JPS55122873A - Lift off apparatus - Google Patents
Lift off apparatusInfo
- Publication number
- JPS55122873A JPS55122873A JP2907879A JP2907879A JPS55122873A JP S55122873 A JPS55122873 A JP S55122873A JP 2907879 A JP2907879 A JP 2907879A JP 2907879 A JP2907879 A JP 2907879A JP S55122873 A JPS55122873 A JP S55122873A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- board
- maintaining
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE: To shorten removing time of the following mentioned film compared with usual apparatus and to reduce the cost, by providing dissolution solution dropping means of the film and rotating brush means on the ratating board maintaining the substrate having the metal film to be removed on the photoresist film at a fixed place.
CONSTITUTION: The apparatus is constructed by maintaining the substrate 1 having the metal film 3 to be removed on the photoresist film 2 having a fixed pattern and facing against the rotatable support board 24 and then, providing with the rotating brush 22 contacting with the surface of the substrate 1 and the supply tube 27 of the dissolution solution 26, such as NaOH etc., for removing the above mentioned film 2, 3. The substrate 1 is placed on the groove 25 of the board 24 and is rotated and then, the above film 2, 3 are removed in the time of about one-fifth of the usual apparatus by the friction by the fiber 21 set in the brush 22 rotating reversely and dropping of the solution 26 and moreover, production cost of photomask is reduced sharply.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2907879A JPS55122873A (en) | 1979-03-13 | 1979-03-13 | Lift off apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2907879A JPS55122873A (en) | 1979-03-13 | 1979-03-13 | Lift off apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55122873A true JPS55122873A (en) | 1980-09-20 |
Family
ID=12266301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2907879A Pending JPS55122873A (en) | 1979-03-13 | 1979-03-13 | Lift off apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55122873A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6793778B2 (en) | 2002-07-15 | 2004-09-21 | Hitachi Global Storage Technologies Netherlands N.V. | Method of fabricating slider pads for a transducer operating with moving magnetic media |
-
1979
- 1979-03-13 JP JP2907879A patent/JPS55122873A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6793778B2 (en) | 2002-07-15 | 2004-09-21 | Hitachi Global Storage Technologies Netherlands N.V. | Method of fabricating slider pads for a transducer operating with moving magnetic media |
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