JPS56144444A - Developing method - Google Patents
Developing methodInfo
- Publication number
- JPS56144444A JPS56144444A JP4844080A JP4844080A JPS56144444A JP S56144444 A JPS56144444 A JP S56144444A JP 4844080 A JP4844080 A JP 4844080A JP 4844080 A JP4844080 A JP 4844080A JP S56144444 A JPS56144444 A JP S56144444A
- Authority
- JP
- Japan
- Prior art keywords
- developing
- turntable
- developed
- soln
- concn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
- G03G15/10—Apparatus for electrographic processes using a charge pattern for developing using a liquid developer
- G03G15/101—Apparatus for electrographic processes using a charge pattern for developing using a liquid developer for wetting the recording material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Wet Developing In Electrophotography (AREA)
Abstract
PURPOSE:To prevent uneven development by rotating an object to be developed by means of a turntable, supplying water and the developing soln. from more than one position of the top surface of the object to be developed on the turntable, and gradually lowering the concn. of the developing soln. upon ending of the developing. CONSTITUTION:An object OD to be developed such as an original disc for discs has a photosensitive layer 2 on a glass substrate 1. This object OD is placed on the annular projection 5 of a turntable T, and a shaft 4 enters a central hole 3. The object is fixed by means of a fixing member 6. Two or more nozzles 17, 18 are provided above this object OD. The developing soln. and water are supplied to these nozzles 17, 18 from a developing tank 11 and a water tank 10 through pipings 15, 16 and a mixing part 14. The liquid on the disc OD flows through the central hole 3 or the end part onto the table T or into dewatering device 8. The developing condition is detected with detecting parts PE0-D1, and the concn. of the developing soln. is lowered.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4844080A JPS56144444A (en) | 1980-04-12 | 1980-04-12 | Developing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4844080A JPS56144444A (en) | 1980-04-12 | 1980-04-12 | Developing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56144444A true JPS56144444A (en) | 1981-11-10 |
Family
ID=12803406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4844080A Pending JPS56144444A (en) | 1980-04-12 | 1980-04-12 | Developing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56144444A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6161159A (en) * | 1984-08-31 | 1986-03-28 | Hoya Corp | Spray developing method |
JPS61279858A (en) * | 1985-06-05 | 1986-12-10 | Mitsubishi Electric Corp | Negative resit developing device |
US6419408B1 (en) * | 1998-03-09 | 2002-07-16 | Tokyo Electron Limited | Developing process and developing unit |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56101148A (en) * | 1980-01-16 | 1981-08-13 | Toshiba Corp | Photoresist developing method |
-
1980
- 1980-04-12 JP JP4844080A patent/JPS56144444A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56101148A (en) * | 1980-01-16 | 1981-08-13 | Toshiba Corp | Photoresist developing method |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6161159A (en) * | 1984-08-31 | 1986-03-28 | Hoya Corp | Spray developing method |
JPS61279858A (en) * | 1985-06-05 | 1986-12-10 | Mitsubishi Electric Corp | Negative resit developing device |
JPH0574816B2 (en) * | 1985-06-05 | 1993-10-19 | Mitsubishi Electric Corp | |
US6419408B1 (en) * | 1998-03-09 | 2002-07-16 | Tokyo Electron Limited | Developing process and developing unit |
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