DE4427242A1 - Inspection or viewing window unit for vaporising process - Google Patents

Inspection or viewing window unit for vaporising process

Info

Publication number
DE4427242A1
DE4427242A1 DE19944427242 DE4427242A DE4427242A1 DE 4427242 A1 DE4427242 A1 DE 4427242A1 DE 19944427242 DE19944427242 DE 19944427242 DE 4427242 A DE4427242 A DE 4427242A DE 4427242 A1 DE4427242 A1 DE 4427242A1
Authority
DE
Germany
Prior art keywords
window
vacuum
temperature
vapor deposition
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19944427242
Other languages
German (de)
Inventor
Albrecht Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Createc Fischer and Co GmbH
Original Assignee
Createc Fischer and Co GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Createc Fischer and Co GmbH filed Critical Createc Fischer and Co GmbH
Priority to DE19944427242 priority Critical patent/DE4427242A1/en
Publication of DE4427242A1 publication Critical patent/DE4427242A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/84—Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/52—Means for observation of the coating process

Abstract

The heating coil (1) is arranged in a vacuum in front of the window (14) and uses a temperature sensor (12) to measure the exact window temperature. There is a generous viewing area and any window covering can be removed at a vaporising temperature up to 1000 deg.C, using continuous heating to prevent any covering or clouding-over of the window. The window unit is placed in a refined steel housing as mechanical protection or again is welded onto the vacuum flange before inserting in the housing. The window material is permeable to electromagnetic radiation and water cooling (16) fitted outside the housing shields the surrounds from the heat of the window. The window temperature is adjusted and regulated exactly by a PID circuit, using a computer link for convenience of servicing and operation.

Description

Die Erfindung betrifft ein bis 1000°C heizbares Fenster für Vakuumanlagen, um Sichtbeeinträchtigungen durch Kondensation des in der Anlage verdampften Materials auf der Glasoberfläche zu verhindern.The invention relates to a heatable to 1000 ° C window for vacuum systems Visual impairments due to condensation of the material evaporated in the system to prevent the glass surface.

In Hoch-Vakuum (HV) und Ultra-Hoch-Vakuum (UHV)-Anlagen, in denen Aufdampf- bzw. Epitaxieprozesse durchgeführt werden, finden Fenster, montiert auf unterschiedliche lösbare Flanschverbindungen Einsatz, um die Prozeßabläufe kontrollieren und in-situ messen zu können. Ein großes Problem ist dabei immer die Bedeckung des Fensters durch Materialkondensation auf der Glasinnenseite, was ein kontinuierliches Beobachten und Messen des Reaktionsprozesses in der UHV-Anlage unmöglich macht. Dies erfordert ein Ausbauen und Reinigen des Fensters, was jedoch ein Öffnen der Anlagen bedingt, und zudem nur kurzzeitig Abhilfe schafft. Ein Abdecken des Fensters mit im Vakuum eingebauten beweglichen Blenden verzögert lediglich die Reinigungsprozedur.In high vacuum (HV) and ultra high vacuum (UHV) systems in which vapor deposition or Epitaxial processes are performed, find windows mounted on different windows Detachable flange connections use to control process flows and in-situ to be able to measure. A major problem is always the covering of the window Material condensation on the inside of the glass, which means continuous observation and Measuring the reaction process in the UHV system makes it impossible. This requires one Removing and cleaning the window, which, however, requires opening the systems, and also only provides temporary relief. Covering the window with in a vacuum built-in movable panels only delays the cleaning procedure.

Bei dem hier erfundenen heizbaren Fenster wird eine Fensterbedeckung durch Heizen des Fensters bis zu einer Temperatur von 1000°C vermieden. Es wird die Kondensation von Materialien, die im Vakuum bei einer Temperatur bis 1000°C abdampfen, verhindert. Bereits kondensiertes Material kann durch Abdampfen entfernt werden. Das heizbare Fenster kann jederzeit während und nach dem Aufdampfprozeß betrieben werden. Eine Unterbrechung des Anlagenbetriebes zum Zweck der Fensterreinigung ist nicht mehr notwendig.In the heatable window invented here, window covering is achieved by heating the Avoid windows up to a temperature of 1000 ° C. It becomes the condensation of Materials that evaporate in a vacuum at a temperature of up to 1000 ° C are prevented. Already condensed material can be removed by evaporation. The heated window can be operated at any time during and after the vapor deposition process. A break plant operation for the purpose of window cleaning is no longer necessary.

Die Heizwicklung ist so konzipiert, daß sowohl das Fensterglas homogen auf Temperatur gehalten wird, als auch eine möglichst große freie Durchsicht gewährleistet ist. Ein eingebautes Thermoelement mißt die Fenstertemperatur und ermöglicht die exakte Kontrolle der gewünschten Temperatur mit einem geeigneten Regelkreis.The heating coil is designed so that both the window glass is homogeneous at temperature is maintained, as well as the greatest possible clear view is guaranteed. On built-in thermocouple measures the window temperature and enables the exact Control the desired temperature with a suitable control loop.

Das Fenster kann entweder konstant auf einer beliebigen Temperatur bis 1000°C gehalten werden, um eine Kondensation zu verhindern, oder sie wird im Falle von störenden Einflüssen der Heizung auf optische Meßmethoden während der Messung auf Raumtemperatur gesetzt. Nach Ende der Messung wird dann das möglicherweise kondensierte Material abgedampft.The window can either be kept constant at any temperature up to 1000 ° C to prevent condensation, or it will in the case of disruptive Influences of the heating on optical measurement methods during the measurement Room temperature set. At the end of the measurement, this may be the case condensed material evaporated.

Abbildung A zeigt die Anordnung der Heizung zum UHV-Fenster. Der Abstand des Heizdrahtes zur Fensteroberfläche ist so gewählt, daß die abgestrahlte Heizleistung möglichst homogen die Glasfläche aufheizt. Die Heizwicklung (1) besteht aus einem ringförmig gebogenen Tantaldraht, der auf einem Isolierkörper (2) aus pyrolytischem Bor- Nitrid (PBN) befestigt ist. Tantalbolzen (3) verbinden den Isolierkörper mit einem Tragering (4), mit dem die Heizwicklung im Gehäuse (5) befestigt wird. Abschirmbleche aus Tantalfolie (6/7/8) vermeiden eine zu starke Erwärmung der Umgebung.Figure A shows the arrangement of the heater to the UHV window. The distance between the heating wire and the window surface is selected so that the radiated heating power heats the glass surface as homogeneously as possible. The heating winding ( 1 ) consists of a ring-shaped bent tantalum wire, which is attached to an insulating body ( 2 ) made of pyrolytic boron nitride (PBN). Tantalum bolts ( 3 ) connect the insulating body to a support ring ( 4 ) with which the heating coil is fastened in the housing ( 5 ). Shielding sheets made of tantalum foil ( 6/7/8 ) prevent the surrounding area from overheating.

Über den Vakuum-Flansch (9) wird das heizbare Fenster mit der Vakuum-Anlage verbunden. In den Flansch sind seitlich die Zuführung für den Heizstrom (10) und für das Thermoelement (11) eingeschweißt. Da die Heizung mit einem Gleichstrom von maximal 12 Ampere bei 15 Volt betrieben wird, genügt eine isolierte Stromzuführung als Pluspol. Der Minuspol wird einfach über die Gehäusemasse verbunden. An die Thermo­ elementdurchführung wird ein Thermoelement (12) angebracht, welches die Fensteroberfläche berührt.The heatable window is connected to the vacuum system via the vacuum flange ( 9 ). The supply for the heating current ( 10 ) and for the thermocouple ( 11 ) are welded into the side of the flange. Since the heater is operated with a direct current of maximum 12 amps at 15 volts, an insulated power supply is sufficient as a positive pole. The negative pole is simply connected via the case ground. A thermocouple ( 12 ) is attached to the thermocouple bushing, which touches the window surface.

Der auf der anderen Gehäuseseite angebrachte Vakuum-Flansch (13) dient der Aufnahme des Vakuum-Fensters (14). Das Fenster ist topfähnlich ausgebildet, um den Glas-Metall- Übergang, der für das Einschweißen des Fensters in den Vakuum-Flansch notwendig ist, möglichst weit weg von der oberen Glasplatte zu plazieren. Dies ist sehr wichtig, da dort nur Maximaltemperaturen von ca. 200-400°C gestattet sind.The vacuum flange ( 13 ) attached to the other side of the housing serves to accommodate the vacuum window ( 14 ). The window is designed like a pot in order to place the glass-metal transition, which is necessary for welding the window into the vacuum flange, as far as possible from the upper glass plate. This is very important, since only maximum temperatures of approx. 200-400 ° C are allowed there.

Entgegen der sonstigen üblichen Art ist hier das Fenster umgekehrt in den Vakuum-Flansch eingeschweißt, damit es in das Gehäuse eingetaucht werden kann. Dadurch ist das empfindliche Fenster mechanisch geschützt, und das umhüllende Gehäuse vermindert die Gefahr eines Temperaturschockes durch äußere Einflüsse.Contrary to the usual way, here is the window vice versa in the vacuum flange welded in so that it can be immersed in the housing. That’s it sensitive windows are mechanically protected, and the enveloping housing reduces the Danger of a temperature shock due to external influences.

Typischerweise wird als Fenstermaterial poliertes Quarzglas (15) verwendet. Benötigt man jedoch Material anderer spektralen Empfindlichkeit, so muß lediglich das Fenster mit seinem Vakuumflansch ausgetauscht werden.Polished quartz glass ( 15 ) is typically used as the window material. However, if you need material with a different spectral sensitivity, you only have to replace the window with its vacuum flange.

Eine optionale Wasserkühlung (16), montiert an der Außenseite des Gehäuses, verhindert eine mögliche Wärmebeeinflussung der Fensterumgebung.An optional water cooling ( 16 ), mounted on the outside of the housing, prevents possible heat influences in the window environment.

Mit Hilfe eines geeigneten PID-Regelkreises kann die Temperatur des Fensters exakt geregelt werden. Ein Computeranbindung ermöglicht einen bequemen und zuverlässigen Betrieb.With the help of a suitable PID control loop, the temperature of the window can be exactly be managed. A computer connection enables a convenient and reliable Business.

Der Testbetrieb hat gezeigt, daß das Fenster zyklische Temperatursprünge auf 1000°C und wieder zurück auf Raumtemperatur unbeschadet übersteht, was für einen zuverlässigen Einsatz im Vakuum-Anlagen unerläßlich ist.The test operation has shown that the window cyclical temperature jumps to 1000 ° C and survives back to room temperature undamaged, what a reliable Use in vacuum systems is essential.

Gebrauch findet das heizbare Fenster überall dort, wo zur Prozeßkontrolle ein gleich­ bleibend guter Einblick in die Vakuum-Anlage zur Sichtkontrolle und in-situ Messung benötigt wird. Dabei kann sowohl bereits kondensiertes Material von der Glasoberfläche abgedampft werden, als auch eine Kondensation durch permanentes Heizen verhindert werden. Entsprechend der gewählten Meßmethode können Fenster aus verschiedenen Materialien eingesetzt werden. Unterschiedliche Flanschgrößen und Typen gestatten das Anpassen an beliebige Aufdampfanlagen.The heated window is used wherever there is an identical process control permanent good insight into the vacuum system for visual inspection and in-situ measurement is needed. This can both condensed material from the glass surface be evaporated, as well as preventing condensation from permanent heating will. Depending on the measurement method selected, windows can be made from different Materials are used. Different flange sizes and types allow this Adapt to any vapor deposition system.

Claims (5)

1. Heizbares Vakuum-Fenster für Aufdampfanlagen um Sichtbeeinträchtigungen durch Kondensation des in der Anlage verdampften Materials zu verhindern, dadurch gekennzeichnet, daß das Heizelement vor der Fensterscheibe im Vakuum plaziert ist, daß ein Temperatursensor die genaue Fenstertemperatur ermittelt, daß eine große freie Durchsichtfläche vorhanden ist, daß Fensterbedeckungen mit einer Abdampftemperatur bis 1000°C entfernt werden können, daß Fensterbedeckungen durch kontinuierliches Heizen verhindert werden, und daß das Vakuum-Fenster in ein Edelstahlgehäuse eingetaucht ist, um es vor mechanischen Belastungen zu schützen.1. Heated vacuum window for vapor deposition systems to prevent visual impairment due to condensation of the material evaporated in the system, characterized in that the heating element is placed in front of the window pane in a vacuum, that a temperature sensor determines the exact window temperature that a large clear viewing area is available that window coverings with an evaporation temperature up to 1000 ° C can be removed, that window coverings are prevented by continuous heating, and that the vacuum window is immersed in a stainless steel housing to protect it from mechanical loads. 2. Heizbares Vakuum-Fenster für Aufdampfanlagen nach Anspruch 1, dadurch gekennzeichnet, daß entgegen sonst üblicher Art das Vakuum-Fenster umgekehrt in den Vakuum- Flansch eingeschweißt ist, um es in das Gehäuse einzutauchen.2. Heated vacuum window for vapor deposition systems according to claim 1, characterized, that, contrary to what is otherwise customary, the vacuum window is reversed into the vacuum Flange is welded to immerse it in the housing. 3. Heizbares Vakuum-Fenster für Aufdampfanlagen nach Anspruch 1, dadurch gekennzeichnet, daß Fenstermaterialien verwendet werden, die eine Durchlässigkeit im Bereich der elektromagnetischen Strahlung haben.3. Heated vacuum window for vapor deposition systems according to claim 1, characterized, that window materials are used that have a permeability in the range have electromagnetic radiation. 4. Heizbares Vakuum-Fenster für Aufdampfanlagen nach Anspruch 1, dadurch gekennzeichnet, daß eine Wasserkühlung, außen an dem Gehäuse montiert, Wärmebeeinflussungen des heizbaren Vakuum-Fensters auf die Umgebung verhindert.4. Heated vacuum window for vapor deposition systems according to claim 1, characterized, that a water cooling, mounted on the outside of the housing, heat influences the heated vacuum window to the environment prevented. 5. Heizbares Vakuum-Fenster für Aufdampfanlagen nach Anspruch 1, dadurch gekennzeichnet, daß mit Hilfe eines geeigneten PID-Regelkreises die Fenstertemperatur exakt eingestellt und geregelt werden kann, und eine zusätzliche Computeranbindung einen sehr bequemen und komfortablen Betrieb ermöglicht.5. Heated vacuum window for vapor deposition systems according to claim 1, characterized, that the window temperature is set exactly with the help of a suitable PID control loop and can be regulated, and an additional computer connection a very enables convenient and convenient operation.
DE19944427242 1994-08-03 1994-08-03 Inspection or viewing window unit for vaporising process Withdrawn DE4427242A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19944427242 DE4427242A1 (en) 1994-08-03 1994-08-03 Inspection or viewing window unit for vaporising process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19944427242 DE4427242A1 (en) 1994-08-03 1994-08-03 Inspection or viewing window unit for vaporising process

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DE4427242A1 true DE4427242A1 (en) 1996-02-15

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DE19944427242 Withdrawn DE4427242A1 (en) 1994-08-03 1994-08-03 Inspection or viewing window unit for vaporising process

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1037506A2 (en) * 1999-03-05 2000-09-20 Board Of Regents, The University Of Texas Heater for high vacuum optical view port
DE102008048586A1 (en) 2008-09-23 2010-04-01 Von Ardenne Anlagentechnik Gmbh Insight device for vacuum plant, comprises a disk movably arranged in a process chamber on interior side directly before a sight glass in an adjustable defined distance, where bristles of resilient materials are directed on the disk
DE102011112698A1 (en) * 2011-06-21 2012-12-27 Von Ardenne Anlagentechnik Gmbh Optical control device used for vacuum treatment of glass substrate, has viewing window that is arranged at predetermined interior space within housing in which passage opening is extended within channel formed at housing
DE102012102489A1 (en) 2012-03-22 2013-09-26 Von Ardenne Anlagentechnik Gmbh Sight glass for vacuum treatment apparatus, for optically controlling processes in plant chamber, comprises a glass sheet and an enclosure, and an optical line, where glass sheet is prism, such that optical line is angled at least one time
CN107012441A (en) * 2017-05-19 2017-08-04 华东师范大学 A kind of anti-pollution window for thermal evaporation plated film instrument
CN109236140A (en) * 2018-10-30 2019-01-18 泰州市宝利电气有限公司 A kind of fire resistant doorsets

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1142158B (en) * 1956-05-09 1963-01-10 Wolfram Ferdinand Schultz Device to avoid fogging up of sight glasses, preferably on heated pressure vessels

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1142158B (en) * 1956-05-09 1963-01-10 Wolfram Ferdinand Schultz Device to avoid fogging up of sight glasses, preferably on heated pressure vessels

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP 04-3 50 166 A, Pat. Abstr. JP C-1051, 22.4.93, Vol. 17, No. 205 *
JP 61-1 06 770 A, Pat. Abstr. JP C-376, 03.10.86, Vol. 10, No. 292 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1037506A2 (en) * 1999-03-05 2000-09-20 Board Of Regents, The University Of Texas Heater for high vacuum optical view port
EP1037506A3 (en) * 1999-03-05 2001-10-24 Board Of Regents, The University Of Texas Heater for high vacuum optical view port
DE102008048586A1 (en) 2008-09-23 2010-04-01 Von Ardenne Anlagentechnik Gmbh Insight device for vacuum plant, comprises a disk movably arranged in a process chamber on interior side directly before a sight glass in an adjustable defined distance, where bristles of resilient materials are directed on the disk
DE102011112698A1 (en) * 2011-06-21 2012-12-27 Von Ardenne Anlagentechnik Gmbh Optical control device used for vacuum treatment of glass substrate, has viewing window that is arranged at predetermined interior space within housing in which passage opening is extended within channel formed at housing
DE102012102489A1 (en) 2012-03-22 2013-09-26 Von Ardenne Anlagentechnik Gmbh Sight glass for vacuum treatment apparatus, for optically controlling processes in plant chamber, comprises a glass sheet and an enclosure, and an optical line, where glass sheet is prism, such that optical line is angled at least one time
DE102012102489B4 (en) * 2012-03-22 2015-12-03 Von Ardenne Gmbh Sight glass for a vacuum treatment plant and its use
CN107012441A (en) * 2017-05-19 2017-08-04 华东师范大学 A kind of anti-pollution window for thermal evaporation plated film instrument
CN109236140A (en) * 2018-10-30 2019-01-18 泰州市宝利电气有限公司 A kind of fire resistant doorsets

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