KR101852953B1 - Manufacturing system for organic light emitting device, manufacturing method and donor substrate set - Google Patents

Abstract

The present invention relates to a system, a method, and a donor substrate set for manufacturing an organic light emitting device, which make it easy to align a deposition position of organic matters on a target substrate and three-dimensionally arrange parts. The system for manufacturing an organic light emitting device comprises a chamber; a first electric field application unit installed on the chamber and electrically connected to both ends of a first donor substrate longitudinally formed in an X-axis direction to apply an electric field to the first donor substrate; and a second electric field application unit installed on the chamber to prevent interference with the first electric field application unit and electrically connected to both ends of a second donor substrate longitudinally formed in a Y-axis direction to apply an electric field to the second donor substrate. The first and the second donor substrate are separated and arranged to intersect at a right angle to deposit organic matters on the second donor substrate from the first donor substrate on an area where the first and the second donor substrate overlap.

Description

[0001] The present invention relates to a manufacturing system and a method for manufacturing an organic light emitting device,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and a method for manufacturing an organic light emitting device and a donor substrate set, and more particularly, to a system and method for manufacturing an organic light emitting device and a donor substrate set that enable organic substances to be deposited on a target substrate.

Among the flat panel display devices, the organic light emitting display device has a response speed of 1 ms or less and has a high response speed, low power consumption, and self light emission, so there is no problem with the viewing angle, .

In addition, since it can be manufactured at a low temperature and the manufacturing process is simple based on the existing semiconductor process technology, it is attracting attention as a next generation flat panel display device. In addition, since the organic layer used in the organic light emitting display device emits light by itself, it can be used in an OLED lighting device by applying an electric field to the upper and lower ends of the multi-layer organic film after the entire deposition. OLED lighting is a point light source, while LED light is a point light source.

The formation of the organic thin film in the organic light emitting display device and OLED lighting manufacturing process can be broadly classified into a polymer type device using a wet process and a low molecular type device using a deposition process depending on the materials and processes used. For example, in the case of an inkjet printing method among the methods of forming a polymer or a low molecular weight light emitting layer, the materials of the organic layers other than the light emitting layer are limited, and there is a need to form a structure for inkjet printing on the substrate. When a light emitting layer is formed by a vapor deposition process, a separate metal mask is used. In a metal mask, the size of the metal mask must be increased as the size of the flat panel display increases. At this time, There is a problem that it is difficult to manufacture a large-sized device.

On the other hand, a technique of forming an organic light emitting layer by using line heating has already been disclosed. In this technique, the organic light emitting layer is first formed on the donor substrate, then the donor substrate and the element substrate are positioned to face each other, and then the row heat is heated on the donor substrate to deposit the organic light emitting layer formed on the donor substrate as a target substrate.

Conventionally, in order to uniformly mix a host and a dopant, an organic material in which a host and a dopant are unevenly mixed is first applied to a first donor substrate, and then the organic material is transferred into a chamber, and an electric field is applied to a first donor substrate The organic material is first deposited on the second donor substrate by heating the substrate, and then the second substrate is deposited on the target substrate by applying an electric field to the second donor substrate.

However, in order to deposit organic materials on the second order using these two donor substrates, it is very difficult to construct an electric field applying device for applying electric fields to the respective donor substrates, And there was a problem that it was difficult to design the equipment because the probability of interference with each other in the internal space of the limited chamber was high.

The object of the present invention is to solve the above-mentioned problems, and it is an object of the present invention to provide a donor substrate, which is long in the X-axis direction and can be flat- It is possible to optimize the design of the interior of the chamber by minimizing the interconnection between the donor substrate and the target substrate by minimizing the line of motion between the donor substrate and the target substrate and to deposit the organic material only at the overlapped portion The organic light emitting device manufacturing system according to the present invention is capable of easily aligning organic substance deposition positions on a target substrate, facilitating the three-dimensional arrangement of the components, And a method and a donor substrate set. However, these problems are illustrative, and thus the scope of the present invention is not limited thereto.

According to an aspect of the present invention, there is provided a system for manufacturing an organic light emitting device, including: a chamber; A first electric field applying device installed in the chamber and capable of applying an electric field to the first donor substrate in electrical contact with both ends of a first donor substrate formed in a long direction in the X axis direction; And a second electric field applying unit provided in the chamber so as not to interfere with the first electric field applying device and capable of applying an electric field to the second donor substrate in electrical contact with both end portions of a second donor substrate, Wherein the first donor substrate and the second donor substrate are configured to deposit organic material from the first donor substrate to the second donor substrate in an overlapping region of the first donor substrate and the second donor substrate, The substrates may be spaced apart from each other and staggered at an angle of 90 degrees.

In addition, according to the present invention, the first electric field application device includes: a movable electrode pad which is in electrical contact with both ends of the first donor substrate and is movable up and down; A pad elevating device for moving the movable electrode pad up and down; And a first power supply for supplying power to the movable electrode pad.

According to the present invention, the second electric field application device further comprises: a stationary electrode pad electrically connected to both ends of the second donor substrate and fixed inside the chamber; And a second power supply for supplying power to the fixed electrode pad.

Further, the manufacturing system of the organic light emitting device according to the present invention may include: the first donor substrate installed inside the chamber; And the second donor substrate disposed above the first donor substrate so that the organic material applied on the upper surface of the first donor substrate can be down-deposited onto the second donor substrate.

The organic light emitting device manufacturing system according to the present invention may further include a first donor substrate transfer device capable of transferring the first donor substrate coated with the organic material on the upper surface into the chamber.

The organic light emitting device manufacturing system according to the present invention may further include a target substrate transporting unit that transports the target substrate to the inside of the chamber so that the organic material deposited on the lower surface of the second donor substrate can be down- Device. ≪ / RTI >

According to an aspect of the present invention, there is provided a method of manufacturing an organic light emitting device, the method comprising: providing a chamber, a plurality of contact holes formed in the chamber and electrically connected to both ends of a first donor substrate, A first electric field applying device which is capable of applying an electric field to a donor substrate and a second electric field applying device which is provided in the chamber so as not to interfere with the first electric field applying device and which electrically contacts both ends of a second donor substrate, Wherein the first donor substrate and the second donor substrate are spaced apart from each other by 90 degrees so that the first donor substrate and the second donor substrate are separated from each other, So that the first donor substrate and the second donor substrate overlap each other at an overlapping area between the first donor substrate and the second donor substrate, To deposit the organic material into a plate.

According to an aspect of the present invention, there is provided a donor substrate set including: a first donor substrate formed to be long in the X-axis direction; And a second donor substrate spaced apart from the first donor substrate and arranged to be offset from the first donor substrate at an angle of 90 degrees so that the organic material can be deposited from the first donor substrate and elongated in the Y axis direction have.

According to some embodiments of the present invention as described above, the donor substrate, which is elongated in the X-axis direction, and the donor substrate, which is elongated in the Y-axis direction, are arranged alternately so as to be spaced apart from each other, It is possible to optimize the interior of the chamber by minimizing the interconnection between the donor substrate and the target substrate by minimizing the line of the donor substrate and the target substrate and to deposit the organic material only at the overlapped portion So that it is possible to easily align the organic material deposition position on the target substrate and to facilitate the three-dimensional arrangement of the parts, thereby making it possible to manufacture a large area organic light emitting device on the surface. Of course, the scope of the present invention is not limited by these effects.

1 is a perspective view showing a manufacturing system and a donor substrate set of an organic light emitting device according to some embodiments of the present invention.
FIGS. 2 to 6 are perspective views showing steps of a method of manufacturing an organic light emitting device according to some embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the thickness and size of each layer are exaggerated for convenience and clarity of explanation.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise "and / or" comprising "when used herein should be interpreted as specifying the presence of stated shapes, numbers, steps, operations, elements, elements, and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the figures, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention should not be construed as limited to the particular shapes of the regions shown herein, but should include, for example, changes in shape resulting from manufacturing.

Hereinafter, a method of depositing an organic material for an organic light emitting device and an organic light emitting device according to some embodiments of the present invention will be described in detail with reference to the drawings.

1 is a perspective view illustrating a system 100 for manufacturing an organic light emitting device and a donor substrate set 20 according to some embodiments of the present invention.

1, a system 100 for manufacturing an organic light emitting device according to some embodiments of the present invention includes a chamber 10, a first electric field applying device 31, Device 32 as shown in FIG.

For example, as shown in FIG. 1, the chamber 10 has an inner space capable of performing a deposition process of an organic material for an organic light emitting device. Although not shown, the chamber 10 includes a substrate 60 A gate for allowing the first donor substrate 21 of FIG. 1 to enter and exit can be formed on the other side, and a deposition environment such as a vacuum pressure can be formed in the inner space A vacuum pump, and various gas supply devices for supplying various kinds of vacuum pumps.

1, the first electric field applying device 31 is electrically connected to both ends of a first donor substrate 21 provided in the chamber 10 and elongated in the X-axis direction, And an electric field is applied to the first donor substrate 21 so that a line heat is generated when an electric field is applied to the first donor substrate 21 so that the organic material applied to the first donor substrate 21 The first donor substrate 22 and the second donor substrate 22 can be supplied with power.

More specifically, for example, as shown in FIG. 1, the first electric field applying device 31 includes a first electric field applying device 31 for applying an electric field to the first donor substrate 21, A movable electrode pad 311 that is in electrical contact with both ends of the movable electrode pad 311 and is movable upward and downward; a pad elevating and lowering device 312 that moves the movable electrode pad 311 up and down; The first power supply unit 313 may be configured to supply power to the first power supply unit 313.

Therefore, when the first donor substrate 21 is positioned at the predetermined position, the pad elevating and lowering device 312 moves the movable electrode pad 311 toward the first donor substrate 21, The first power supply device 313 may apply an electric field to the first donor substrate 21 after the substrate 21 is electrically connected to the first power supply device 313, When an electric field is applied to the donor substrate 21, a row of heat is generated, and organic substances 1 applied to the first donor substrate 21 may be first deposited on the surface of the second donor substrate 22.

1, the second electric field applying device 32 is installed in the chamber 10 so as not to interfere with the first electric field applying device 31, A device for applying an electric field to a second donor substrate (22) in electrical contact with both ends of a long second donor substrate (22), characterized in that when an electric field is applied to the second donor substrate (22) So that the organic material 1 applied to the second donor substrate 22 can be supplied to the target substrate 60 in a planar manner.

More specifically, for example, as shown in FIG. 1, the second electric field applying device 32 may apply electric field to the second donor substrate 22 fixed inside the chamber 10 A fixed electrode pad 321 electrically connected to both ends of the second donor substrate 22 so as to be fixed to the chamber 10 and a second power source supplying power to the fixed electrode pad 321, Device 322, as shown in FIG.

Therefore, the stationary electrode pad 321 assembled to the second donor substrate 22 can always be electrically connected to the second donor substrate 22, and the second power supply device 322 An electric field can be applied to the second donor substrate 22. When an electric field is applied to the second donor substrate 22, a string of heat is generated to deposit the deposited organic material 1 on the second donor substrate 22 May be secondarily deposited on the target substrate 60 in Fig.

Here, the manufacturing system 100 of the organic light emitting device according to some embodiments of the present invention may be configured such that the first donor substrate (21) and the second donor substrate (22) overlap each other in the overlapping region of the first donor substrate The first donor substrate 21 and the second donor substrate 22 may be spaced apart from each other such that the organic material 1 is deposited on the second donor substrate 22 from the first donor substrate 21 .

Therefore, the system 100 for manufacturing an organic light emitting device according to some embodiments of the present invention includes the first donor substrate 21 formed in a long direction in the X-axis direction, And the second donor substrate 22, which is elongated in the Y-axis direction, are staggered so as to be spaced apart from each other, and the organic material 1 is deposited on the overlapped portion to facilitate the construction of various devices, It is possible to optimally design the inside of the chamber 10 by minimizing the interconnection between the substrate 22 and the target substrate 60 to minimize the interference between the target substrate 60 and the target substrate 60. Organic materials can be deposited only at the overlapped portion, It is possible to easily align the organic material deposition position in the organic light emitting device, and to facilitate the three-dimensional arrangement of the components.

1, a system 100 for manufacturing an organic light emitting device according to some embodiments of the present invention includes a first donor substrate 21 and a second donor substrate 21 installed inside the chamber 10, The first donor substrate 22 provided above the first donor substrate 21 so that the organic material 1 coated on the upper surface of the first donor substrate 21 is deposited on the second donor substrate 22 ). ≪ / RTI >

For example, as shown in FIG. 1, the first donor substrate 21 and the second donor substrate 22 are overlapped with each other in a region where the first donor substrate 21 and the second donor substrate 22 overlap each other. The first donor substrate 21 and the second donor substrate 22 may be spaced apart from each other at an angle of 90 degrees so that the organic substance 1 is deposited.

Here, as shown in FIG. 1, the present invention may include a donor substrate set 20 comprising the first donor substrate 21 and the second donor substrate 22 described above, in addition to the system described above.

At this time, the length of the first donor substrate 21 is set so that the length of the overlapped portion plus the length of the overlapping portion of the movable electrode pads 311 can be set so that the movable electrode pads 311 can sufficiently contact the portion not overlapping the second donor substrate 22. [ The width of the movable electrode pads 311 is preferably equal to or larger than the width of the movable electrode pads 311.

The length of the second donor substrate 22 is set so that the length of the overlapped portion plus the width of the overlapping portion of the second donor substrate 31 is two The width of the fixed electrode pad 312 is preferably equal to or greater than the width of the fixed electrode pad 312.

That is, the donor substrate set 20 according to some embodiments of the present invention includes a first donor substrate 21 formed to be elongated in the X-axis direction and a second donor substrate 21 spaced apart from the first donor substrate 21, And a second donor substrate 22 disposed at an angle of 90 ° with the substrate 21 so as to be elongated in the Y-axis direction so that the organic substance 1 can be deposited from the first donor substrate 21.

A more detailed description of the operating relationship of the system 100 and the donor substrate set 20 in accordance with some embodiments of the present invention will be described in more detail in FIGS. 2-6.

FIGS. 2 to 6 are perspective views showing steps of a method of manufacturing an organic light emitting device according to some embodiments of the present invention.

2 to 6, a method of manufacturing an organic light emitting device according to some embodiments of the present invention will be described. First, as shown in FIG. 2, The host material and the dopant may be uniformly mixed with the organic material 1 on the upper surface of the first donor substrate 21 by using the organic material N. [

3, a system 100 for manufacturing an organic light emitting device according to some embodiments of the present invention is a system 100 for manufacturing an organic light emitting device according to some embodiments of the present invention, The first donor substrate transfer device 40 may further include a first donor substrate transfer device 40 capable of transferring the first donor substrate 21 into the chamber 10, The donor substrate 21 can be transferred into the chamber 10. At this time, the first donor substrate transfer device 40 can be applied to various types of transfer devices such as various transfer arms, transfer robots, and conveyor devices.

4, when the first donor substrate 21 is positioned at a predetermined position, the pad elevating and lowering device 312 moves the movable electrode pad 311 to the first donor substrate 21, And the first power supply device 313 applies an electric field to the first donor substrate 21 after the first power supply device 313 electrically connects the first donor substrate 21 to the first power supply device 313 When an electric field is applied to the first donor substrate 21, a string of heat is generated and the organic substance 1 applied to the first donor substrate 21 is transferred to the second donor substrate 22 The first deposition can be performed.

5, the first donor substrate 21, which has been deposited using the first donor substrate transfer device 40, may be transferred to the outside of the chamber 10 as shown in FIG.

5, a system 100 for manufacturing an organic light emitting device according to some embodiments of the present invention includes a substrate 100 on which the organic material 1 deposited on the lower surface of the second donor substrate 22 (50) capable of transferring the target substrate (60) into the chamber (10) so that the target substrate (60) can be top-down deposited on the substrate (60) 60 can be transferred into the chamber 10. At this time, the target substrate transfer device 60 can be applied to various types of transfer devices such as various transfer arms, transfer robots, and conveyor devices.

6, the stationary electrode pad 321 assembled to the second donor substrate 22 may be electrically connected to the second donor substrate 22 at all times, 2 power supply device 322 can apply an electric field to the second donor substrate 22. When an electric field is applied to the second donor substrate 22, The deposited organic material 1 may be secondarily deposited on the surface of the target substrate 60 of FIG. 5 to be described later.

Meanwhile, the present invention may include a manufacturing method using the manufacturing system 100 of an organic light emitting device.

1 to 6, a method of manufacturing an organic light emitting device according to some embodiments of the present invention includes a chamber 10, a substrate 10 provided in the chamber 10, The first electric field applying device 31 and the first electric field applying device 31 which are electrically contacted with both ends of the donor substrate 21 and can apply an electric field to the first donor substrate 21, A second electric field is applied to the second donor substrate 22 which is electrically connected to both ends of the second donor substrate 22 which is formed in the chamber 10 so as to be elongated in the Y- A manufacturing method using an organic light emitting device manufacturing system (100) including an apparatus (32), wherein the first donor substrate (21) and the second donor substrate (22) are spaced apart from each other The first donor substrate 21 and the second donor substrate 22 overlap each other, Which can deposit the organic material (1) in the second donor substrate 22 from the first donor substrate 21 in the region.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1: organic matter
10: chamber
20: donor substrate set
21: first donor substrate
22: second donor substrate
31: first electric field applying device
311: movable electrode pad
312: Pad lifting device
313: first power supply
32: second electric field applying device
321: Fixed Electrode Pad
322: Second power supply
40: first donor substrate transfer device
50: Target substrate transfer device
100: Manufacturing system of organic light emitting device

Claims (8)

chamber;
A first electric field applying device installed in the chamber and capable of applying an electric field to the first donor substrate in electrical contact with both ends of a first donor substrate formed in a long direction in the X axis direction; And
A second electric field applying unit that is provided in the chamber so as not to interfere with the first electric field applying device and is electrically contacted with both ends of a second donor substrate which is elongated in the Y axis direction to apply an electric field to the second donor substrate, An applicator;
Lt; / RTI >
The first donor substrate and the second donor substrate are spaced apart from each other by 90 degrees so that organic matter is deposited from the first donor substrate to the second donor substrate in the overlapping region of the first donor substrate and the second donor substrate, Respectively,
The first electric field applying device includes:
A first electrode pad in electrical contact with both ends of the first donor substrate;
Lt; / RTI >
The second electric field applying device includes:
A second electrode pad in electrical contact with both ends of the second donor substrate;
Lt; / RTI >
Wherein a length of the first donor substrate is equal to or greater than a sum of a length of a region where the first donor substrate and the second donor substrate overlap and a width of the two first electrode pads,
Wherein a length of the second donor substrate is equal to or greater than a sum of a width of a region where the first donor substrate and the second donor substrate overlap and a width of the two second electrode pads. The method according to claim 1,
The first electrode pad of the first electric field applying device is a movable electrode pad which is installed to move up and down,
The first electric field applying device includes:
A pad elevating device for moving the movable electrode pad up and down; And
A first power supply for supplying power to the movable electrode pad;
Wherein the organic light emitting device is a light emitting device. 3. The method of claim 2,
A second electrode pad of the second electric field applying device is a fixed electrode pad fixed inside the chamber,
The second electric field applying device includes:
A second power supply for supplying power to the fixed electrode pad;
Wherein the organic light emitting device is a light emitting device. The method of claim 3,
The first donor substrate installed inside the chamber; And
The second donor substrate being disposed above the first donor substrate so that the organic material applied on the upper surface of the first donor substrate is down-deposited onto the second donor substrate;
Wherein the organic light emitting device further comprises: 5. The method of claim 4,
A first donor substrate transfer device capable of transferring the first donor substrate coated with the organic material on an upper surface thereof into the chamber;
Wherein the organic light emitting device further comprises: 6. The method of claim 5,
A target substrate transfer device capable of transferring the target substrate into the chamber so that the organic material deposited on the lower surface of the second donor substrate can be down-deposited onto the target substrate;
Wherein the organic light emitting device further comprises: A chamber is provided in the chamber and is electrically contacted with both ends of a first donor substrate which is elongated in the X axis direction to apply an electric field to the first donor substrate and to be in electrical contact with both ends of the first donor substrate The first electric field applying device and the second electric field applying device are electrically connected to both ends of a second donor substrate provided in the chamber so as not to interfere with the first electric field applying device formed with the first electrode pad and elongated in the Y axis direction, And a second electric field applying device capable of applying an electric field to the donor substrate and having a second electrode pad electrically connected to both ends of the second donor substrate,
The first donor substrate and the second donor substrate are spaced apart from each other by 90 degrees so that the first donor substrate and the second donor substrate are offset from each other, And then,
Wherein a length of the first donor substrate is equal to or greater than a sum of a length of a region where the first donor substrate and the second donor substrate overlap and a width of the two first electrode pads,
Wherein a length of the second donor substrate is equal to or greater than a sum of a width of a region where the first donor substrate and the second donor substrate overlap and a width of the two second electrode pads. A first donor substrate which is elongated in the X-axis direction and forms an electrode pad contact portion capable of selecting application of an electric field by contact of an external first electrode pad; And
A second donor substrate spaced apart from the first donor substrate and arranged to be offset from the first donor substrate at an angle of 90 degrees so that the organic material can be deposited from the first donor substrate and elongated in the Y axis direction;
/ RTI >
Wherein a length of the first donor substrate is equal to or greater than a sum of a length of a region where the first donor substrate and the second donor substrate overlap and a width of two first electrode pads electrically contacting the first donor substrate,
Wherein a length of the second donor substrate is equal to or greater than a sum of a width of a region where the first donor substrate and the second donor substrate overlap and a width of two second electrode pads electrically in contact with the second donor substrate, set.

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