 3 < D1 < 29, 9 < E1 < 31이고,상기 제 2 스퍼터링 타겟에 포함되는 M1, Cr, 및 O를 조성식 CrD2M1E2O100-D2-E2로 표기한 경우에, 상기 D2 및 E2가 9 < D2 < 32, 6 < E2 < 26인 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 제 23 항에 있어서, 상기 제 1 스퍼터링 타겟이 Cr2O3와 (M1)O2로 이루어지는 제 1 혼합물을 포함하고, 상기 제 1 혼합물에 있어서 Cr2O3가 5mol% 이상 60mol% 이하이고,상기 제 2 스퍼터링 타겟이 Cr2O3와 (M1)O2로 이루어지는 제 2 혼합물을 포함하고, 상기 제 2 혼합물에 있어서 Cr2O3가 15mol% 이상 80mol% 이하이고,또한, 상기 제 2 혼합물의 Cr2O3농도(mol%)가 상기 제 1 혼합물의 Cr2O3농도(mol%) 보다도 큰 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 제 5 항의 광학적 정보기록매체를 제조하는 방법에 있어서,적어도 Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Si, Cr, 및 0를 포함하는 제 1 스퍼터링 타겟을 이용하여, 스퍼터링에 의해 제 1 유전체막을 성막하는 공정과,레이저광의 조사에 의해 광학 특성이 가역적으로 변화하는 기록막을 성막하는 공정과,적어도 Zr 및 Hf 중에서 선택되는 적어도 한 쪽의 원소(M1), Si, Cr, 및 O를 포함하는 제 2 스퍼터링 타겟을 이용하여, 스퍼터링에 의해 제 2 유전체막을 성막하는 공정을 포함하고,상기 제 2 스퍼터링 타겟의 Si 원자 농도가 상기 제 1 스퍼터링 타겟의 Si 원자 농도 보다 작은 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 제 26 항에 있어서, 상기 제 2 스퍼터링 타겟의 Cr 원자 농도가 상기 제 1 스퍼터링 타겟의 Cr 원자 농도 보다 큰 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 제 26 항에 있어서, 상기 제 1 스퍼터링 타겟에 포함되는 M1, Si, Cr, 및 O를 조성식 SiF3CrD3M1E3O100-D3-E3-F3로 표기한 경우에, 상기 D3, E3, 및 F3가 3 < D3 < 32, 1 < E3, 1 < F3 < 13이고,상기 제 2 스퍼터링 타겟에 포함되는 M1, Si, Cr, 및 O를 조성식 SiF4CrD4M1E4O100-D4-E4-F4로 표기한 경우에, 상기 D4, E4, 및 F4가 9 < D4 < 35, 1 < E4, 0 < F4 < 11인 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 제 26 항에 있어서, 상기 제 1 스퍼터링 타겟이 SiO2와 Cr2O3와 (M1)O2로 이루어지는 제 1 혼합물을 포함하고, 상기 제 1 혼합물에 있어서,SiO2: 5mol% 이상 40mol% 이하,Cr2O3: 5mol% 이상 70mol% 이하,SiO2+ Cr2O3가 10mol% 이상 95mol% 이하이고,상기 제 2 스퍼터링 타겟이 SiO2와 Cr2O3와 (M1)O2로 이루어지는 제 2 혼합물을 포함하고, 상기 제 2 혼합물에 있어서,SiO2: 35mol% 이하, Cr2O3가 15mol% 이상 80mol% 이하,SiO2+ Cr2O3: 10mol%를 넘고, 95mol% 이하이고,또한, 상기 제 2 혼합물의 SiO2농도(mol%)가 상기 제 1 혼합물의 SiO2농도(mol%) 보다도 작은 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
- 다수의 정보층을 포함하는 다층 구조의 광학적 정보기록매체의 제조방법에 있어서, 상기 다수의 정보층 중 적어도 하나가 제 23 항 또는 제 26 항의 방법으로 형성되는 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
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TWI226058B (en) * | 2002-09-11 | 2005-01-01 | Tdk Corp | Optical recording medium |
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-
2003
- 2003-03-19 DE DE60317958T patent/DE60317958T8/de active Active
- 2003-03-19 EP EP03251698A patent/EP1349160B1/en not_active Expired - Fee Related
- 2003-03-19 US US10/392,164 patent/US6841217B2/en not_active Expired - Lifetime
- 2003-03-20 CN CNB031073204A patent/CN1326133C/zh not_active Expired - Lifetime
- 2003-03-20 KR KR10-2003-0017517A patent/KR100531538B1/ko active IP Right Grant
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DE60317958D1 (de) | 2008-01-24 |
EP1349160B1 (en) | 2007-12-12 |
EP1349160A3 (en) | 2006-07-05 |
DE60317958T8 (de) | 2009-04-16 |
US6841217B2 (en) | 2005-01-11 |
CN1326133C (zh) | 2007-07-11 |
KR100531538B1 (ko) | 2005-11-28 |
US20030180473A1 (en) | 2003-09-25 |
CN1445767A (zh) | 2003-10-01 |
DE60317958T2 (de) | 2008-12-18 |
EP1349160A2 (en) | 2003-10-01 |
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