KR101032080B1 - Apparatus and method for preventing contamination of camera view port of evaporation chamber - Google Patents

Abstract

An apparatus and method for preventing contamination of a photographing window of a deposition chamber, the method comprising: a camera configured to photograph an alignment mark formed on the substrate through a photographing window illuminating the processing space; In the deposition chamber, the apparatus for preventing contamination of the photographing window of the deposition chamber according to the embodiment of the present invention comprises: a moving part for approaching and detaching the camera after the photographing of the alignment mark to the photographing window; And a heater positioned in the photographing window when the camera is separated from the photographing window, the heater contacting the photographing window to heat the photographing window, thereby heating the photographing window of the deposition chamber, and the organic source to the photographing window. Deposition is effective to prevent the photographing window from being contaminated.

Description

Apparatus and method for preventing contamination of camera view port of evaporation chamber}

The present invention relates to a photographing window contamination prevention apparatus and method of a deposition chamber, and more particularly, to a photographing window contamination prevention apparatus and method of a deposition chamber for preventing contamination of a photographing window that illuminates an interior of a deposition chamber.

In recent years, as the information age rapidly enters, a display technology that displays information by text or image so that the user can see the information anytime and anywhere is becoming more important.

Looking at the consumption trend of such display devices, conventional CRTs are bulky and heavy, so they are easy to use, such as liquid crystal displays (LCDs), plasma display panels (PDPs), organic electroluminescence display devices (OLEDs), and the like. The demand for flat panel displays is growing rapidly.

However, LCD is a passive device that basically requires a separate light source, not a self-light emitting device, and has technical limitations in viewing angle, response speed, and contrast ratio, and PDP has better characteristics than LCD in viewing angle and response speed, It is difficult, high power consumption, and expensive production costs.

On the other hand, the organic EL display (hereinafter referred to as 'OLED') is a self-luminous type, so it does not need a separate light source, has a small power consumption, has a fast response speed of 10 Hz or less, and has no problem in viewing angle. Any video up to can be realized realistically. In addition, the basic structure is simple, making it easy to manufacture and ultimately producing ultra-thin and ultra-light displays with thicknesses of 1 mm or less. Furthermore, the display is manufactured on a flexible substrate such as plastic instead of a glass substrate, making it thinner, lighter, and unbreakable. Research into developing a flexible display is ongoing.

In general, OLED has a structure of an anode (ITO), an organic thin film, and a cathode electrode. The organic thin film layer may be made of a single material, but is generally composed of a multilayer such as a hole transport layer (HTL), a light emitting layer, and an electron transport layer (ETL).

As described above, the OLED having a multi-layer structure forms holes supplied from the hole transport layer and electrons supplied from the electron transport layer to the light emitting layer to form excitons coupled to the hole-electrons, and then the excitons return to the ground state. The energy is emitted by the generated energy.

Meanwhile, as a typical thin film deposition method in an OLED manufacturing process having a multi-layer structure, a vapor deposition method (VD) may be mentioned.

That is, the source source in which the organic material is stored is heated to generate an organic source from the organic material, and a transfer gas is injected into the source source to supply the organic source into the chamber in which the deposition process is performed. At this time, the chamber is provided with a heating means such as a hot wire to prevent the gaseous organic source from being deposited on the inner wall of the chamber, and is configured to control the temperature inside the chamber.

Meanwhile, the chamber provides a processing space for a deposition process therein, and a mask and a substrate for pattern formation of the organic thin film are loaded therein. Alignment of the substrate and mask is essential to the organic thin film deposition process.

Therefore, the upper surface of the chamber is provided with a photographing window that illuminates the processing space, through which the alignment mark formed on the substrate and the mask is photographed, thereby measuring the alignment state of the substrate and the mask.

In the conventional deposition chamber, an organic source may be deposited on the photographing window that illuminates the processing space, and thus the photographing window may be contaminated, which makes it difficult to observe the processing space. This leads to a problem that acts as an obstacle to photographing the alignment marks formed on the substrate and the mask in the deposition process.

Accordingly, an object of the present invention is to provide an apparatus for preventing contamination of a photographing window of a deposition chamber and a method of preventing contamination using the same so as to prevent an organic source from being deposited on the photographing window of the deposition chamber to contaminate the photographing window.

A deposition chamber comprising a camera for providing a processing space for depositing an organic material on a substrate and photographing an alignment mark formed on the substrate through a photographing window that reflects the processing space, the deposition chamber according to an embodiment of the present invention. The photographing window contamination prevention apparatus may include: a moving unit approaching and detaching the camera after the photographing of the alignment mark to the photographing window; And a heater positioned in the photographing window when the camera is separated from the photographing window and in contact with the photographing window to heat the photographing window.

The moving unit may include: a first axis provided in a first direction in which the camera faces the photographing window; provided in a second direction in a direction crossing the first direction, and the first axis in the second direction A second shaft coupled to reciprocate; And a moving body coupled to the camera and the heater spaced apart in the second direction, and coupled to the first shaft to move up and down in the first direction.

The moving unit may further include a lifting unit configured to lift and lower the heater from the moving body in the first direction.

The first shaft and the second shaft are used as ball screws, and the moving body is coupled to an end portion of the first shaft facing the photographing window, and the moving part rotates the first shaft, so that the first axis is the first axis. A first rotating motor for elevating in one direction; And a second rotation motor rotating the second shaft to reciprocate the first shaft in the second direction according to the rotation of the second shaft.

The heater comprises a heating plate for generating heat by electrical energy; And a heat transfer plate coupled to the heat generating plate and transferring heat generated by the heat generating plate to the photographing window.

The photographing window contamination prevention device is coupled to one side of the heat transfer plate, the temperature sensor for sensing the temperature of the heat transfer plate; And a temperature controller configured to adjust the amount of current supplied to the heating plate according to the temperature sensed by the temperature sensor.

The heating plate may be a rubber heater, and the heat transfer plate may be an aluminum plate.

On the other hand, providing a processing space for depositing the organic material on the substrate, through the photographing window reflecting the processing space, the photographing window contamination prevention method of the deposition chamber having a camera for photographing the alignment mark formed on the substrate, A method for preventing contamination of a photographing window of a deposition chamber according to an embodiment of the present invention, the detaching step of detaching the camera from the photographing window; an alignment step of placing a heater for heating the photographing window on the photographing window; Lifting the heater to make contact with the photographing window; And a photographing window heating step of supplying power to the heater to heat the heater to heat the photographing window.

An apparatus for preventing contamination of a photographing window of a deposition chamber and a method of preventing contamination using the same according to the present invention has an effect of preventing an organic source from being deposited on a photographing window and contaminating the photographing window by heating the photographing window of the deposition chamber.

Hereinafter, an apparatus for preventing contamination of a deposition chamber according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic cross-sectional view of an organic material deposition apparatus in which a photographing window contamination prevention apparatus is installed according to an exemplary embodiment of the present invention. Referring to FIG. 1, the organic material deposition apparatus 100 includes a chamber 110 and a source supply unit 130.

The chamber 110 provides a processing space 110a for depositing an organic thin film on the substrate S. The chamber 110 is provided with a door 111 for loading and unloading the substrate S and the mask M on one side thereof. A stage 113 for supporting the substrate S is provided below the processing space 110a.

The source supply unit 130 generates an organic source by vaporizing the organic material, and supplies the organic source to the processing space 110a. The source supply unit 130 is supplied with a transfer gas for transferring the organic source to the processing space 110a, and a shower head (not shown) for injecting the organic source may be provided above the processing space 110a.

On the other hand, the substrate S has a first alignment mark Sa, and the mask M on which the pattern of the organic film foil to be deposited is formed on the substrate S has a second alignment mark Ma. At least one first alignment mark Sa of the substrate S is formed at each corner of the substrate S or at an edge portion thereof. The second alignment mark Ma of the mask M is formed at a position corresponding to the first alignment mark Sa.

The chamber 110 includes a photographing window 115 that illuminates the processing space 110a in order to measure the alignment state of the substrate S and the mask M on the upper surface. On the photographing window 115, a camera 150 for photographing the first alignment mark Sa and the second alignment mark Ma is provided. In this case, the camera 150 may include a sensor (not shown) that measures the distance between the upper surface of the chamber 110 and the camera 150.

Here, the mask M carried into the processing space 110a is located on the substrate S supported by the stage 113. Therefore, when the material of the mask M is opaque, the second alignment mark Ma may pass through the mask M so that the camera 150 can photograph the first alignment mark Sa of the substrate S. It may have a shape of a hole penetrating through the mask (M), in another embodiment, if the material of the mask (M) is transparent may be formed by printing on the surface of the mask (M).

In addition, in the above description, the mask M for pattern formation of the organic thin film is carried into the processing space 110a and is positioned on the substrate S, and the camera 150 is connected to the first alignment mark Sa. The second alignment mark Ma is photographed. However, when the formation of the pattern of the organic thin film to be deposited on the substrate S is not necessary, the camera 150 photographs only the first alignment mark Sa so that the substrate S is supported at the correct position of the stage 113. We can photograph whether it is.

On the other hand, the upper surface of the chamber 110 is provided with a photographing window contamination prevention apparatus 200 for preventing the organic source is deposited on the photographing window 115 to contaminate the photographing window 115.

FIG. 2 is an enlarged perspective view showing part “A” shown in FIG. 1, and FIG. 3 is a front view showing a photographing window contamination prevention apparatus according to an embodiment of the present invention in which a camera is mounted. 2 to 3, the photographing window contamination prevention apparatus 200 includes a moving unit 210 and a heater 230.

The moving unit 210 separates the camera 150, which has completed the photographing of the first and second alignment marks Sa and Ma, on the photographing window 115. The moving unit 210 may include a first axis 211 provided in a first direction in which the camera 150 faces the photographing window 115, and a second axis provided in a second direction crossing the first direction. 213 is provided. In other words, the first direction is the z-axis direction shown in FIG. 2, and the second direction is one of the x-axis direction and the y-axis direction shown in FIG. 2.

The moving body 215 is coupled to the end of the first shaft 211 toward the photographing window 115 so as to reciprocate in the first direction. The camera body 150 and the heater 230 are coupled to the moving body 215 spaced apart in the second direction. The first shaft 211 is coupled to the second shaft 213 so as to reciprocate in the second direction.

Here, as shown in FIGS. 2 to 3, the first shaft 211 and the second shaft 213 may be used as ball screws, respectively. The moving unit 210 may further include a first rotating motor 211a and a second rotating motor 213a for rotating the first shaft 211 and the second shaft 213.

Accordingly, the first shaft 211 is rotated by the first rotary motor 211a to be lifted in the first direction, and as the second shaft 213 is rotated by the second rotary motor 213a, It is reciprocated in two directions.

In another embodiment, although not shown, the first shaft 211 and the second shaft 213 are each constituted by a piston rod, and the moving unit 210 may move the first shaft 211 and the second shaft 213. A pump for driving may be further provided. In addition, the first shaft 211 linearly moves the moving body 215 in the first direction, and the second shaft 213 is transformed into all linear moving means for linearly moving the first axis 211 in the second direction. May be implemented.

Meanwhile, the moving unit 210 further includes a lifting unit 217 for elevating the heater 230 in the first direction from the moving body 215 separately from the camera 150. That is, before the camera 150 contacts the upper surface of the chamber 110, the moving body 215 stops moving in the first direction. In this case, the lifting unit 217 further moves the heater 230 in the first direction while the moving body 215 is stopped, so that the heater 230 contacts the photographing window 115. The lifting unit 217 may be composed of a pneumatic cylinder.

 On the other hand, the heater 230 is provided in order to contact the photographing window 115 to heat the photographing window 115 when the photographing camera 150 is separated from the photographing window 115.

4 is a cross-sectional view showing a heater of the photographing window contamination prevention apparatus according to the embodiment of the present invention. Referring to FIG. 4, the heater 230 includes a heat generating plate 231 and a heat transfer plate 233.

A rubber heater may be used as the heating plate 231. The rubber heater has a resistance element between two sheets of silicone comb, removes air therein, and presses two sheets of silicone rubber to form a thin sheet. Since the rubber heater has a thin sheet shape, heat can be uniformly transferred to the entire surface of the heating surface.

The heat transfer plate 233 is coupled to the heat generating plate 231, and transfers heat generated by the heat generating plate 231 to the imaging window 115. As the heat transfer plate 233, a metal material having high heat transfer efficiency such as an aluminum plate is preferably used.

The heat generating plate 231 and the heat transfer plate 233 are screwed to the fixing plate 235 facing the heat transfer plate 233 with the heat generating plate 231 interposed therebetween, and the fixing plate 235 is a lifting unit 217. Is coupled to.

The photographing window contamination prevention device 200 further includes a temperature sensor 237 and a temperature controller 239. The temperature sensor 237 is coupled to one side of the heat transfer plate 233 and senses the temperature of the heat transfer plate 233. The temperature controller 239 adjusts the amount of current supplied to the heating plate 231 according to the temperature sensed by the temperature sensor 237 to adjust the temperature of the heating plate 231.

The temperature controller 239 may simultaneously adjust the temperature of heating means (not shown) such as a heating wire that may be embedded in the inner wall of the chamber 110 so that the organic source is not deposited on the inner wall of the chamber 110.

Hereinafter, the operation of the photographing window contamination prevention apparatus of the deposition chamber according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings.

5A to 5C are enlarged views of an operation state of the apparatus for preventing contamination of a photographing window of a deposition chamber according to an exemplary embodiment of the present invention, in which the "A" portion shown in FIG. 1 is enlarged.

First, referring to FIG. 5A, the substrate S and the mask M are loaded into the processing space 110a, and the substrate S is supported by the stage 113, and the mask M is the substrate S. Located in the phase.

At this time, by the moving unit 210, the camera 150 and the heater 230 maintains a height that does not contact the upper surface of the chamber 110 and the photographing window 115, and along the second axis 213 One axis 211 is moved in the second direction. The camera 150 is located on the photographing window 115. The camera 150 positioned on the photographing window 115 photographs the first alignment mark Sa and the second alignment mark Ma through the photographing window 115.

Subsequently, referring to FIG. 5B, when the camera 150 finishes capturing the first alignment mark Sa and the second alignment mark Ma, the first axis 211 may have a second axis along the second axis 213. Is moved in the direction. As the first axis 211 is moved in the second direction, the camera 150 is separated from the photographing window 115, and the heating unit 250 is positioned on the photographing window 115.

Subsequently, referring to FIG. 5C, when the heating unit 250 is positioned on the photographing window 115, the moving body 230 moves along the first axis 211 in the first direction. As the moving body 230 is moved in the first direction, the camera 150 and the heating part 250 are moved in the first direction.

At this time, according to the installation space of the camera 150, before the camera 150 moved in the first direction is in contact with the upper surface of the chamber 110, the heater 253 may first be in contact with the photographing window (hereinafter, 'First case').

On the other hand, according to the installation space of the camera 150, before the heater 253 moving in the first direction is in contact with the photographing window 115, the camera 150 may first be in contact with the upper surface of the chamber (hereinafter , 'Second case').

Of course, in the second case, before the camera 150 contacts the upper surface of the chamber 110 by the sensor (not shown) included in the camera 150, the movement of the moving body 230 is stopped and the camera ( Preferably, 150 is in contact with the upper surface of the chamber 110 to prevent the camera 150 from being contaminated or damaged.

In the first case, the lifting unit 251 may not be driven. That is, in the first case, the heater 253 contacts the image capturing window 115 only by moving the moving body 230 along the first axis 211 in the first direction. Accordingly, a current is supplied to the heater 253 in contact with the imaging window 115, so that the imaging window 115 may be heated.

On the other hand, in the second case, the lifting unit 251 is driven. That is, in the second case, even if the movement of the moving body 230 moved in the first direction is stopped, since the heater 253 does not contact the photographing window 115, the lifting unit 251 is driven. The heater 253 is further moved in the first direction by the elevating unit 251 to contact the photographing window 115, and a current is supplied to the heater 253 in contact with the photographing window 115, thereby photographing the window 115. ) Can be heated.

Meanwhile, while the photographing window 115 is heated, the inner wall of the chamber 110 may be heated by a separate heating means (not shown). When the photographing window 115 and the inner wall of the chamber 110 begin to heat, an organic source is supplied to the processing space 110a and deposition of the organic thin film on the substrate S is performed. At this time, the inner window of the photographing window 115 and the chamber 110 is heated, and the organic source is not deposited on the inner wall of the photographing window 115 and the chamber 110.

As such, the photographing window contamination prevention apparatus 200 of the deposition chamber may heat the photographing window 115 to prevent the organic source from being deposited on the photographing window 115 to contaminate the photographing window 115. .

1 is a schematic cross-sectional view of an organic material deposition apparatus in which a photographing window contamination prevention apparatus is installed according to an exemplary embodiment of the present invention.

FIG. 2 is an enlarged perspective view illustrating part “A” shown in FIG. 1.

3 is a front view showing a photographing window pollution prevention apparatus according to an embodiment of the present invention equipped with a camera.

4 is a cross-sectional view showing a heater of the photographing window contamination prevention apparatus according to the embodiment of the present invention.

5A to 5C are enlarged views of an operation state of the apparatus for preventing contamination of a photographing window of a deposition chamber according to an exemplary embodiment of the present invention, in which the "A" portion shown in FIG. 1 is enlarged.

Description of the Related Art [0002]

110: deposition chamber

115: Shooting window

200: pollution prevention device for the photographing window of the deposition chamber

210: moving part

230: heater

Claims (8)

A deposition chamber providing a processing space for depositing an organic material on a substrate, and including a photographing window that illuminates the processing space. A camera spaced apart from the photographing window in a first direction to photograph the alignment mark formed on the substrate through the photographing window; A heater spaced apart from the camera in a second direction, the direction crossing the first direction; An elevating unit supporting the heater and elevating the heater in the first direction; A mobile body supporting the camera and the lifting unit together; A first shaft disposed in the first direction, the first shaft coupled to the mobile body to move up and down in the first direction; and A second shaft disposed in the second direction, the first shaft coupled to and reciprocated in the second direction, As the moving body is moved in the second direction along the second axis, the camera is separated from the photographing window, and the heater is conveyed to a position corresponding to the photographing window, And the elevating unit lifts the heater transferred to a position corresponding to the photographing window toward the photographing window so that the heater contacts the photographing window so that the heater heats the photographing window. Window pollution prevention device. delete delete According to claim 1, The first shaft and the second shaft are each made of a ball screw, the moving body is coupled to the end facing the shooting window of the first shaft, A first rotation motor to rotate the first shaft so that the moving body is elevated in the first direction according to the rotation of the first shaft; and And a second rotary motor configured to rotate the second shaft so that the first shaft is reciprocated in the second direction according to the rotation of the second shaft. The method of claim 1, wherein the heater, Heating plate to generate heat by electrical energy; And And a heat transfer plate coupled to the heat generating plate and transferring the heat generated by the heat generating plate to the image pickup window. 6. The method of claim 5, A temperature sensor coupled to one side of the heat transfer plate and configured to sense a temperature of the heat transfer plate; And And a temperature controller configured to adjust an amount of current supplied to the heating plate according to the temperature sensed by the temperature sensor. 6. The method of claim 5, The heating plate is a rubber heater, The heat transfer plate is a photographing window contamination prevention device of the deposition chamber, characterized in that the aluminum plate. delete

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