KR20010050231A - Vacuum-Generating Unit - Google Patents

Vacuum-Generating Unit Download PDF

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Publication number
KR20010050231A
KR20010050231A KR1020000050126A KR20000050126A KR20010050231A KR 20010050231 A KR20010050231 A KR 20010050231A KR 1020000050126 A KR1020000050126 A KR 1020000050126A KR 20000050126 A KR20000050126 A KR 20000050126A KR 20010050231 A KR20010050231 A KR 20010050231A
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South Korea
Prior art keywords
valve
vacuum
passage
pressure fluid
solenoid valve
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KR1020000050126A
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Korean (ko)
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KR100387364B1 (en
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나가이시게카즈
이토요시하루
토야마다카시
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다까다 요시유끼
에스엠씨 가부시키 가이샤
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48Control
    • F04F5/52Control of evacuating pumps

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

PURPOSE: To reduce size and weight by decreasing size in a width direction approximately orthogonal to the longitudinal direction of a body part. CONSTITUTION: A first communication passage 48 communicating with a compressed air feed port 36, a sixth passage 64 communicating a vacuum port 62, and an eight passage 116 communicating with an exhaust port 38 for an electromagnetic valve are disposed approximately in parallel to each other. Besides, a solenoid valve 22 for feeding pressure fluid, a solenoid valve 24 for vacuum fracture, a flow rate regulating screw 114, a suction filter 94, and a vacuum pressure switch 96 are disposed, in the order, in series to a body part 20.

Description

진공발생용 유니트 {Vacuum-Generating Unit}Vacuum Generating Unit {Vacuum-Generating Unit}

본 발명은 예를 들어, 흡착용 패드 등의 흡착수단에 부압을 공급할 수 있는 진공발생용 유니트에 관한 것이다.The present invention relates, for example, to a vacuum generating unit capable of supplying negative pressure to an adsorption means such as an adsorption pad.

종래부터 흡착용 패드에 부압을 공급하는 수단으로서 진공발생용 유니트가 이용되고 있다. 이러한 진공발생용 유니트는 일반적으로 부압을 발생시키는데 사용되는 이젝터, 튜브를 통해 흡착용 패드 등의 흡착수단에 연통접속되는 진공포트, 상기 이젝터 및 진공포트에 압축공기를 공급하거나 또는 차단하는 압력유체공급용 전자밸브 및 진공파괴용 전자밸브가 설치된 밸브기구, 및 상기 진공포트에 발생하는 부압을 검출하는 진공스위치부로 구성된다.Conventionally, a vacuum generating unit has been used as a means for supplying negative pressure to a suction pad. The vacuum generating unit generally includes an ejector used to generate a negative pressure, a vacuum port connected to an adsorption means such as a pad for adsorption through a tube, and a pressure fluid supply for supplying or blocking compressed air to the ejector and the vacuum port. And a valve mechanism provided with a solenoid valve for vacuum and a solenoid valve for vacuum destruction, and a vacuum switch unit for detecting underpressure generated in the vacuum port.

이와 같은 종래 기술에 관한 진공발생용 유니트의 개략 동작에 대해 설명한다.The schematic operation of such a vacuum generating unit according to the prior art will be described.

밸브기구부를 통해 이젝터에 압축공기를 공급하여 부압을 발생시킨다. 상기 이젝터에 의해 발생된 부압은 진공포트에 접속된 튜브를 통해 흡착용 패드에 공급되고, 흡착용 패드에 발생된 부압작용에 의해 공작물이 흡착된다. 이와 같이 하여 흡착용 패드에 흡착유지된 공작물은 로보트아암의 변위작용하에 소정의 위치까지 반송된다.The negative pressure is generated by supplying compressed air to the ejector through the valve mechanism. The negative pressure generated by the ejector is supplied to the adsorption pad through a tube connected to the vacuum port, and the work is adsorbed by the negative pressure generated on the adsorption pad. In this way, the workpiece adsorbed and held on the suction pad is conveyed to a predetermined position under the displacement action of the robot arm.

이어서 흡착용 패드에 의해 지지된 공작물을 이탈시키는 경우, 압축공기를 밸브기기구부에서 진공포트로 연통하는 통로를 통해 흡착용 패드로 이송됨에 따라 상기 흡착용 패드의 부압상태가 해제된다. 그 결과, 공작물이 흡착용 패드에서 떨어져 소정 위치로 반송된다.Subsequently, when the workpiece supported by the suction pad is separated, the negative pressure of the suction pad is released as the compressed air is transferred to the suction pad through a passage communicating from the valve mechanism part to the vacuum port. As a result, the workpiece is conveyed to a predetermined position away from the pad for adsorption.

종래부터 본체부의 긴쪽 방향과 실질적으로 직교하는 폭방향의 크기를 감축함에 따라 가능한 한 소형화 및 경량화하고자 하는 요청이 있다. 예를 들어 복수개의 진공발생 유니트를 연설하여 매니폴드화한 경우, 본체부의 폭방향의 크기를 감축함에 따라 상당히 소형화 및 경량화된 전자밸브 매니폴드가 얻어지고, 설치공간을 유효하게 이용할 수 있게 된다.Conventionally, there is a request to reduce the size and weight as much as possible by reducing the size of the width direction substantially perpendicular to the longitudinal direction of the body portion. For example, when a plurality of vacuum generating units are extended to manifold, as the width of the main body portion is reduced in size, a considerably smaller and lighter solenoid valve manifold can be obtained and the installation space can be effectively used.

본 발명은 상기의 요청을 감안하여 된 것으로, 본체부의 긴쪽방향과 실질적으로 직교하는 폭방향의 크기를 감축하여 소형화 및 경량화할 수 있는 진공발생용 유니트를 제공하는 것을 목적으로 한다.The present invention has been made in consideration of the above-described request, and an object of the present invention is to provide a vacuum generating unit that can be reduced in size and weight by reducing the size of the width direction substantially orthogonal to the longitudinal direction of the body portion.

도 1은 본 발명의 실시예에 의한 진공발생 유니트의 축방향을 따른 개략 종단면도,1 is a schematic longitudinal sectional view along the axial direction of a vacuum generating unit according to an embodiment of the present invention;

도 2는 도 1의 화살표 A방향에서 본 사시도,2 is a perspective view seen from the arrow A direction of FIG.

도 3은 도 1의 화살표 B방향에서 본 사시도,3 is a perspective view seen from the arrow B direction of FIG.

도 4는 도 1의 진공발생용 유니트를 구성하는 제1 ON/OFF 밸브의 확대 종단면도,4 is an enlarged vertical cross-sectional view of the first ON / OFF valve constituting the vacuum generating unit of FIG.

도 5는 도 4의 제1 ON/OFF 밸브의 밸브플러그가 오른쪽 방향으로 변위하여 온상태로 될 때의 동작설명도,FIG. 5 is an operation explanatory diagram when the valve plug of the first ON / OFF valve of FIG. 4 is displaced in the right direction and is turned on;

도 6은 진공압력스위치를 구성하는 제1 케이싱과 제2 케이싱의 체결수단을 나타낸 분해사시도,6 is an exploded perspective view showing the fastening means of the first casing and the second casing constituting the vacuum pressure switch;

도 7은 도 1에 도시된 진공발생용 유니트의 회로구성도.7 is a circuit diagram of the vacuum generating unit shown in FIG.

(부호의 설명)(Explanation of the sign)

10: 진공발생용 유니트 12, 14, 16, 18: 블록부재10: vacuum generating unit 12, 14, 16, 18: block member

20: 본체부 22: 압력유체공급용 전자밸브 24: 진공파괴용 전자밸브20: main body 22: solenoid valve for pressure fluid supply 24: solenoid valve for vacuum destruction

28: 노즐 30: 디퓨저 32: 이젝터 36: 압력공기공급포트28: nozzle 30: diffuser 32: ejector 36: pressure air supply port

38: 전자밸브배기포트 40, 44: 챔버 42, 46: ON/OFF 밸브38: Solenoid valve exhaust port 40, 44: Chambers 42, 46: ON / OFF valve

48, 50, 52, 54, 56, 64, 70, 98, 116: 통로 58, 60: 파일로트통로48, 50, 52, 54, 56, 64, 70, 98, 116: passage 58, 60: pilot passage

62: 진공포트 72: 밸브플러그 94: 흡인필터 96: 진공압력스위치62: vacuum port 72: valve plug 94: suction filter 96: vacuum pressure switch

102, 104: 케이싱 110: 돌기부 112: 체결용 홀부102, 104: casing 110: protrusion 112: fastening hole portion

도 1에서 참조번호 10은 본 발명의 실시예에 의한 진공발생용 유니트를 나타낸다.In FIG. 1, reference numeral 10 denotes a vacuum generating unit according to an embodiment of the present invention.

상기 진공발생유니트(10)는 긴쪽방향을 따라 직렬로 연결된 제1 블록부재(1 2), 제2 블록부재(14), 제3 블록부재(16) 및 제4 블록부재(18)로 된 본체부(20); 상기 본체부(20)의 상면부에 배설된 압력유체공급용 전자밸브(22) 및 진공파괴용 전자밸브(24)로 된 전자밸브(26); 상기 본체부(20)의 내부에 배설되고, 노즐(28) 및 디퓨저(30)를 갖는 이젝터부(32); 및 상기 제4 블록부재(18)에 장착되는 공작물의 흡착상태를 확인하는 검출부(34)로 구성된다. 상기 노즐(28)은 제2 블록부재(14 )와 일체로 형성될 수도 있다. 또한 상기 압력유체공급용 전자밸브(22) 및 진공파괴용 전자밸브(24)는 각각 동일한 구성요소로 되어 있으며, 노르말크로스타입으로 설정되어 있다. 또 상기 압력유체공급용 전자밸브(22) 및 진공파괴용 전자밸브(24)는 노르말크로스타입으로 한정되는 것은 아니며, 미도시된 노르말오픈타입의 전자밸브, 자기지지형 전자밸브 또는 타이머부착 전자밸브를 사용할 수도 있다.The vacuum generating unit 10 is a main body of the first block member 12, the second block member 14, the third block member 16 and the fourth block member 18 connected in series along the longitudinal direction. Part 20; A solenoid valve (26) comprising a solenoid valve (22) for supplying pressure fluid and a solenoid valve (24) for vacuum destruction disposed on an upper surface of the main body (20); An ejector portion 32 disposed inside the main body portion 20 and having a nozzle 28 and a diffuser 30; And a detector 34 for checking a suction state of the workpiece mounted on the fourth block member 18. The nozzle 28 may be integrally formed with the second block member 14. The pressure fluid supply solenoid valve 22 and the vacuum release solenoid valve 24 each have the same component and are set to a normal cross type. The pressure fluid supply solenoid valve 22 and vacuum release solenoid valve 24 are not limited to the normal cross type, but are not shown in the normally open type solenoid valve, a self-supporting solenoid valve, or a solenoid valve with a timer. You can also use

상기 제1 내지 제4 블록부재(12, 14, 16, 18)은 각각 실질적으로 동일한 크기의 폭을 가지며, 편평한 얇은 벽구조로 형성되어 있다(도 2 및 도 3 참조). 제1 블록부재(12)의 일측면에는 이젝터부(32)에 압축공기를 공급하기 위한 압축공기공급포트(압력유체공급포트: 36)가 형성되고, 상기 압축공기공급포트(36)에 근접하는 상부측에는 전자밸브용 배기포트(38)가 형성되어 있다. 또 제1 블록부재(12)의 챔버(40) 내에는 파이로트압의 공급작용하에 오프상태에서 온상태로 절환되는 제1 ON/OFF 밸브(42)가 배설되고, 제2 블록부재(14)의 챔버(44) 내에는 파이로트압의 공급작용하에 오프상태에서 온상태로 절환하는 제2 ON/OFF 밸브(46)가 배설된다.The first to fourth block members 12, 14, 16, and 18 have substantially the same width and are formed in a flat thin wall structure (see FIGS. 2 and 3). One side of the first block member 12 is formed with a compressed air supply port (pressure fluid supply port: 36) for supplying compressed air to the ejector unit 32, which is adjacent to the compressed air supply port 36 On the upper side, an exhaust port 38 for the solenoid valve is formed. In the chamber 40 of the first block member 12, a first ON / OFF valve 42, which is switched from the off state to the on state under the supply of the pilot pressure, is disposed, and the second block member 14 is disposed. In the chamber 44, a second ON / OFF valve 46 for switching from the off state to the on state under the supply action of the pilot pressure is disposed.

압축공기공급포트(36)는 제1 블록부재(12) 및 제2 블록부재(14)의 거의 중앙부를 따라 소정의 길이만큼 연재하는 제1 통로(48)에 연통하고, 상기 제1 통로(48)에서 분지하여 압력유체공급용 전자밸브(22)에 연통하는 제2 통로(50) 및 진공파괴용 전자밸브(24)에 연통하는 제3 통로(52)가 형성되어 있다.The compressed air supply port 36 communicates with the first passage 48 extending by a predetermined length along a substantially central portion of the first block member 12 and the second block member 14, and the first passage 48. The second passage 50 which is branched from the head) and communicates with the solenoid valve 22 for pressure fluid supply and the third passage 52 which communicates with the solenoid valve 24 for vacuum breakdown are formed.

또 상기 제1 통로(48)에서 분지하여 제1 ON/OFF 밸브(42)에 연통하는 제4 통로(54), 및 제2 ON/OFF 밸브(46)에 연통하는 제5 통로(56)가 형성되고, 상기 제4 통로(54) 및 제5 통로(56)를 통해 제1 ON/OFF 밸브(42) 및 제2 ON/OFF 밸브(46)에 각각 압축공기가 공급된다.In addition, a fourth passage 54 branched from the first passage 48 and communicating with the first ON / OFF valve 42 and a fifth passage 56 communicating with the second ON / OFF valve 46 are provided. And the compressed air is supplied to the first ON / OFF valve 42 and the second ON / OFF valve 46 through the fourth passage 54 and the fifth passage 56, respectively.

압력유체공급용 전자밸브(22)와 제1 ON/OFF 밸브(42)와의 사이에는 상기 압력유체공급용 전자밸브(22)를 작동하여 온상태로 함에 따라 상기 제1 ON/OFF 밸브(42)에 파이로트압을 공급하는 제1 파이로트통로(58)가 형성되고, 진공파괴용 전자밸브(24)와 제2 ON/OFF 밸브(46)와의 사이에는 상기 진공파괴용 전자밸브(24)를 작동하여 온상태로 함에 따라 상기 제2 ON/OFF 밸브(46)에 파이로트압을 공급하는 제2 파이로트통로(60)가 형성되어 있다.The first ON / OFF valve 42 is operated between the pressure fluid supply solenoid valve 22 and the first ON / OFF valve 42 by operating the pressure fluid supply solenoid valve 22 to be in an ON state. The first pilot passage 58 for supplying a pilot pressure is formed, and the vacuum release solenoid valve 24 is provided between the vacuum release solenoid valve 24 and the second ON / OFF valve 46. The second pilot passage 60 for supplying the pilot pressure to the second ON / OFF valve 46 is formed as it is operated and turned on.

이젝터부(32)를 형성하는 노즐(28)과 디퓨저(30)와의 사이에는 진공포트(62)에 연통되고, 제1 통로(48)와 실질적으로 평행하게 연재하는 제6 통로(64)가 형성되며, 상기 이젝터부(32)에서 발생하는 부압은 튜브 등을 통해 접속된 미도시된 흡착용패드 등의 흡착수단에 공급된다. 디퓨저(30)는 제3 블록부재(16)에 형성된 배기포트(66)에 연통되고, 이젝터부(32)에 공급된 압축공기는 공기배기포트(배출포트: 66)에 연통하는 사이렌서(silencer; 68: 도 7 참조)를 통해 외부로 배기된다.A sixth passage 64 is formed between the nozzle 28 forming the ejector portion 32 and the diffuser 30 so as to communicate with the vacuum port 62 and extend substantially in parallel with the first passage 48. The negative pressure generated in the ejector unit 32 is supplied to adsorption means such as an adsorption pad (not shown) connected through a tube or the like. The diffuser 30 communicates with the exhaust port 66 formed in the third block member 16, and the compressed air supplied to the ejector portion 32 communicates with the air exhaust port (discharge port 66). 68: see FIG. 7).

제2 ON/OFF 밸브(46)에는 제6 통로(64)에 연통되며, 실질적으로 평행하게 연재하는 제7 통로(70)가 접속되고, 상기 제2 ON/OFF 밸브(46)가 온상태로 됨에 따라 제7 통로(70)를 통해 압축공기가 공급된다. 따라서, 진공포트(62)에 연통되는 제6 통로(64)에 압축공기(정압)가 공급됨에 따라 부압상태가 해제된다.A seventh passage 70 communicating with the sixth passage 64 and extending substantially in parallel to the second ON / OFF valve 46 is connected, and the second ON / OFF valve 46 is turned on. As the compressed air is supplied through the seventh passage 70. Therefore, as the compressed air (static pressure) is supplied to the sixth passage 64 communicating with the vacuum port 62, the negative pressure state is released.

제1 ON/OFF 밸브(42) 및 제2 ON/OFF 밸브(46)는 각각 동일한 구성요소로 되어 있고, 도 4에 도시된 바와 같이, 실질적으로 수평방향으로 소정의 거리만큼 변위자재하게 설치된 밸브플러그(72)와, 상기 밸브플러그(72)를 둘러싸도록 원통상으로 형성되고 상기 챔버(40) 내에 고정된 리테이너(retainer: 74)를 갖는다. 상기 밸브플러그(72)의 일측면의 외주면에는 상기 리테이너(74)의 착지부(76)에 착지되어 챔버(40)를 폐쇄하는 제1 링부재(78)가 장착되고, 상기 밸브플러그(72)의 타단측의 외주면에는 리테이너(74)의 내벽면을 따라 섭동하는 제2 링부재(80)가 장착되어 있다. 상기 제1 및 제2 링부재(78, 80)는 천연고무 또는 합성고무 등의 탄성재료로 형성되어 있다.The first ON / OFF valve 42 and the second ON / OFF valve 46 each have the same components, and as shown in FIG. It has a plug 72 and a retainer 74 formed in a cylindrical shape so as to surround the valve plug 72 and fixed in the chamber 40. On the outer circumferential surface of one side of the valve plug 72 is mounted a first ring member 78 which is landed on the landing portion 76 of the retainer 74 to close the chamber 40, the valve plug 72 On the outer circumferential surface of the other end of the second ring member 80 is perturbed along the inner wall surface of the retainer 74. The first and second ring members 78 and 80 are made of an elastic material such as natural rubber or synthetic rubber.

또 상기 밸브플러그(72)에는 상기 밸브플러그(72)의 거의 중앙부에서 제1 링부재(78)까지 연재되는 계단형 환상홈(82)이 형성되고, 리테이너(74)의 계단부(84)에 당접함에 따라 밸브플러그(72)의 오른쪽방향으로 변위량을 규제하는 스토퍼부(8 6)가 형성되어 있다. 상기 리테이너(74)에는 계단형 환상홈(82)에 연통하는 홀부(8 8)가 형성되어 있다. 또한 참조번호 90은 패킹을 나타내고, 참조번호 92는 O링을 나타낸다.In addition, the valve plug 72 is formed with a stepped annular groove 82 extending from the center of the valve plug 72 to the first ring member 78, and is formed in the stepped portion 84 of the retainer 74. As the abutment is made, a stopper portion 8 6 is provided which regulates the displacement amount in the right direction of the valve plug 72. The retainer 74 is provided with a hole portion 8 8 which communicates with the stepped annular groove 82. Reference numeral 90 denotes a packing and reference numeral 92 denotes an O-ring.

상기 제4 통로(54)을 통해 공급되는 압축공기의 작용하에 밸브플러그(72)가 도 4에 도시된 바와 같이, 왼쪽방향으로 변위하고, 제1 링부재(78)가 리테이너(74)의 착지부(76)에 착지함에 따라 챔버(40)가 폐쇄됨으로써 제1 ON/OFF 밸브(42)가 오프상태로 된다. 한편, 압력유체공급용 전자밸브(22)의 작용하에 제1 파이로트통로(58)를 통해 공급되는 파이로트압에 의해 밸브플러그(72)가 도 5에 도시된 바와 같이, 오른쪽 방향으로 변위하고, 제1 링부재(78)가 착지부(76)로부터 떨어짐에 따라 제1 ON/OFF 밸브(42)가 온상태로 된다. 이 경우, 제4 통로(54)를 통해 공급된 압축공기는 도 5의 화살표방향과 같이 계단형 환상홈(82) 및 제1 링부재(78)와 착지부(76)와의 사이의 공간을 경유하여 이젝터부(32)로 도출된다.Under the action of the compressed air supplied through the fourth passage 54, the valve plug 72 is displaced to the left as shown in FIG. 4, and the first ring member 78 is attached to the retainer 74. The first ON / OFF valve 42 is turned off because the chamber 40 is closed by landing on the branch 76. On the other hand, the valve plug 72 is displaced in the right direction by the pilot pressure supplied through the first pilot passage 58 under the action of the pressure fluid supply solenoid valve 22. As the first ring member 78 is separated from the landing portion 76, the first ON / OFF valve 42 is turned on. In this case, the compressed air supplied through the fourth passage 54 passes through the space between the stepped annular groove 82 and the first ring member 78 and the landing portion 76 as shown in the arrow direction of FIG. 5. To the ejector unit 32.

따라서 제1 ON/OFF 밸브(42)가 오프상태인 경우, 이젝터부(32)에 대한 압축공기의 공급이 정지되고, 상기 제1 ON/OFF 밸브(42)가 온상태로 됨에 따라 압축공기가 이젝터부(32)로 공급된다.Accordingly, when the first ON / OFF valve 42 is in the OFF state, the supply of compressed air to the ejector unit 32 is stopped, and the compressed air is turned on as the first ON / OFF valve 42 is turned ON. It is supplied to the ejector unit 32.

도 1에 도시된 바와 같이, 검출부(34)는 부압작용하에 진공포트(62)로부터 흡인된 공기중에 포함되어 있는 먼지등을 제거하기 위한 흡인필터(94)와, 내부에 미도시된 반도체압력센서가 설치되고, 미리 설정된 문턱값에 도달할 때 검출신호를 도출하는 진공압력스위치(96)를 포함한다. 상기 흡인필터(94) 및 진공압력스위치(9 6)는 각각 제4 블록부재(18)와 기밀하게 연결된다.As shown in FIG. 1, the detector 34 includes a suction filter 94 for removing dust and the like contained in the air sucked from the vacuum port 62 under a negative pressure, and a semiconductor pressure sensor not shown therein. Is installed, and includes a vacuum pressure switch 96 for deriving a detection signal when the preset threshold is reached. The suction filter 94 and the vacuum pressure switch 96 are respectively hermetically connected to the fourth block member 18.

상기 진공압력스위치(96)는 제6 통로(64)에 연통하는 통로(98)를 통해 흡착용 패드에 공급되는 부압을 도입하고, 상기 도입된 압력유체의 부압을 미도시된 반도체압력센서에 의해 검출함에 따라 공작물의 흡착상태를 확인하는 기능을 한다. 또한 상기 통로(98) 중에 미도시된 반도체압력센서를 보호하기 위한 필터(미도시)를 설치하는 것이 바람직하다. 또 진공압력스위치(96)의 조작수단으로는 트리머타입, 또는 업버튼 및 다운버튼을 포함하는 푸쉬타입일 수도 있다.The vacuum pressure switch 96 introduces a negative pressure supplied to the pad for adsorption through the passage 98 communicating with the sixth passage 64 and converts the negative pressure of the introduced pressure fluid by a semiconductor pressure sensor (not shown). It detects the adsorption state of the workpiece upon detection. In addition, it is preferable to provide a filter (not shown) for protecting the semiconductor pressure sensor not shown in the passage 98. In addition, the operation means of the vacuum pressure switch 96 may be a trimmer type or a push type including an up button and a down button.

또 진공압력스위치(96)는 도 6에 도시된 바와 같이, 체결수단(100)을 통해 일체로 연결된 제1 케이싱(102) 및 제2 케이싱(104)과, 상기 제1 케이싱(102) 및 제2 케이싱(104)으로 형성된 내부공간에 배설되는 회로기판(106)과, 커버플레이트( 108)을 갖는다. 상기 체결수단(100)은 제1 케이싱(102)의 개구부 근방의 측벽면에 형성된 다수개의 돌기부(110)와, 제2 케이싱(104)의 측벽면에 형성되고, 상기 돌기부(110)가 삽입되는 체결용 홀부(112)로 구성된다.In addition, as shown in FIG. 6, the vacuum pressure switch 96 includes a first casing 102 and a second casing 104 connected integrally through the fastening means 100, and the first casing 102 and the first casing 102. The circuit board 106 and the cover plate 108 are provided in the inner space formed by the two casings 104. As shown in FIG. The fastening means 100 is formed on the side wall surface of the second casing 104 and the plurality of protrusions 110 formed on the side wall surface near the opening of the first casing 102, the protrusion 110 is inserted It is composed of a fastening hole (112).

또한 도 1에서 참조번호 114는 제2 ON/OFF 밸브(46)가 온상태로됨에 따라 제7 통로(70)를 유통하는 진공파괴용 압력유체의 유량을 조정하는 유량조정나사를 나타내고, 참조번호 116은 압력유체공급용 전자밸브(22) 및 진공파괴용 전자밸브(2 4)와 전자밸브용 배기포트(38)를 각각 연통시키는 제8 통로를 나타낸다. 상기 제8 통로(116)는 제1 통로(48)와 실질적으로 평행하도록 배치되어 있다.1, reference numeral 114 denotes a flow rate adjustment screw for adjusting the flow rate of the vacuum breaking pressure fluid flowing through the seventh passage 70 as the second ON / OFF valve 46 is turned on. Reference numeral 116 denotes an eighth passage communicating with the solenoid valve 22 for pressure fluid supply, the solenoid valve 24 for vacuum release, and the exhaust port 38 for the solenoid valve, respectively. The eighth passage 116 is disposed to be substantially parallel to the first passage 48.

본 발명의 실시예에 따른 진공발생용 유니트(10)는 기본적으로 이상과 같이 구성된 것으로, 그 작동 및 작용효과에 대해 도 7에 도시된 회로구성도에 기초하여 설명한다. 또한 기초상태에서는 압력유체공급용 전자밸브(22) 및 진공파괴용 전자밸브(24)는 각각 오프상태에 있는 것으로 추정된다.The vacuum generating unit 10 according to the embodiment of the present invention is basically configured as described above, and its operation and effect will be described based on the circuit configuration shown in FIG. In the basic state, the solenoid valve 22 for supplying the pressure fluid and the solenoid valve 24 for vacuum release are estimated to be in the off state, respectively.

미도시된 압축공기공급원으로부터 공급된 압축공기는 압축공기공급포트(36)를 통해 제1 통로(48)로 도입된다. 제1 통로(48)에 도입된 압축공기는 상기 제1 통로(48)에 연통하는 제1 ON/OFF 밸브(42)의 챔버(40) 내에 공급되고, 상기 압축공기의 작용하에 밸브플러그(72)가 도 4에 도시된 바와 같이, 왼쪽방향으로 변위되며, 상기 제1 ON/OFF 밸브(42)가 오프상태로 된다.Compressed air supplied from an unshown compressed air supply source is introduced into the first passage 48 through the compressed air supply port 36. The compressed air introduced into the first passage 48 is supplied into the chamber 40 of the first ON / OFF valve 42 in communication with the first passage 48, and under the action of the compressed air, the valve plug 72 Is displaced to the left, and the first ON / OFF valve 42 is turned off.

이와 같은 상태에서 미도시된 컨트롤러로부터 출력된 온신호에 의해 압력유체공급용 전자밸브(22)가 온상태로 된다. 또한 이 때 진공파괴용 전자밸브(24)는 오프상태 그대로이다. 상기 압력유체공급용 전자밸브(22)가 온상태가 됨에 따라 제1 파이로트통로(58)를 통해 제1 ON/OFF 밸브(42)에 파이로트압이 공급되고, 상기 파이로트압의 압압작용으로 밸브플러그(72)가 오른쪽방향으로 변위하여 제1 ON/OFF 밸브(42)가 온상태로 된다. 상기 제1 ON/OFF 밸브(42)가 온상태가 됨에 따라 제1 통로(48)로 도입된 압축공기는 제1 ON/OFF 밸브(42)를 통과하여 이젝터부(32)로 공급된다.In this state, the solenoid valve 22 for supplying the pressure fluid is turned on by the on signal output from the controller (not shown). At this time, the vacuum release solenoid valve 24 remains off. As the pressure fluid supply solenoid valve 22 is turned on, the pilot pressure is supplied to the first ON / OFF valve 42 through the first pilot passage 58, and the pressure action of the pilot pressure is performed. As a result, the valve plug 72 is displaced in the right direction so that the first ON / OFF valve 42 is turned on. As the first ON / OFF valve 42 is turned on, the compressed air introduced into the first passage 48 is supplied to the ejector unit 32 through the first ON / OFF valve 42.

이젝터부(32)에서는 노즐(28)의 노즐구멍으로부터 디퓨저(30)를 향하여 압축공기가 토출됨에 따라 부압이 발생되고, 이 부압은 제6 통로(64) 및 진공포트(62)에 접속된 튜브를 통해 미도시된 흡착용 패드로 공급된다.In the ejector portion 32, negative pressure is generated as the compressed air is discharged from the nozzle hole of the nozzle 28 toward the diffuser 30, and the negative pressure is a tube connected to the sixth passage 64 and the vacuum port 62. It is supplied to the adsorption pad not shown through.

따라서, 미도시된 로보트 아암을 조작함에 따라 흡착용 패드가 공작물에 접촉되고, 부압작용하에 흡착용 패드가 공작물을 흡착하면 부압이 다시 상승하고, 이 부압은 진공압력스위치(96)의 미도시된 반도체압력센서에 의해 검출된다. 상기 반도체압력센서에 의해 검출된 흡착확인신호는 미도시된 컨트롤러로 이송되고, 상기 컨트롤러는 흡착확인신호를 수취함에 따라 흡착용 패드에 의해 공작물이 확실하게 흡착되는 것을 확인한다.Therefore, when the robot arm is not shown, the suction pad contacts the workpiece, and when the suction pad sucks the workpiece under the negative pressure, the negative pressure rises again, and this negative pressure is not shown in the vacuum pressure switch 96. It is detected by the semiconductor pressure sensor. The adsorption confirmation signal detected by the semiconductor pressure sensor is transferred to a controller not shown, and the controller confirms that the workpiece is surely adsorbed by the adsorption pad as the adsorption confirmation signal is received.

이어서, 공작물이 소정의 거리만큼 이동한 후, 상기 흡착용 패드의 부압을 해제하여 공작물을 소정의 위치로 이탈시키는 경우에 대해 설명한다.Next, a description will be given of a case where the work is moved by a predetermined distance, and then the negative pressure of the suction pad is released to release the work to a predetermined position.

미도시된 컨트롤러는 압력유체공급용 전자밸브(22)에 오프신호를 도입한다. 이 결과, 압력유체공급용 전자밸브(22)가 오프상태로 됨에 따라 제1 ON/OFF 밸브(42)가 오프상태로 되고, 이젝터부(32)에 대한 압축공기의 공급이 정지되며, 진공포트(62)로부터 흡착용 패드에 대한 부압의 공급이 정지된다.The controller not shown introduces an OFF signal to the solenoid valve 22 for pressure fluid supply. As a result, as the pressure fluid supply solenoid valve 22 is turned off, the first ON / OFF valve 42 is turned off, the supply of compressed air to the ejector portion 32 is stopped, and the vacuum port. From 62, the supply of the negative pressure to the adsorption pad is stopped.

한편, 미도시된 컨트롤러는 진공파괴용 전자밸브(24)에 온신호를 도출하여 상기 진공파괴용 전자밸브(24)를 온상태로 한다. 상기 진공파괴용 전자밸브(24)가 온상태로 됨에 따라 제2 파이로트통로(60)를 통해 제2 ON/OFF 밸브(46)에 파이로트압이 공급되며, 상기 파이로트압의 압압작용하에 밸브플러그(72)가 오른쪽방향으로 변위되고 제2 ON/OFF 밸브(46)가 온상태로 된다. 상기 제2 ON/OFF 밸브(46)가 온상태로 됨에 따라 제1 통로(48)에 도입된 압축공기는 제2 ON/OFF 밸브(46)를 통과하고, 제7 통로(70) 및 제6 통로(64)를 경유하여 진공포트(62)로 공급된다. 이 결과, 압축공기공급포트(36)로부터 공급된 압축공기(정압)는 진공포트(62)를 경유하여 흡착용 패드에 공급되고, 상기 흡착용패드의 공작물에 대한 흡착상태가 해제된다.On the other hand, the controller not shown leads the on-signal to the vacuum release solenoid valve 24 to turn on the vacuum release solenoid valve 24. As the vacuum release solenoid valve 24 is turned on, the pilot pressure is supplied to the second ON / OFF valve 46 through the second pilot passage 60, and under the pressure action of the pilot pressure. The valve plug 72 is displaced in the right direction and the second ON / OFF valve 46 is turned on. As the second ON / OFF valve 46 is turned on, the compressed air introduced into the first passage 48 passes through the second ON / OFF valve 46 and the seventh passage 70 and the sixth passage. It is supplied to the vacuum port 62 via the passage 64. As a result, the compressed air (static pressure) supplied from the compressed air supply port 36 is supplied to the adsorption pad via the vacuum port 62, and the adsorption state to the workpiece of the adsorption pad is released.

공작물이 흡착용 패드로부터 이탈됨에 따라 부압상태로부터 대기압상태로 되고, 상기 대기압을 미도시된 반도체압력센서로 검출하고, 반도체압력센서는 미도시된 컨트롤러에 공작물 이탈신호를 이송한다. 컨트롤러는 상기 공작물이탈신호를 수취함에 따라 흡착용 패드로부터 공작물이 이탈되는지를 확인한다. 이와 같이 하여 흡착용 패드를 확실하게 이탈시킬 수 있다.As the workpiece is separated from the suction pad, the workpiece is brought into the atmospheric pressure from the negative pressure state, and the atmospheric pressure is detected by a semiconductor pressure sensor (not shown), and the semiconductor pressure sensor transmits the workpiece release signal to the controller (not shown). The controller checks whether the workpiece is released from the suction pad as the workpiece release signal is received. In this way, the adsorption pad can be reliably separated.

본 실시예에서는 압축공기공급포트(36)에 연통하는 제1 통로(48)와, 진공포트(62)에 연통하는 제6 통로(64)와, 전자밸브용 배기포트(38)에 연통하는 제8 통로 (116)를 각각 실질적으로 평행하게 배치하며, 본체부(20)의 하부에 제1 ON/OFF 밸브(42)를 배치하고, 상부측에 제2 ON/OFF 밸브(46)를 각각 제1 통로(48)와 실질적으로 평행하게 배치한다. 또 본 실시예에서는 본체부(20)의 상부에 압력유체공급용 전자밸브(22), 진공파괴용 전자밸브(24), 유량조정나사(114), 흡인필터(94) 및 진공압력스위치(96)를 각각 순차적으로 직렬로 탑재한다.In this embodiment, the first passage 48 communicates with the compressed air supply port 36, the sixth passage 64 communicates with the vacuum port 62, and the agent communicates with the exhaust port 38 for the solenoid valve. Each of the eight passages 116 is disposed substantially parallel to each other, the first ON / OFF valve 42 is disposed under the main body 20, and the second ON / OFF valve 46 is disposed on the upper side, respectively. 1 is disposed substantially parallel to the passage (48). In this embodiment, the solenoid valve 22 for supplying the pressure fluid, the solenoid valve 24 for vacuum release, the flow adjusting screw 114, the suction filter 94 and the vacuum pressure switch 96 are placed on the upper portion of the main body 20. ), Each in series.

본 실시예에서는 이와 같은 배치에 따라 본체부(20)의 축방향과 실질적으로 직교하는 폭방향의 크기를 억제하고, 소형화 및 경량화할 수 있다, 따라서 진공발생용 유니트(10)가 설치되는 공간을 유효하게 이용할 수 있다.According to this arrangement, the size of the width direction substantially orthogonal to the axial direction of the main body 20 can be suppressed, and the size and weight can be reduced. Therefore, the space in which the vacuum generating unit 10 is installed can be reduced. It can be used effectively.

또 본 실시예에서는 진공압력스위치(96)의 제1 케이싱(102)과 제2 케이싱(10 4)을 다수개의 돌기부(110)와 체결용 홀부(112)로 된 체결수단에 의해 일체로 연결함에 따라 조립작업을 간편하게 행할 수 있다는 이점이 있다.In this embodiment, the first casing 102 and the second casing 10 4 of the vacuum pressure switch 96 are integrally connected by fastening means consisting of a plurality of protrusions 110 and fastening holes 112. Therefore, there is an advantage that the assembly work can be easily performed.

또한 본 실시예에 따른 진공발생용 유니트(10)를 다수개 연설하여 매니폴드화할 수도 있다.In addition, a plurality of the vacuum generating units 10 according to the present embodiment may be manifolded.

본 발명에 의하면 본체부의 축방향과 실질적으로 직교하는 폭방향의 크기를 억제하여 소형화 및 경량화할 수 있다. 따라서 진공발생용 유니트가 설치되는 스페이스를 유효하게 이용할 수 있다.According to the present invention, the size of the width direction substantially orthogonal to the axial direction of the main body portion can be suppressed to reduce the size and weight. Therefore, the space in which the vacuum generating unit is installed can be effectively used.

Claims (6)

압력유체공급원에 접속된 압력유체공급포트(36), 흡착수단에 접속되는 진공포트(62), 상기 압력유체공급포트(36)로부터 공급된 압력유체를 외부로 배출하는 배출포트(66)가 설치된 본체부(20)와,A pressure fluid supply port 36 connected to the pressure fluid supply source, a vacuum port 62 connected to the adsorption means, and a discharge port 66 for discharging the pressure fluid supplied from the pressure fluid supply port 36 to the outside are provided. The main body 20, 상기 압력유체공급포트(36)로부터 공급된 압력유체의 작용하에 부압을 발생시키는 이젝터부(32)와,An ejector unit 32 for generating a negative pressure under the action of the pressure fluid supplied from the pressure fluid supply port 36; 상기 본체부(20)에 탑재된 전자밸브부(26) 및 검출부(34)를 구비하며,The solenoid valve part 26 and the detection part 34 mounted in the said main-body part 20 are provided, 상기 압력유체공급포트(36)에 연통하는 통로(48), 상기 진공포트(62)에 연통하는 통로(64), 전자밸브용 배기포트(38)에 연통하는 통로(116)가 각각 실질적으로 평행하게 배설된 것을 특징으로 하는 진공발생용 유니트.The passage 48 communicating with the pressure fluid supply port 36, the passage 64 communicating with the vacuum port 62, and the passage 116 communicating with the exhaust port 38 for the solenoid valve are substantially parallel to each other. Vacuum generating unit, characterized in that the excreted. 제1항에 있어서, 상기 본체부(20)에는 압력유체공급용 전자밸브(22), 진공파괴용 전자밸브(24), 유량조절나사(114), 필터(94) 및 진공압력스위치(96)를 순서대로 직렬로 배설되는 것을 특징으로 하는 진공발생용 유니트.The solenoid valve 22 for pressure fluid supply, the solenoid valve for vacuum breakdown 24, the flow control screw 114, the filter 94, and the vacuum pressure switch 96 are provided in the main body part 20. Vacuum generating unit characterized in that the discharge in series in order. 제1항에 있어서, 상기 압력유체공급포트(36)에 연통되는 통로(48)에 대해 제1 ON/OFF 밸브(42) 및 제2 ON/OFF 밸브(46)가 실질적으로 평행하게 배설되고, 상기 제1 ON/OFF 밸브(42)는 압력유체공급용 전자밸브(22)로부터 공급되는 파이로트압의 작용하에 오프상태에서 온상태로 절환되며, 상기 제2 ON/OFF 밸브(46)는 진공파괴용 전자밸브(24)로부터 공급되는 파이로트압의 작용하에 오프상태에서 온상태로 절환되는 것을 특징으로 하는 진공발생용 유니트.4. The first ON / OFF valve 42 and the second ON / OFF valve 46 are disposed substantially parallel to the passage 48 in communication with the pressure fluid supply port 36. The first on / off valve 42 is switched from the off state to the on state under the action of the pilot pressure supplied from the pressure fluid supply solenoid valve 22, and the second on / off valve 46 is vacuumed. A vacuum generating unit, characterized in that switching from the off state to the on state under the action of the pilot pressure supplied from the solenoid valve 24 for destruction. 제2항에 있어서, 상기 진공압력스위치(96)는 제1 케이싱(102)과 제2 케이싱(104)을 가지며, 상기 제1 케이싱(102)에 형성된 다수개의 돌기부(11)를 제2 케이싱(104)에 형성된 다수개의 체결용 홀부(112)에 각각 삽입함으로써 제1 케이싱(102)과 제2 케이싱(104)이 조립되는 것을 특징으로 하는 진공발생용 유니트.According to claim 2, wherein the vacuum pressure switch 96 has a first casing 102 and the second casing 104, a plurality of protrusions 11 formed in the first casing 102, the second casing ( The first casing 102 and the second casing 104 are assembled by inserting into a plurality of fastening holes 112 formed in the 104, respectively. 제1항에 있어서, 상기 본체부(20)는 각각 편평한 얇은 벽구조로 형성되어 있으며 긴쪽방향을 따라 직렬로 연결된 제1 블록(12), 제2 블록(14), 제3 블록(16) 및 제4 블록(18)으로 구성되며, 상기 제1 블록(12), 상기 제2 블록(14), 상기 제3 블록(16) 및 상기 제4 블록(18)은 각각 실질적으로 동일한 크기의 폭(W)을 갖는 것을 특징으로 하는 진공발생용 유니트.According to claim 1, wherein the main body portion 20 is formed of a flat thin wall structure, respectively, the first block 12, the second block 14, the third block 16 and the first connected in series along the longitudinal direction Four blocks 18, the first block 12, the second block 14, the third block 16 and the fourth block 18 are each substantially the same width (W) Vacuum generating unit having a). 제3항에 있어서, 상기 제1 ON/OFF 밸브(42) 및 상기 제2 ON/OFF 밸브(46)는, 실질적으로 수평방향으로 소정의 거리만큼 변위자재하게 설치된 밸브플러그(72), 상기 밸브플러그(72)를 둘러싸도록 원통상으로 형성되고 상기 챔버(40) 내에 고정된 리테이너(74), 상기 밸브플러그(72)의 일측면에 설치되고 상기 리테이너(74)의 착지부(76)에 착지되어 상기 챔버(40)를 폐쇄하는 제1 링부재(78), 및 상기 밸브플러그(72)의 타측면에 설치되고 상기 리테이너(74)의 내벽면을 따라 섭동하는 제2 링부재(80)를 포함하는 동일한 구성요소로 되어 있는 것을 특징으로 하는 진공발생용 유니트.The valve plug 72 and the valve of claim 3, wherein the first ON / OFF valve 42 and the second ON / OFF valve 46 are disposed to be substantially displaced by a predetermined distance in a substantially horizontal direction. A retainer 74 formed in a cylindrical shape to surround the plug 72 and fixed in the chamber 40, and installed on one side of the valve plug 72 and landing on the landing portion 76 of the retainer 74. The first ring member 78 to close the chamber 40, and the second ring member 80 installed on the other side of the valve plug 72 and perturbing along the inner wall surface of the retainer 74. A vacuum generating unit, characterized in that the same component including.
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CN1136396C (en) 2004-01-28
TW448268B (en) 2001-08-01
KR100387364B1 (en) 2003-06-12
CN1287227A (en) 2001-03-14
DE10042488A1 (en) 2001-05-10
JP3678950B2 (en) 2005-08-03
DE10042488B4 (en) 2007-04-05
US6416295B1 (en) 2002-07-09
JP2001074000A (en) 2001-03-21

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