KR20000070592A - 유체공급장치 - Google Patents
유체공급장치 Download PDFInfo
- Publication number
- KR20000070592A KR20000070592A KR1019997006839A KR19997006839A KR20000070592A KR 20000070592 A KR20000070592 A KR 20000070592A KR 1019997006839 A KR1019997006839 A KR 1019997006839A KR 19997006839 A KR19997006839 A KR 19997006839A KR 20000070592 A KR20000070592 A KR 20000070592A
- Authority
- KR
- South Korea
- Prior art keywords
- fluid
- pressure
- flow controller
- valve
- flow rate
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Magnetically Actuated Valves (AREA)
- Control Of Non-Electrical Variables (AREA)
Abstract
Description
고속변환밸브의 폐쇄 | |
질량유량제어기 | 제어밸브를 연다 --> 2차측 압력증가 --> 유체의 잔류발생 |
압력유동제어기 | 제어밸브를 닫는다 --> 2차측 압력감소 --> 유체의 잔류없음 |
Claims (5)
- 유체의 유량을 제어하는 압력유동제어기(C)와, 압력유동제어기(C)의 2차측 유체통로(L)를 개폐하는 유체변환밸브(D)와, 압력유동제어기(C)와 유체변환밸브(D)의 작동을 제어하는 유체공급제어장치(B)로 구성되고, 또 상기 압력유동제어기(C)를 오리피스(5)와, 제어밸브(1)와 오리피스(5) 사이에 설치된 압력검출기(3)와, 압력검출기(3)의 검출압(P1)으로부터 유량 Qc=KP1(단, K는 정수)으로서 연산된 유량신호(Qc)와 유량지령신호(Qs)와의 차를 제어신호(Qy)로서 상기 제어밸브(1)의 구동부(2)로 출력하는 연산제어장치(6)로 형성하는 것과 함께, 상기 제어밸브(1)의 개폐에 의해 오리피스(5)의 상류측 압력(P1)을 조정하고, 오리피스(5)의 하류측 유량을 제어하는 구성으로 한 것을 특징으로 하는 유체공급장치.
- 제1항에 있어서, 오리피스(5)의 상류측 압력(P1)을 하류측 압력(P2)의 약 2배 이상으로 유지한 상태에서 제어밸브(1)를 개폐제어하도록 한 것을 특징으로 하는 유체공급장치.
- 제1항 또는 제2항에 있어서, 압력유동제어기(C)를 병렬로 설치한 복수의 압력유동제어기(C1),(Cn)로 하는 것과 함께, 각 압력유동제어기(C1)의 2차측에 설치된 유체변환밸브(D1),(Dn)의 출구측을 각각 연이어 통하게 유체사용부하(E)로 접속하고, 또 각 압력유동제어기(C1),(Cn)의 1차측으로 다른 종류의 유체를 공급하도록 한 것을 특징으로 하는 유체공급장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 유체변환밸브(D)를 전동식 고속작동형 유체변환밸브로 한 것을 특징으로 하는 유체공급장치.
- 제4항에 있어서, 전동식의 고속작동형 유체변환밸브를 솔레노이드 구동식 고속작동형 유체변환밸브로 한 것을 특징으로 하는 유체공급장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP996198A JPH11212653A (ja) | 1998-01-21 | 1998-01-21 | 流体供給装置 |
JP98-9961 | 1998-01-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000070592A true KR20000070592A (ko) | 2000-11-25 |
KR100327878B1 KR100327878B1 (ko) | 2002-03-09 |
Family
ID=11734549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019997006839A KR100327878B1 (ko) | 1998-01-21 | 1999-01-11 | 유체공급장치 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6178995B1 (ko) |
EP (1) | EP0969342B1 (ko) |
JP (1) | JPH11212653A (ko) |
KR (1) | KR100327878B1 (ko) |
CN (1) | CN1127004C (ko) |
DE (1) | DE69928047T2 (ko) |
TW (1) | TW385380B (ko) |
WO (1) | WO1999038057A1 (ko) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3522544B2 (ja) * | 1998-08-24 | 2004-04-26 | 忠弘 大見 | 流体可変型流量制御装置 |
CN1114847C (zh) * | 1998-08-24 | 2003-07-16 | 株式会社富士金 | 压力式流量控制装置的孔板堵塞检测方法及其检测装置 |
JP3626874B2 (ja) * | 1999-04-16 | 2005-03-09 | 忠弘 大見 | 並列分流型の流体供給装置 |
US6210482B1 (en) * | 1999-04-22 | 2001-04-03 | Fujikin Incorporated | Apparatus for feeding gases for use in semiconductor manufacturing |
US6581623B1 (en) * | 1999-07-16 | 2003-06-24 | Advanced Technology Materials, Inc. | Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
JP3554509B2 (ja) * | 1999-08-10 | 2004-08-18 | 忠弘 大見 | 圧力式流量制御装置における流量異常検知方法 |
JP2002143751A (ja) * | 2000-10-17 | 2002-05-21 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | 処理液分配装置及び方法 |
US6631334B2 (en) * | 2000-12-26 | 2003-10-07 | Mks Instruments, Inc. | Pressure-based mass flow controller system |
US7563328B2 (en) * | 2001-01-19 | 2009-07-21 | Tokyo Electron Limited | Method and apparatus for gas injection system with minimum particulate contamination |
AU2002307547A1 (en) * | 2001-04-24 | 2002-11-05 | Unit Instruments, Inc. | System and method for configuring and asapting a mass flow controller |
US6655408B2 (en) | 2001-06-13 | 2003-12-02 | Applied Materials, Inc. | Tunable ramp rate circuit for a mass flow controller |
JP2003280745A (ja) * | 2002-03-25 | 2003-10-02 | Stec Inc | マスフローコントローラ |
JP3856730B2 (ja) * | 2002-06-03 | 2006-12-13 | 東京エレクトロン株式会社 | 流量制御装置を備えたガス供給設備からのチャンバーへのガス分流供給方法。 |
EP1523701A2 (en) * | 2002-07-19 | 2005-04-20 | Celerity Group, Inc. | Methods and apparatus for pressure compensation in a mass flow controller |
JP4331539B2 (ja) | 2003-07-31 | 2009-09-16 | 株式会社フジキン | チャンバへのガス供給装置及びこれを用いたチャンバの内圧制御方法 |
JP4399227B2 (ja) | 2003-10-06 | 2010-01-13 | 株式会社フジキン | チャンバの内圧制御装置及び内圧被制御式チャンバ |
JP3767897B2 (ja) * | 2004-03-01 | 2006-04-19 | シーケーディ株式会社 | ガス供給集積ユニット |
US7216019B2 (en) * | 2004-07-08 | 2007-05-08 | Celerity, Inc. | Method and system for a mass flow controller with reduced pressure sensitivity |
US9921089B2 (en) | 2005-06-27 | 2018-03-20 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
US9383758B2 (en) | 2005-06-27 | 2016-07-05 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
JP4856905B2 (ja) * | 2005-06-27 | 2012-01-18 | 国立大学法人東北大学 | 流量レンジ可変型流量制御装置 |
JP4743763B2 (ja) * | 2006-01-18 | 2011-08-10 | 株式会社フジキン | 圧電素子駆動式金属ダイヤフラム型制御弁 |
JP5372353B2 (ja) * | 2007-09-25 | 2013-12-18 | 株式会社フジキン | 半導体製造装置用ガス供給装置 |
US7905139B2 (en) * | 2008-08-25 | 2011-03-15 | Brooks Instrument, Llc | Mass flow controller with improved dynamic |
US20110232588A1 (en) * | 2010-03-26 | 2011-09-29 | Msp Corporation | Integrated system for vapor generation and thin film deposition |
JP5562712B2 (ja) * | 2010-04-30 | 2014-07-30 | 東京エレクトロン株式会社 | 半導体製造装置用のガス供給装置 |
US8997686B2 (en) | 2010-09-29 | 2015-04-07 | Mks Instruments, Inc. | System for and method of fast pulse gas delivery |
US9348339B2 (en) * | 2010-09-29 | 2016-05-24 | Mks Instruments, Inc. | Method and apparatus for multiple-channel pulse gas delivery system |
US10353408B2 (en) | 2011-02-25 | 2019-07-16 | Mks Instruments, Inc. | System for and method of fast pulse gas delivery |
US10031531B2 (en) | 2011-02-25 | 2018-07-24 | Mks Instruments, Inc. | System for and method of multiple channel fast pulse gas delivery |
US10126760B2 (en) | 2011-02-25 | 2018-11-13 | Mks Instruments, Inc. | System for and method of fast pulse gas delivery |
US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
DE102011120166A1 (de) * | 2011-12-06 | 2013-06-06 | Micronas Gmbh | Magnetischer Drucksensor |
JP5754853B2 (ja) * | 2012-01-30 | 2015-07-29 | 株式会社フジキン | 半導体製造装置のガス分流供給装置 |
JP5881467B2 (ja) | 2012-02-29 | 2016-03-09 | 株式会社フジキン | ガス分流供給装置及びこれを用いたガス分流供給方法 |
JP5665794B2 (ja) * | 2012-04-27 | 2015-02-04 | 株式会社フジキン | 半導体製造装置のガス分流供給装置 |
CN107489888B (zh) * | 2012-11-30 | 2020-05-01 | 鲁比康研究有限公司 | 流体管道系统 |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
JP6193679B2 (ja) | 2013-08-30 | 2017-09-06 | 株式会社フジキン | ガス分流供給装置及びガス分流供給方法 |
JP6158111B2 (ja) * | 2014-02-12 | 2017-07-05 | 東京エレクトロン株式会社 | ガス供給方法及び半導体製造装置 |
CN104536365B (zh) * | 2014-12-09 | 2017-06-13 | 北京七星华创电子股份有限公司 | 一种化学液在线加热控制系统及控制方法 |
US9904299B2 (en) * | 2015-04-08 | 2018-02-27 | Tokyo Electron Limited | Gas supply control method |
US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
JP6748586B2 (ja) * | 2016-07-11 | 2020-09-02 | 東京エレクトロン株式会社 | ガス供給システム、基板処理システム及びガス供給方法 |
US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
US11659828B2 (en) | 2019-01-10 | 2023-05-30 | Capstan Ag Systems, Inc. | Systems and methods for fluid application including sectioned spray boom and section control valves for sectional pressure control |
WO2022186971A1 (en) | 2021-03-03 | 2022-09-09 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4836233A (en) * | 1988-06-06 | 1989-06-06 | Eclipse Ion Technology, Inc. | Method and apparatus for venting vacuum processing equipment |
US5146941A (en) * | 1991-09-12 | 1992-09-15 | Unitech Development Corp. | High turndown mass flow control system for regulating gas flow to a variable pressure system |
EP0547617B1 (en) * | 1991-12-18 | 1996-07-10 | Pierre Delajoud | Mass flow meter and method |
US5190068A (en) * | 1992-07-02 | 1993-03-02 | Brian Philbin | Control apparatus and method for controlling fluid flows and pressures |
JP3310386B2 (ja) * | 1993-05-25 | 2002-08-05 | 忠弘 大見 | 絶縁酸化膜の形成方法及び半導体装置 |
JP2784154B2 (ja) * | 1994-12-27 | 1998-08-06 | シーケーディ株式会社 | マスフローコントローラ |
JP3291161B2 (ja) * | 1995-06-12 | 2002-06-10 | 株式会社フジキン | 圧力式流量制御装置 |
JP3758717B2 (ja) * | 1995-10-03 | 2006-03-22 | 大陽日酸株式会社 | ガス混合装置 |
JP3580645B2 (ja) * | 1996-08-12 | 2004-10-27 | 忠弘 大見 | 圧力式流量制御装置 |
-
1998
- 1998-01-21 JP JP996198A patent/JPH11212653A/ja active Pending
-
1999
- 1999-01-11 EP EP99900168A patent/EP0969342B1/en not_active Expired - Lifetime
- 1999-01-11 CN CN99800002A patent/CN1127004C/zh not_active Expired - Lifetime
- 1999-01-11 WO PCT/JP1999/000062 patent/WO1999038057A1/ja active IP Right Grant
- 1999-01-11 US US09/355,872 patent/US6178995B1/en not_active Expired - Lifetime
- 1999-01-11 KR KR1019997006839A patent/KR100327878B1/ko not_active IP Right Cessation
- 1999-01-11 DE DE1999628047 patent/DE69928047T2/de not_active Expired - Fee Related
- 1999-01-21 TW TW88100902A patent/TW385380B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0969342A4 (en) | 2004-05-19 |
EP0969342B1 (en) | 2005-11-02 |
TW385380B (en) | 2000-03-21 |
DE69928047T2 (de) | 2006-07-13 |
CN1127004C (zh) | 2003-11-05 |
KR100327878B1 (ko) | 2002-03-09 |
JPH11212653A (ja) | 1999-08-06 |
WO1999038057A1 (fr) | 1999-07-29 |
DE69928047D1 (de) | 2005-12-08 |
EP0969342A1 (en) | 2000-01-05 |
CN1255981A (zh) | 2000-06-07 |
US6178995B1 (en) | 2001-01-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100327878B1 (ko) | 유체공급장치 | |
TW381205B (en) | Gas supplying device with a pressure flow controller | |
KR100792220B1 (ko) | 유체 통로의 워터 해머레스 개방방법 및 이것을 이용한약액 공급 방법 및 워터 해머레스 개방장치 | |
KR101005031B1 (ko) | 유체혼합시스템 및 유체혼합장치 | |
JP6193679B2 (ja) | ガス分流供給装置及びガス分流供給方法 | |
EP1564615B1 (en) | Fluid-switchable flow rate control system | |
TWI534577B (zh) | 壓力式流量控制裝置 | |
JP2005149075A (ja) | 流体制御装置 | |
US10261522B2 (en) | Pressure-type flow rate control device | |
US20160327963A1 (en) | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | |
KR102104805B1 (ko) | 압력식 유량 제어 장치 | |
JP5134841B2 (ja) | ガス供給ユニット | |
KR20200093031A (ko) | 유량 제어 방법 및 유량 제어 장치 | |
KR100686595B1 (ko) | 유체통로의 폐쇄방법과 이것에 이용하는 워터 해머리스밸브장치 | |
JPH09330128A (ja) | マスフローコントローラ | |
JPWO2008136042A1 (ja) | 水分発生用反応炉の並列運転方法 | |
JP3935924B2 (ja) | プロセスチャンバ内真空圧力制御システム | |
JP3012042B2 (ja) | 質量流量制御器の制御弁 | |
JP4420695B2 (ja) | 圧力調整装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130201 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20140204 Year of fee payment: 13 |
|
FPAY | Annual fee payment |
Payment date: 20150130 Year of fee payment: 14 |
|
FPAY | Annual fee payment |
Payment date: 20160127 Year of fee payment: 15 |
|
FPAY | Annual fee payment |
Payment date: 20170202 Year of fee payment: 16 |
|
FPAY | Annual fee payment |
Payment date: 20180219 Year of fee payment: 17 |
|
EXPY | Expiration of term |