DK0846032T3 - Apparat til spin-coating af CD - Google Patents

Apparat til spin-coating af CD

Info

Publication number
DK0846032T3
DK0846032T3 DK96926514T DK96926514T DK0846032T3 DK 0846032 T3 DK0846032 T3 DK 0846032T3 DK 96926514 T DK96926514 T DK 96926514T DK 96926514 T DK96926514 T DK 96926514T DK 0846032 T3 DK0846032 T3 DK 0846032T3
Authority
DK
Denmark
Prior art keywords
spin coating
substrate
substrate carrier
coating apparatus
lid
Prior art date
Application number
DK96926514T
Other languages
English (en)
Inventor
Vladimir Schwartz
Klaus Bierwagen
Michael Schwartz
Original Assignee
Tapematic Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tapematic Spa filed Critical Tapematic Spa
Application granted granted Critical
Publication of DK0846032T3 publication Critical patent/DK0846032T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
DK96926514T 1995-08-21 1996-08-20 Apparat til spin-coating af CD DK0846032T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/517,388 US5803968A (en) 1995-08-21 1995-08-21 Compact disc spin coater
PCT/IB1996/000825 WO1997006894A1 (en) 1995-08-21 1996-08-20 Improved compact disc spin coater

Publications (1)

Publication Number Publication Date
DK0846032T3 true DK0846032T3 (da) 2000-05-29

Family

ID=24059604

Family Applications (1)

Application Number Title Priority Date Filing Date
DK96926514T DK0846032T3 (da) 1995-08-21 1996-08-20 Apparat til spin-coating af CD

Country Status (10)

Country Link
US (1) US5803968A (da)
EP (1) EP0846032B1 (da)
JP (1) JPH11511070A (da)
AT (1) ATE188144T1 (da)
CA (1) CA2230068A1 (da)
DE (1) DE69605928T2 (da)
DK (1) DK0846032T3 (da)
ES (1) ES2146407T3 (da)
PT (1) PT846032E (da)
WO (1) WO1997006894A1 (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7478646B2 (en) * 2003-01-31 2009-01-20 Terry Borrenpohl Valve outlet enclosure device
GB0423539D0 (en) * 2004-10-22 2004-11-24 Reid Matthew F Apparatus for brewing beverages
DE102009007260B3 (de) * 2009-02-03 2010-06-10 Suss Microtec Lithography Gmbh Vorrichtung zum Beschichten eines Substrats
US8361610B2 (en) * 2009-07-02 2013-01-29 E I Du Pont De Nemours And Company Composite with low content of metal
WO2011002867A1 (en) 2009-07-02 2011-01-06 E. I. Du Pont De Nemours And Company Semiconductor manufacture component
JP2012076045A (ja) * 2010-10-04 2012-04-19 Tokyo Ohka Kogyo Co Ltd 塗布装置
US10262880B2 (en) * 2013-02-19 2019-04-16 Tokyo Electron Limited Cover plate for wind mark control in spin coating process

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US943407A (en) * 1909-03-03 1909-12-14 John J Heimbuecher Water-curb-box lid.
US1159198A (en) * 1914-02-04 1915-11-02 Alberta C Elliott Closure for receptacles.
US4033288A (en) * 1971-11-20 1977-07-05 Basf Aktiengesellschaft Apparatus for coating magnetic disks
DE2554692C2 (de) * 1975-12-05 1977-11-17 Basf Ag, 6700 Ludwigshafen Vorrichtung zur Herstellung der Magnetschichten von Magnetspeicherplatten
JPS5819350B2 (ja) * 1976-04-08 1983-04-18 富士写真フイルム株式会社 スピンコ−テイング方法
US4068019A (en) * 1976-11-08 1978-01-10 International Business Machines Corporation Spin coating process for prevention of edge buildup
US4086870A (en) * 1977-06-30 1978-05-02 International Business Machines Corporation Novel resist spinning head
US4377245A (en) * 1980-10-06 1983-03-22 Patty Blyde L Closure for container
JPS57135067A (en) * 1981-02-16 1982-08-20 Tokyo Denshi Kagaku Kabushiki Thin film-applying machine
US4510176A (en) * 1983-09-26 1985-04-09 At&T Bell Laboratories Removal of coating from periphery of a semiconductor wafer
US4550679A (en) * 1984-06-11 1985-11-05 Harvey Russack Device for producing decorative patterns on clothing
JPH07106334B2 (ja) * 1985-12-12 1995-11-15 松下電器産業株式会社 レジスト塗布装置
JPS6376431A (ja) * 1986-09-19 1988-04-06 Hitachi Ltd スピン塗布装置
JP2564638B2 (ja) * 1988-12-30 1996-12-18 太陽誘電株式会社 コンパクトディスクの製造方法
US5099469A (en) * 1990-02-20 1992-03-24 Del Mar Avionics Process for manufacturing an optical disc master
US5270150A (en) * 1990-04-25 1993-12-14 Victor Company Of Japan, Ltd. Optical recording medium and process for producing it
CA2070221A1 (en) * 1991-06-14 1992-12-15 Tadahiko Mizukuki Optical recording medium
JPH0722361A (ja) * 1993-06-30 1995-01-24 Hitachi Ltd 塗布装置
US5518134A (en) * 1994-10-14 1996-05-21 Liu; Chin C. Pin lock lidded cup

Also Published As

Publication number Publication date
JPH11511070A (ja) 1999-09-28
DE69605928T2 (de) 2000-07-20
ATE188144T1 (de) 2000-01-15
US5803968A (en) 1998-09-08
WO1997006894A1 (en) 1997-02-27
DE69605928D1 (de) 2000-02-03
PT846032E (pt) 2000-06-30
EP0846032A1 (en) 1998-06-10
CA2230068A1 (en) 1997-02-27
EP0846032B1 (en) 1999-12-29
ES2146407T3 (es) 2000-08-01

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