KR102747938B1 - 반송 장치 및 물품 제조 방법 - Google Patents

반송 장치 및 물품 제조 방법 Download PDF

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Publication number
KR102747938B1
KR102747938B1 KR1020200179287A KR20200179287A KR102747938B1 KR 102747938 B1 KR102747938 B1 KR 102747938B1 KR 1020200179287 A KR1020200179287 A KR 1020200179287A KR 20200179287 A KR20200179287 A KR 20200179287A KR 102747938 B1 KR102747938 B1 KR 102747938B1
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South Korea
Prior art keywords
movable element
permanent magnets
permanent magnet
magnet group
force
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KR1020200179287A
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English (en)
Korean (ko)
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KR20210082088A (ko
Inventor
다케시 야마모토
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캐논 가부시끼가이샤
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Publication of KR20210082088A publication Critical patent/KR20210082088A/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
    • B60L13/04—Magnetic suspension or levitation for vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020200179287A 2019-12-24 2020-12-21 반송 장치 및 물품 제조 방법 Active KR102747938B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019233231A JP7479835B2 (ja) 2019-12-24 2019-12-24 搬送装置及び物品の製造方法
JPJP-P-2019-233231 2019-12-24

Publications (2)

Publication Number Publication Date
KR20210082088A KR20210082088A (ko) 2021-07-02
KR102747938B1 true KR102747938B1 (ko) 2024-12-31

Family

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Family Applications (1)

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KR1020200179287A Active KR102747938B1 (ko) 2019-12-24 2020-12-21 반송 장치 및 물품 제조 방법

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Country Link
US (2) US11370621B2 (enExample)
JP (1) JP7479835B2 (enExample)
KR (1) KR102747938B1 (enExample)
CN (1) CN113023372A (enExample)

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* Cited by examiner, † Cited by third party
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JP7479835B2 (ja) * 2019-12-24 2024-05-09 キヤノン株式会社 搬送装置及び物品の製造方法
TW202516998A (zh) 2020-02-20 2025-04-16 美商布魯克斯自動機械美國公司 線性電機、電磁輸送帶基板輸送裝置、及用於電磁輸送帶基板輸送裝置的方法
EP3955436B1 (de) * 2020-08-14 2024-01-17 Schneider Electric Industries SAS Linearmotorsystem und betriebsverfahren für ein solches
JP7757072B2 (ja) * 2021-07-28 2025-10-21 キヤノン株式会社 搬送システム、搬送システムの制御方法、加工システム、物品の製造方法及びモータ
US12384634B2 (en) * 2021-08-30 2025-08-12 Yamaha Hatsudoki Kabushiki Kaisha Conveyance device
US12206342B2 (en) 2021-10-29 2025-01-21 Brooks Automation Us, Llc Substrate processing apparatus
JP2023087446A (ja) * 2021-12-13 2023-06-23 キヤノン株式会社 搬送装置
JP2023174388A (ja) * 2022-05-27 2023-12-07 キヤノン株式会社 搬送システム、成膜装置、搬送システムの制御方法及び物品の製造方法

Citations (1)

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JP2012138522A (ja) * 2010-12-27 2012-07-19 Canon Anelva Corp 基板搬送装置及び真空処理装置

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JPH0616240A (ja) * 1992-07-01 1994-01-25 Sumitomo Electric Ind Ltd 磁気浮上搬送車の停止保持装置
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DE102009002606A1 (de) * 2009-04-23 2010-10-28 Robert Bosch Gmbh Umlaufende Transportvorrichtung mit verbessertem Antriebskonzept
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KR101386685B1 (ko) * 2012-04-20 2014-04-24 세메스 주식회사 기판 처리 장치
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KR20150005110A (ko) * 2013-07-04 2015-01-14 진형일 자기부상장치, 자기부상장치를 이용한 이송장치, 및 자기부상장치를 이용한 가이드장치
KR101531656B1 (ko) 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
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JP7066333B2 (ja) * 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構
JP7179488B2 (ja) * 2018-05-11 2022-11-29 キヤノン株式会社 搬送システムおよびその制御方法
US10944314B2 (en) * 2018-08-08 2021-03-09 Canon Kabushiki Kaisha Transport system, mover, control apparatus, and control method
JP7479835B2 (ja) * 2019-12-24 2024-05-09 キヤノン株式会社 搬送装置及び物品の製造方法
JP7451205B2 (ja) * 2020-02-07 2024-03-18 キヤノン株式会社 搬送装置および物品の製造方法

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Publication number Priority date Publication date Assignee Title
JP2012138522A (ja) * 2010-12-27 2012-07-19 Canon Anelva Corp 基板搬送装置及び真空処理装置

Also Published As

Publication number Publication date
JP7479835B2 (ja) 2024-05-09
US11370621B2 (en) 2022-06-28
US11851274B2 (en) 2023-12-26
JP2021102495A (ja) 2021-07-15
US20220281698A1 (en) 2022-09-08
CN113023372A (zh) 2021-06-25
KR20210082088A (ko) 2021-07-02
US20210188569A1 (en) 2021-06-24

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