KR20000054212A - Thin film deposition apparatus for fabricating organic light-emitting devices - Google Patents

Abstract

PURPOSE: A thin film vapor device for manufacturing luminous element is provided to reduce lost time due to movement of the base film(20) by moving flexible base film(20) moves inside the chamber and consecutively performing vapor process, and to reduce the space the vapor device occupies in the work room. CONSTITUTION: A thin film vapor device for manufacturing luminous element includes a chamber(2) whose internal pressure is controllable. A pair of base film(20) rollers are composed of a base film(20) supply roller(12) and a base film(20) receiving roller(14). The base film(20) supply roller(12) installed with intervals inside the chamber(2) supplies rolled base film(20). The base film(20) receiving roller(14) receives the base film(20) by rolling. A pair of mask rollers are composed of a mask supply roller(16) and a mask receiving roller(18). The mask supply roller(16) installed to the lower part of the base film(20) supply roller(12) inside the chamber(2) supplies rolled mask(22). The mask receiving roller(18) installed to the lower part of the base film(20) receiving roller(14) inside the chamber(2) receives mask by rolling. A contact fixer fixes the base film(20) and rolled mask(22) which move by the rotation of the base film(20) supply roller(12) and the mask supply roller(16) to the base film(20) receiving roller(14) and the mask receiving roller(18). A heating device sublimes organism by heating. A shutter opens and closes the aperture of the heating device.

Description

Thin film deposition apparatus for fabricating organic light-emitting devices

The present invention relates to a thin film deposition apparatus for manufacturing an organic light emitting device, and more particularly, to a thin film deposition apparatus for manufacturing an organic light emitting device capable of continuously depositing different organic materials on a film type substrate.

In general, an organic light emitting device manufacturing process alternately deposits organic materials having a high refractive index and organic materials having a small refractive index on a glass substrate to form a DBR layer (Distrubuted Bragg Reflection Layer), and a transparent conductive film (ITO: Indium) on the DBR layer. Tin oxide is formed to form an anode (+) metal electrode, and a layer of an organic light emitting material such as Alq ₃ (tris (8-hydroxy qunolinate) aluminum) is deposited on the transparent conductive film using a vacuum system. And forming a cathode (−) metal electrode on the organic light emitting material layer by using any one of magnesium, aluminum, indium, and silver-magnesium. Here, the glass substrate is the same as the display substrate such as an LCD (Liquid Crystal Display) or PDP (Plasma Panel Display).

In the organic light emitting device manufacturing process as described above, a process equipment for depositing a DBR layer on a glass substrate by a transfer means such as a robot arm, a process equipment for forming an anode (+) metal electrode, and an organic light emitting material layer are deposited. It is performed by sequentially moving the process equipment and the process equipment to form a cathode (-) metal electrode.

However, a glass substrate in which a conventional organic light emitting device is implemented has a loss time in the process of moving the glass substrate to each process facility by moving each process facility by a robot arm and performing a series of deposition processes. ) Has a problem that the process time is long.

In addition, since the deposition equipment for performing the deposition process on the glass substrate is provided separately according to the type of deposition material, the area occupied by each deposition process equipment in which the organic light emitting device manufacturing process is performed occupies the inside of the process chamber. .

An object of the present invention is to provide a thin film deposition apparatus for manufacturing an organic light emitting device that can shorten the air of the organic light emitting device manufacturing process by moving a flexible film-like substrate in the chamber and continuously performing a different deposition process. .

Another object of the present invention is to provide a thin film deposition apparatus for manufacturing an organic light emitting device that can reduce the area occupied by the deposition process equipment in the process chamber by unifying each deposition equipment.

1 is a block diagram illustrating a thin film deposition apparatus for manufacturing an organic light emitting device according to an embodiment of the present invention.

FIG. 2 is a plan view for describing the shapes of the substrate and the mask illustrated in FIG. 1.

FIG. 3 is a perspective view illustrating the guide rail shown in FIG. 1.

4 is a cross-sectional view illustrating a fastening relationship between the substrate, the mask, and the guide rail shown in FIG. 1.

5 is a perspective view showing the heating container shown in FIG.

※ Explanation of symbols for main parts of drawing

2 chamber 10 exhaust line

12: substrate feed roller 14: substrate receiving roller

16: mask supply roller 18: mask receiving roller

20: film-type substrate 22: scroll type mask

24, 80, 82: guide rail 26: substrate feed auxiliary roller

28: mask supply auxiliary roller 30: bulkhead container

34: 1st heating container 36: 1st support stand

38: first shutter 40: second heating vessel

44: second support 46: second shutter

48: third heating vessel 52: third support

54: third shutter 60: thermocouple

62: power supply 70: alignment hole

84: alignment pin

Thin film deposition apparatus for manufacturing an organic light emitting device according to the present invention for achieving the above object, the chamber is the internal pressure is controlled; A pair of substrate rollers installed in the chamber at predetermined intervals and comprising a substrate supply roller for supplying a film substrate wound around the outside and a substrate receiving roller for winding the film substrate outside; A mask supply roller installed inside the chamber below the substrate supply roller and supplying a rolled-type mask wound around the outside; and a mask receiving roller installed inside the chamber below the substrate-receiving roller and winding the rolled mask outside A pair of mask rollers;

Contact fixing means for fixing the film-like substrate and the rolled-type substrate to move in contact with the substrate receiving roller and the mask receiving roller by rotation of the substrate supplying roller and the mask supplying roller; A heating container installed on the bottom surface of the chamber between the mask supply roller and the mask receiving roller and for heating and subliming the organic matter contained therein; And a shutter capable of opening and closing the opening of the heating vessel.

The contact fixing means may include a pair of substrate supply auxiliary rollers and a mask supply auxiliary roller which are engaged with each other with the film-like substrate and the roll-shaped mask therebetween.

In addition, a plurality of alignment holes may be continuously formed at both side edges of the film substrate and the rolled mask in the longitudinal direction, and a guide rail having an alignment pin inserted into the alignment hole at the lower side of the mask may be further provided. .

In addition, a plurality of the heating vessels containing different organic materials may be sequentially spaced apart from each other on the bottom surface of the chamber.

The heating container may be accommodated in a cylindrical partition wall container having an open top.

In addition, one side of the heating vessel is formed with a power supply for applying power for sublimating the organic matter stored in the heating vessel, the heating vessel may be provided with a thermocouple for measuring the internal temperature.

In addition, an upper portion of the heating vessel may be concave than the lower portion, and the opening may be elongated in the width direction of the film-like substrate.

In addition, the shutter is supported by a support, the shutter may be moved from a horizontal state to a vertical state with respect to the bottom of the chamber.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram illustrating a thin film deposition apparatus for manufacturing an organic light emitting device according to an embodiment of the present invention, Figure 2 is a plan view for explaining the shape of the substrate and mask shown in Figure 1, Figure 3 1 is a perspective view for explaining the guide rail shown in Figure 1, Figure 4 is a cross-sectional view for explaining the fastening relationship between the substrate, the mask and the guide rail shown in Figure 1, Figure 5 is a perspective view showing the heating vessel shown in Figure 1 to be.

Thin film deposition apparatus for manufacturing an organic light emitting device according to the present invention, as shown in Figure 1 is provided with a chamber 2 is provided with an exhaust line 10 connected to a vacuum pump to control the pressure inside.

In addition, one side of the chamber 2 is a predetermined number of times the film type substrate 20 based on one end of the transparent polymer film 20 coated with a conductive inorganic material such as indium tin oxide (ITO). The substrate supply roller 12 wound on the outside is provided, and on the other side inside the chamber 2, the substrate receiving roller 14 on which the film type substrate 20 is wound a predetermined number of times based on the other end of the film type substrate 20. Is provided. Here, one end and the other end of the film-like substrate 20 is fixed to a predetermined portion of the outer surface of the substrate supply roller 12 and the substrate receiving roller 14, the film-type substrate is a polyethylene terephalate (PET) or PC It may be made of a material such as (Polycarbonate).

The substrate supply roller 12 rotates to one side by driving a motor to supply the film-shaped substrate 20 wound to the outside in the direction of the substrate receiving roller 14, and the substrate receiving roller 14 It rotates by the drive of a motor in the direction opposite to the rotation direction of the board | substrate supply roller 12, The film-type board | substrate 20 supplied by the rotation of the board | substrate supply roller 12 is wound up and accommodated outside.

In addition, a mask supply roller in which a roll type mask 22 is wound outside the predetermined number of times based on one end of the roll type mask 22 having a predetermined circuit pattern formed inside the chamber 2 under the substrate supply roller 12. (16) is provided, and the mask receiving roller (18) in which the other end of the rollable mask (22) is wound outside the predetermined number of times in the chamber (2) below the substrate receiving roller (14). ) Is provided. Here, one end and the other end of the roll-shaped mask 22 are fixed to predetermined portions of the outer surface of the mask supply roller 16 and the mask receiving roller 18, respectively.

In addition, the film-type substrate 20 and the roll-shaped mask 22 supplied by the rotation of the substrate supply roller 12 and the mask supply roller 16 are supplied to be fixed to each other by contact fixing means.

Here, the contact fixing means is a plurality of substrate supply auxiliary rollers 26 and mask supply auxiliary rollers 28, which are rotated by a motor by engaging each other with the film-type substrate 20 and the roll-shaped mask 22 being supplied therebetween. Is done. In addition, in order to contact-fix the film-like substrate 20 and the rollable mask 22, the film-type substrate 20 and the rolled-shaped mask 22 are spaced apart from each other at predetermined edges on both sides of the longitudinal direction. The plurality of alignment holes 70 are formed in succession, and the guide rails 24 as shown in FIG. 3 are provided at the lower edges of the film-like substrate 20 and the rolled mask 22. Here, the guide rail 24 is a first guide rail formed with a plurality of alignment pins 84 are inserted into the alignment hole 70 formed in the longitudinal side edge of the film-like substrate 20 and the roll-shaped mask 22 And a second guide rail 82 formed with a plurality of alignment pins 84 inserted into the alignment holes 70 formed at the other edges of the film-like substrate 20 and the roll-shaped mask 22.

Accordingly, the film-type substrate 20 and the rolled mask 22 have a plurality of alignment pins 84 formed on the guide rails 80 and 82 as shown in FIG. 4. The film-like substrate 20 and the roll-shaped mask 22 are fixed to each other by being inserted into the alignment hole 70 formed at the edge of the mold-type substrate 22.

In addition, the bottom surface of the chamber 2 is provided with a cylindrical partition vessel 30 which serves to allow the sublimed organic material to move in the direction in which the film-like substrate 20 is located.

In addition, inside the partition vessel 30, MTDATA (4,4,4-Tris (N-3-methylphenyl-amino) -triphenylamine) and TPD (N, N′-diphenrl-N, N′-bis- {3- First heating vessel 34, second heating vessel 40 and third containing a certain amount of different kinds of organic substances such as methylphenyl}-{1,1′-biphenyl} -4,4′-diamine}, Alq _3, etc. The heating vessel 48 is provided at predetermined intervals, and a thermocouple 60 capable of measuring an internal temperature is inserted into a predetermined portion of each of the heating vessels 34, 40, and 48, as shown in FIG. The other predetermined portions of each of the heating containers 34, 40, and 48 receive electric power applied from a power source (not shown) to heat a heater (not shown) to heat the organic material contained therein. The power supply unit 62 is formed.

Each of the heating containers 34, 40, and 48 may be formed of a film-type substrate so as to easily supply a sublimated organic material to the entire surface of the film-like substrate 20 and the roll-shaped mask 22. An opening formed to elongate in the width direction of 20) is formed, and the sublimed organic material has a linear flux because the upper portion is concave compared with the lower portion.

In addition, one side of the first heating vessel 34 is provided with a first shutter 38 supported by the first support 36, and one side of the second heating vessel 40 by the second support 44. A second shutter 46 is provided to be supported, and a third shutter 54 supported by the third support zone 52 is provided at one side of the third heating container 48. Each of the shutters 38, 46, and 54 is capable of opening and closing each opening of the heating vessels 34, 40, and 48 by moving from the horizontal state to the vertical state based on the bottom surface of the chamber 2.

Therefore, first, by operating the vacuum pump connected to the exhaust line 10 to form the internal pressure of the chamber 2 at room temperature to 10 ^-6 to 10 ^-7 Torr.

Next, by operating the motor, the substrate supply roller 12, the substrate supply auxiliary roller 26, and the substrate receiving roller 14 are rotated, and the mask supply roller 16, the mask supply auxiliary roller 28, and the mask accommodation are rotated. Rotate the roller 18. At this time, the film-type substrate 20 wound on the outside of the substrate supply roller 12 starts from the substrate supply roller 12 and passes through the upper portions of the heating containers 34, 40, and 48 to the outer surface of the substrate receiving roller 14. Wound around the outside of the mask supply roller 16, the rolled mask 22 also leaves the mask supply roller 16 and passes through an upper portion of each of the heating containers 34, 40, and 48. 18) is wound on the outer surface. At this time, the film type substrate 20 and the rollable mask 22 have alignment pins of the guide rails 80 and 82 at the alignment holes 70 formed at the edges of the film type substrate 20 and the rolled mask 22. 84) is stably contact fixed and moved.

Then, when the film-like substrate 20 and the rolled mask 22 move, the first shutter 38, the second shutter 46, and the third shutter 54 are sequentially opened.

Therefore, the organic material contained in the first heating vessel 34 is heated and sublimed to a temperature of about 100 ° C. by the power applied to the power supply 62 of the first heating vessel 34 from the power source, and is then heated to the roll-type mask 22. Deposited on the masked film-like substrate 20. Here, since the opening of the first heating container 34 extends in parallel to the width direction of the film-type substrate 20, the deposition process is uniformly performed on the entire surface of the film-type substrate 20, and the first heating container is The upper portion of 34 is concave in comparison with the lower portion, so the flux of the sublimed organic matter is increased.

Next, the organic material contained in the second heating vessel 40 is also heated and sublimed to a temperature of about 100 ° C. by electric power applied to the power supply unit 62 of the second heating vessel 40 from a power source, and thus the rolled mask 22 It is deposited on the film-like substrate 20 masked by. Here, since the opening of the second heating container 40 also extends in parallel with the width direction of the film type substrate 20, the deposition process is uniformly performed on the entire surface of the film type substrate 20, and the second heating container is formed. Since the upper portion of the 40 is concave compared with the lower portion, the flux of the sublimed organic matter is increased.

Finally, the organic material contained in the third heating vessel 48 is also heated and sublimed to a temperature of about 100 ° C. by the power applied to the power supply unit 62 of the third heating vessel 48 from the power source, and thus the roll-type mask 22 It is deposited on the film-like substrate 20 masked by. Here, since the opening of the third heating vessel 48 extends in parallel with the width direction of the film-type substrate 20, the deposition process is uniformly performed on the entire surface of the film-type substrate 20, and the third heating vessel is The upper portion of 48 is concave in comparison with the lower portion, so the flux of the sublimed organic matter is increased.

Accordingly, according to the present invention, by sequentially depositing a deposition process on a roll-type substrate and continuously performing an organic light emitting device manufacturing process, the manufacturing air of the organic light emitting device can be shortened, and an organic light emitting device manufacturing process is performed. By unifying the reduction of the external volume of the deposition equipment has the effect of reducing the area occupied by the deposition equipment inside the process chamber.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (8)

A chamber in which the internal pressure is controlled; A pair of substrate rollers installed in the chamber at predetermined intervals and comprising a substrate supply roller for supplying a film substrate wound around the outside and a substrate receiving roller for winding the film substrate outside; A mask supply roller installed inside the chamber below the substrate supply roller and supplying a rolled-type mask wound around the outside; and a mask receiving roller installed inside the chamber below the substrate-receiving roller and winding the rolled mask outside A pair of mask rollers; Contact fixing means for fixing the film-like substrate and the rolled-type substrate to move in contact with the substrate receiving roller and the mask receiving roller by rotation of the substrate supplying roller and the mask supplying roller; A heating container installed on the bottom surface of the chamber between the mask supply roller and the mask receiving roller and for heating and subliming the organic matter contained therein; And A shutter capable of opening and closing the opening of the heating vessel; Thin film deposition apparatus for manufacturing an organic light emitting device, characterized in that provided with. The method of claim 1, And the contact fixing means comprises a pair of substrate supply auxiliary rollers and a mask supply auxiliary roller which are interlocked with each other with the film-like substrate and the roll-type mask interposed therebetween. The method of claim 2, A plurality of alignment holes are continuously formed at both edges in the longitudinal direction of the film substrate and the roll-type mask, and a guide rail having an alignment pin inserted into the alignment hole is further provided below the mask. Thin film deposition apparatus for manufacturing the organic light emitting device. The method of claim 1, The chamber bottom surface portion is a thin film deposition apparatus for manufacturing an organic light emitting device, characterized in that a plurality of the heating vessel containing different organic materials are sequentially spaced apart from each other. The method of claim 4, wherein The heating container is a thin film deposition apparatus for manufacturing an organic light emitting device, characterized in that the upper portion is accommodated in the cylindrical partition container with an open top. The method of claim 1, One side of the heating vessel is formed with a power supply for applying power for sublimating the organic material stored in the heating vessel, the inside of the heating vessel is characterized in that the organic light emitting is provided with a thermocouple for measuring the internal temperature Thin film deposition apparatus for device manufacturing. The method of claim 1, The upper portion of the heating vessel is formed concave than the lower portion, the opening is thin film deposition apparatus for manufacturing an organic light emitting device, characterized in that formed in the elongated extending in the width direction of the film-like substrate. The method of claim 1, The shutter is supported by a support, wherein the shutter is thin film deposition apparatus for manufacturing an organic light emitting device, characterized in that to move from the horizontal state to the vertical state relative to the bottom surface of the chamber.