KR102849594B1 - 경사 격자들의 롤링 k 벡터들의 조절 - Google Patents

경사 격자들의 롤링 k 벡터들의 조절

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Publication number
KR102849594B1
KR102849594B1 KR1020217022110A KR20217022110A KR102849594B1 KR 102849594 B1 KR102849594 B1 KR 102849594B1 KR 1020217022110 A KR1020217022110 A KR 1020217022110A KR 20217022110 A KR20217022110 A KR 20217022110A KR 102849594 B1 KR102849594 B1 KR 102849594B1
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KR
South Korea
Prior art keywords
electrodes
ion beam
angle
substrate
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020217022110A
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English (en)
Korean (ko)
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KR20210094104A (ko
Inventor
조셉 씨. 올슨
모르간 에반스
루트거 마이어 티머만 티센
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Priority to KR1020257027607A priority Critical patent/KR20250133452A/ko
Publication of KR20210094104A publication Critical patent/KR20210094104A/ko
Application granted granted Critical
Publication of KR102849594B1 publication Critical patent/KR102849594B1/ko
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching for microworking, e. g. etching of gratings or trimming of electrical components
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/1506—Tilting or rocking beam around an axis substantially at an angle to optical axis
    • H01J2237/1507—Tilting or rocking beam around an axis substantially at an angle to optical axis dynamically, e.g. to obtain same impinging angle on whole area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3151—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Drying Of Semiconductors (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Mechanical Engineering (AREA)
KR1020217022110A 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절 Active KR102849594B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020257027607A KR20250133452A (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862780815P 2018-12-17 2018-12-17
US62/780,815 2018-12-17
PCT/US2019/064601 WO2020131398A1 (en) 2018-12-17 2019-12-05 Modulation of rolling k vectors of angled gratings

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020257027607A Division KR20250133452A (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절

Publications (2)

Publication Number Publication Date
KR20210094104A KR20210094104A (ko) 2021-07-28
KR102849594B1 true KR102849594B1 (ko) 2025-08-21

Family

ID=71071213

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020217022110A Active KR102849594B1 (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절
KR1020217022108A Active KR102717774B1 (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절
KR1020257027607A Pending KR20250133452A (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020217022108A Active KR102717774B1 (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절
KR1020257027607A Pending KR20250133452A (ko) 2018-12-17 2019-12-05 경사 격자들의 롤링 k 벡터들의 조절

Country Status (7)

Country Link
US (4) US11456152B2 (enExample)
EP (2) EP3899607A4 (enExample)
JP (3) JP7417611B2 (enExample)
KR (3) KR102849594B1 (enExample)
CN (2) CN113195151B (enExample)
TW (3) TWI846780B (enExample)
WO (2) WO2020131398A1 (enExample)

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EP3899607A4 (en) 2018-12-17 2023-03-01 Applied Materials, Inc. MODULATION OF ROLLING K-VECTORS OF ANGULAR GRIDS
US11487058B2 (en) 2020-08-13 2022-11-01 Applied Materials, Inc. Method for manufacturing optical device structures
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US12674927B2 (en) 2022-04-20 2026-07-07 Applied Materials, Inc. Method for roughness reduction in manufacturing optical device structures
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Also Published As

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JP2024122990A (ja) 2024-09-10
TW202030766A (zh) 2020-08-16
JP7417611B2 (ja) 2024-01-18
TW202037932A (zh) 2020-10-16
JP2022514238A (ja) 2022-02-10
KR20210094103A (ko) 2021-07-28
US12106935B2 (en) 2024-10-01
EP3899607A1 (en) 2021-10-27
KR20250133452A (ko) 2025-09-05
US20200194228A1 (en) 2020-06-18
KR102717774B1 (ko) 2024-10-15
EP3899607A4 (en) 2023-03-01
EP3898068A1 (en) 2021-10-27
TWI841643B (zh) 2024-05-11
JP2022512366A (ja) 2022-02-03
TW202439365A (zh) 2024-10-01
US20210027985A1 (en) 2021-01-28
CN113195151A (zh) 2021-07-30
US20200194227A1 (en) 2020-06-18
US11670482B2 (en) 2023-06-06
US11367589B2 (en) 2022-06-21
KR20210094104A (ko) 2021-07-28
CN113167948A (zh) 2021-07-23
US20230260746A1 (en) 2023-08-17
EP3898068A4 (en) 2022-11-23
TWI921809B (zh) 2026-04-11
WO2020131394A1 (en) 2020-06-25
US11456152B2 (en) 2022-09-27
WO2020131398A1 (en) 2020-06-25
JP7494179B2 (ja) 2024-06-03
TWI846780B (zh) 2024-07-01
CN113195151B (zh) 2024-04-16

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