KR20000077471A - 진공펌프 - Google Patents

진공펌프 Download PDF

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Publication number
KR20000077471A
KR20000077471A KR1020000028885A KR20000028885A KR20000077471A KR 20000077471 A KR20000077471 A KR 20000077471A KR 1020000028885 A KR1020000028885 A KR 1020000028885A KR 20000028885 A KR20000028885 A KR 20000028885A KR 20000077471 A KR20000077471 A KR 20000077471A
Authority
KR
South Korea
Prior art keywords
rotor
blade
vacuum pump
rotor shaft
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020000028885A
Other languages
English (en)
Korean (ko)
Inventor
가바사와다카시
노나카마나부
오카다다카시
Original Assignee
다카키도시요시
세이코세이키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다카키도시요시, 세이코세이키 가부시키가이샤 filed Critical 다카키도시요시
Publication of KR20000077471A publication Critical patent/KR20000077471A/ko
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F04D29/30—Vanes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/38—Blades
    • F04D29/384—Blades characterised by form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2220/00—Application
    • F05D2220/30—Application in turbines
    • F05D2220/32—Application in turbines in gas turbines
    • F05D2220/321—Application in turbines in gas turbines for a special turbine stage
    • F05D2220/3216—Application in turbines in gas turbines for a special turbine stage for a special compressor stage
    • F05D2220/3217—Application in turbines in gas turbines for a special turbine stage for a special compressor stage for the first stage of a compressor or a low pressure compressor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
KR1020000028885A 1999-05-28 2000-05-27 진공펌프 Ceased KR20000077471A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14909799A JP3961155B2 (ja) 1999-05-28 1999-05-28 真空ポンプ
JP99-149097 1999-05-28

Publications (1)

Publication Number Publication Date
KR20000077471A true KR20000077471A (ko) 2000-12-26

Family

ID=15467641

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000028885A Ceased KR20000077471A (ko) 1999-05-28 2000-05-27 진공펌프

Country Status (4)

Country Link
US (1) US6755611B1 (OSRAM)
JP (1) JP3961155B2 (OSRAM)
KR (1) KR20000077471A (OSRAM)
TW (1) TW466305B (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180108577A (ko) * 2016-02-12 2018-10-04 에드워즈 가부시키가이샤 진공 펌프 및 그 진공 펌프에 이용되는 가요성 커버 및 로터

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
US20050186885A1 (en) * 2003-09-11 2005-08-25 Valentin Tara J. Multi-piece bra
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
WO2007146882A1 (en) * 2006-06-12 2007-12-21 Mag Aerospace Industries, Inc. Regenerative vacuum generator for aircraft and other vehicles
US11274671B2 (en) * 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
JP6190580B2 (ja) * 2012-09-13 2017-08-30 エドワーズ株式会社 真空ポンプの回転部及び真空ポンプ
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
JP6706553B2 (ja) * 2015-12-15 2020-06-10 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
JP2018035684A (ja) 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
US10641282B2 (en) * 2016-12-28 2020-05-05 Nidec Corporation Fan device and vacuum cleaner including the same
WO2018173341A1 (ja) 2017-03-23 2018-09-27 エドワーズ株式会社 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード
WO2018174013A1 (ja) * 2017-03-23 2018-09-27 エドワーズ株式会社 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード
JP6885851B2 (ja) 2017-10-27 2021-06-16 エドワーズ株式会社 真空ポンプ、ロータ、ロータフィン、およびケーシング
JP7096006B2 (ja) * 2018-02-16 2022-07-05 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
JP7088688B2 (ja) * 2018-02-16 2022-06-21 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
TWI696754B (zh) * 2019-03-15 2020-06-21 承輝先進股份有限公司 具有改良型蓋子之轉子裝置
CN112563106B (zh) * 2019-09-10 2023-10-31 中微半导体设备(上海)股份有限公司 一种半导体处理设备及其排气系统
CN112814927B (zh) * 2019-11-18 2023-05-30 致扬科技股份有限公司 涡轮分子泵及其防尘式转子元件
CN114673671B (zh) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 风机和吸尘装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04370394A (ja) * 1991-06-19 1992-12-22 Seiko Seiki Co Ltd 真空ポンプ
JPH0626493A (ja) * 1992-06-05 1994-02-01 Shinku Kagaku Kenkyusho ターボ分子ポンプ
JPH0932794A (ja) * 1995-07-24 1997-02-04 Shimadzu Corp ターボ分子ポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3157793A (en) * 1961-07-31 1964-11-17 Curtiss Wright Corp Turbo-alternator generator
IT1137555B (it) * 1980-04-26 1986-09-10 Porsche Ag Gruppo di azionamento,in particolare per autoveicoli
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE59305085D1 (de) * 1992-06-19 1997-02-20 Leybold Ag Gasreibungsvakuumpumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04370394A (ja) * 1991-06-19 1992-12-22 Seiko Seiki Co Ltd 真空ポンプ
JPH0626493A (ja) * 1992-06-05 1994-02-01 Shinku Kagaku Kenkyusho ターボ分子ポンプ
JPH0932794A (ja) * 1995-07-24 1997-02-04 Shimadzu Corp ターボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180108577A (ko) * 2016-02-12 2018-10-04 에드워즈 가부시키가이샤 진공 펌프 및 그 진공 펌프에 이용되는 가요성 커버 및 로터

Also Published As

Publication number Publication date
JP2000337290A (ja) 2000-12-05
US6755611B1 (en) 2004-06-29
JP3961155B2 (ja) 2007-08-22
TW466305B (en) 2001-12-01

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