KR20030048764A - A spin scrubber for the Flat Panel Display - Google Patents

Abstract

PURPOSE: A cleaning apparatus used for manufacturing a flat panel display is provided to perform an operation of cleaning a glass and an operation of drying the glass using a single unit to reduce cost and time required for the operations. CONSTITUTION: A cleaning apparatus used for manufacturing a flat panel display includes a case(60), a driver(80), a cleaner(100), and a purified gas supply(78). The driver is set inside the case and rotates a glass. The cleaner is placed on the glass rotating according to the driver to remove particles on the glass. The purified gas supply sprays purified gas onto the top and bottom faces of the rotating glass to eliminate moisture left on the glass after the cleaning operation is finished. The apparatus further includes an outlet(90) through which the moisture and purified gas exhaust, and an operation unit(95) attached to the outer wall of the case to control the operations of the driver and purified gas supply.

Description

Cleaning device for flat display device {A spin scrubber for the Flat Panel Display}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus used for manufacturing a flat panel display (FPD), and in particular, a spin dryer (Spin) to remove moisture remaining in the glass while the glass used in the flat panel display is fixed and driven. Dryer) includes a cleaning means further comprises a cleaning device for manufacturing a flat panel display device to simplify the work process.

In general, a flat panel display (FPD) is a flat panel display device made of a technology different from a cathode ray tube (CRT) display device, and is used in portable computers because it is thinner than a CRT display device. Commonly used flat panel displays include an electroluminescent display (ELD), a liquid crystal display (LCD), a plasma display panel (PDP), and the like.

In addition, glass cleaning during the manufacturing process of the flat panel display device is an essential process before and after each process in order to remove contaminants and reduce a defect rate.

Conventionally, the glass for the flat display device is dried by hot air and by air knife which blows air into a small gap at high speed to dry it, but the dry by hot air stains the glass surface. There is a risk of leaving, the drying method using the air knife has the advantage of being mechanically simple and inexpensive, but has a disadvantage in that it is difficult to dry to a minute part.

Therefore, a spin dryer that rotates the glass at high speed and removes water on the glass surface by centrifugal force is required in a portion requiring high precision drying.

1 is a perspective view showing the main part of a conventional cleaning device for manufacturing a flat panel display device, a case 10 and a driving device 30 for removing moisture from the surface of the glass while rotating the glass on the glass, and the glass Clean gas supply means 20 for supplying clean gas such as N_2 to the upper and lower surfaces of the glass to improve the dryness of the glass, and the clean water injected from the glass by the centrifugal force and the upper or lower surface of the glass. The exhaust / drainage part 40 which discharges to the outside, and the operation part 45 which controls the operation | movement of the said drive device 30 and the clean gas supply means 20 are comprised.

2 is a perspective view illustrating main parts of a conventional flat display device.

As shown in FIG. 2, the driving device 30 includes a rotating plate 32 on which the glass 1 is mounted and driven, a motor (not shown) and a rotating shaft (rotating shaft) for supplying driving force to the rotating plate 32. The spin cup 38 is installed around the rotary plate 32 to prevent foreign substances and water from being injected outward in the lateral direction when the rotary plate 32 is driven.

The rotating plate 32 is formed with a plurality of support pins 34 to allow the glass to be seated on the upper surface, four pairs of support pins 34 to constrain the edge of the rectangular glass (1) is formed and the rotating plate 32 ) Is suppressed from flowing.

In addition, the rotating plate 32 has a discharge port 36 through which the gas supplied from the clean gas supply means 20 is injected at the center of rotation so that the gas is injected onto the bottom surface of the glass.

In addition, the clean gas supply means 20 is installed on the circumferential side of the rotating plate 32 so as to be movable above the rotating plate 32 so that clean gas such as nitrogen is supplied to the upper surface of the glass 1. An injection passage (not shown) for supplying gas to the injector 22 and the discharge port 36 formed at the center of the rotating plate 32 to inject clean gas into the lower surface of the glass, the injector 22 and the injection passage It comprises a clean gas supplier 24 for pumping clean gas.

Looking at the operation of the cleaning apparatus for manufacturing a flat panel display device according to the prior art configured as described above are as follows.

First, the glass is placed on the support pin 34 of the rotating plate 32, the spin cup 38 is raised for airflow formation and safety, and then the rotating plate 32 is driven at a high speed to remain in the glass 1. Moisture is removed.

At this time, since the injector 22 is moved to the center of the upper surface of the glass 1, nitrogen gas is injected, and since nitrogen gas is injected through the injection flow path, a portion that cannot be removed by the centrifugal force of the rotating plate 32. All moisture is removed.

However, since the cleaning apparatus for manufacturing a flat panel display device according to the prior art does not have a self-cleaning function, a separate cleaning apparatus is required because the glass 1, which has been cleaned by another apparatus, needs to be transported and dried, and the cleaned glass is transferred. There is a problem in that it is difficult to reduce the cost and time required for the work is required to carry and work.

In addition, the cleaning apparatus for manufacturing a flat panel display device according to the related art has a size larger or smaller than the distance between the support pins 34 because four pairs of support pins 34 formed on the rotating plate 32 are installed to maintain a constant distance. That is, there is a problem in that the glass of different sizes cannot be securely fixed, so that glass of various sizes cannot be cleaned.

The present invention has been made to solve the above problems of the prior art, by installing the cleaning means in the spin dryer, it is possible to perform the cleaning and drying operations of the glass in a single unit to reduce the cost and time required for the operation It is an object of the present invention to provide a cleaning device for manufacturing a flat panel display device.

In addition, the glass is mounted on the rotating plate is driven by a plurality of supports that can be installed glass of various sizes, the purpose is to improve the compatibility according to the size of the glass.

1 is a perspective view showing a cleaning device for manufacturing a flat panel display device according to the prior art;

Figure 2 is a perspective view showing the main part of the cleaning device for manufacturing a flat panel display device according to the prior art,

3 is a perspective view showing a cleaning device for manufacturing a flat panel display device according to the present invention;

4 is a perspective view showing the main part of the cleaning device for manufacturing a flat panel display device according to the present invention;

5 is a perspective view illustrating a driving device of a cleaning device for manufacturing a flat panel display device according to the present invention;

6 is a side view illustrating a driving device of a cleaning device for manufacturing a flat panel display device according to the present invention;

7 is a perspective view showing the cleaning means of the cleaning device for manufacturing a flat panel display device according to the present invention.

<Explanation of symbols on main parts of the drawings>

50: glass 60: case

70: washing means 72: injector

74: support rod 76: nozzle

78: clean gas supply 80: drive device

82: rotating plate 84: support pin

86: discharge port 88: spin cup

90: exhaust / drainage part 95: operation part

100: washing means 102: support

104: brush 106: cleaning nozzle

The cleaning device for manufacturing a flat panel display device according to the present invention for solving the above problems is disposed on the case, a drive device installed inside the case to rotate the glass, and is disposed on the upper surface of the glass rotated by the drive device Cleaning means for removing foreign matter on the glass surface, and clean gas supply means for injecting a clean gas to the upper and lower surfaces of the glass rotated to remove the moisture remaining in the glass after the cleaning operation is completed by the cleaning means Characterized in that it is made.

Hereinafter, an embodiment of a cleaning device for manufacturing a flat panel display device according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a perspective view illustrating a cleaning device for manufacturing a flat panel display device according to the present invention.

The cleaning apparatus for manufacturing a flat panel display device according to the present invention includes a case 60, a driving device 80 installed on the upper surface of the barrier partitioning the inside of the case 60 up and down, and the glass to rotate, and the driving device ( 80 is disposed on the upper surface of the glass to be rotated by the cleaning means 100 to remove foreign substances on the glass surface, and the upper and lower surfaces of the glass rotated to effectively remove the moisture remaining on the glass after the cleaning operation is completed Clean gas supply means 70 for injecting gas, exhaust / drainage unit 90 for discharging the water separated by the centrifugal force from the glass and the clean gas injected on the upper or lower surface of the glass to the outside, and the drive Operation unit 95 for controlling the operation of the device 80 and the clean gas supply means 70 is included.

4 is a perspective view showing the main part of the cleaning device for producing a flat display device according to the present invention, Figure 5 is a perspective view showing a rotating plate of the cleaning device for producing a flat display device according to the present invention, Figure 6 is A side view of the rotating plate of the cleaning device for producing a flat panel display device is shown.

As shown in FIG. 4, the driving device 80 includes a rotating plate 82 on which the glass 50 is mounted and driven, a motor (not shown) and a rotating shaft (not shown) for supplying driving force to the rotating plate 82. And a spin cup 88 installed around the rotating plate 82 for safety from the rotating plate 82 driven at a high speed.

The rotating plate 82 is formed of a circular plate is formed with a plurality of support pins 84 for mounting the glass 50 on the upper surface, the support pin 84 is the center of rotation of the rotating plate 82 A plurality of support pins 84 are arranged at the same distance from the plurality of support pins 84 to allow the glass 50 to be seated to form a group, and the rotating plate 82 to allow the glass 50 to be seated in various sizes. ), A plurality of groups of the support pins 84 having different distances from the center of rotation are formed.

That is, referring to the example illustrated in FIG. 5, the support pin 84 is formed such that two support pins 84 are disposed on respective surfaces of the square glass to constrain the corners of the square glass.

In addition, the support pin 84 is the first support pin 84a and the first support disposed at a relatively close distance from the rotation center of the rotating plate 82 so that the glass 50 of various sizes can be seated A second support pin 84b is formed at a relatively long distance compared to the pin 84a, so that the first glass 51 and the first glass 51 are relatively small in size. To allow all of the large second glasses 52 to be seated.

The support pins 84 may be formed with the support pins 84 to form a plurality of groups at more various distances, so that the glass 50 having two or more different sizes may be seated.

In addition, a discharge port 86 is formed at the rotation center of the rotating plate 82 so that the gas pressurized from the clean gas supply means 70 is injected when the glass 50 is dried.

The washing means 100 is movable on one side around the rotary plate 82 in a vertical direction, is installed on the support 102 and rotatably around one end, and is installed on the other end of the support (102) Brush 104 for cleaning the glass 50 while rotating in the horizontal direction, and a plurality of cleaning nozzles 106 are installed around the brush 104 to spray the washing water is configured to include.

The brush 104 is rotatably supported at the end of the support 102, and is driven in a direction opposite to the rotating plate 82, so that the relative speed between the glass 50 and the brush 104 is increased to provide a cleaning action. To improve efficiency.

The clean gas supply means 70 is installed on the circumferential side of the rotating plate 82 to be movable above the rotating plate 82 to inject clean gas such as nitrogen into the upper surface of the glass 50 ( 72 and an injection passage (not shown) formed at the center of the rotating plate 82 to supply the clean gas to the lower surface of the glass 50, and the clean gas for feeding clean gas to the injector 72 and the injection passage. A gas supply 78 is included and configured.

The injector 72 is installed on the other end of the support rod 74 and the support rod 74 is rotatably installed on one side around the rotary plate 82, such as the support 102 of the washing means. It is formed to include a nozzle 76 is injected to the gas injected from the clean gas supply.

The operation of the cleaning apparatus for manufacturing a flat panel display device according to the present invention configured as described above is as follows.

First, when the cleaning operation of the first glass 51 is carried out, the first glass 51 having a relatively small size is seated on the first support pin 84a, and the brush 104 is used as the first glass brush. When the auto-operation is started after the replacement and fastening, the support plate 102 is moved upward and rotated to the upper surface of the glass, and the support plate 102 is lowered so that the brush 104 contacts the upper surface of the glass. ) And the brush 104 are rotated in different directions to perform the cleaning operation.

At this time, the rotating plate 82 performs a relatively low speed drive, the speed is usually 50 RPM, the brush is driven at about 100 RPM.

Thereafter, when the set time elapses, the support 102 is lifted upward, and the driving of the brush 104 is stopped, and at the same time, the washing water is sprayed from the cleaning nozzle 76 to finish the washing operation.

Then, the support 102 is rotated and seated on the drip tray 108, and performs a self-cleaning operation while rotating at a low speed.

In addition, when the support 102 performs the self-cleaning operation, the spin cup 88 is moved upwards, and the rotating plate 82 is rotated at a high speed of about 2200 RPM to remove water remaining in the glass 50 by centrifugal force. do.

At this time, the gas pumped from the clean gas supplier 78 is ejected to the nozzle 76 formed on the support rod 74 and the discharge port 86 formed on the rotating plate 82 to remove the moisture remaining in the glass 50. do.

In the cleaning apparatus for manufacturing a flat panel display device according to the present invention configured as described above, the cleaning means is installed on one side of the circumference of the rotating plate on which the glass is seated and driven, so that the glass can be washed and dried in one unit. There is an advantage that can reduce the time and cost required.

In addition, the rotating plate on which the glass is seated is provided with a plurality of groups forming a single group, and a plurality of support pins are provided at different distances from the center of the rotating plate, so that glass of various sizes can be seated, thereby providing compatibility according to glass size. There is an advantage that can be improved.

Claims (7)

A case; A driving device installed inside the case to rotate the glass; Washing means disposed on an upper surface of the glass rotated by the driving device to remove foreign substances on the glass surface; And cleaning gas supply means for injecting clean gas into the upper and lower surfaces of the glass rotated to remove moisture remaining in the glass after the washing operation by the washing means is completed. Device. The method of claim 1, The cleaning device for manufacturing the flat panel display device may include: an exhaust / drainage unit configured to discharge moisture separated from the glass by centrifugal force and clean gas injected on the upper or lower surface of the glass to the outside; And a control unit (95) installed on an outer wall of the case to control the operation of the driving device and the clean gas supply means. The method of claim 1, The driving device includes a rotating plate on which the glass is mounted and driven; A motor and a rotating shaft supplying a driving force to the rotating plate; And a spin cup provided around the rotating plate for safety from the rotating plate driven at a high speed. The method of claim 3, wherein The rotating plate is formed of a circular plate is formed with a plurality of support pins for seating the glass on the upper surface, the support pin is disposed at the same distance from the center of rotation of the rotating plate to allow the glass of a certain size to be seated Fabrication of a flat panel display device characterized in that a plurality of support pins form a group, and a plurality of groups of support pins having different distances from the rotation center of the rotating plate are formed so that the glass of various sizes can be seated. Cleaning equipment. The method according to claim 3 or 4, And a discharge port is formed at the rotation center of the rotating plate so that the gas pressurized from the clean gas supply means is injected when the glass is dried. The method of claim 1, The washing means may be movable in a vertical direction on one side of the circumference of the rotating plate, the support is installed rotatably around one end; A brush installed at the other end of the support and rotating the glass while washing the glass; A cleaning device for manufacturing a flat panel display device, characterized in that a plurality of cleaning nozzles are installed around the brush to spray the washing water. The method of claim 1, The clean gas supply means is formed on the circumferential side of the rotating plate so as to be movable above the rotating plate so that the clean gas is supplied to the upper surface of the glass, and is formed to communicate with the outlet of the rotating plate. And a clean gas supply unit for supplying clean gas to the injector and the injection flow path to supply clean gas to the injector.