CN1287227A - Vacuum generating equipment - Google Patents

Vacuum generating equipment Download PDF

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Publication number
CN1287227A
CN1287227A CN00126454A CN00126454A CN1287227A CN 1287227 A CN1287227 A CN 1287227A CN 00126454 A CN00126454 A CN 00126454A CN 00126454 A CN00126454 A CN 00126454A CN 1287227 A CN1287227 A CN 1287227A
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CN
China
Prior art keywords
valve
vacuum
pressure fluid
close
generating equipment
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Granted
Application number
CN00126454A
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Chinese (zh)
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CN1136396C (en
Inventor
永井茂和
伊藤吉治
远山隆史
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SMC Corp
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SMC Corp
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Publication of CN1287227A publication Critical patent/CN1287227A/en
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Publication of CN1136396C publication Critical patent/CN1136396C/en
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Expired - Fee Related legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

A first passage communicating with a compressed air supply port, a sixth passage communicating with a vacuum port, and an eighth passage communicating with an air discharge port for a solenoid-operated valve are arranged in parallel respectively. Further, a pressure fluid-supplying solenoid-operated valve, a vacuum-breaking solenoid-operated valve, a flow rate-adjusting screw, a suction filter, and a vacuum pressure switch are successively arranged in series in a main body section.

Description

Vacuum generating equipment
The present invention relates to and for example to comprise that to suction means air-breathing pad provides the vacuum generating equipment of negative pressure.
So far, vacuum generating equipment has been used as to air-breathing pad provides means for applying negative.This vacuum generating equipment for example generally comprises: the sparger that is used for producing negative pressure; The vacuum port that leads to through pipeline and for example air-breathing pad of suction means; Be provided with the valve system portion of pressure fluid solenoid supply valve and vacuum non-return solenoid valve, these two valves then are used for above-mentioned relatively sparger and vacuum port supply and by pressurized air respectively; And the vacuum switch portion that is used for detecting the negative pressure that the vacuum port place produces.
The above-mentioned operation that relates to the vacuum generating equipment of conventional art schematically is described below.
Pressurized air is supplied with sparger to produce negative pressure through valve system portion.Supply with air-breathing pad by the negative pressure that sparger produces by the pipeline that is connected with vacuum port.The suction function that is produced by air-breathing pad attracts a workpiece.Air-breathing thus pad attracts and the workpiece that keeps is transported to the precalculated position by the displacement effect of mechanism hand.
Then, when supplying with pressurized air (malleation) for air-breathing pad by valve system portion by the passage that leads to vacuum port, this is just thrown off from it by workpiece that air-breathing pad keeps.Like this, this air-breathing pad just disengages from negative pressure state.As a result, workpiece just from air-breathing pad separately, moves to desired location.
Proposed to require entire equipment by making its small-sized and lightweight as far as possible along being basically perpendicular to the wide longitudinally size to the minimizing main part, its reason is like this.For example when a plurality of vacuum generating equipment phase interconnected locks formed complex polyploid, if the wide of main part reduced to size, just the solenoid valve complex polyploid that can obtain to have very small dimensions and light weight can effectively utilize installing space simultaneously.
General objects of the present invention is the vacuum generating equipment that provides such, and it can widely longitudinally realize small-sized and light weight to size in being basically perpendicular to by reducing main part.
Above-mentioned purpose of the present invention and other purpose, characteristics and advantage can obtain better to understand from the description of being done below in conjunction with the accompanying drawing that shows bright best form of implementation of the present invention with way of example.
Fig. 1 shows the schematic longitudinal section of vertical intercepting of bright vacuum generating equipment along an embodiment of the present invention;
Fig. 2 shows and brightly shows to the diagrammatic sketch of observing along arrow A among Fig. 1;
Fig. 3 shows and brightly shows to the diagrammatic sketch of observing along arrow B among Fig. 1;
Fig. 4 shows bright one longitudinal section that amplifies, and illustrates first close/open valve that is used to construct vacuum generating equipment shown in Figure 1;
Fig. 5 shows the bright operation of being carried out when the valve plug of first close/open valve shown in Fig. 4 when right shift provides open state;
Fig. 6 shows a bright exploded perspective illustration, has illustrated first casing and second casing that are used to construct a vacuum pressure switch;
Fig. 7 shows the circuitry of understanding vacuum generating equipment shown in Figure 1.
Vacuum generating equipment 10 comprises: a main part 20, and it has first module part 12, second unit piece 14, the 3rd unit piece 16 and the 4th unit piece 18, and they are series connection mutually longitudinally; Solenoid valve portion 26, it has the solenoid valve 22 and the vacuum non-return solenoid valve 24 of pressure fluid supply, and they are arranged on the upper surface part of main part 20; Sparger portion 32, it is located within the main part 20 and has nozzle 28 and diffuser 30; And detection portion 34, it is installed on the 4th unit piece 18, is used for determining the attraction state of workpiece.Nozzle 28 can with second unit piece, 14 unitary mouldings.Pressure fluid solenoid supply valve 22 is made of identical assembly respectively with vacuum non-return solenoid valve 24, respectively is designed to a kind of common closo.Pressure fluid solenoid supply valve 22 and vacuum non-return solenoid valve 24 are not limited to this common closo.For example also allow to adopt not shown common style of opening solenoid valve, self locking type solenoid valve or be equipped with the solenoid valve of timer.
This first to fourth unit piece 12,14,16,18 has essentially identical wide to size, respectively forms the configuration (referring to Fig. 2 and 3) with flat thin-walled.The pressurized air supply port (pressure fluid supply port) 36 that is used for pressurized air is supplied with sparger portion 32 is formed on first side of first module part 12.The relief opening 38 that is used for solenoid valve is formed on the upper lateral part that next-door neighbour's pressurized air supply port 36 is provided with.Effect according to the supply pilot pressure is located in the chamber 40 of first module part 12 by first close/open valve 42 that the pass closed state transforms to the switch attitude.Effect according to the supply pilot pressure then is located in the chamber 44 of second unit room 14 by second close/open valve that the pass closed state transforms to on-state.
Pressurized air supplying mouth 36 leads to first passage 48, and the basic middle body of this passage and first module part 12 and second unit piece 14 extends a predetermined length simultaneously.Be formed with second channel 50 that leads to pressure fluid solenoid supply valve 22 and the third channel 52 that leads to vacuum non-return solenoid valve 24, this each passage diverges out according to vertical substantially direction from first passage.
Be formed with four-way 54 that leads to first close/open valve 42 and the five-way road 56 that leads to second close/open valve 46, respectively prolong vertical substantially direction and diverge out from first passage 48.Pressurized air is supplied with first close/open valve 42 and second close/open valve 46 through four-way 54 and five-way road 56 respectively.
First leader channel 58 that forms between the pressure fluid solenoid supply valve 22 and first close/open valve 42 is used for giving when pressure fluid solenoid supply valve 22 is opened first close/open valve 42 supply pilot pressures.Second leader channel 60 that forms between the vacuum non-return solenoid valve 24 and second close/open valve 46 is used for giving second close/open valve 46 supply pilot pressures when vacuum non-return solenoid valve 24 is opened.
Formed the 6th passage 64 between diffuser 30 that is used for constructing sparger portion 32 and nozzle 28, it and vacuum port 62 lead to and are arranged essentially parallel to first passage 48 and extend.The negative pressure feeding that produces in injection portion 32 is in the air-breathing pad of the not shown suction means that goes out as connecting by pipeline etc.Diffuser 30 leads to the relief opening 66 that is formed in the 3rd unit piece 16.The pressurized air of supplying with sparger portion 32 effluxes by the silencing apparatus 68 (Fig. 7) that leads to relief opening (exhaust port) 66.
Lead to the 6th passage 64 and the 7th passage of substantially parallel extension is connected on second close/open valve 46.When second close/open valve 46 is in on-state, pressurized air is then supplied with through the 7th passage 70.Like this, just eliminated negative pressure state by pressurized air (malleation) being supplied in the 6th passage 64 that leads to vacuum port 62.
First and second close/ open valve 42,46 has identical member.As shown in Figure 4, be provided with valve plug 72, it can move predetermined distance along horizontal direction; Also be provided with guard housing 74, it is cylindrical configuration, around valve plug 72 and be fixed in the chamber 40.Being positioned at first ring 78 of closing this chamber 40 in the seat portion 76 of guard housing 74 is installed on the outer circumferential face of valve plug 72 on first side.Can be installed on the outer circumferential face of valve plug 72 on second side along 80 of second rings that guard housing 74 internal faces slide.First and second ring 78,80 all is to be made by elastic material such as natural or synthetic rubber.
Extend to the cascade annular slot 82 that 78 formation one of first ring are used for valve plug 72 from the basic central part of valve plug 72.Also be formed with retainer 86, it pastes the end difference 84 that props up guard housing 74, with the displacement amount of control valve plug 72 in dextrad.For guard housing 74 is formed with a hole of leading to cascade annular slot 82.Label 90 shows liner and label 92 finger seal rings.
Valve plug 72 is owing to the pressurized air effect that is supplied in four-way 54 is moved along left-hand shown in Figure 4.First ring 78 is positioned in the seat portion 76 of guard housing 74, so just with chamber 40 sealings.As a result, first close/open valve 42 just is in the pass closed state.On the other hand, under the effect of pressure fluid solenoid supply valve 22, owing to the pilot pressure of supplying with through first leader channel 58 makes valve plug along right shift shown in Figure 5.First ring 78 is separated with seat portion 76, so first close/open valve 42 is in on-state.Under said structure, the just space by 76 in cascade annular slot 82 and first ring 78 and seat portion through four-way 54 compressed and supplied air, by arrow among Fig. 5 show to, direct into sparger portion 32.
So,, the pressurized air of sparger portion 32 is supplied with is just ended when first close/open valve 42 is in the pass closed state.When first close/open valve 42 is in on-state, pressurized air is just supplied with sparger portion 32.
As shown in Figure 1, detection portion 34 comprises an air-breathing filter 94 and a vacuum pressure switch 96 that is used for removing its contained dust from the air of vacuum port 62 suction, the latter includes not shown semiconductor pressure sensor, and it is located at the inboard, is used for obtaining when arriving predetermined threshold values testing signal.Air-breathing filter 94 is connected the 4th unit piece 18 with air tight manner respectively with vacuum pressure switch 96.
Vacuum pressure switch 96 is used for the attraction attitude of affirming workpiece for air-breathing pad supplying negative voltage by the passage 98 that leads to the 6th passage 64, and by not showing that bright semiconductor pressure sensor detects the negative pressure of the pressure fluid of being introduced.Preferably will be used for protecting the filter (not showing bright) of this not shown pressure transducer to be located in the passage 98.The operation equipment of vacuum pressure switch 96 both can be a trimmer type (not shown), also can be a kind of push button type (not shown) that comprises button and following button.
As shown in Figure 6, vacuum pressure switch 96 comprises first and second casing 102,104, and they are interconnected into integral body by securing means 100, also comprise circuit board 106, it is located in the inner space of first and second casing 102,104 formation, also comprises a cover plate 108 in addition.Securing means 100 comprises many projections 110, and they are formed on the side wall surface of first casing 102 in this adjacent area, space, also comprises some fastener holes 112, and they are formed on the side wall surface of second casing 104 and allow projection 110 insert wherein.
Among Fig. 1, label 114 refers to the flow rate adjustment screws, and the flow rate that is used for regulating pressure fluid to be ending vacuum, and when second close/open valve 46 is in on-state, this pressure fluid flows through the 7th passage.Label 116 refers to the 8th passage, is used for being communicated with respectively relief opening 38 and the pressure fluid solenoid supply valve 22 and the electric valve 24 of vacuum non-return of solenoid valve.This 8th passage 116 is arranged to basic parallel with first passage 48.
Vacuum generating equipment 10 according to this form of implementation of the present invention is got aforementioned structure basically, and its operation, function and effect is described according to circuit system figure shown in Figure 7 below.Assumed stress fluid solenoid supply valve 22 with vacuum non-return solenoid valve 24 in initial state time-division other places in closed condition.
Introduce first passages 48 by the compressed air supply mouth 36 of pressurized air that bright source of compressed air not shown in the figures is supplied.Supply with the chamber 40 of first close/open valve 42 that leads to first passage 48.Valve plug 72 is in this pressurized air effect lower edge left-hand displacement shown in Figure 4.This first close/open valve 42 is in closed condition.
In these cases, pressure fluid solenoid valve 22 is in opening state according to the signal of opening of a bright controller output not shown in the figures.In this simultaneously, vacuum non-return solenoid valve 24 still is in the pass closed state.When pressure fluid solenoid supply valve 22 was in on-state, pilot pressure was just supplied with first close/open valve 42 via first leader channel 58.Valve plug 72 moves right under this pilot pressure effect, thereby first close/open valve 42 is in on-state, and the pressurized air of at this moment introducing first passage 48 is just supplied with sparger portion 32 by first close/open valve 42.
In sparger portion 32, pressurized air sprays to diffuser 30 and produces negative pressure from the nozzle bore of nozzle 28.This negative pressure is supplied with bright air-breathing pad not shown in the figures through the 6th passage 64 and the pipeline that is connected vacuum port 62.
By operating not shown mechanical arm above-mentioned air-breathing pad is contacted with workpiece.When this air-breathing pad attracted workpiece because of the effect of negative pressure, negative pressure further strengthened.This negative pressure is detected by the not shown semiconductor pressure sensor of vacuum pressure switch 96.Send not shown controller to by the detected attraction affirming signal of semiconductor pressure sensor.After this controller receives the attraction affirming signal, just can confirm that workpiece is attracted reliably by air-breathing pad.
Illustrate that again the negative pressure of eliminating air-breathing pad after workpiece moves intended distance is to throw off the process of workpiece.
Not shown controller gives pressure fluid solenoid supply valve 22 with shutdown signal.So this solenoid valve 22 is in the pass closed state, first close/open valve 42 is in the pass closed state simultaneously.End to give sparger portion 32 to supply with pressurized air, end simultaneously to give air-breathing pad supplying negative voltage by vacuum port 62.
On the other hand, not shown controller sends for vacuum non-return solenoid valve 24 and opens signal, makes this solenoid valve 24 be in on-state, and at this moment, pilot pressure is just supplied with second close/open valve 46 through second leader channel 60.Under this pilot pressure effect, valve plug 72 moves to right, and second close/open valve 46 is in on-state.When second close/open valve 46 is in on-state, the pressurized air of introducing first passage 48 is supplied with vacuum ports 62 through second channel 70 and the 6th passage 64 more just by second close/open valve 46.As a result, just supply with air-breathing pad by the pressurized air (malleation) of pressurized air supply port 36 supplies through vacuum port 62.This has just eliminated the attraction attitude that air-breathing pad carries out with respect to workpiece.
Throw off from attracting pad when workpiece, state just becomes the atmospheric pressure attitude from the negative pressure attitude.This atmospheric pressure is detected by not shown semiconductor pressure sensor.This semiconductor pressure sensor sends workpiece disengagement signal for not shown controller.When controller receives workpiece disengagement signal, just can confirm that workpiece is from air-breathing pad disengagement.So just can guarantee that workpiece throws off reliably from air-breathing pad.
In above-mentioned form of implementation of the present invention, the first passage 48 that leads to pressurized air supply port 36, the 6th passage 64 that leads to vacuum port 62 and the 8th passage 116 that leads to the relief opening 38 of solenoid valve, they are arranged to be parallel to each other substantially.In addition, being located at first close/open valve 42 on main part 20 downsides and second close/open valve 46 that is located on its upside respectively also is arranged to substantially parallel.Have, in an embodiment of the present invention, it is the top of continuously being located at main part 20 by the serial connection mode mutually respectively that pressure fluid solenoid supply valve 22, vacuum are ended solenoid valve 24, flow adjustment screw 114, air-breathing filter 94 and vacuum pressure switch 96 again.
The above-mentioned layout of this form of implementation of the present invention can axial widely upwards reduce the size of main part 20 and realize small-sized and lightweight being basically perpendicular to.Thereby can effectively utilize the space that this vacuum generating equipment 10 is installed.
In addition, the securing means that this form of implementation of the present invention is formed by a collection of projection 110 and fastener hole 112 integrally is connected first casing 102 and second casing 104 of vacuum pressure switch, helps carrying out easily assembling operation.
Obviously, can form compound polyploid to this embodiment's of foundation the present invention many independent vacuum generating equipment 10 phase interconnected locks.

Claims (6)

1. vacuum generating equipment, this equipment comprises:
Main part (20), the relief opening (66) that it is provided with the pressure fluid supply port (36) that is connected with the pressure fluid supply source, the vacuum port (62) that is connected with suction means and is used for air is effluxed is from above-mentioned pressure fluid supplying mouth (36) supply pressure fluid;
Sparger portion (32), it produces negative pressure under the effect of the above-mentioned pressure fluid that described pressure fluid supply port (36) is supplied with; With
Be stated from solenoid valve portion (26) and detection portion (34) in the aforementioned body portion (20), it is characterized in that:
Substantially parallel ground is arranged passage (64) that the passage (48) that leads to described pressure fluid supplying mouth (36) is being set, is leading to described vacuum port (62) and the passage (116) that leads to relief opening (38) with solenoid valve respectively.
2. the described vacuum generating equipment of claim 1 is characterized in that: go up with the polyphone form at described main part (20) and be provided with pressure fluid solenoid supply valve (22), vacuum termination solenoid valve (24), flow rate adjustment screw (114), filter (94) and vacuum pressure switch (96) mutually continuously.
3. the described vacuum generating equipment of claim 1, it is characterized in that: be arranged essentially parallel to the above-mentioned passage (48) that leads to described pressure fluid supply port (36) and be provided with first close/open valve (42) and second close/open valve (46), this first close/open valve (42) transforms to opening state according to the effect of pressure fluid solenoid supply valve (22) pilot pressure that supplies from closed condition, and described second close/open valve (46) then transforms to opening state according to the effect of vacuum termination solenoid valve (24) pilot pressure that supplies from closed condition.
4. the described vacuum generating equipment of claim 2, it is characterized in that: described vacuum pressure switch (96) comprises first casing (102) and second casing (104), and these two casings insert second casing (104) respectively and go up in the many fastener holes (112) that form and make up mutually by first casing (102) being gone up the many projections (110) that form.
5. the described vacuum generating equipment of claim 1, it is characterized in that: described main part (20) comprises the first, second, third and the 4th unit piece (12,14,16,18), they are longitudinally connected, each unit piece forms has flat thin-walled configuration, and the described first, second, third and the 4th unit piece (12,14,16,18) formation respectively has the wide to size (W) of basically identical.
6. the described vacuum generating equipment of claim 3, it is characterized in that: described first close/open valve (42) has consistent member with second close/open valve (46), comprises the valve plug (72) of being arranged to move along horizontal direction intended distance, form and have around the cylindrical configuration of this valve plug (72) and be fixed in guard housing (74) in the chamber (40), be located at that this valve plug (72) first is distolateral to be gone up and be positioned in the seat portion (76) of above-mentioned guard housing (74) and first ring (78) of sealing above-mentioned chamber (40), and second distolateral second ring part (78) of going up and can sliding along described guard housing (74) internal surface of being located at this valve plug (72).
CNB001264540A 1999-09-03 2000-09-01 Vacuum generating equipment Expired - Fee Related CN1136396C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP250643/1999 1999-09-03
JP25064399A JP3678950B2 (en) 1999-09-03 1999-09-03 Vacuum generation unit

Publications (2)

Publication Number Publication Date
CN1287227A true CN1287227A (en) 2001-03-14
CN1136396C CN1136396C (en) 2004-01-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB001264540A Expired - Fee Related CN1136396C (en) 1999-09-03 2000-09-01 Vacuum generating equipment

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US (1) US6416295B1 (en)
JP (1) JP3678950B2 (en)
KR (1) KR100387364B1 (en)
CN (1) CN1136396C (en)
DE (1) DE10042488B4 (en)
TW (1) TW448268B (en)

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CN1136396C (en) 2004-01-28
TW448268B (en) 2001-08-01
KR100387364B1 (en) 2003-06-12
DE10042488A1 (en) 2001-05-10
JP3678950B2 (en) 2005-08-03
DE10042488B4 (en) 2007-04-05
US6416295B1 (en) 2002-07-09
KR20010050231A (en) 2001-06-15
JP2001074000A (en) 2001-03-21

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