CN107012441B - Anti-pollution window for thermal evaporation coating instrument - Google Patents
Anti-pollution window for thermal evaporation coating instrument Download PDFInfo
- Publication number
- CN107012441B CN107012441B CN201710358616.XA CN201710358616A CN107012441B CN 107012441 B CN107012441 B CN 107012441B CN 201710358616 A CN201710358616 A CN 201710358616A CN 107012441 B CN107012441 B CN 107012441B
- Authority
- CN
- China
- Prior art keywords
- rocker
- cat eye
- seat
- sweeping
- curved mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an anti-pollution window for a thermal evaporation coating instrument, which comprises a condensation cabin, a cat eye, a semiconductor refrigerator and a sweeping module, wherein a refrigerator seat, a sweeping module seat, a sweeping rod cavity and an air duct are arranged in the condensation cabin, a cold guide piece of the semiconductor refrigerator is arranged in the air duct, so that the periphery of a horn mouth is cooled, metal steam is condensed around the horn mouth, and the metal steam is prevented from being condensed on a curved mirror. Dividing the observation hole into two sections of a cat eye hole and a bell mouth, and arranging the cat eye in the cat eye hole; a rocker of the sweeping module is arranged in a sweeping rod cavity of the condensation cabin, and a hairbrush on the rocker sweeps on a curved mirror and a horn port of the cat eye so as to remove a small amount of metal vapor which is not condensed around the horn port and is close to the curved mirror; the invention effectively improves the window cleanliness and definition of the thermal evaporation coating instrument, so that experimenters can observe the metal melting condition in the evaporation container anytime and anywhere for a long time, control the best moment of opening the baffle plate and ensure that high-quality coating is finished.
Description
Technical Field
The invention relates to the technical field of thermal evaporation coating, which is used for observing the metal melting process in an evaporation container, in particular to an anti-pollution window for a thermal evaporation coating instrument.
Background
The thermal evaporation coating is a technology for forming a solid film by melting a solid raw material to be formed into a film in an evaporation container by electric heating in a vacuum environment, vaporizing atoms or molecules from the surface to escape to form a vapor stream, evaporating the vapor stream onto a sample surface above the evaporation container, and condensing the vapor stream to form the solid film, and is called a thermal evaporation coating technology. The thermal evaporation coating technology is one of the physical vapor deposition PVD technologies with the longest history, is mainly used for evaporating Ag, al, cu, cr, au, ni, cd, pb and other metal materials, and can be widely applied to scientific research and small-batch preparation of thin film materials in universities and colleges. In the existing thermal evaporation coating instrument, a baffle is arranged between an evaporation container and a sample plate for fixing a sample, and the baffle is closed in the process of vacuumizing and increasing current to melt metal, namely, the baffle is blocked between the evaporation container and the sample, so that the circulation of air flow between the evaporation container and the sample is blocked, and the sample is prevented from being polluted by impurities on the surface of the metal, thereby reducing the quality of the coating. The baffle can be opened only after the metal material coated in the evaporation container is completely melted, so that pure metal vapor is evaporated on the surface of the sample and condensed into a solid film. When a thermal evaporation coating apparatus is used for coating metal, an experimenter needs to observe the melting degree of the metal in the evaporation container through a window so as to control the time for opening the baffle. The problem that exists is, if there is not the object shielding before the window, the metal vapor that permeates in the vacuum chamber can condense on the lens of window, and over time, the lens of observation window is covered by the metal film, makes the experimenter can't observe the degree of melting of metal clearly from the observation window, and the metal film is difficult to wash.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art and provides an anti-pollution window for a thermal evaporation coating instrument, wherein an observation hole, a sweeping rod cavity and a vertical air duct are arranged in a condensation cabin, the observation hole is divided into two sections of a cat eye hole and a bell mouth, and the cat eye is arranged in the cat eye hole; the cold guide plate of the semiconductor refrigerator is arranged in the air duct, so that the periphery of the horn mouth is cooled, and metal vapor is condensed around the horn mouth to prevent the metal vapor from being condensed on the curved mirror; a rocker of the sweeping module is arranged in a sweeping rod cavity of the condensation cabin, and a hairbrush on the rocker sweeps on a curved mirror of the cat eye and a horn mouth port so as to remove a small amount of metal vapor which is not condensed around the horn mouth and is close to the curved mirror; the invention effectively improves the window cleanliness and definition of the thermal evaporation coating instrument, so that experimenters can observe the metal melting condition in the evaporation container anytime and anywhere for a long time, control the best moment of opening the baffle plate and ensure that high-quality coating is finished.
The specific technical scheme for realizing the aim of the invention is as follows:
an anti-pollution window for a thermal evaporation coating instrument is characterized by comprising a condensation cabin, a cat eye, a semiconductor refrigerator and a sweeping module; the condensation cabin is a rectangular cavity body horizontally provided with an observation hole, the top of the observation hole is provided with a refrigerator seat, the bottom of the observation hole is provided with a sweeping module seat, the observation hole is axially formed by a section of cat eye hole and a section of bell mouth, a sweeping rod cavity is arranged between the cat eye hole and the bell mouth, and a vertical air duct is arranged from the refrigerator seat to the periphery of the bell mouth;
the cat eye consists of a shell, a curved mirror, a concave lens and a convex lens, wherein the shell is a cylindrical body, the curved mirror and the concave lens are sequentially arranged at one end of the shell, and the convex lens is arranged at the other end of the shell;
the semiconductor refrigerator is formed by connecting a fan with a semiconductor refrigerating sheet, wherein a heat conducting sheet is arranged above the semiconductor refrigerating sheet, and a cold conducting sheet is arranged below the semiconductor refrigerating sheet;
the sweeping module consists of a base, a stepping motor, a crank, a connecting rod and a rocker, wherein the rocker is a rod piece, the middle part and one end of the rod piece are respectively provided with a hinge point, the two sides of the other end of the rod piece are provided with brushes, the base is provided with a rocker shaft seat and a motor seat, the base, the crank, the connecting rod and the rocker form a crank rocker mechanism, the stepping motor is arranged on the motor seat of the base, the hinge point at one end of the rocker is hinged with the rocker shaft seat of the base, one end of the crank is fixedly connected with an output shaft of the stepping motor, and the connecting rod is connected with the other end of the crank and the hinge point at the middle part of the rocker;
the device comprises a condensation cabin, a semiconductor refrigerator, a semiconductor refrigerating sheet, a sweeping module, a sweeping rod cavity, a curved mirror, a horn mouth port and a reflector, wherein the cat eye is arranged in a cat eye hole of an observation hole on the condensation cabin;
the cat eye is provided with a bell mouth with one end of the curved mirror facing the observation hole;
the lens of the curved mirror of the cat eye contains coloring agents such as ferric oxide, cobalt oxide and the like.
The invention sets up observation hole, sweep bar cavity and vertical air duct in the condensation cabin, divide the observation hole into two sections of cat eye hole and bell mouth, and locate the cat eye in cat eye hole; the cold guide plate of the semiconductor refrigerator is arranged in the air duct, so that the periphery of the horn mouth is cooled, and metal vapor is condensed around the horn mouth to prevent the metal vapor from being condensed on the curved mirror; a rocker of the sweeping module is arranged in a sweeping rod cavity of the condensation cabin, and a hairbrush on the rocker sweeps on a curved mirror of the cat eye and a horn mouth port so as to remove a small amount of metal vapor which is not condensed around the horn mouth and is close to the curved mirror; the invention effectively improves the window cleanliness and definition of the thermal evaporation coating instrument, so that experimenters can observe the metal melting condition in the evaporation container anytime and anywhere for a long time, control the best moment of opening the baffle plate and ensure that high-quality coating is finished.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a schematic structural diagram of the sweeping module.
Detailed Description
Referring to fig. 1 and 2, an anti-pollution window for a thermal evaporation coating apparatus comprises a condensation chamber 1, a cat eye 2, a semiconductor refrigerator 3 and a sweeping module 4; the condensation cabin 1 is a rectangular cavity body horizontally provided with an observation hole 11, a refrigerator seat 12 is arranged at the top and a sweeping module seat 13 is arranged at the bottom, wherein the observation hole 11 is axially formed by a section of cat eye hole 111 and a section of bell mouth 112, a sweeping rod cavity 14 is arranged between the cat eye hole 111 and the bell mouth 112, and a vertical air duct 15 is arranged from the refrigerator seat 12 to the periphery of the bell mouth 112.
The cat eye 2 is composed of a casing 21, a curved mirror 22, a concave lens 23 and a convex lens 24, wherein the casing 21 is a cylindrical body, the curved mirror 22 and the concave lens 23 are sequentially arranged at one end of the casing 21, and the convex lens 24 is arranged at the other end of the casing 21.
The semiconductor refrigerator 3 is formed by connecting a fan 31 and a semiconductor cooling plate 32, and a heat conducting plate 33 is arranged above the semiconductor cooling plate 32, and a cold conducting plate 34 is arranged below the semiconductor cooling plate.
The sweeping module 4 is composed of a base 42, a stepping motor 43, a crank 44, a connecting rod 45 and a rocker 46, wherein the rocker 46 is a rod piece with a hinging point at the middle part and one end, brushes are arranged at two sides of the other end, a rocker shaft seat 421 and a motor seat 422 are arranged on the base 42, the crank 44, the connecting rod 45 and the rocker 46 form a crank rocker mechanism, the stepping motor 43 is arranged on the motor seat 422 of the base 42, the hinging point at one end of the rocker 46 is hinged with the rocker shaft seat 421 of the base 42, one end of the crank 44 is fixedly connected with an output shaft of the stepping motor 43, and the connecting rod 45 is connected with the other end of the crank 44 and the hinging point at the middle part of the rocker 46.
The peep hole 2 is arranged in the peep hole 111 of the observation hole 11 on the condensation chamber 1, the semiconductor refrigerator 3 is arranged on the refrigerator seat 12 at the top of the condensation chamber 1 through the semiconductor refrigerating sheet 32, the cold guide sheet 34 of the semiconductor refrigerator 3 is arranged in the air duct 15 of the condensation chamber 1, the sweeping module 4 is arranged on the sweeping module seat 13 at the bottom of the condensation chamber 1 through the base 42, the rocker 46 of the sweeping module 4 is arranged in the sweeping rod cavity 14 of the condensation chamber 1, and the hairbrush on the rocker 46 is brushed on the curved mirror 22 and the horn mouth 112 port of the peep hole 2.
The cat eye 2 is provided with a bell mouth 112 with one end of the curved mirror 22 facing the observation hole 11.
The curved mirror 22 of the cat eye 2 contains coloring agents such as ferric oxide, cobalt oxide and the like.
Examples
Referring to fig. 1 and 2, the invention provides an anti-pollution window for a thermal evaporation coating apparatus, which comprises a condensation cabin 1, a cat eye 2, a semiconductor refrigerator 3 and a sweeping module 4, wherein when in use, only the horn mouth 112 of the condensation cabin 1 is aligned with the observation mouth of an evaporation container and is installed, and for convenient operation, the invention is provided with a sweeping module 4 switch and a semiconductor refrigerator 3 switch outside the condensation cabin 1 for operation by experimental staff. The rotation speed of the stepping motor 43 is controlled through the switch of the sweeping module 4 so as to control the stopping, starting and swinging speeds of the rocker 46; the stopping and starting of the fan 31 and the semiconductor refrigerating sheet 32 are controlled by the switching of the semiconductor refrigerator 3.
Referring to fig. 1 and 2, in the present invention, an observation hole 11, a refrigerator seat 12, a sweeping module seat 13, a sweeping rod cavity 14 and a vertical air duct 15 are provided in a condensation chamber 1, the observation hole 11 is divided into two sections of a cat eye hole 111 and a bell mouth 112, and a cat eye 2 is provided in the cat eye hole 111; the cold guide sheet 34 of the semiconductor refrigerator 3 is arranged in the air duct 15 to cool the periphery of the horn mouth 112, and metal vapor is condensed around the horn mouth 112 to prevent the metal vapor from being condensed on the curved mirror 22; the sweeping module 4 is arranged on the sweeping module seat 13 at the bottom of the condensation chamber 1 through the base 42, the rocker 46 of the sweeping module 4 is arranged in the sweeping rod cavity 14 of the condensation chamber 1, and a brush on the rocker 46 brushes on the curved mirror 22 of the cat eye 2 and the port of the bell mouth 112 to remove a small amount of metal vapor which is not condensed around the bell mouth 112 and is close to the curved mirror 22; the invention effectively improves the window cleanliness and definition of the thermal evaporation coating instrument, so that experimenters can observe the metal melting condition in the evaporation container anytime and anywhere for a long time, control the best moment of opening the baffle plate and ensure that high-quality coating is finished.
The cat eye 2 of the invention is composed of a shell 21, a curved mirror 22, a concave lens 23 and a convex lens 24, wherein the shell 21 is a cylinder, the curved mirror 22 and the concave lens 23 are sequentially arranged at one end of the shell 21, and the convex lens 24 is arranged at the other end of the shell 21; in this embodiment, the distance between the concave lens 23 and the convex lens 24 of the cat eye 2 is 3 cm, the focal length of the concave lens 23 is 1 cm, and the imaging rule of the convex lens 24 indicates that the focal length of the convex lens 24 must be greater than the sum of the focal length of the concave lens 23 and the distance between the two lenses to form an upright reduced virtual image, so in this embodiment, the focal length of the convex lens 24 is selected to be 5 cm, and in this embodiment, the distance from the metal to be melted in the evaporation container to the human eye is controlled to be about 20 cm, which is beneficial for the experimenter to see the image formed by the object in the evaporation container.
The curved mirror 22 is mainly used for enlarging the viewing angle, and contains coloring agents such as ferric oxide, cobalt oxide and the like in the lens, so that the lens is yellow-green, can effectively absorb ultraviolet light and infrared light, greatly reduces the transmittance of visible light, and simultaneously reduces the damage of strong light emitted by high-melting point metal to human eyes during heating.
The sweeping module 4 of the invention is composed of a base 42, a stepping motor 43, a crank 44, a connecting rod 45 and a rocker 46, wherein the base 42, the crank 44, the connecting rod 45 and the rocker 46 form a crank rocker mechanism; the other end of the rocker 46 is provided with brushes with carbon fiber naps on two sides, and the brushes on the rocker 46 sweep over the curved mirror 22 of the cat eye 2 and the port of the bell mouth 112 to remove a small amount of metal vapor which is not condensed around the bell mouth 112 and is close to the curved mirror 22; to maximize metal vapor scavenging, the range of brush oscillation on rocker 46 completely covers the surface area of curved mirror 22 and the port of flare 112.
Claims (3)
1. An anti-pollution window for a thermal evaporation coating instrument is characterized by comprising a condensation cabin (1), a cat eye (2), a semiconductor refrigerator (3) and a sweeping module (4), wherein the condensation cabin (1) is a rectangular cavity which is horizontally provided with an observation hole (11), a refrigerator seat (12) is arranged at the top and a sweeping module seat (13) is arranged at the bottom, the observation hole (11) is axially formed by a section of cat eye hole (111) and a section of horn mouth (112), a sweeping rod cavity (14) is arranged between the cat eye hole (111) and the horn mouth (112), and a vertical air duct (15) is arranged between the refrigerator seat (12) and the periphery of the horn mouth (112);
the cat eye (2) is composed of a shell (21), a curved mirror (22), a concave lens (23) and a convex lens (24), wherein the shell (21) is a cylindrical body, the curved mirror (22) and the concave lens (23) are sequentially arranged at one end of the shell (21), and the convex lens (24) is arranged at the other end of the shell (21);
the semiconductor refrigerator (3) is formed by connecting a fan (31) and a semiconductor refrigerating sheet (32), wherein a heat conducting sheet (33) is arranged above the semiconductor refrigerating sheet (32), and a cold conducting sheet (34) is arranged below the semiconductor refrigerating sheet;
the sweeping module (4) is composed of a base (42), a stepping motor (43), a crank (44), a connecting rod (45) and a rocker (46), wherein the rocker (46) is a rod piece with a hinging point at the middle part and one end respectively, brushes are arranged at the two sides of the other end, a rocker shaft seat (421) and a motor seat (422) are arranged on the base (42), the crank (44), the connecting rod (45) and the rocker (46) form a crank rocker mechanism, the stepping motor (43) is arranged on the motor seat (422) of the base (42), the hinging point at one end of the rocker (46) is hinged with the rocker shaft seat (421) of the base (42), one end of the crank (44) is fixedly connected with an output shaft of the stepping motor (43), and the connecting rod (45) is connected with the other end of the crank (44) and the hinging point at the middle part of the rocker (46);
the cat eye (2) is arranged in a cat eye hole (111) of an observation hole (11) on the condensation cabin (1), the semiconductor refrigerator (3) is arranged on a refrigerator seat (12) at the top of the condensation cabin (1) through a semiconductor refrigerating sheet (32), a cold guide sheet (34) of the semiconductor refrigerator (3) is arranged in an air duct (15) of the condensation cabin (1), the sweeping module (4) is arranged on a sweeping module seat (13) at the bottom of the condensation cabin (1) through a base (42), a rocker (46) of the sweeping module (4) is arranged in a sweeping rod cavity (14) of the condensation cabin (1), and a brush on the rocker (46) sweeps on a curved mirror (22) of the cat eye (2) and a port of a horn mouth (112).
2. An anti-pollution window for a thermal evaporation coating apparatus according to claim 1, characterized in that the cat eye (2) is provided with a bell mouth (112) with one end of the curved mirror (22) facing the observation hole (11).
3. The anti-pollution window for a thermal evaporation coating apparatus according to claim 1, wherein the curved mirror (22) of the cat eye (2) comprises iron oxide and cobalt oxide colorants.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710358616.XA CN107012441B (en) | 2017-05-19 | 2017-05-19 | Anti-pollution window for thermal evaporation coating instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710358616.XA CN107012441B (en) | 2017-05-19 | 2017-05-19 | Anti-pollution window for thermal evaporation coating instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107012441A CN107012441A (en) | 2017-08-04 |
| CN107012441B true CN107012441B (en) | 2023-04-21 |
Family
ID=59450279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710358616.XA Active CN107012441B (en) | 2017-05-19 | 2017-05-19 | Anti-pollution window for thermal evaporation coating instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107012441B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207793418U (en) * | 2018-01-30 | 2018-08-31 | 北京铂阳顶荣光伏科技有限公司 | A kind of filming equipment |
| CN109046091B (en) * | 2018-08-13 | 2023-09-01 | 高邮市新浪爱拓化工机械设备有限公司 | Vacuum emulsification device convenient to inside is observed |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62247074A (en) * | 1986-04-17 | 1987-10-28 | Nec Corp | Thin film forming method |
| JPH02149671A (en) * | 1988-11-30 | 1990-06-08 | Shinko Electric Co Ltd | Monitor window of device for generating metallic vapor |
| JPH0544032A (en) * | 1991-08-13 | 1993-02-23 | Fujitsu Ltd | Film forming device |
| DE4427242A1 (en) * | 1994-08-03 | 1996-02-15 | Createc Fischer & Co Gmbh | Inspection or viewing window unit for vaporising process |
| KR101032080B1 (en) * | 2008-04-10 | 2011-05-02 | 엘아이지에이디피 주식회사 | Apparatus and method for preventing contamination of camera view port of evaporation chamber |
| CN203360565U (en) * | 2013-07-15 | 2013-12-25 | 淮安澳洋顺昌光电技术有限公司 | Explosion-proof visible window of ITO evaporator for LED chips |
| CN203411605U (en) * | 2013-08-09 | 2014-01-29 | 中建材光电装备（太仓）有限公司 | Vacuum chamber observation window device |
| CN104526149B (en) * | 2014-12-30 | 2016-10-19 | 中国航空工业集团公司北京航空制造工程研究所 | Anti-metallic vapour finder for vacuum environment |
| CN205152325U (en) * | 2015-09-17 | 2016-04-13 | 镇江超威纳米科技有限公司 | Vacuum coating equipment observation window |
| CN206887220U (en) * | 2017-05-19 | 2018-01-16 | 华东师范大学 | A kind of anti-pollution window for thermal evaporation plated film instrument |
-
2017
- 2017-05-19 CN CN201710358616.XA patent/CN107012441B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN107012441A (en) | 2017-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107012441B (en) | Anti-pollution window for thermal evaporation coating instrument | |
| US3494326A (en) | Spin-coating machine | |
| US9717396B2 (en) | Video endoscope with sideways viewing direction and method for mounting a video endoscope | |
| CN105721747B (en) | A kind of monitor camera | |
| CN103866240B (en) | Film deposition apparatus | |
| CN104837340A (en) | Cryogenic storage device and method for operating same | |
| CN108378815A (en) | A kind of laparoscope | |
| CN206887220U (en) | A kind of anti-pollution window for thermal evaporation plated film instrument | |
| CN105571238B (en) | Refrigerator with a door | |
| JP2008009298A (en) | Environment preservation apparatus for microscope and microscope | |
| JP3958554B2 (en) | Modulation contrast microscope | |
| CN109310293A (en) | Endoscope apparatus | |
| CA2342868C (en) | Method and apparatus for producing diffracted-light contrast enhancement in microscopes | |
| CN109207933A (en) | Ultra-thin film device is deposited in multifunctional vacuum | |
| CN214193432U (en) | Novel coating by vaporization machine | |
| CN212567126U (en) | Glimmer night vision sighting telescope | |
| CN112725737A (en) | Novel coating by vaporization machine | |
| CN208953784U (en) | A kind of waterproof antifogging type binoculars | |
| JPH03229632A (en) | Viewing port | |
| CN205152325U (en) | Vacuum coating equipment observation window | |
| CN208782922U (en) | The CCD camera component of intelligence single shaft CCD carving machine | |
| CN201622385U (en) | Sipit preventing eyepiece cap | |
| JP4854869B2 (en) | Microscope thermal insulation device | |
| RU2419118C2 (en) | Method of protecting optical device | |
| CN211426914U (en) | Telescope with defogging device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |