KR20010070778A - Multi functional cleaning module of manufacturing apparatus for liquid crystal display device and Cleaning apparatus using the same - Google Patents

Multi functional cleaning module of manufacturing apparatus for liquid crystal display device and Cleaning apparatus using the same Download PDF

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Publication number
KR20010070778A
KR20010070778A KR1020010031664A KR20010031664A KR20010070778A KR 20010070778 A KR20010070778 A KR 20010070778A KR 1020010031664 A KR1020010031664 A KR 1020010031664A KR 20010031664 A KR20010031664 A KR 20010031664A KR 20010070778 A KR20010070778 A KR 20010070778A
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South Korea
Prior art keywords
cleaning
cleaning module
glass substrate
unit
manufacturing apparatus
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KR1020010031664A
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Korean (ko)
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KR100402901B1 (en
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박병후
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박용석
주식회사 디엠에스
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Priority to KR10-2001-0031664A priority Critical patent/KR100402901B1/en
Priority to DE10130999A priority patent/DE10130999A1/en
Priority to TW090115854A priority patent/TW592842B/en
Priority to US09/894,625 priority patent/US6564421B2/en
Priority to FR0108709A priority patent/FR2810908B1/en
Priority to JP2001198261A priority patent/JP2002172369A/en
Priority to CNB011232781A priority patent/CN1221331C/en
Publication of KR20010070778A publication Critical patent/KR20010070778A/en
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Publication of KR100402901B1 publication Critical patent/KR100402901B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/017—Cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display

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  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE: A multi-functions washing module of a flat display manufacturing device and a washing device using the same is provided to minimize an equipment place of the manufacturing device, and improve washing function of the washing module for easily performing the operation. CONSTITUTION: The multi-functions washing module of a flat display manufacturing device includes a plurality of air curtains(1), an excimer ultraviolet irradiating device(2), a blush(3), a high speed shower machine(4), and an air knife(5). The air curtains(1) are placed between each unit used to exclude mutual interference which will occur in each element. A glass substrate is continuously inserted into the washing module to enable continuous process. Also, the excimer ultraviolet irradiating device(2) includes an ultraviolet lamp and a quartz tube for covering an outside of the ultraviolet lamp to be a body.

Description

평판디스플레이 제조장치의 다기능 세정모듈 및 이를 이용한 세정장치{Multi functional cleaning module of manufacturing apparatus for liquid crystal display device and Cleaning apparatus using the same}Multi functional cleaning module of manufacturing apparatus for liquid crystal display device and Cleaning apparatus using the same}

본 발명은 평판디스플레이 제조 장비에 관한 것으로서, 특히, 장비의 개별적인 기능을 집약하여 하나의 복합 모듈로 구성한 일체형의 다기능 세정모듈로서, 좁은 면적에 기존장비의 기능을 모두 포함하면서 장비의 설치면적을 최소화할 수 있도록 구성한 평판디스플레이 제조장치의 다기능 세정모듈에 관한 것이다.The present invention relates to a flat-panel display manufacturing equipment, in particular, as an integrated multi-functional cleaning module composed of a single composite module that aggregates the individual functions of the equipment, minimizing the installation area of the equipment while including all the functions of the existing equipment in a small area It relates to a multi-functional cleaning module of the flat panel display manufacturing apparatus configured to be.

도 1은 종래 평판디스플레이 제조장치의 세정기를 나타내는 도면으로서, (a)는 기능별로 분리한 블럭도, (b)는 개략적인 구조도이다.1 is a view showing a washing machine of a conventional flat panel display manufacturing apparatus, (a) is a block diagram separated by function, (b) is a schematic structural diagram.

도시하는 바와 같이, 종래의 세정기는 크게 반송부, 세정부, 건조부로 구성되어 있으며, 반송부는 세정기의 입구 및 출구쪽에 설치되어 유리기판을 세정기로 반입, 반출하는 역할을 하며, 세정부는 오염 제거 및 이물질 제거의 역할을, 건조부는 기판상에 잔존하는 D.I(De Ionized Water)와 같은 세정액을 제거하여 건조시키는 역할을 한다.As shown in the drawing, a conventional scrubber is largely composed of a conveying part, a washing part, and a drying part, and the conveying part is installed at the inlet and outlet side of the scrubber, and serves to bring the glass substrate into and out of the scrubber, and the cleaning part removes contamination. And the role of removing foreign matter, the drying unit serves to remove the cleaning liquid, such as DI (De Ionized Water) remaining on the substrate to dry.

따라서, 유리기판은 반송부의 로더(Loader)부로 반입되어, 세정 및 건조부를 거쳐 언로더(Unloader)부로 반출되어 세정공정이 완료된다.Therefore, the glass substrate is brought into the loader part of the conveyance part, and is carried out to the unloader part through the cleaning and drying part to complete the cleaning process.

이때, 유리기판의 이동은 하부 베어링(Bearing)구동방식에 의해 이동한다.At this time, the movement of the glass substrate is moved by the lower bearing (Bearing) driving method.

그러나, 상기와 같은 종래 평판디스플레이 제조공정에서 유리기판의 세정공정은 다양한 용도로 활용되는 반면, 다른 공정과 연계하여 적용되는 점을 고려하면 장비의 설치면적이 크다는 단점을 갖는다. 즉, 설치면적이 큼에 따라 다른공정과연계하여 연속공정이 가능하게 설치하는데 어려움이 있다.However, the cleaning process of the glass substrate in the conventional flat panel display manufacturing process as described above has a disadvantage that the installation area of the equipment is large in consideration of being applied in connection with other processes. That is, as the installation area is large, there is a difficulty in installing the continuous process in connection with other processes.

또한, 설치위치가 연계공정과 다름에 따라 물류이동이 증가하고, 이상과 같은 이유로 Fab효율을 저하시키는 원인이 된다.In addition, as the installation location is different from the linking process, the logistics movement increases, which causes the Fab efficiency to decrease.

본 발명은 상기한 종래 기술의 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은 평판디스플레이 제조장비의 설치면적을 최소화하여 제조Fab 내의 공간활용을 효율적으로 운영할 수 있도록 한 평판디스플레이 제조장치의 다기능 세정모듈을 제공하는 것이다.The present invention has been made to solve the above problems of the prior art, an object of the present invention is to minimize the installation area of the flat panel display manufacturing equipment of the flat panel display manufacturing apparatus to efficiently operate the space utilization in the manufacturing Fab It is to provide a multifunctional cleaning module.

본 발명의 다른 목적은 상기 다기능 세정모듈에 의한 설치면적의 최소화를 통하여 연속공정간 장비연계배치가 가능하게 함으로써 제조Fab의 물류이동을 최소화하는 것이다.Another object of the present invention is to minimize the logistics movement of the manufacturing Fab by enabling the equipment connection arrangement between the continuous process through the minimization of the installation area by the multi-functional cleaning module.

본 발명의 또 다른 목적은 상기 다기능 세정모듈의 기능향상을 용이하게 하여 이를 통하여 제품의 수율을 향상시키는 것이다.Still another object of the present invention is to facilitate the functional improvement of the multifunctional cleaning module, thereby improving the yield of the product.

상기한 본 발명의 목적을 달성하기 위하여 본 발명에 따른 평판디스플레이 제조장치의 다기능 세정모듈은 다수의 에어커튼, 엑시머 자외선 조사장치, 브러시, 고유속 샤워기, 에어나이프가 연속적으로 배열된 구조를 취한다.In order to achieve the above object of the present invention, the multifunctional cleaning module of the flat panel display manufacturing apparatus according to the present invention takes a structure in which a plurality of air curtains, excimer ultraviolet irradiation devices, brushes, high speed showers, and air knives are continuously arranged. .

더욱, 상기한 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정기는 다기능 세정모듈로의 기판의 반입 및 반출을 수행하는 반송부와, 기판상의 오염/이물질 제거 및 건조를 행하는 다기능 세정모듈을 포함하여 이루어진다.Further, the washing machine using the multi-functional cleaning module of the flat panel display manufacturing apparatus includes a conveying unit for carrying in and taking out the substrate to the multi-functional cleaning module, and a multi-functional cleaning module for removing contamination and foreign matter on the substrate and drying. .

도 1은 종래 평판디스플레이 제조장치의 세정기를 나타내는 도면으로서, (a)는 기능별로 분리한 블럭도, (b)는 개략적인 구조도.1 is a view showing a washing machine of a conventional flat panel display manufacturing apparatus, (a) is a block diagram separated by function, (b) is a schematic structural diagram.

도 2는 본 발명에 따른 평판디스플레이 제조장치의 다기능 세정모듈의 개략적인 사시도.Figure 2 is a schematic perspective view of a multifunctional cleaning module of the flat panel display manufacturing apparatus according to the present invention.

도 3은 본 발명의 일실시예에 따른 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정기의 측면도.Figure 3 is a side view of the washing machine using a multifunctional cleaning module of the flat panel display manufacturing apparatus according to an embodiment of the present invention.

도 4는 본 발명의 다른 실시예에 따른 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정기의 측면도.Figure 4 is a side view of the cleaner using a multifunctional cleaning module of the flat panel display manufacturing apparatus according to another embodiment of the present invention.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

1 ----- 에어커튼 2 ----- 엑시머 자외선 조사장치1 ----- Air curtain 2 ----- Excimer UV irradiation device

3 ----- 브러시 4 ----- 고유속 샤워기3 ----- Brush 4 ----- High Flow Shower Head

5 ----- 에어나이프 10 ----- 유리기판5 ----- Air Knife 10 ----- Glass Substrate

20 ----- 받침판 30 ----- 저장탱크20 ----- Support Plate 30 ----- Storage Tank

40 ----- 구동부 50 ----- 세정액40 ----- Drive 50 ----- Cleaning solution

이하, 본 발명의 바람직한 실시예를 도면을 참조하여 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

도 2는 본 발명에 따른 평판디스플레이 제조장치의 다기능 세정모듈의 개략적인 사시도로서, 본 발명의 다기능 세정모듈은 연속적으로 배열된 다수의 에어커튼(1), 엑시머 자외선 조사장치(2), 브러시(3), 고유속 샤워기(4), 에어나이프(5)를 포함한다.Figure 2 is a schematic perspective view of a multi-functional cleaning module of the flat panel display manufacturing apparatus according to the present invention, the multi-functional cleaning module of the present invention is a plurality of air curtains (1), excimer ultraviolet irradiation device (2), brush ( 3) a high velocity showerhead 4 and an air knife 5.

상기 다수의 에어커튼(1)은 각 부분 간에 발생할 수 있는 상호 간섭을 배제하기 위하여 제공된다.The plurality of air curtains 1 are provided to exclude mutual interference that may occur between the respective parts.

상기 엑시머 자외선 조사장치(2)는 본원 출원인에 의해 기출원된 특허출원 제2000-36458호에 기재된 바와 같이 자외선 램프와 그 외부를 감싸는 원통형의 석영관이 일체화된 구조를 취한다. 이러한 구조에 따르면 유리기판의 연속적인 투입 및 연속적인 처리가 가능하게 된다.The excimer ultraviolet irradiation device 2 has a structure in which an ultraviolet lamp and a cylindrical quartz tube surrounding the outside thereof are integrated as described in Patent Application No. 2000-36458 filed by the present applicant. According to this structure, the continuous feeding and the continuous processing of the glass substrate are possible.

상기 브러시(3), 고유속 샤워기(4), 및 에어나이프(5)는 통상의 것으로서 소형으로 제작된 것을 사용한다.The brush 3, the high flow showerhead 4, and the air knife 5 are conventional ones and are manufactured in a small size.

이상으로부터 알 수 있듯이, 본 발명에 따른 평판디스플레이 제조장치의 다기능 세정모듈은 종래 세정기의 각 세정 유닛을 상호간 간격을 좁혀 연속적으로 배열하여 구성함으로써 하나의 유리기판에 여러 세정기능이 동시에 적용될 수 있도록 구성함을 특징으로 한다.As can be seen from the above, the multi-functional cleaning module of the flat panel display manufacturing apparatus according to the present invention is configured so that each cleaning unit of the conventional washing machine is arranged in a row to narrow the interval between each other so that several cleaning functions can be simultaneously applied to one glass substrate It is characterized by.

또한, 상기한 구성은 에어커튼-엑시머 자외선 조사장치- 에어커튼-브러시-고유속샤워기-에어커튼-에어나이프-에어커튼으로 되어 있으나, 이에 한정되지 않고 각 세정 유닛은 기능과 목적에 따라 변경하여 구성할 수 있으며, 그 예로서 다음과같은 구성이 가능하다.In addition, the above configuration is an air curtain-excimer ultraviolet irradiation device-air curtain-brush-high speed shower-air curtain-air knife-air curtain, but not limited to this, each cleaning unit is changed according to the function and purpose It can be configured, for example, the following configuration is possible.

1) 에어커튼-브러시-고유속샤워기-에어커튼-에어나이프-에어커튼-엑시머자외선 조사장치-에어커튼1) Air curtain-Brush-High speed shower-Air curtain-Air knife-Air curtain-Excimer UV irradiation device-Air curtain

2) 에어커튼-엑시머자외선 조사장치-에어커튼-브러시-고유속샤워기-에어커튼 -에어나이프-에어커튼-엑시머자외선 조사장치-에어커튼2) Air curtain-Excimer ultraviolet irradiation device-Air curtain-Brush-High speed shower-Air curtain-Air knife-Air curtain-Excimer ultraviolet irradiation device-Air curtain

3) 에어커튼-엑시머자외선 조사장치-에어커튼-고유속샤워기-에어커튼-에어나이프-에어커튼3) Air curtain-Excimer UV irradiation device-Air curtain-High speed shower-Air curtain-Air knife-Air curtain

4) 에어커튼-고유속샤워기-에어커튼-에어나이프-에어커튼-엑시머자외선 조사장치-에어커튼4) Air curtain-High speed shower-Air curtain-Air knife-Air curtain-Excimer UV irradiation device-Air curtain

5) 에어커튼-엑시머자외선 조사장치-에어커튼-고유속샤워기-에어커튼-에어나이프-에어커튼-엑시머자외선 조사장치-에어커튼5) Air curtain-Excimer UV irradiation device-Air curtain-High speed shower-Air curtain-Air knife-Air curtain-Excimer UV irradiation device-Air curtain

본 발명의 다른 양태에서는 위에 기술한 1) 내지 5) 이외에 특정한 목적으로 일부 기능만을 사용하여 구성할 수도 있다.In another aspect of the present invention, in addition to the above-mentioned 1) to 5), it may be configured using only some functions for a specific purpose.

상기의 기술은 세정장비의 적용을 대표적인 예로서 나타낸것이며, 일체형다기능모듈에서 고유속샤워기의 기능변경에 따라 세정이외의 식각공정이나 현상공정등의 다른공정에도 응용이 가능하다. 즉, 상기예에서는 고유속샤워기에서 D.I를 분사하여 세정기로 활용하는 경우를 나타낸 경우이고, 고유속샤워기가 식각액 또는 박리액을 분사하게할 경우는 식각장비로 활용이 가능하며, 현상액을 분사하게 할 경우에는 현상장비로도 활용이 가능하다.The above technique shows the application of the cleaning equipment as a representative example, and can be applied to other processes such as etching process and developing process in addition to the cleaning by changing the function of the high speed shower in the integrated multifunctional module. That is, in the above example, the DI sprayed from the high-speed shower was used as a scrubber, and when the high-speed shower sprayed the etchant or the peeling solution, it can be used as an etching equipment, and the developer was sprayed. In this case, it can also be used as a developing equipment.

도 3은 본 발명의 일실시 예에 따른 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정기의 측면도를 나타낸다.Figure 3 shows a side view of the washing machine using a multifunctional cleaning module of the flat panel display manufacturing apparatus according to an embodiment of the present invention.

도시하는 바와 같이, 본 발명의 일실시예에 따른 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정기는, 유리기판(10)의 반입 및 반출을 수행하는 구동부(40)와, 내부에 유리기판(10)의 삽입 공간이 형성되고 유리기판(10)의 상하면에 공통적으로 적용되어 유리기판(10) 표면의 오염/이물질 제거 및 건조를 행하는 다기능 세정모듈(100)과, D.I와 같은 세정액(50)을 한곳으로 모으기 위한 받침판(20)과, 세정액(50)이 저장되는 저장탱크(30)를 포함하여 이루어진다.As shown, the washing machine using the multi-functional cleaning module of the flat panel display manufacturing apparatus according to an embodiment of the present invention, the drive unit 40 for carrying in and out of the glass substrate 10, and the glass substrate 10 therein ), A multi-functional cleaning module 100 is formed and is commonly applied to the upper and lower surfaces of the glass substrate 10 to remove contaminants / debris and dry the surface of the glass substrate 10, and a cleaning liquid 50 such as DI. It comprises a support plate 20 for collecting in one place, and a storage tank 30 in which the cleaning liquid 50 is stored.

도면에서 A는 유리기판(10)의 이동방향을 나타내고, B는 다기능 세정모듈(100)의 이동방향을 나타낸다. 다시말하면, 유리기판(10)이 구동부(40)에 의해 지면의 우측으로 이동하게 되면 이와 동시에 다기능 세정모듈(100)은 지면의 좌측으로 이동하면서 세정 기능을 수행하게 된다.In the drawing, A represents the moving direction of the glass substrate 10 and B represents the moving direction of the multifunctional cleaning module 100. In other words, when the glass substrate 10 is moved to the right side of the ground by the drive unit 40, the multifunctional cleaning module 100 simultaneously performs the cleaning function while moving to the left side of the ground.

이때, 유리기판(10)을 이동시키는 구동부는 롤방식이나 비접촉방식인 에어베어링방식으로 이동 가능하도록 구성한다.At this time, the driving unit for moving the glass substrate 10 is configured to be movable in an air bearing method of a roll method or a non-contact method.

유리기판(10)의 세정이 완료되면 유리기판(10)은 후면으로, 다기능 세정모듈(100)은 전면으로 위치가 바뀌고 후면부에서 세정 완료된 유리기판(100)은 외부로 반출된다.When the cleaning of the glass substrate 10 is completed, the glass substrate 10 is changed to the rear side, the multifunctional cleaning module 100 is changed to the front side, and the cleaned glass substrate 100 is removed from the rear side to the outside.

상기와 같은 방식에 의하면 최소 면적에서 유리기판(10)의 세정이 가능하며, 공정시간의 단축을 꾀할 수 있게 된다.According to the above method, the glass substrate 10 can be cleaned at the minimum area, and the process time can be shortened.

도 4는 본 발명의 다른 실시예에 따른 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정기의 측면도를 나타낸다.Figure 4 shows a side view of the washing machine using a multi-functional cleaning module of the flat panel display manufacturing apparatus according to another embodiment of the present invention.

본 발명의 다른 실시예에서는 다기능 세정모듈(100) 전후로 유리기판(10)의 반입 및 반출을 위한 반송부가 별도로 구성되어 있다.In another embodiment of the present invention, the transport unit for carrying in and out of the glass substrate 10 before and after the multifunctional cleaning module 100 is configured separately.

본 실시예가 앞선 실시예와 다른 점은 다기능 세정모듈(100)이 이동하지 않고 고정된 상태에서 세정이 실시된다는 것이고 그 이외의 작용은 앞선 실시예와 동일하다.The present embodiment differs from the previous embodiment in that the cleaning is performed in a fixed state without the multifunctional cleaning module 100 moving, and the other functions are the same as in the previous embodiment.

본 발명에 따르면 종래 세정기의 각 세정 유닛을 상호간 간격을 좁혀 연속적으로 배열하여 구성함으로써 하나의 유리기판에 여러 세정기능이 동시에 적용될 수 있도록 하여 제조Fab의 공간활용을 극대화할 수 있다.According to the present invention, by arranging each cleaning unit of the conventional cleaner in a narrowly spaced manner, the cleaning unit can be applied to one glass substrate at the same time, thereby maximizing the space utilization of the manufacturing fabric.

또한, 본 발명에 따르면, 해당공정과 연속공정간 장비연계배치가 용이함으로 물류이동을 최소화하여 Fab효율을 향상시킬 수 있고, 최소의 설치면적 내에서 복합기능을 갖는 장비를 제공함으로써 다양한 공정기능을 통해 공정능력을 향상하여 제품의 수율 향상을 도모하는 동시에 기존 장비에 비하여 대형기판을 비롯하여 기판크기 변화에 대한 대응이 용이하다.In addition, according to the present invention, by facilitating the arrangement of equipment between the process and the continuous process, it is possible to improve the Fab efficiency by minimizing the logistics movement, and to provide a variety of process functions by providing equipment having a complex function within a minimum installation area By improving the process capability, it is possible to improve the yield of the product and at the same time, it is easy to cope with the change of the substrate size including the large substrate compared to the existing equipment.

Claims (5)

유리기판을 반입 및 반출하는 반송부와, 오염 제거 및 이물질을 제거하는 세정부와, 잔존 세정액을 건조시키는 건조부로 이루어진 평판디스플레이 제조장치의 세정모듈에 있어서,In the cleaning module of the flat panel display manufacturing apparatus comprising a conveying unit for carrying in and carrying out a glass substrate, a cleaning unit for removing contamination and foreign substances, and a drying unit for drying the remaining cleaning liquid, 상기 세정부가 엑시머 자외선 조사장치, 브러시, 고유속 샤워기, 에어나이프로 구성되어 평면상에서 배열되고 각각의 유닛 사이에 간섭 배제용 에어커튼이 배설되며, 상기 세정부에 유리기판이 연속적으로 투입되어 연속적인 처리가 가능하도록 구성됨을 특징으로 하는 평판디스플레이 제조장치의 다기능 세정모듈.The cleaning unit is composed of an excimer ultraviolet irradiation device, a brush, a high-speed shower, and an air knife, arranged in a plane, and an interference curtain is disposed between each unit, and a glass substrate is continuously introduced into the cleaning unit. Multifunctional cleaning module of the flat panel display manufacturing apparatus, characterized in that configured to enable the processing. 제1항에 있어서, 상기 엑시머 자외선 조사장치가 자외선 램프와 그 외부를 감싸는 원통형의 석영관이 일체화된 구조인 것을 특징으로 하는 평판디스플레이 제조장치의 다기능 세정모듈.The multifunctional cleaning module according to claim 1, wherein the excimer ultraviolet irradiation device has a structure in which an ultraviolet lamp and a cylindrical quartz tube surrounding the outside thereof are integrated. 제1항에 있어서, 고유속샤워기가 식각액, 박리액, 또는 현상액을 분사하는 것을 특징으로 하는 평판디스플레이 제조장치의 다기능 세정모듈.The multifunctional cleaning module according to claim 1, wherein the high velocity shower apparatus injects an etching solution, a stripping solution, or a developing solution. 유리기판을 반입 및 반출하는 구동부와,A driving unit for importing and exporting glass substrates, 엑시머 자외선 조사장치, 브러시, 고유속 샤워기, 에어나이프로 구성되어 평면상에서 배열되고, 각각의 유닛 사이에 간섭 배제용 에어커튼이 배설되며 내부에상기 유리기판의 삽입 공간이 형성되어 상기 엑시머 자외선 조사장치, 브러시, 고유속 샤워기, 에어나이프, 및 에어커튼이 유리기판의 상하면에 공통적으로 적용되도록 구성된 다기능 세정모듈과,Excimer UV irradiation device, brush, high-speed shower, air knife is arranged on the plane, the interference curtain is disposed between each unit is disposed between the excitation glass irradiation apparatus is formed inside the insertion space of the glass substrate A multifunctional cleaning module configured to apply a brush, a high speed shower, an air knife, and an air curtain to the upper and lower surfaces of the glass substrate in common; 상기 다기능 세정모듈의 하부에서 세정액을 한곳으로 모으기 위한 받침판과,A support plate for collecting the cleaning liquid in one place under the multifunctional cleaning module, 상기 세정액이 저장되는 저장탱크를 포함하여 이루어지고, 상기 세정부에 유리기판이 연속적으로 투입되어 연속적인 처리가 가능하도록 구성된, 평판디스플레이 제조장치의 다기능 세정모듈을 이용한 세정장치.And a storage tank in which the cleaning liquid is stored, and the glass substrate is continuously added to the cleaning unit to continuously process the cleaning liquid. The cleaning apparatus using the multifunctional cleaning module of the flat panel display manufacturing apparatus. 제4항에 있어서, 고유속 샤워기가 식각액, 박리액, 또는 현상액을 분사하는 것을 특징으로 하는 세정장치.5. The cleaning apparatus as set forth in claim 4, wherein the high flow shower device injects an etching solution, a stripping solution, or a developing solution.
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TW090115854A TW592842B (en) 2000-06-29 2001-06-28 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same
US09/894,625 US6564421B2 (en) 2000-06-29 2001-06-28 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same
FR0108709A FR2810908B1 (en) 2000-06-29 2001-06-29 MULTIFUNCTION CLEANING MODULE OF FLAT SCREEN MANUFACTURING APPARATUS AND CLEANING APPARATUS USING THE SAME
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