JP3934488B2 - Vacuum generator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vacuum generator that generates a vacuum suction force by an ejector method.
[0002]
[Prior art]
In an adsorption device that adsorbs workpieces (electronic parts, etc.) by air suction using multiple suction ports, a vacuum pump system is used and pipes (tubes, etc.) branched into multiple parts from one vacuum pump are provided. In many cases, an adsorption part is provided.
[0003]
However, in this case, there is no problem when all the suction parts are sucking workpieces (electronic parts, etc.), but when a suction mistake occurs in one suction part, the atmosphere flows in and the vacuum is the vacuum source. There exists a problem that the vacuum pressure of a pump falls and the adsorption | suction power of the other adsorption | suction part connected with the same intake line falls. There is also a problem that a stable vacuum degree cannot be obtained due to the pulsation of the vacuum pump, and the response speed varies.
[0004]
When an ejector-type vacuum generator (for example, the product name “CV Convum” commercially available from Myonoku Co., Ltd.) is used in place of the above vacuum pump, the above-described pulsation does not occur, so that it is stable. Although there is an advantage that the response speed can be obtained, the vacuum is released from the atmospheric pressure state, and the atmospheric pressure is released to release the vacuum state. Therefore, the workpiece is adsorbed and separated compared to the above vacuum pump system. It takes time to reach a predetermined degree of vacuum. In recent years, with a high-speed mounting machine (mounter) or high-speed inspection machine (handler, etc.), it is desired to quickly make the pipe line from the nozzle that adsorbs electronic components, devices, etc. to the vacuum unit a predetermined degree of vacuum, that is, to make a high-speed response. There is an urgent need to further increase the response speed of an ejector-type vacuum generator.
[0005]
[Problems to be solved by the invention]
In consideration of the above facts, the present invention provides a vacuum generator capable of high-speed response, which can obtain a stable degree of vacuum and prevents the adsorption force at other adsorption parts from being lowered even if an adsorption error occurs. It is an issue to provide.
[0006]
The invention according to claim 1 is a vacuum generator for generating a vacuum suction force by an ejector method, a compressed air supply path for supplying compressed air, a compressed air on-off valve for opening and closing the compressed air supply path, wherein the diffuser air supplied from the compressed air supply passage is fed, and communicates with the diffuser, a vacuum suction passage having a vacuum suction port, communicating with the vacuum suction port, breaking the air supply for supplying air to vacuum break A switching valve that opens and closes the vacuum suction path, and a switching valve that branches to the compressed air supply path and reaches the switching valve. A branch path and an electromagnetic valve provided in the switching valve branch path, and the switching valve is moved by compressed air from the switching valve branch path when the solenoid valve is opened. Switching Wherein the switching member to open state is provided.
[0007]
Since this vacuum generator is an ejector type vacuum generator, pulsation does not occur and a stable response speed can be obtained. Also, vacuum suction can be switched between start and stop with the compressed air on-off valve, and the vacuum generator can be released by breaking the vacuum by opening the break air on-off valve. Is realized.
[0008]
According to a second aspect of the present invention, there is provided a vacuum generator for generating a vacuum suction force by an ejector method, a compressed air supply path for supplying compressed air, and a plurality of branches provided in the compressed air supply path a branch passage, a plurality of compressed air on-off valve for opening and closing said plurality of branch passages, respectively, and a plurality of diffuser air supplied from said plurality of branch paths are fed respectively, communicated to each of the plurality of diffuser, vacuum A plurality of vacuum suction passages each having a suction port, a break air supply passage for supplying air for vacuum breakage, and a plurality of branches that are provided to branch to the break air supply passage and communicate with the plurality of vacuum suction ports, respectively. and breaking the air branch passage, the plurality of the plurality of destroying air-off valve for each open and close the fracture air supply passage, the plurality of the plurality of switching valve for switching opening and closing the respective vacuum suction path A plurality of switching valve branch paths branching to the plurality of branch paths and reaching the plurality of switching valves, respectively, and a plurality of solenoid valves respectively provided in the plurality of switching valve branch paths, Each of the switching valves is provided with a switching member that is moved by compressed air from the switching valve branch when the solenoid valve is opened to open the switching valve. and said that you are.
[0009]
Thereby, since each vacuum suction port performs vacuum suction independently, even if one suction mistake occurs, the vacuum degree of other vacuum suction ports does not decrease. Even if a plurality of diffusers are provided, air is blown into each diffuser by a branch path branched from the compressed air supply path, so that one compressed air supply path can be provided, contributing to downsizing of the apparatus. To do.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to embodiments. 1 to 3 are views showing a vacuum generator 10 according to an embodiment of the present invention. The vacuum generator 10 is attached to a body to be attached (not shown) by screw connection, and is externally attached. Is a device that blows out the air supplied from the nozzles in the four vacuum generators 14A to 14D constituting the base 12 and generates an air suction force.
[0011]
An air supply port 22 through which compressed air is supplied is formed on the front side of the base 12 constituting the vacuum generator 10, and a compressed air supply path 24 that communicates with the air supply port 22 is formed in the base 12. Is formed (see FIG. 2). The compressed air supplied from the compressed air supply path 24 is guided to each branch path of each vacuum generator (for example, the branch path 26AL and the branch path 26AU in the case of the vacuum generator 14A).
[0012]
The vacuum generator 14A is provided with a nozzle portion 16A that allows the compressed air supplied to the branch passage 26AL to pass therethrough, and a diffuser 18A provided on the downstream side of the nozzle portion 16A. Similarly, each of the vacuum generators 14B to 14D (see FIG. 2) is provided with a nozzle portion and a diffuser.
[0013]
Further, the vacuum generators 14A to 14D are provided with air discharge ports 28A to 28D for discharging the air blown from each diffuser to the outside (see FIG. 2).
[0014]
Further, the vacuum generator 14A is formed with a vacuum suction path 20A communicating between the air outlet of the nozzle portion 16A and the air inlet of the diffuser 18A, and the end of the vacuum suction path 20A is a vacuum suction opening 21A. Similarly, vacuum suction ports 21B to D are formed in the vacuum generators 14B to 14D, respectively.
[0015]
Furthermore, the vacuum generator 14A includes a switching valve 32A that opens and closes the vacuum suction path 20A. The switching valve 32A is provided on the lower end side of the switching member 34A and the switching member 34A that moves by changing the air pressure of the branch path 26AU and switches the opening and closing of the air flow path S. The switching member 34A is always directed from below to above. A compression coil spring 36A that is biased. Furthermore, the vacuum generator 14A includes an electromagnetic valve 42A that opens and closes the branch path 26AU, and a control unit 40A that controls opening and closing of the electromagnetic valve 42A.
[0016]
When the electromagnetic valve 42A is closed, the switching member 34A receives only the force biased upward by the compression coil spring 36A, and as a result, the switching valve 32A is closed (see FIG. 1). When the electromagnetic valve 42A is opened, the switching member 34A is pressed from above by air of a predetermined pressure or more from the branch path 26AU, and moves downward against the urging force of the compression coil spring 36A. As a result, the switching valve 32A is in an open state (see FIG. 3).
[0017]
Further, the base body 12 is provided with a breaking air feeding passage 46 (see FIG. 2) having a breaking air feeding port 44 through which air for vacuum breaking is fed on the front side. The air supplied to the passage 46 is branched and guided to each vacuum break branch passage of each vacuum generator, and is supplied to each vacuum suction passage (for example, the air supplied to the vacuum break branch passage 48A is a vacuum). Supplied to the suction channel 20A). Each vacuum break branch passage is provided with a needle valve (for example, needle valve 56A in the vacuum break branch 48A). Further, the vacuum generator 14A includes an electromagnetic valve 52A that opens and closes the vacuum break branch path 48A, and a control unit 50A that controls opening and closing of the electromagnetic valve 52A. The air flow rate when the electromagnetic valve 52A of the vacuum generator 14A is opened to break the vacuum is adjusted by the needle valve 52A.
[0018]
Similarly, each of the vacuum generators 14B to 14D includes a vacuum breaking branch, a control unit, a solenoid valve, and a needle valve.
[0019]
The vacuum suction ports 21 </ b> A to 21 </ b> D and the air supply port 22 are generally formed with female threads, and a joint can be attached.
[0020]
Hereinafter, vacuum suction by the vacuum generator 14A and vacuum breaking will be described in detail and the operation of the vacuum generator 10 will be described, but the same applies to the other vacuum generators 14B to 14D.
[0021]
When the electromagnetic valve 42A is opened in a state where compressed air is supplied from the air supply port 22 of the vacuum generator 10, each nozzle part, and further each diffuser (for example, the nozzle part 16A and the diffuser 18A of the vacuum generation part 14A). Air is spouted from.
[0022]
As a result, the vacuum suction path 20A has a negative pressure with respect to the vacuum suction port 21A, a suction flow V is formed, and vacuum suction is performed from the vacuum suction port 21A. Further, the air discharged from the diffuser 18A forms an exhaust flow D and is discharged from the air discharge port 28A. Therefore, the vacuum suction force can be generated immediately by opening the electromagnetic valve 42A.
[0023]
Similarly, each of the vacuum generators 14B to 14D is vacuum-sucked independently from the vacuum suction ports 21B to 21D (that is, without being affected by other vacuum generators). Therefore, even if a suction mistake occurs in a suction pad (not shown) of a suction line connected to one vacuum suction port, the vacuum suction force by the suction pad connected to another vacuum suction port does not decrease. .
[0024]
To cause a vacuum break in the vacuum suction path 20A, the electromagnetic valve 52A is opened. As a result, breaking air flows from the needle valve 56A into the vacuum suction path 20A, and for example, a workpiece adsorbed by a suction line connected to the vacuum suction path 20A can be released with a high-speed response. Similarly, the vacuum generators 14B to 14D can be broken by a high-speed response without being affected by other vacuum generators.
[0025]
Further, the vacuum generator 10 has a plurality of vacuum generators 14A to 14D, and the compressed air supply path 24 and the break air supply path 46 are common. Therefore, a small vacuum generator 10 having a plurality of independent vacuum suction ports 21A to 21D is realized.
[0026]
【The invention's effect】
Since the present invention has the above configuration, the following effects can be obtained.
[0027]
According to the first aspect of the present invention, since this vacuum generator is an ejector type vacuum generator, pulsation does not occur and a stable response speed can be obtained. Also, vacuum suction can be switched between start and stop with the compressed air on-off valve, and the vacuum generator can be released by breaking the vacuum by opening the break air on-off valve. Is realized.
[0028]
According to the second aspect of the present invention, since each vacuum suction port has an independent structure, even if one suction error occurs, the degree of vacuum of the other vacuum suction ports does not decrease. Even if a plurality of diffusers are provided, air is blown into each diffuser by a branch path branched from the compressed air supply path, so that one compressed air supply path can be provided, contributing to downsizing of the apparatus. To do.
[Brief description of the drawings]
FIG. 1 is a front sectional view showing a configuration of a vacuum generator according to an embodiment of the present invention.
FIG. 2 is a side view of a vacuum generator according to an embodiment of the present invention.
FIG. 3 is a front sectional view showing a configuration of a vacuum generator according to an embodiment of the present invention.
[Explanation of symbols]
10 Vacuum generator 18A Diffuser 24 Compressed air supply path (Compressed air supply path)
21A to D Vacuum suction port 26AL Branch path 26AU Branch path 42A Solenoid valve (compressed air on-off valve)
46 Breaking air supply path (breaking air supply path)
48A Branch for vacuum break (break air supply path)
52A Solenoid valve (Break air open / close valve)

Claims (2)

A vacuum generator that generates a vacuum suction force by an ejector method,
A compressed air supply path for supplying compressed air;
A compressed air on-off valve that opens and closes the compressed air supply path;
A diffuser into which air supplied from the compressed air supply path is fed;
And communicating with said diffuser, a vacuum suction passage having a vacuum suction port,
A breaking air supply passage that communicates with the vacuum suction port and supplies air to be broken by vacuum;
A breaking air on-off valve for opening and closing the breaking air supply path;
A switching valve for switching between opening and closing of the vacuum suction path;
A switching valve branch that branches to the compressed air supply path and reaches the switching valve;
A solenoid valve provided in the switching valve branch;
With
The switching valve is provided with a switching member that is moved by the compressed air from the switching valve branch when the electromagnetic valve is opened to open the switching valve. Vacuum generator. A vacuum generator that generates a vacuum suction force by an ejector method,
A compressed air supply path for supplying compressed air;
A plurality of branch paths provided to branch into the compressed air supply path;
A plurality of compressed air on-off valves that respectively open and close the plurality of branch paths;
A plurality of diffusers into which the air supplied from the plurality of branch paths is respectively sent;
Respectively communicated with the plurality of diffuser, and a plurality of vacuum suction line having a vacuum suction port, respectively,
A breaking air supply passage for supplying air for vacuum breaking;
A plurality of break air branch passages that are branched from the break air supply passage and communicate with the plurality of vacuum suction ports;
A plurality of break air on / off valves that respectively open and close the plurality of break air supply paths;
A plurality of switching valves that respectively switch the opening and closing of the plurality of vacuum suction paths;
A plurality of switching valve branch paths that respectively branch to the plurality of branch paths and reach the plurality of switching valves;
A plurality of solenoid valves respectively provided in the plurality of switching valve branches;
With
Each of the switching valves is provided with a switching member that is moved by the compressed air from the switching valve branch when the electromagnetic valve is opened to open the switching valve. A vacuum generator.

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