KR101574831B1 - Apparatus and method for forming flatness of glass substrate using the same - Google Patents

Abstract

Disclosed is an apparatus and a method for forming a flat surface of a glass substrate in which productivity is improved and a high-quality glass substrate can be obtained at low cost.
The flat surface forming apparatus for a glass substrate according to the present invention comprises a glass substrate transfer section for transferring a glass substrate, a jetting section for jetting a liquid raw material onto the glass substrate transferred by the glass substrate transfer section to form a flat layer on the glass substrate, And a raw material supply part for supplying the liquid raw material to the spray part.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus and a method for forming a flat surface of a glass substrate,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for forming a flat surface of a glass substrate, and more particularly to an apparatus and a method for forming a flat surface of a glass substrate for forming a flat surface on a glass substrate.

Glass substrates are used for PDP (Plasma Display Panel), LCD (Liquid Crystal Display), and AMOLED (Active Matrix Organic Light Emitting Diodes), which have recently become popular as display devices.

Among them, a glass substrate used in a TFT LCD (Thin Film Transistor Liquid Crystal Display) is a substrate attached to a TFT array and a color filter, and is used as a core material of a TFT LCD panel. Therefore, the glass substrate is required to have a flat surface that can not be distinguished from the naked eye, and high quality characteristics such as no deformation due to heat.

However, in the process of producing a glass substrate, melting defects are generated on the surface of the glass substrate, and melting defects cause a problem that it is difficult to use the glass substrate in a display device. Therefore, conventionally, the surface of the glass substrate is polished to remove a melting defect, so that a certain level of waviness is secured on the glass substrate. Such a device for polishing the surface of a glass substrate has already been disclosed in Korean Patent Registration No. 10-0952324 and the like. Conventionally, a glass substrate is directly polished to form a flat surface on a glass substrate.

However, in order to obtain a required thickness and flatness, a glass substrate belonging to a relatively hard material must be directly polished, and an expensive polishing pad and slurry must be used, resulting in an increase in production cost.

In addition, the time required for directly polishing the glass substrate is also delayed, resulting in a problem that productivity is lowered.

Korean Patent No. 10-0952324 (published on Aug. 21, 2009)

It is an object of the present invention to provide an apparatus and a method for forming a flat surface of a glass substrate in which productivity is improved and a high quality glass substrate can be obtained at low cost.

The flat surface forming apparatus for a glass substrate according to the present invention comprises a glass substrate transfer section for transferring a glass substrate, a jetting section for jetting a liquid raw material onto the glass substrate transferred by the glass substrate transfer section to form a flat layer on the glass substrate, And a raw material supply part for supplying the liquid raw material to the spray part.

Wherein the glass substrate transporting part further comprises a transporting part for transporting the glass substrate and a transporting part for transporting the glass substrate to the transporting part, A second conveyor disposed outside the process chamber and configured to transfer the glass substrate to the exit, and a second conveyor disposed outside the exit, the first conveyor disposed outside the glass substrate to transfer the glass substrate into the process chamber, To the outside of the process chamber.

The flat surface forming apparatus of the glass substrate may further include a communicating pipe communicating with the inside of the process chamber and a pressure regulating pump connected to the exhaust pipe to regulate the pressure inside the process chamber.

The flat surface forming apparatus of the glass substrate may further include an air curtain forming unit installed at the inlet and the outlet, respectively, for spraying air in a direction crossing the direction in which the glass substrate is conveyed.

Wherein the air curtain forming portion includes an inlet side air nozzle which opens toward the inlet and discharges the air, an inlet side exhaust pipe which is opposed to the inlet side air nozzle and through which the air is exhausted, an outlet opening toward the outlet, Side air nozzle and an outlet-side exhaust pipe which is opposed to the outlet-side air nozzle and through which the air is exhausted.

And a first curing unit disposed between the jetting unit and the outlet in the process chamber to cure the flat layer.

The flat surface forming apparatus of the glass substrate may further include a partition disposed between the jetting section and the first curing section to direct heat or light of the first curing section toward the jetting section.

A refrigerant circulation path through which the refrigerant is circulated may be formed in the partition wall.

The flat surface forming apparatus of the glass substrate includes a curing chamber disposed outside the process chamber and a curing chamber provided inside the curing chamber to cure the flat layer cured by the first curing unit so that the surface of the flat layer is strengthened And a second curing unit for curing the second curing unit.

The second curing unit may heat the flat layer to a temperature of 200 to 800 degrees Celsius.

Wherein the jetting unit includes a plurality of first jetting nozzles for jetting the liquid raw material into a plurality of first jetting areas spaced apart from each other in a direction crossing the direction in which the glass substrate is transported, And a plurality of second injection nozzles for spraying the liquid raw material into a plurality of second incident areas partially overlapping the plurality of first incident areas.

The jetting unit may further include a bracket for supporting the plurality of first jetting nozzles and the plurality of second jetting nozzles together, and an elevating unit for supporting the brackets and raising and lowering the brackets.

Wherein the raw material supply portion is connected to a raw material tank in which the liquid raw material is accommodated, a first supply pipe for supplying the liquid raw material to the raw material tank, a first supply pipe connected to the raw material tank and branched to the first injection head and the second injection head, A second supply pipe for supplying the liquid to the first ejection head and the second ejection head, and a raw material supply pump installed in a channel of the second supply pipe to form a supply pressure of the liquid raw material.

The raw material supply unit may further include at least one filter installed in a channel of the second supply pipe to filter the liquid raw material.

The raw material supply unit may further include a flow rate adjusting valve installed in a channel of the second supply pipe to adjust a flow rate of the liquid raw material.

Wherein the glass substrate flat surface forming apparatus includes a dust collecting tube disposed inside the process chamber and opened to a peripheral portion of the jetting portion and the glass substrate transferring portion so that foreign substances in the process chamber are discharged to the outside of the process chamber, And a dust collecting plate for guiding a foreign substance in the process chamber to the dust collecting tube.

Wherein the flat surface forming apparatus of the glass substrate comprises a waste liquid container which is disposed in a lower portion of the inside of the process chamber and which is used for forming the flat layer and receives the remaining waste liquid and a waste liquid container which is connected to the waste liquid container and extends outside the process chamber, And a peculiar drain pipe for allowing the pumped liquid to be discharged to the outside of the chamber.

A method of forming a flat surface of a glass substrate according to the present invention includes: a carrying-in step of carrying a glass substrate into a processing chamber; a step of forming a flat layer on the glass substrate by spraying a liquid raw material onto the glass substrate, A flat layer curing step in which the flat layer is cured in the process chamber, and a take-out step in which the glass substrate is taken out of the process chamber.

Wherein the flat layer forming step includes a first supplying step of supplying the liquid raw material to the raw material tank, a second supplying step of supplying the liquid raw material from the raw material tank into the processing chamber, and a second supplying step of supplying the liquid raw material into the processing chamber And a jetting step of jetting by a first jet head and a second jet head to be disposed.

The flat layer forming step may further include a filtering step in which the liquid raw material is filtered.

The flat layer forming step may further include a flow adjusting step of adjusting the flow rate of the liquid raw material.

Wherein the injecting step includes a first injection step in which the liquid raw material is injected into a plurality of first incident regions which are spaced apart from each other in a direction crossing the direction in which the glass substrate is conveyed, And a second injection step in which the liquid source material is injected into a plurality of second incident areas partially overlapping the first incident area of the first injection step.

The method of forming a flat surface of the glass substrate may further include a second flat layer hardening step of hardening the flat layer to strengthen the surface of the flat layer after the carrying out step.

The apparatus and method for forming a flat surface of a glass substrate according to the present invention can produce a high-quality glass substrate.

Further, the apparatus and method for forming a flat surface of a glass substrate according to the present invention have an effect of improving productivity.

Further, the apparatus and method for forming a flat surface of a glass substrate according to the present invention can reduce the production cost.

FIGS. 1 and 2 are views schematically showing a configuration of an apparatus for forming a flat surface of a glass substrate according to the present embodiment.
Fig. 3 is a view showing a jetting portion of the flat surface forming apparatus of the glass substrate according to the present embodiment.
FIG. 4 is a view showing a pattern in which the liquid crystal material injected by the jetting portion of the glass substrate flat surface forming apparatus according to the present embodiment is incident on the glass substrate.
5 is a view showing a jetting portion of a planar surface forming apparatus of a glass substrate according to another embodiment.
6 is a flowchart showing a method of forming a flat surface of a glass substrate according to the present embodiment.
7 is a view showing a state in which the glass substrate is brought into the chamber in the flat surface forming apparatus of the glass substrate according to the present embodiment.
8 is a view showing a state where a flat layer is formed on a glass substrate in the flat surface forming apparatus of the glass substrate according to the present embodiment.
9 is a view showing a state where the flat layer is cured in the flat surface forming apparatus of the glass substrate according to the present embodiment.
10 is a view showing a state where the glass substrate is cured in the inside of the curing chamber in the flat surface forming apparatus of the glass substrate according to the present embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of an apparatus and method for forming a flat surface of a glass substrate according to the present invention will be described with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but may be embodied in various forms and should not be construed as limited to the embodiments set forth herein, Is provided to fully inform the user.

FIGS. 1 and 2 are views schematically showing a configuration of an apparatus for forming a flat surface of a glass substrate according to the present embodiment.

1 and 2, a planar surface forming apparatus 100 for a glass substrate according to an embodiment of the present invention includes a process chamber 110, a glass substrate transferring unit 130, A raw material supply unit 140, a jetting unit 150, and a first hardening unit 180.

Inside the process chamber 110, a separate space is formed that is shielded from the outside of the process chamber 110. A communication pipe 111 is installed in the process chamber 110 and a pressure control pump 112 is connected to the communication pipe 111. The pressure regulating pump 112 performs exhaustion of the inside of the process chamber 110 through the communicating pipe 111. Accordingly, a predetermined pressure can be maintained inside the process chamber 110, and a process environment in which cleanliness is secured can be established.

In addition, an inlet 113 and an outlet 114 for allowing the glass substrate 1 to smoothly enter and exit are formed in the process chamber 110. The air curtain forming unit 120 may be installed at the inlet 113 and the outlet 114. The air curtain forming portion 120 may include an inlet side air nozzle 121, an inlet side exhaust pipe 122, an outlet side air nozzle 123 and an outlet side exhaust pipe 124. Although not shown, an air pump can be connected to the inlet side exhaust pipe 122 and the outlet side exhaust pipe 124. The inlet-side air nozzle 121 injects air toward the inlet 113, and the inlet-side exhaust pipe 122 exhausts the air injected into the inlet. The outlet-side air nozzle 123 injects air toward the outlet 114, and the outlet-side exhaust pipe 124 exhausts the air injected to the outlet 114. The air curtain forming unit 120 prevents foreign substances from the outside of the process chamber 110 from being introduced into the process chamber 110 through the inlet 113 and the outlet 114, Or the waste liquid is discharged to the outside of the process chamber 110. Particularly, since the inlet-side air nozzle 121 injects air into the glass substrate 1 that is brought into the process chamber 110, it can also remove foreign substances remaining on the surface of the glass substrate 1 .

The glass substrate transferring section 130 transfers the glass substrate 1. The glass substrate transferring part 130 includes a first conveyor 131, a second conveyor 132, and a third conveyor 133. The first conveyor 131 is disposed outside the inlet 113. The first conveyor 131 transports the glass substrate 1 through the inlet 113 to the inside of the process chamber 110. A second conveyor 132 is disposed within the process chamber 110. The second conveyor 132 transports the glass substrate 1 inside the process chamber 110 toward the outlet. The third conveyor 133 is disposed outside the outlet 114. The third conveyor 133 discharges the glass substrate 1 inside the process chamber 110 to the outside of the process chamber 110.

At this time, the glass substrate 1 can be supported by the carrier 10 and transported. An unillustrated chucking device, for example, an adsorption pad, an adhesive pad, or the like, may be provided on the carrier 10 to stably support the glass substrate 1.

Although the first conveyor 131, the second conveyor 132 and the third conveyor 133 are shown as being provided in the form of a roller conveyor as shown in FIG. 1, the first conveyor 131, the second conveyor 132, .

The raw material supply unit 140 supplies the liquid raw material used for depositing the flat layer 2 to the glass substrate 1 into the process chamber 110. The raw material supply unit 140 includes a raw material tank 141, a first supply pipe 142, a second supply pipe 143 and a raw material supply pump 144. The liquid raw material is contained in the raw material tank 141. The first supply pipe 142 is connected to the raw material tank 141 to supply the liquid raw material to the raw material tank 141. The second supply pipe 143 is connected to the raw material tank 141 and extends into the process chamber 110 to supply the liquid raw material in the raw material tank 141 into the process chamber 110. The second supply pipe 143 may be branched so as to supply the liquid raw material to the first injection head 151 and the second injection head 152 (see FIG. 2), respectively, which will be described later. The raw material supply pump 144 is installed in a channel of the second supply pipe 143 to form a supply pressure of the liquid raw material.

In addition, at least one filter 145 and a flow control valve 146 may be installed in the channel of the second supply pipe 143. The filter 145 filters foreign substances that may be contained in the liquid raw material supplied into the process chamber 110. Although the filter 145 is shown in Fig. 1 in two, the number of filters can be added or subtracted as much as desired. The flow control valve 146 controls the flow rate of the liquid raw material so that the liquid raw material supplied to the first injection head 151 and the second injection head 152 can be supplied in a constant amount.

The jetting section 150 allows the liquid raw material to be sprayed onto the glass substrate 1 with a uniform distribution.

FIG. 3 is a view showing a spraying unit of the flat surface forming apparatus according to the present embodiment. FIG. 4 is a cross-sectional view of the glass substrate flat surface forming apparatus according to the present embodiment, And FIG. 5 is a view showing a spraying unit of the flat surface forming apparatus of the glass substrate according to the present embodiment.

3 and 4, the jetting unit 150 includes a first jetting head 151 and a second jetting head 152 disposed in the process chamber 110. The first injection head 151 and the second injection head 152 are linearly arranged in a direction crossing the direction in which the glass substrate 1 is conveyed. The first ejection head 151 is disposed on the inlet 113 side and the second ejection head 152 is spaced apart from the first ejection head 151 in the direction in which the glass substrate 1 is conveyed.

The first injection head 151 and the second injection head 152 are provided with a plurality of first injection nozzles 151a and a plurality of second injection nozzles 152a. The plurality of first injection nozzles 151a and the plurality of second injection nozzles 152a allow the liquid raw material to be injected into the glass substrate 1 in the form of a zigzag.

That is, the plurality of first injection nozzles 151a cause the liquid raw material to be injected into a plurality of first incident areas 151b which are spaced from each other in the direction crossing the direction in which the glass substrate 1 is conveyed. A plurality of second injection nozzles 152a are inserted between the plurality of first incident regions 151b and are arranged in a plurality of second yarn regions 152 partially overlapping the plurality of first incident regions 151b, .

Therefore, the liquid material can be injected into the glass substrate 1 with a uniform distribution, and the flat layer 2 having a uniform thickness can be formed. As the flat layer 2 is formed on the glass substrate 1, the glass substrate 1 may have a flat surface.

On the other hand, the distance between the plurality of first injection nozzles 151a and the plurality of second injection nozzles 152a from the glass substrate 1 can be adjusted. That is, the first injection head 151 and the second injection head 152 are supported together on the bracket 153, and the jetting unit 150 may further include an elevating unit 154 for raising and lowering the bracket 153 have. The elevating unit 154 moves up and down the bracket 153 so that the distance between the plurality of first injection nozzles 151a and the glass substrate 1 and the distance between the plurality of second injection nozzles 152a and the glass substrate 1 Adjust the distance.

3, a plurality of first injection nozzles 151a are formed in the form of holes formed in the first injection head 151, and a plurality of second injection nozzles 152a are formed in the second injection head 152 And is formed in the form of a hole.

As shown in FIG. 4, the plurality of first injection nozzles 251a and the plurality of second injection nozzles 252a are provided in the form of individual tubes, and may be respectively connected to the second supply pipes 243 which are branched. The branched second supply pipe 243 may be connected to the plurality of first injection nozzles 251a and the plurality of second injection nozzles 252a through a plurality of through holes 253a formed in the bracket 253 have.

Referring again to FIG. 1, a dust collecting pipe 161 and a dust collecting plate 162 may be installed in the process chamber 110. The dust collecting pipe 161 may be installed above the first jet head 151 and the second jet head 152 and below the second conveyor 132, respectively. The dust collecting pipe 161 is provided in the shape of a tube that opens toward the upper side of the first jet head 151 and the second jet head 152 and a tube that opens toward the second conveyor 132. When the liquid raw material is jetted, So that foreign matter scattered in accordance with the injection pressure of the liquid raw material is collected and discharged to the outside of the process chamber 110. The dust collecting plate 162 is provided around the open end of the dust collecting tube 161 to guide the foreign matter to the dust collecting tube 161.

In addition, a waste liquid container 171 may be installed in the process chamber 110. The waste liquid container 171 is installed in the lower part of the process chamber 110 to be used for forming the flat layer 2 and receives the waste liquid remaining in the process chamber 110. The waste liquid container 171 has a bottom surface tilted to one side. A waste liquid discharge pipe 172 is connected to one side of the waste liquid container 171. The waste liquid discharge pipe 172 discharges the waste liquid accommodated in the waste liquid container 171 to the outside of the process chamber 110.

The first curing unit 180 is installed inside the process chamber 110 to cure the flat layer 2. When the flat layer 2 is made of a photocurable resin, the first hardened portion 180 may include a light source that shines light to the flat layer 2, and when the flat layer 2 is made of a thermosetting resin , And the first hardening unit 180 may include a heat source for irradiating heat with the flat layer 2. [

At this time, a partition 190 may be provided between the first hardening unit 180 and the jetting unit 150. The partition wall 190 blocks the light or heat generated in the first hardened portion 180 from being directed to the jetting portion 150. The refrigerant circulation path 191, through which the refrigerant is supplied and circulated, may be formed in the partition 190.

In addition, a hardening chamber 210 may be disposed outside the process chamber 110. The hardening unit 220 may be installed inside the hardening chamber 210. The second curing unit 220 heats the cured flat layer 2 inside the process chamber 110 once more to strengthen the surface of the flat layer 2. The second curing unit 220 may include an infrared ray (IR) lamp capable of heating the flat layer 2 to a higher temperature (for example, 200 to 800 degrees Celsius) than the first curing unit 180, A lamp, or a near infra-red (NIR) lamp. The third conveyor 133 may be disposed inside the curing chamber 210 and the glass substrate transferring unit 130 may be disposed outside the curing chamber 210 to transfer the glass substrate 1 to the curing chamber 210 And a fourth conveyor 134 for discharging the fourth conveyor 134 to the outside of the first conveyor.

1 and 2, the flat surface forming apparatus 100 includes a process chamber 110 and a curing chamber 210 which are adjacent to each other and a glass substrate transfer unit 130 is connected to the in-line (In -Line method. It should be understood, however, that the arrangement of the process chamber 110 and the curing chamber 210 is not limited to the scope of the present invention, and the flat surface forming apparatus 100 may be disposed in the curing chamber 210 (Off-Line Batch) system that further includes a transfer robot (not shown) for transferring the glass substrate 1 with a transfer robot (not shown).

Hereinafter, a method of forming a flat shape of the glass substrate according to the present embodiment will be described in detail.

FIG. 6 is a flowchart showing a method of forming a flat surface of a glass substrate according to the present embodiment, and FIG. 7 is a view showing a state in which a glass substrate is brought into a chamber in the flat surface forming apparatus according to the present embodiment.

6 and 7, the inside of the process chamber 110 is exhausted by the pressure regulating pump 112 and the air curtain forming unit 120 forms an air curtain Is formed. Therefore, the pressure inside the process chamber 110 can be maintained, and cleanliness can be maintained.

When the process environment is thus formed, the glass substrate 1 is supported by the carrier 10 and supplied to the first conveyor 131. The first conveyor 131 transports the glass substrate 1 into the process chamber 110. At this time, foreign matter remaining on the surface of the glass substrate 1 can be removed as air is injected from the inlet-side air nozzle 121. (Step S11)

8 is a view showing a state where a flat layer is formed on a glass substrate in the flat surface forming apparatus of the glass substrate according to the present embodiment.

6 and 8, the second conveyor 132 transports the glass substrate 1 from the inside of the process chamber 110 toward the outlet 114.

The liquid raw material is accommodated in the raw material tank 141 along the first supply pipe 142 and supplied to the first injection head 151 and the second injection head 152 along the second supply pipe 143. At this time, at least one filter 145 filters the liquid raw material, and the flow control valve 146 regulates the flow rate of the liquid raw material supplied to the first injection head 151 and the second injection head 152. Therefore, the purity of the liquid raw material can be secured and supplied in a fixed amount.

The liquid raw material supplied to the first injection head 151 and the second injection head 152 is supplied to the glass substrate 1 through the plurality of first injection nozzles 151a and the plurality of second injection nozzles 152a . That is, the liquid raw material enters the plurality of first incident regions 151b. As the glass substrate 1 is conveyed toward the outlet 114, the liquid raw material enters the plurality of second yarn regions 152.

In other words, the liquid raw material has a plurality of first incidence regions 151b and a plurality of second four-region regions 151b interposed between the plurality of first incidence regions 151b and partially overlapping the plurality of first incidence regions 151b 152, the glass substrate 1 can be uniformly distributed with respect to the entire surface area of the glass substrate 1. Therefore, the flat layer 2 can be deposited on the glass substrate 1 with a uniform thickness.

On the other hand, as the liquid raw material is injected, the supply pressure of the liquid raw material is generated, and thus the foreign matter may be scattered. At this time, the foreign matter is guided to the dust collecting tube by the dust collecting plate. The foreign matter is discharged to the outside of the chamber along the dust collecting pipe. In addition, the flattening layer 2 is formed, and the remaining liquid waste is contained in the waste liquid container 171. The pecane stored in the waste liquid container is discharged to the outside of the process chamber 110 along the waste liquid discharge pipe. (Step S12)

9 is a view showing a state where the flat layer is cured in the flat surface forming apparatus of the glass substrate according to the present embodiment.

Referring to Figs. 6 and 9, the glass substrate 1 is transported toward the outlet 114. Fig. At this time, the flat layer 2 is hardened by the first hardening unit 180.

That is, when the flat layer 2 is made of a photocurable resin, light is irradiated to the flat layer 2. When the flat layer 2 is made of a thermosetting resin, the flat layer 2 is irradiated with heat. By thus curing the flat layer 2, the flat layer 2 can be firmly bonded to the glass substrate 1. [ (Step S13)

10 is a view showing a state where the glass substrate is cured in the inside of the curing chamber in the flat surface forming apparatus of the glass substrate according to the present embodiment.

5 and 10, the glass substrate 1 is conveyed to the third conveyor 133 through the outlet 114 and the third conveyor 133 is conveyed to the outside of the process chamber 110 .

The glass substrate 1 discharged to the outside of the process chamber 110 is carried into the curing chamber 210. The third conveyor 133 conveys the glass substrate 1 toward the exit of the curing chamber 210 and the second curing unit 220 heats the flat layer 2 to strengthen the surface of the flat layer . (Step S14)

The glass substrate 1 with the flat layer 2 strengthened is transferred to the fourth conveyor 134 and the fourth conveyor 134 discharges the glass substrate 1 to the outside of the hardening chamber 210.

As described above, the apparatus and method for forming a glass substrate according to the present embodiment can form a flat layer 2 on a glass substrate 1 without directly polishing the glass substrate 1, So that a flat surface is formed.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

1: glass substrate 2: flat layer
10: Carrier 100: Planar surface forming apparatus of glass substrate
110: process chamber 120: air curtain forming part
130: Glass substrate transferring part 140:
150: jetting section 151: first jetting head
151a: first injection nozzle 151b: first incidence area
152: second injection head 152a: second injection nozzle
152b: second incidence area 161: dust collecting tube
162: collecting plate 171:
172: waste liquid discharge pipe 180: first hardening unit
210: hardening chamber 220: second hardening part

Claims (23)

A glass substrate transferring unit for transferring the glass substrate;
A jetting part for jetting a liquid raw material onto the glass substrate conveyed by the glass substrate transfer part to form a flat layer on the glass substrate;
A raw material supply part for supplying the liquid raw material to the spray part;
A process chamber in which the injection unit is installed and in which an inlet through which the glass substrate is carried and an outlet through which the glass substrate is taken out are formed;
A communication pipe communicating with the inside of the process chamber;
And a pressure regulating pump connected to the exhaust pipe and regulating the pressure inside the process chamber. The method according to claim 1,
The glass substrate transfer part
A first conveyor disposed outside of said inlet for conveying said glass substrate into said process chamber;
A second conveyor disposed within the process chamber to transfer the glass substrate to the outlet;
And a third conveyor disposed outside the outlet for conveying the glass substrate to the outside of the process chamber. delete 3. The method of claim 2,
Further comprising an air curtain forming unit installed at the inlet and the outlet to inject air in a direction crossing the direction in which the glass substrate is conveyed. The airbag apparatus according to claim 4, wherein the air curtain forming portion
An inlet side air nozzle which opens toward the inlet and injects the air;
An inlet-side exhaust pipe opposed to the inlet-side air nozzle to exhaust the air;
An outlet-side air nozzle which opens toward the outlet and injects the air;
And an outlet-side exhaust pipe opposed to the outlet-side air nozzle and through which the air is exhausted. 5. The apparatus of claim 4, further comprising: a first curing unit disposed between the jetting unit and the outlet in the process chamber to cure the flat layer. The flat surface forming apparatus of claim 6, further comprising a partition wall disposed between the jetting section and the first curing section to direct heat or light of the first curing section toward the jetting section. [8] The apparatus of claim 7, wherein a coolant circulation path is formed in the partition wall to circulate the coolant. The method according to claim 6,
A curing chamber disposed outside the process chamber;
And a second hardening unit provided inside the hardening chamber for hardening the flat layer hardened by the first hardening unit so as to strengthen the surface of the flat layer, Device. 10. The method of claim 9,
Wherein the second hardening unit heats the flat layer at a temperature between 200 and 800 degrees. 2. The apparatus as claimed in claim 1,
A plurality of first injection nozzles for spraying the liquid raw material to a plurality of first incident regions spaced from each other in a direction crossing the direction in which the glass substrate is conveyed;
And a plurality of second injection nozzles which are injected between the plurality of first incidence regions and inject the liquid source material into a plurality of second incidence regions partially overlapping the plurality of first incidence regions A flat surface forming apparatus for a substrate. 12. The apparatus of claim 11, wherein the injector
A bracket for supporting the plurality of first injection nozzles and the plurality of second injection nozzles together;
And an elevating unit for supporting the bracket and raising and lowering the bracket. 12. The process cartridge according to claim 11, wherein the raw material supply portion
A raw material tank in which the liquid raw material is accommodated;
A first supply pipe for supplying the liquid raw material to the raw material tank;
A second supply pipe connected to the raw material tank and branched to the plurality of first injection nozzles and the plurality of second injection nozzles to supply the liquid raw material to the plurality of first injection nozzles and the plurality of second injection nozzles, ; And
And a raw material supply pump installed at a channel of the second supply pipe to form a supply pressure of the liquid raw material. 14. The process according to claim 13, wherein the raw material supply portion
Further comprising at least one filter installed in a channel of the second supply pipe to filter the liquid raw material. 14. The process according to claim 13, wherein the raw material supply portion
Further comprising a flow rate control valve installed in a channel of the second supply pipe to adjust a flow rate of the liquid raw material. The method according to claim 1,
A dust collecting pipe disposed inside the process chamber and opened to the peripheral portion of the jetting portion and the glass substrate transferring portion so that foreign substances in the process chamber are discharged to the outside of the process chamber;
And a dust collecting plate for guiding a foreign substance in the process chamber to the dust collecting tube. The method according to claim 1,
A waste liquid container disposed at a lower portion of the inside of the process chamber and used for forming the flat layer,
And a liquid discharge pipe connected to the waste liquid container and extending to the outside of the process chamber to discharge the waste liquid to the outside of the process chamber. A carrying-in step in which the glass substrate is carried into the processing chamber;
Forming a flat layer on the glass substrate by spraying a liquid raw material onto the glass substrate transferred in the process chamber;
A first flat layer hardening step in which the flat layer is cured within the process chamber;
A carrying-out step in which the glass substrate is taken out of the process chamber;
And a second flat layer curing step of curing the flat layer to strengthen the surface of the flat layer after the carrying out step. 19. The method of claim 18, wherein the planarizing layer forming step
A first supply step of supplying the liquid raw material to the raw material tank;
A second supplying step in which the liquid raw material is supplied from the raw material tank into the process chamber;
And a jetting step of jetting the liquid raw material by a first jet head and a second jet head disposed inside the process chamber. 20. The method of claim 19, wherein the planarizing layer forming step
And filtering the liquid source material to form a flat surface of the glass substrate. 20. The method of claim 19, wherein the planarizing layer forming step
And adjusting a flow rate of the liquid raw material to adjust the flow rate of the liquid raw material. 20. The method according to claim 19,
A first injection step in which the liquid raw material is injected into a plurality of first incident areas spaced from each other in a direction crossing the direction in which the glass substrate is conveyed;
And a second injection step of injecting the liquid raw material into a plurality of second incident areas incident on the plurality of first incident areas and partially overlapping the plurality of first incident areas Flat surface forming method. delete

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