JPH0868400A - Negative pressure generating device - Google Patents

Abstract

PURPOSE: To prevent entrance of high pressure air to the intake chamber side and to prevent the occurrence of negative pressure rupture and entrance of high pressure air to the intake chamber side by a method wherein a seal moving body is pressed in the direction of a seal port by a seal body during negative pressure rupture and a solenoid valve for negative pressure rupture to effect negative pressure rupture only by a preset high pressure air amount is operated. CONSTITUTION: A seal body 40 comprises a seal body 41 movable in the direction of a seal port 12; a seal moving body 42 movable in the direction of the seal port 12 from the seal body 41; and a seal part 43 fixed to the tip of the seal moving body 42 and closing the seal port 12. The seal body 41 is formed by effecting energization in a direction opposite to the seal port 12, and the seal moving body 42 is formed in such a manner to effect energization in the direction of the seal port 12. During negative pressure rupture, by moving the seal body 41 in the direction of the seal port 12, the seal moving body 42 is pressed against the seal port 12 by means of the seal body 41 and high pressure air is forced to flow in a negative pressure passage 11 from a rupture flow passage 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a negative pressure generating device, and more specifically, it is easy to maintain a negative pressure state once generated, and it is possible to ensure negative pressure destruction for breaking the negative pressure state. The present invention relates to a negative pressure generating device that can be used for.

[0002]

2. Description of the Related Art Conventionally, a negative pressure suction device using a suction pad in communication with a negative pressure generation device for sucking and holding a work or moving it has been put to practical use. Such a negative pressure suction device is generally sufficient if it can suck a work. However, among the negative pressure adsorption devices, there is also a negative pressure adsorption device used in factory assembly lines or industrial robots. In such a negative pressure suction device, since the work is supplied at regular intervals, it is necessary to securely suck the work, and it is necessary to release the suction of the suctioned work within a predetermined time. Further, since high pressure air is required to form the negative pressure, it is also desired that the negative pressure once generated can be maintained without supplying the high pressure air in order to save the generation of the high pressure air.

Therefore, conventionally, there has been provided a negative pressure generating device capable of easily maintaining the negative pressure and breaking the negative pressure. As such a negative pressure generator, for example, there is an invention described in Japanese Patent Application Laid-Open No. 58-99393 filed by the same applicant. According to the present invention, high-pressure air is ejected from the nozzle hole portion into the diffuser hole portion through the high-pressure flow passage, so that the air in the intake chamber provided between the nozzle hole portion and the diffuser hole portion is sucked into the intake chamber. A negative pressure is generated in the negative pressure flow passage provided in communication with the negative pressure flow passage, and a sealing valve is provided between the intake chamber and the negative pressure flow passage. The stop port is closed so that the negative pressure can be maintained. Further, the negative pressure generated in the negative pressure flow passage is broken toward the suction chamber side from the sealing valve in the negative pressure flow passage. The present invention relates to a negative pressure generating device configured to destroy negative pressure by injecting high pressure air through the.

Here, the sealing valve is pressed from the intake chamber toward the negative pressure flow passage by a spring, and is formed so as to close the sealing port in a normal state. In such a conventional negative pressure generating device, when high-pressure air is blown into the high-pressure flow passage, the high-pressure air sucks the air in the intake chamber and communicates with the intake chamber between the nozzle hole and the diffuser. Negative pressure is generated in the provided negative pressure flow passage.

At this time, the sealing valve is sucked and moved in the negative pressure direction toward the intake chamber against the elastic force of the spring, so that the sealing port is released and communicates with the intake chamber. The inside of the negative pressure flow passage thus provided is made negative pressure. Therefore, when the suction pad is made to communicate with this negative pressure flow passage, the inside of the suction pad is in a negative pressure state, and the work can be sucked onto the suction pad.

When the high pressure air is not blown into the high pressure flow passage after the work is adsorbed in this way, a negative pressure is not generated in the intake chamber, so that the intake chamber and the negative pressure flow passage have the same pressure. On the contrary, since the outside air enters the intake chamber from the day fuser unit, the pressure in the intake chamber becomes higher than that in the negative pressure passage. At this time, the sealing valve closes the sealing port by the elastic force of the spring, and the suction chamber and the negative pressure flow passage do not communicate with each other. Is maintained, and the work remains adsorbed.

While maintaining the negative pressure state in this way,
In order to perform negative pressure destruction, high pressure air is allowed to flow into the negative pressure flow passage on the side opposite to the intake chamber from the sealing port by way of the destruction flow passage, thereby adsorbing to the negative pressure flow passage. The negative pressure state in the pad is released, and the work is released from the suction pad. When performing this negative pressure destruction, the amount of high pressure air to be introduced varies depending on the volume up to the adsorption pad including the negative pressure flow passage, the negative pressure state given in advance, the weight of the work, and the like.

In such a conventional negative pressure generating device, since the negative pressure state is maintained by the sealing valve pressed against the sealing port by the spring, the negative pressure state can be maintained very easily. It is a thing. However, since this sealing valve is moved against the elastic force of the spring in the direction of the negative pressure in the intake chamber, the spring cannot be made too strong. It was.

Therefore, when high pressure air is made to flow into the negative pressure flow passage on the side opposite to the intake chamber with respect to the sealing port in order to perform negative pressure breakdown, the sealing valve is covered by this high pressure air and the sealing port is opened. Sometimes it opened. If this happens, all of the high-pressure air for performing negative pressure destruction cannot be used for negative pressure destruction. Furthermore, the inflow amount of the high-pressure air that is caused to flow due to the negative pressure breakdown at this time differs depending on various conditions.

On the other hand, in such a negative pressure suction device, as for the negative pressure suction device used in a factory assembly line or an industrial robot, the work is supplied at regular intervals, so In addition to being able to reliably adsorb, it is necessary to release the adsorbed work within a predetermined time. However, as in the above-mentioned conventional example, high-pressure air is introduced into the negative pressure flow passage on the side opposite to the suction port to cause negative pressure breakdown, and the sealing port is pushed by the elastic force of the spring. If it is blocked by the sealing valve that is present, part of the high pressure air that flows in will flow to the intake chamber side,
Negative pressure breakdown could not be performed at the preset timing.

[0011]

Claim 1 of the present invention
Although the invention described uses a sealing valve for maintaining negative pressure as in the conventional case, the sealing valve is movable in the direction of the sealing port, and the sealing body is movable from the sealing body in the direction of the sealing port. It is composed of a movable sealing moving body and a seal part that is fixed to the tip of the sealing moving body and closes the sealing opening. When the negative pressure is broken, the sealing moving body presses the sealing moving body toward the sealing opening. Accordingly, it is an object of the present invention to provide a negative pressure generating device that does not invade high pressure air into the intake chamber side and can perform negative pressure breakdown only by a preset amount of high pressure air.

According to a second aspect of the present invention, in addition to the object of the first aspect of the present invention, the pressing of the sealing moving body toward the sealing port by the sealing body is performed by a destructive electromagnetic force for negative pressure destruction. A valve is used to allow high-pressure air to flow into the sealing body on the side opposite to the sealing port side, and the sealing body is formed so as to be movable toward the sealing port side. It is an object of the present invention to provide a negative pressure generating device which is operated to prevent negative pressure and prevent high pressure air from entering the intake chamber side.

[0013]

In order to achieve the above-mentioned object, in the invention according to claim 1 of the present invention, high pressure air is jetted from a nozzle hole portion into a day fuser hole portion through a high pressure flow passage. As a result, the air in the intake chamber provided between the nozzle hole portion and the day fuser hole portion is sucked, a negative pressure is generated in the negative pressure flow passage provided in communication with the intake chamber, and the negative pressure is generated between the intake chamber and the negative pressure passage. A sealing valve is provided between the pressure passage and
By operating this sealing valve, the sealing port of the negative pressure flow passage is closed so as to maintain the negative pressure. Further, the negative pressure generated in the negative pressure flow passage is converted into the negative pressure flow passage. In a negative pressure generating device configured to cause negative pressure breakdown by injecting high pressure air to a side opposite to the suction valve from the sealing valve through a breaking flow passage, the sealing valve is movable in the direction of the sealing port. A sealing body, a sealing moving body that is movable from the sealing body in the direction of the sealing opening, and a seal part that is fixed to the tip of the sealing moving body and closes the sealing opening. , The sealing body is
The sealing moving body is formed by urging in the direction opposite to the sealing port, and the sealing moving body is formed by urging in the direction toward the sealing port. By moving it, the intake chamber and the negative pressure flow passage are connected, and when maintaining negative pressure,
By closing the sealing port with the seal part by urging and moving the sealing moving body toward the sealing port side, the intake chamber and the negative pressure flow passage are closed, and when the negative pressure is broken, the state when maintaining the negative pressure is maintained. ,
By moving the sealing body toward the sealing port, the sealing body presses the sealing moving body against the sealing port, and the high pressure air is allowed to flow into the negative pressure channel from the breaking flow channel. Is characterized by.

According to a second aspect of the invention, in addition to the structure of the first aspect of the invention, a breaking electromagnetic valve for opening and closing both flow passages is provided between the high pressure flow passage and the breakage flow passage, and The area on the side opposite to the sealing opening of the sealing body is formed to be larger than the area of the sealing opening, and by the operation of the breaking solenoid valve,
It is characterized in that the high pressure air is caused to flow into the negative pressure flow passage and at the same time as to flow into the side opposite to the sealing port of the sealing body so that the sealing body can be moved to the sealing port side.

[0015]

According to the first aspect of the present invention, when high-pressure air is blown into the high-pressure flow passage, the high-pressure air sucks the air in the intake chamber and communicates with the intake chamber between the nozzle hole and the diffuser. Negative pressure is generated in the provided negative pressure flow passage. At this time, the sealing body of the sealing valve is in a state of being urged in the direction opposite to the sealing port. Further, although the sealing moving body is biased toward the sealing port, it is sucked and moved toward the suction chamber in the negative pressure state, so that the sealing port is released and communicates with the suction chamber. The inside of the provided negative pressure flow passage is made negative pressure.

Therefore, when the suction pad is made to communicate with the negative pressure passage, the inside of the suction pad is in a negative pressure state and the work can be sucked onto the suction pad. After adsorbing the work piece in this way, if the blowing of the high-pressure air into the high-pressure flow passage is stopped, no negative pressure will be generated in the intake chamber, so that the intake chamber and the negative-pressure flow passage will have the same pressure, or rather On the contrary, since the outside air enters the intake chamber from the day fuser portion, the pressure in the intake chamber becomes higher than that in the negative pressure flow passage.

At this time, the sealing body of the sealing valve is
It remains in a state of being urged in the direction opposite to the sealing port. Moreover, since the sealing moving body is biased toward the sealing port, the sealing portion at the tip closes the sealing port. Therefore, the suction chamber and the negative pressure passage are not communicated with each other, so that the suction pad communicating with the negative pressure passage maintains the negative pressure state and remains in the state of adsorbing the workpiece.

When the negative pressure state is maintained in this way,
In order to perform negative pressure breakdown, high-pressure air is allowed to flow into the negative pressure flow passage on the side of the air intake chamber opposite to the sealing port while moving the sealing body toward the sealing port through the breaking flow channel. The sealing body presses the sealing moving body against the sealing port. Therefore, since the seal portion at the tip of the sealing moving body closes the sealing opening and the sealing moving body is pressed against the sealing opening by the sealing body, the high pressure air moves toward the intake chamber side due to the movement of the sealing body. Without releasing the work, the negative pressure state in the suction pad communicating with the negative pressure passage is released, and the work is released from the suction pad.

Here, the movement of the sealing main body can be performed by an electromagnetic valve or the like, but as described in claim 2, it is performed by the operation of the destruction electromagnetic valve for causing negative pressure destruction. You can also When formed in this way, the operation of the solenoid valve for breaking the negative pressure can prevent the breaking of the negative pressure and prevent the high pressure air from entering the intake chamber side.

[0020]

Embodiments of the present invention will be described below with reference to the drawings. 1, FIG. 2 and FIG. 3 are all cross sections showing a negative pressure generating device according to the present invention. FIG. 1 is a cross sectional view showing a positional relationship when negative pressure is generated, and FIG. FIG. 3 is a cross-sectional view showing the positional relationship between the two, and FIG.

First, the overall structure will be described with reference to FIG. In this negative pressure generator, high pressure air is supplied to the high pressure flow passage 1
The air in the intake chamber 30 provided between the nozzle hole 20 and the day fuser hole 21 is sucked into the day diffuser hole 21 through the nozzle hole 20 to communicate with the intake chamber 30. Negative pressure is generated in the negative pressure flow passage 11 provided in the same manner, and the intake chamber 30 and the negative pressure flow passage 1 are provided.
1, a sealing valve 40 is provided between the inside and the inside, and by operating this sealing valve 40, the sealing port 12 of the negative pressure flow passage 11 is closed so that a negative pressure can be maintained. The negative pressure generated in the passage 11 is transferred to the sealing valve 40 in the negative pressure passage 11.
In this configuration, high pressure air is introduced to the side opposite to the intake chamber 30 through the destruction flow passage 13 to cause negative pressure destruction.

More specifically, the high pressure flow passage 10 starts from a high pressure air inlet 50 provided on one side of the negative pressure generator. The high-pressure flow passage 10 communicates with the nozzle hole portion 20 via the destruction master valve 60 and the generation master valve 61. A diffuser hole portion 21 faces the nozzle hole portion 20 with a slight gap, and a silencer 22 is attached to the outside of the diffuser hole portion 21. In addition,
The gap between the nozzle hole portion 20 and the day fuser hole portion 21 serves as an intake chamber 30.

A filter 52 is provided between the sealing valve 40 and the suction port 51 at the end of the negative pressure flow passage 11, and a vacuum switch 53 is provided near the suction port 51. is there. Here, an operation branch passage 14 is provided from the high-pressure flow passage 10 between the high-pressure air inlet 50 and the breaking master valve 60, and a solenoid valve 54 for generating a negative pressure and a negative-pressure breaking are provided. It is connected to the breaking solenoid valve 55 for performing.

Further, the breaking master valve 60 sends the high pressure air in the high pressure flow passage 10 to the break flow passage 13 by opening and closing the break opening 15 between the high pressure flow passage 10 and the break flow passage 13. The breaking master valve 60 is connected to the breaking electromagnetic valve 55 side and the other side to the breaking flow passage 13. The master valve for breaking 60 will be described in more detail. The master valve for breaking 60 is movable in a direction perpendicular to the flow direction of the high-pressure flow passage 10 and has an area on the side of the breaking electromagnetic valve 55. The area in contact with the high pressure air is larger than the area on the high pressure flow passage 10 side. The anti-destruction solenoid valve 55 side of the destruction master valve 60 is
The breaking port 15 reaches the breaking flow passage 13 side, and the breaking port 15 is opened and closed from the breaking flow passage 13 side. Further, on the side of the breaking flow passage 13 of the breaking master valve 60, a breaking valve spring 62 for urging the entire breaking master valve 60 toward the breaking electromagnetic valve 55 is provided.

When the breaking master valve 60 is located on the breaking electromagnetic valve 55 side, the breaking master valve 60 closes the breaking port 15 and the high pressure air in the high pressure flow passage 10 flows into the breaking flow passage 13. To prevent this, and when it is located on the anti-destruction solenoid valve 55 side,
The opening of the breakage port 15 allows high pressure air to flow into the breakage flow passage 13 due to the pressure on the high pressure flow passage 10 side. And such control is performed by the destruction electromagnetic valve 55.

Specifically, when the breaking electromagnetic valve 55 is OFF, the high pressure air in the operation branch passage 14 is blocked so that it does not reach the breaking master valve 60 direction. Therefore, the breaking master valve 60 is pushed to the breaking electromagnetic valve 55 side by the breaking valve spring 62 and the high pressure air in the high pressure flow passage 10, so that the breaking port 15 is blocked, and as a result, the breaking master valve 60 in the high pressure flow passage 10 is closed. The high pressure air is prevented from flowing into the breaking flow passage 13.

On the contrary, when the breaking solenoid valve 55 is ON, the master valve 6 for breaking the high pressure air in the operation branch passage 14 is used.
It is sent to the back of 0. Then, since the area of the breaking master valve 60 on the side of the breaking solenoid valve 55 is larger than the area on the side of the high pressure flow passage 10, the breaking master valve 60 moves to the side of the anti-breakdown solenoid valve 55 by the pressure of the high pressure air. Will be done. Then, the breaking port 15 opens as the breaking master valve 60 moves, and the high-pressure air in the high-pressure flow passage 10 flows into the breaking flow passage 13.

A breakage flow rate adjusting knob 63 is provided in the breakage flow passage 13 ahead of the breakage port 15 so that the amount of high-pressure air flowing into the breakage flow passage 13 can be adjusted. On the other hand, the generation master valve 61 causes the high pressure air in the high pressure flow passage 10 to flow through the nozzle hole 20 by opening and closing the generation port 16 between the high pressure flow passage 10 and the nozzle hole 20.
In this case, one of the generating master valves 61 is communicated with the generating solenoid valve 54 side, and the other side is communicated with the nozzle hole 20 side. The generation master valve 61 will be described in more detail. The generation master valve 61 is movable in a direction coinciding with the flow direction of the high-pressure flow passage 10, and the generation solenoid valve 54.
The area on the side is larger than the area on the side of the high pressure flow passage 10 and is in contact with the high pressure air. Further, the anti-generation solenoid valve 54 side of this generation master valve 61 reaches the nozzle hole portion 20 side of the generation port 16, and this generation port 16
Is opened and closed from the nozzle hole portion 20 side.

When the generation master valve 61 is located on the generation solenoid valve 54 side, the generation master valve 61 closes the generation port 16 and the high pressure air in the high pressure flow passage 10 flows into the nozzle hole 20. To prevent this, and conversely when it is located on the side of the anti-generation solenoid valve 54,
When the generation port 16 is opened, the high pressure air is made to flow into the nozzle hole portion 20 by the pressure on the high pressure flow passage 10 side. Then, such control is performed by the generating solenoid valve 54.

Specifically, when the generation solenoid valve 54 is ON, the high pressure air in the operation branch passage 14 is sent to the rear surface of the generation master valve 61. Then, in the generation master valve 61, the area of the generation solenoid valve 54 side is larger than the area of the high pressure flow passage 10 side, so that the generation master valve 61 moves to the anti-generation solenoid valve 54 side by the pressure of the high pressure air. Will be done. Then this master valve for generation 6
With the movement of 1, the generation port 16 opens, and the high pressure air in the high pressure flow passage 10 flows into the nozzle hole portion 20.

On the contrary, when the generating solenoid valve 54 is OFF,
The high pressure air in the operation branch passage 14 is blocked so that it does not reach the generation master valve 61. Therefore, since the generation master valve 61 is pushed toward the generation solenoid valve 54 side by the high pressure air in the high pressure flow passage 10,
The generation port 16 is blocked so that the high pressure air in the high pressure flow passage 10 does not flow into the nozzle hole 20.

Next, the sealing valve 40 used in the present invention will be described. Here, the sealing valve 40 includes a sealing body 41 movable in the direction of the sealing port 12, a sealing moving body 42 movable in the direction of the sealing port 12 from the sealing body 41, and a sealing body. It is formed of a seal portion 43 fixed to the tip of the moving body 42 and closing the sealing port 12.

Then, the sealing body 41 is formed by urging the body spring 44 in the direction opposite to the sealing port 12. Further, a sealing back space 45 is formed on the side opposite to the sealing port 12 of the sealing body 41, and the sealing back space 45 is communicated with the breaking electromagnetic valve 55 by the pressing flow passage 17. Further, the area of the sealing back space 45, which is the area on the side opposite to the sealing port 12 of the sealing body 41, is formed to be larger than the area of the sealing port 12. Although the operation branch passage 14 and the pressing flow passage 17 are closed when the breaking electromagnetic valve 55 is OFF, the breaking master valve 60 moves as described above when the breaking electromagnetic valve 55 is ON. As a result, the high pressure flow passage 10 communicates with the destruction flow passage 13, and the operation branch passage 14 and the pressing flow passage 17 communicate with each other. Therefore, the high-pressure air in the high-pressure flow passage 10 reaches the sealing back space 45 via the operation branch passage 14 and the pressing flow passage 17, and the pressure of this high-pressure air causes the sealing main body 41 to repel the main body spring 44. It is pushed against the sealing port 12 side against the force.

On the other hand, the sealing moving body 42 is formed by urging the moving body spring 46 toward the sealing port 12. Next, the operation of the negative pressure generator according to the present invention will be described. First, a description will be given from a state in which both the breaking electromagnetic valve 55 and the generating electromagnetic valve 54 are OFF, that is, a state before the operation. Since this state is the same as the sectional view showing the positional relationship when maintaining the negative pressure shown in FIG. 2, description will be given based on this figure.

First, in this state, the high-pressure air inlet 50 is connected to a high-pressure air source (not shown), and the suction port 51 is connected to a suction pad (not shown). Then, from this state, high pressure air is supplied to the high pressure air inlet 50. Then, the high-pressure air reaches the destruction solenoid valve 55 and the generation solenoid valve 54 from the high-pressure flow passage 10 through the operation branch passage 14. Further, here, the breaking master valve 60 is pushed toward the breaking electromagnetic valve 55 by the high pressure air in the high pressure flow passage 10, and the breaking master valve 60 closes the breaking port 15. Furthermore, the generation master valve 61 is also pushed toward the generation solenoid valve 54, and the generation port 16 is blocked by the generation master valve 61. In the sealing valve 40, the sealing body 41 is located on the side opposite to the sealing port 12 side by the elastic force of the body spring 44, and the sealing moving body 42 is closed by the elastic force of the moving body spring 46. It is located in.

Therefore, in this state, the high-pressure air exists only in the high-pressure flow passage 10 and the operation branch passage 14. Further, the sealing valve 40 closes the sealing port 12 with the sealing portion 43 at the tip of the sealing moving body 42. Next, from this state, as shown in FIG.
Turn on only 4

Then, the operation branch passage 14 communicating with the high pressure flow passage 10 and the generation solenoid valve 54 side of the generation master valve 61 communicate with each other, and the high pressure flow passage 10 side of the generation master valve 61 and the generation solenoid valve. The pressure is the same on the 54 side. Then, in the generation master valve 61, the area of the generation solenoid valve 54 side is larger than the area of the high pressure flow passage 10 side, so that the generation master valve 61 moves to the anti-generation solenoid valve 54 side by the pressure of the high pressure air. Will be done. Then, the generation port 16 opens with the movement of the generation master valve 61, and the high pressure air in the high pressure flow passage 10 flows into the nozzle hole portion 20.

The high-pressure air flowing into the nozzle hole portion 20 then reaches the diffuser hole portion 21 and is eventually discharged into the air through the silencer 22. However, between the nozzle hole 20 and the day fuser hole 21, the intake chamber 30
The air is sucked to bring the intake chamber 30 into a negative pressure. When the intake chamber 30 has a negative pressure in this manner, a pressure difference is generated between the intake chamber 30 and the negative pressure flow passage 11, and the sealing moving body 42 eventually resists the elastic force of the moving body spring 46. It is sucked toward the anti-sealing port 12 and the sealing port 12 is released.

As a result, even the negative pressure flow passage 11 is in a negative pressure state, and the suction pad connected to the suction port 51 of the negative pressure flow passage 11 is in a negative pressure state so that the workpiece can be sucked. . After adsorbing the work in this way, the generation solenoid valve 54 is turned off again. Then, the state becomes as shown in FIG.

That is, when the generating solenoid valve 54 is turned off, the high pressure air reaching the generating solenoid valve 54 from the high pressure flow passage 10 through the operation branch passage 14 reaches the generating solenoid valve 54 of the generating master valve 61. Will not be reached. Then, the master valve 61 for generation is
Solenoid valve 5 generated by the pressure of high pressure air in high pressure flow passage 10
It will be pushed to the 4 side. Therefore, the generation port 16 is blocked by the generation master valve 61, and the high pressure air does not reach the nozzle hole portion 20.

Further, at this time, the sealing valve 40 is connected to the intake chamber 30.
Since no negative pressure is generated at the inside of the intake chamber 30 and the negative pressure flow passage 1
The pressure inside 1 is the same, or conversely, the outside air enters the intake chamber 30 through the diffuser hole portion 21, so that the inside of the intake chamber 30 has a higher pressure than the inside of the negative pressure passage 11. At this time, the sealing body 41 of the sealing valve 40 is
It remains in a state of being urged in the direction opposite to the sealing port 12 by the body spring 44. Further, the sealing moving body 42 is
Since the moving body spring 46 biases the sealing port 12 toward the sealing port 12,
Will be blocked. Therefore, the intake chamber 30 and the negative pressure flow passage 11 do not communicate with each other, so that the negative pressure flow passage 1
The suction pad communicating with No. 1 maintains a negative pressure state, and remains in a state of adsorbing the work.

Therefore, in this state, high pressure air is present in the high pressure flow passage 10 and the operation branch passage 14. Further, since the sealing valve 40 closes the sealing port 12 with the sealing portion 43 at the tip of the sealing moving body 42, the negative pressure air flows from the sealing port 12 through the negative pressure flow passage 11 to the adsorption pad. Will exist. In this way, once the work is sucked under a negative pressure and then the work can be sucked and held while maintaining the negative pressure state, the amount of high pressure air consumed can be saved.

The vacuum switch 53 performs such suction and maintenance of the negative pressure. That is, when the vacuum switch 53 confirms that a certain degree of vacuum has been reached after suctioning the work under negative pressure, the solenoid valve 54 is turned off to maintain the negative pressure and save the amount of high-pressure air. It is a thing. In addition, the solenoid valve 54 thus generated is set to O
When the vacuum switch 53 detects that the vacuum level has become lower than the preset vacuum level due to the negative pressure air being gradually released while the negative pressure is maintained at FF, the solenoid valve 54 is turned on again. Then, negative pressure is generated.

When the negative pressure state is maintained in this way,
In order to perform the negative pressure destruction, as shown in FIG. 3, the destruction electromagnetic valve 55 is left with the generation electromagnetic valve 54 in the OFF state.
Will be turned on. Then, the high-pressure air reaching the operation branch passage 14 moves the breaking master valve 60 and the sealing valve 40 in accordance with the ON operation of the breaking electromagnetic valve 55.

That is, the breaking master valve 60 is moved so that the high pressure air in the operation branch passage 14 is sent to the rear surface of the breaking master valve 60 when the breaking electromagnetic valve 55 is turned on. Then, since the area of the breaking master valve 60 on the side of the breaking solenoid valve 55 is larger than the area on the side of the high pressure flow passage 10, the breaking master valve 60 moves to the side of the anti-breakdown solenoid valve 55 by the pressure of the high pressure air. Will be done. Then, the breaking port 15 opens with the movement of the breaking master valve 60, and the high-pressure air in the high-pressure flow passage 10 flows into the breaking flow passage 13.

The amount of high-pressure air flowing into the breaking flow passage 13 can be adjusted by the breaking flow rate adjusting knob 63 provided in the breaking flow passage 13 ahead of the breaking port 15. At the same time as the movement of the breaking master valve 60, the operation branch passage 14 and the pressurizing passage 17 communicate with each other when the breaking electromagnetic valve 55 is turned on. Therefore, the high-pressure air in the high-pressure flow passage 10 reaches the sealing back space 45 through the operation branch passage 14 and the pressing flow passage 17, and the pressure of the high-pressure air causes the sealing main body 41.
Against the elastic force of the body spring 44,
It will be pushed to the side.

Then, the movement of the sealing body 41 toward the sealing port 12 causes the sealing body 41 to press the sealing moving body 42 against the sealing port 12. Therefore, the sealing moving body 42 is pressed against the sealing opening 12 by the sealing body 41 so that the sealing portion 43 at the tip of the sealing moving body 42 closes the sealing opening 12. At this time, although the high-pressure air from the breaking flow passage 13 is also acting on the non-sealing body 41 side of the sealing moving body 42 via the negative pressure flow passage 11, the anti-sealing port 12 of the sealing main body 41 is used. Since the area of the sealing back space 45, which is the side area, is formed to be larger than the area of the sealing port 12, the sealing body 41 does not move in the direction opposite to the sealing port 12.

In other words, in this embodiment, when the breaking solenoid valve 55 is turned on to perform negative pressure breaking, the breaking flow passage 13
The high-pressure air flows in and the sealing port 12 is blocked. Therefore, the high-pressure air for breaking the negative pressure does not flow into the intake chamber 30, and the predetermined amount of the high-pressure air can surely break the negative pressure and release the work.

The movement of the sealing body 41 can be performed by a solenoid valve or the like, but as in this embodiment, it is performed by operating the destruction solenoid valve 55 for causing negative pressure destruction. You can also If formed in this manner, the operation of the solenoid valve for breaking the negative pressure can prevent the breaking of the negative pressure and prevent the high pressure air from entering the intake chamber 30 side.

Further, as in this embodiment, the sealing body 41
When the area of the sealing back space 45, which is the area on the side opposite to the sealing opening 12, is formed to be larger than the area of the sealing opening 12 and is moved using high pressure air, the pressure of the high pressure air is reduced. Irrespective of this, it is possible to prevent high-pressure air from entering the intake chamber 30 side.

[0051]

As described above, the invention according to claim 1 of the present invention uses the sealing valve for maintaining the negative pressure as in the conventional case, but the sealing valve is moved toward the sealing port. It is composed of a flexible sealing body, a sealing moving body that is movable from the sealing body in the direction of the sealing opening, and a seal part that is fixed to the tip of the sealing moving body and closes the sealing opening. By pressing the sealing moving body toward the sealing port by the sealing body at the time of pressure breakdown, high pressure air does not enter the intake chamber side, and negative pressure breakdown can be performed only by a preset high pressure air amount.

According to a second aspect of the present invention, in addition to the effect of the first aspect of the present invention, the pressing of the sealing moving body toward the sealing port by the sealing body is performed by a destructive electromagnetic force for negative pressure destruction. A valve is used to allow high-pressure air to flow into the sealing body on the side opposite to the sealing port side, and the sealing body is formed so as to be movable toward the sealing port side. By the operation, the negative pressure is broken and high-pressure air is prevented from entering the intake chamber side.

[Brief description of drawings]

FIG. 1 is a sectional view showing a positional relationship when a negative pressure is generated.

FIG. 2 is a sectional view showing a positional relationship when negative pressure is maintained.

FIG. 3 is a cross-sectional view showing a positional relationship at the time of negative pressure breakdown.

[Explanation of symbols]

10 High Pressure Flow Path 11 Negative Pressure Flow Path 12 Sealing Port 13 Breaking Flow Path 14 Operation Branch Path 15 Breaking Port 16 Generation Port 17 Pressurizing Flow Path 20 Nozzle Hole 21 Day Fuser Hole 22 Silencer 30 Intake Chamber 40 Sealing Valve 41 Sealing Stop body 42 Sealing moving body 43 Sealing part 44 Body spring 45 Sealing back space 46 Moving body spring 50 High pressure air inlet 51 Suction port 52 Filter 53 Vacuum switch 54 Generation solenoid valve 55 Release solenoid valve 60 Release master valve 61 Generation Master valve 62 Release valve spring 63 Release flow rate adjustment knob

Claims (2)

[Claims] 1. A high-pressure air is jetted from a nozzle hole into a diffuser hole through a high-pressure flow passage, so that air in an intake chamber provided between the nozzle hole and the diffuser hole is sucked to suck the intake chamber. To generate a negative pressure in the negative pressure flow passage that is provided in communication with the negative pressure flow passage, and to provide a sealing valve between the intake chamber and the negative pressure flow passage. Formed so that the negative pressure can be maintained by closing the sealing port,
Further, the negative pressure generated in the negative pressure flow passage is destroyed by causing high pressure air to flow into the side of the suction chamber opposite to the sealing valve in the negative pressure flow passage through the destruction flow passage. In the negative pressure generator configured as described above, the sealing valve includes a sealing main body that is movable in the direction of the sealing opening, and a sealing moving body that is movable in the direction of the sealing opening from the sealing main body.
The sealing body is formed by a seal part that is fixed to the tip of the sealing moving body and closes the sealing opening, and the sealing body is formed by urging in the direction opposite to the sealing opening. It is formed by urging in the direction of the stop port, and when negative pressure occurs, the sealing moving body is moved to the side opposite to the sealing port due to the pressure difference so that the intake chamber and the negative pressure flow passage communicate with each other, and when maintaining negative pressure. , By closing the sealing port with the seal part by urging the sealing moving body toward the sealing port side, the suction chamber and the negative pressure flow passage are closed, and at the time of negative pressure breakdown, the state when maintaining negative pressure. From the above, by moving the sealing body toward the sealing port, the sealing moving body is pressed against the sealing port by the sealing body, and high pressure air is caused to flow from the breaking flow passage into the negative pressure passage. A negative pressure generator characterized in that 2. A breaking solenoid valve for opening and closing both flow passages is provided between the high pressure flow passage and the break flow passage, and the area of the sealing body on the side opposite to the sealing opening is larger than the area of the sealing opening. The sealing main body is formed to have a large size, and the high pressure air is caused to flow into the negative pressure flow passage by the operation of the breaking electromagnetic valve, and at the same time, to the non-sealing port side of the sealing main body to seal the sealing main body. The negative pressure generating device according to claim 1, wherein the negative pressure generating device is formed so as to be movable to the side.