KR20010012524A - 기판 건조용 장치 - Google Patents

기판 건조용 장치 Download PDF

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Publication number
KR20010012524A
KR20010012524A KR1019997010479A KR19997010479A KR20010012524A KR 20010012524 A KR20010012524 A KR 20010012524A KR 1019997010479 A KR1019997010479 A KR 1019997010479A KR 19997010479 A KR19997010479 A KR 19997010479A KR 20010012524 A KR20010012524 A KR 20010012524A
Authority
KR
South Korea
Prior art keywords
glass plate
substrate disk
substrate
drying
lowering
Prior art date
Application number
KR1019997010479A
Other languages
English (en)
Other versions
KR100328602B1 (ko
Inventor
클라우스 베버
울리히 슈페어
Original Assignee
라스프
스티그 하마테크 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 라스프, 스티그 하마테크 악티엔게젤샤프트 filed Critical 라스프
Publication of KR20010012524A publication Critical patent/KR20010012524A/ko
Application granted granted Critical
Publication of KR100328602B1 publication Critical patent/KR100328602B1/ko

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/02—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in the whole or part of a circle
    • F26B15/04—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in the whole or part of a circle in a horizontal plane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Drying Of Solid Materials (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

본 발명은 자외선 광에 대한 노출에 의해 디스크 기판(3)을 건조하기 위한 장치에 관한 것이다. 유리판(11)은 건조 처리동안 디스크 기판(3)상에 놓인다. 본 발명의 목적은 다루기 쉬운 장치로 디스크 기판의 최저 손실 및 보다 나은 품질을 보장하기 위한 간단한 기술적 수단을 제공하는 것이다. 이 때문에, 본 장치는 유리판을 디스크 기판(3) 위에 내려놓기 위해 상승 및 하강할 수 있는 상위부(6)를 가지며, 디스크 기판은 하위부(23)에 놓인다.
KR1019997010479A 1997-05-23 1998-05-14 기판 건조용 장치 KR100328602B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19721689.7 1997-05-23
DE19721689A DE19721689C2 (de) 1997-05-23 1997-05-23 Vorrichtung zum Trocknen von Substraten

Publications (2)

Publication Number Publication Date
KR20010012524A true KR20010012524A (ko) 2001-02-15
KR100328602B1 KR100328602B1 (ko) 2002-03-15

Family

ID=7830331

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019997010479A KR100328602B1 (ko) 1997-05-23 1998-05-14 기판 건조용 장치

Country Status (14)

Country Link
US (1) US6170169B1 (ko)
EP (1) EP0983590B1 (ko)
JP (1) JP3283533B2 (ko)
KR (1) KR100328602B1 (ko)
CN (1) CN1143290C (ko)
AT (1) ATE206554T1 (ko)
CA (1) CA2288124C (ko)
DE (2) DE19721689C2 (ko)
DK (1) DK0983590T3 (ko)
ES (1) ES2165173T3 (ko)
HK (1) HK1028128A1 (ko)
IL (1) IL132707A (ko)
TW (1) TW438664B (ko)
WO (1) WO1998053452A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19818478A1 (de) * 1998-04-24 1999-11-04 Steag Hama Tech Ag Vorrichtung zum Fixieren von Substraten
DE29816588U1 (de) 1998-09-16 1998-12-24 Leybold Systems GmbH, 63450 Hanau Vorrichtung zum Trocknen von mit Lack überzogenen Substraten, beispielsweise für schutzlackierte Compact Disks innerhalb einer Fertigungslinie
US20050160616A1 (en) * 2002-07-13 2005-07-28 Krauss-Maffei Kunststofftechnik Gmbh Multi-format spindle transport device for transporting and cooling flat substrates
DE10231767C1 (de) * 2002-07-13 2003-08-14 Krauss Maffei Kunststofftech Multiformat-Spindeltransportvorrichtung für Transport und Kühlung von flachen Substraten
WO2004039568A2 (en) * 2002-10-29 2004-05-13 4M Technologies Holding Device and method for the production of optical discs
KR101288758B1 (ko) * 2004-12-30 2013-07-23 포세온 테크날러지 인코퍼레이티드 산업 공정에서 광원을 사용하는 시스템 및 방법
JP4519037B2 (ja) * 2005-08-31 2010-08-04 東京エレクトロン株式会社 加熱装置及び塗布、現像装置
JP2011135009A (ja) * 2009-12-25 2011-07-07 Tokyo Electron Ltd 基板乾燥装置及び基板乾燥方法
KR101860631B1 (ko) * 2015-04-30 2018-05-23 시바우라 메카트로닉스 가부시끼가이샤 기판 처리 장치 및 기판 처리 방법

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4005135A (en) * 1975-04-07 1977-01-25 Sun Chemical Corporation Rotatable ultraviolet lamp reflector and heat sink
JPS5824235A (ja) 1981-08-05 1983-02-14 Fuji Xerox Co Ltd 設定時間可変ｃｒタイマ
JPS5842435A (ja) * 1981-09-04 1983-03-11 Matsushita Electric Ind Co Ltd 信号記録担体の製造法
NL8702493A (nl) 1986-10-31 1988-05-16 Seiko Epson Corp Optisch opnamemedium en werkwijze voor het vervaardigen daarvan.
US5249255A (en) * 1990-10-03 1993-09-28 Wisconsin Automated Machinery Corporation Resin curing apparatus and method utilizing infrared lamp and blower control means
DE4041199A1 (de) * 1990-12-21 1992-07-09 Hamatech Halbleiter Maschinenb Verfahren und vorrichtung zum verkleben von zwei miteinander zu verbindenden, informationen tragenden scheiben oder dergleichen
US5565034A (en) * 1993-10-29 1996-10-15 Tokyo Electron Limited Apparatus for processing substrates having a film formed on a surface of the substrate
US5518542A (en) * 1993-11-05 1996-05-21 Tokyo Electron Limited Double-sided substrate cleaning apparatus
JPH09193249A (ja) * 1995-08-15 1997-07-29 Dainippon Ink & Chem Inc ディスクの貼り合わせ方法及び装置
US5775000A (en) * 1996-05-13 1998-07-07 Ebara Corporation Substrate gripper device for spin drying
AT408287B (de) * 1996-10-01 2001-10-25 Sez Semiconduct Equip Zubehoer Verfahren und vorrichtung zum trocknen von scheibenförmigen substraten der halbleitertechnik
DE19718471A1 (de) 1997-04-30 1998-11-05 Steag Hamatech Gmbh Machines Verfahren und Vorrichtung zum Verkleben von zwei Substraten

Also Published As

Publication number Publication date
HK1028128A1 (en) 2001-02-02
CA2288124C (en) 2002-09-17
IL132707A (en) 2004-06-01
WO1998053452A9 (de) 1999-04-01
DE59801646D1 (de) 2001-11-08
WO1998053452A1 (de) 1998-11-26
DE19721689A1 (de) 1998-11-26
IL132707A0 (en) 2001-03-19
CN1257601A (zh) 2000-06-21
DE19721689C2 (de) 1999-06-10
CN1143290C (zh) 2004-03-24
EP0983590B1 (de) 2001-10-04
US6170169B1 (en) 2001-01-09
TW438664B (en) 2001-06-07
KR100328602B1 (ko) 2002-03-15
EP0983590A1 (de) 2000-03-08
JP2000512060A (ja) 2000-09-12
ES2165173T3 (es) 2002-03-01
DK0983590T3 (da) 2002-01-28
JP3283533B2 (ja) 2002-05-20
ATE206554T1 (de) 2001-10-15
CA2288124A1 (en) 1998-11-26

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