KR20020018606A - 테이퍼된 랜딩을 갖는 구조 및 그 제조 방법 - Google Patents
테이퍼된 랜딩을 갖는 구조 및 그 제조 방법 Download PDFInfo
- Publication number
- KR20020018606A KR20020018606A KR1020010053303A KR20010053303A KR20020018606A KR 20020018606 A KR20020018606 A KR 20020018606A KR 1020010053303 A KR1020010053303 A KR 1020010053303A KR 20010053303 A KR20010053303 A KR 20010053303A KR 20020018606 A KR20020018606 A KR 20020018606A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- region
- conductive
- thick portion
- landing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/68—Capacitors having no potential barriers
- H10D1/692—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5223—Capacitor integral with wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US65349200A | 2000-08-31 | 2000-08-31 | |
| US09/653492 | 2000-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20020018606A true KR20020018606A (ko) | 2002-03-08 |
Family
ID=24621097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020010053303A Withdrawn KR20020018606A (ko) | 2000-08-31 | 2001-08-31 | 테이퍼된 랜딩을 갖는 구조 및 그 제조 방법 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2002124576A (enrdf_load_stackoverflow) |
| KR (1) | KR20020018606A (enrdf_load_stackoverflow) |
| GB (1) | GB2371408B (enrdf_load_stackoverflow) |
| TW (1) | TW582090B (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4949656B2 (ja) * | 2005-08-12 | 2012-06-13 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| US11869725B2 (en) | 2021-11-30 | 2024-01-09 | Texas Instruments Incorporated | Multi-stacked capacitor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5838605A (en) * | 1996-03-20 | 1998-11-17 | Ramtron International Corporation | Iridium oxide local interconnect |
| US6114766A (en) * | 1997-12-18 | 2000-09-05 | Advanced Micro Devices, Inc. | Integrated circuit with metal features presenting a larger landing area for vias |
-
2001
- 2001-08-30 TW TW090121454A patent/TW582090B/zh not_active IP Right Cessation
- 2001-08-31 JP JP2001262668A patent/JP2002124576A/ja not_active Abandoned
- 2001-08-31 KR KR1020010053303A patent/KR20020018606A/ko not_active Withdrawn
- 2001-08-31 GB GB0121205A patent/GB2371408B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB2371408B (en) | 2004-12-22 |
| TW582090B (en) | 2004-04-01 |
| GB2371408A (en) | 2002-07-24 |
| JP2002124576A (ja) | 2002-04-26 |
| GB0121205D0 (en) | 2001-10-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20010831 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |