KR102664951B1 - Handler for testing electronic devices - Google Patents

Abstract

The present invention relates to a handler for testing electronic components.
The handler for testing electronic components according to the present invention can accommodate a test tray loaded with electronic components and has a moving chamber that moves along a designated moving path. Additionally, the moving chamber may have a first chamber portion for controlling the temperature of the electronic components loaded on the test tray and a second chamber portion for returning the temperature of the electronic components loaded on the test tray to room temperature.
According to the present invention, by configuring a mobile chamber, a plurality of test windows can be provided in the form of a cell, so installation space compared to processing capacity can be significantly reduced, and by dividing one chamber into two and setting their functions differently, the installation area can be minimized. You can.

Description

Handler for testing electronic components {HANDLER FOR TESTING ELECTRONIC DEVICES}

The present invention relates to a handler for testing electronic components.

Produced electronic components are tested by testers and then divided into good and defective products, and only good products are shipped.

The electrical connection between the tester and electronic components is made by a handler for testing electronic components (hereinafter abbreviated as 'handler'), and there are various types of handlers depending on the type of electronic component. Among them, the present invention relates to a handler equipped with a test tray on which a large number of electronic components can be loaded.

The handler to which the test tray is applied has various forms, including Korean Patent Publication No. 10-2013-0105104, and generally includes a loading machine 110, a first chamber 120, and a test chamber as shown in the conceptual plan view of FIG. 1. It includes (130), a connector 140, a second chamber 150, and an unloading machine 160.

The loading machine 110 loads the electronic components to be tested loaded on the customer tray (CT ₁ ) onto the test tray (TT) at the loading position (LP: LOADING POSITION).

The first chamber 120 is provided to pre-adjust (preheat or precool) the temperature according to test temperature conditions prior to testing the electronic components loaded on the received test tray (TT).

The test chamber 130 is provided to test electronic components of the test tray (TT) that have been preheated/precooled in the first chamber 120 and then transferred to the test position (TP: TEST POSITION). That is, the test chamber 130 is provided to maintain the temperature of the electronic components loaded on the received test tray TT at test temperature conditions.

The connector 140 electrically connects the electronic components loaded on the test tray (TT) at the test position (TP) to the tester.

The second chamber 150 is provided to cool the electronic components in a heated state of the test tray (TT) transferred from the test chamber 130 and return them to room temperature or a certain temperature that does not cause problems during unloading. .

The unloading machine 160 unloads electronic components from the test tray (TT) at the unloading position (UP: UNLOADING POSITION), sorts them by test grade, and moves them to an empty customer tray (CT ₂ ).

As seen, the test tray (TT) circulates along a circular path (CC) that leads back to the loading position (LP) through the loading position (LP), testing position (TP), and unloading position (UP). For this purpose, a number of transporters (not shown) transport the test tray (TT) in each section forming the circulation path (CC).

Meanwhile, the handler 100 as shown in FIG. 1 has a structure that places the test chamber 130 between the first chamber 110 and the second chamber 150 and transports the test tray (TT) in a closed circulation path (CC). Because it has a structured structure, it is difficult to provide more than four test windows (TW) when considering the width and height of the equipment. Here, the test window (TW) refers to a window where electronic components are electrically connected to the tester, and one test tray (TT) corresponds to one test window (TW). Of course, the tester (TESTER) is coupled to the handler 100 through the test window (TW).

Therefore, the number of electronic components that can be tested at one time is limited to the number loaded on at least 1 to as many as 3 test trays (TT), which causes the handler 100, which cannot expand its size indefinitely, to have limited processing capacity. has a limit of

The purpose of the present invention is to provide a technology that allows one temperature control chamber to supply test trays to multiple test windows or receive test trays from multiple test windows.

A handler for testing electronic components according to a first aspect of the present invention includes a moving chamber that can accommodate a test tray loaded with electronic components and moves along a predetermined movement path; a transfer device that transfers the mobile chamber on the movement path; It is provided on at least one side of the movement path so that a test tray can be received from the mobile chamber or a test tray can be given to the mobile chamber, and is coupled to the test window so that electrical characteristics of electronic components loaded on the test tray can be tested. A connector that electrically connects or disconnects electronic components to a tester; and at least one mover that moves the test tray between the move chamber and the connector; Includes.

The at least one mobile device may be installed in the mobile chamber and move together with the mobile chamber.

The moving chamber includes a first chamber portion for controlling the temperature of electronic components loaded on a test tray; and a second chamber portion arranged vertically side by side with the first chamber portion and configured to return the temperature of the electronic components loaded on the test tray to room temperature. It includes, and the first chamber portion and the second chamber portion are separated from each other by a mutual separation wall.

The first chamber part includes an opening/closing door that opens and closes a first moving hole for receiving a test tray in a loading position or sending a test tray to the connector, and the second chamber part includes an opening/closing door for sending a test tray to an unloading position. It has a second moving hole for receiving a test tray coming from the connector, and the inside of the second chamber portion communicates with the outside through the second moving hole.

an elevator that elevates the moving chamber to a position where the first chamber part can send a test tray to the connector, or a position where the second chamber part can receive a test tray from the connector; It may further include.

There are a plurality of test windows, and the connector is provided for each of the plurality of test windows.

a plurality of test chambers that accommodate test trays coming from the moving chamber and are provided on each test window side to maintain test temperature conditions for electronic components; It further includes, and the moving chamber and the test chamber have a one-to-many number relationship.

The plurality of connectors described above are divided and arranged on both sides of the movement path.

a test chamber for receiving a test tray from the moving chamber and maintaining the temperature of electronic components loaded on the received test tray at a test temperature condition; and a circuit breaker for blocking external air from the electronic components of the test tray on the path from the mobile chamber to the test chamber. It may further include.

The handler includes a first buffer chamber where a test tray loaded with electronic components to be tested waits before moving to the moving chamber; and a second buffer chamber that accommodates and waits for a test tray loaded with test-completed electronic components coming from the moving chamber. It further includes, and the first buffer chamber and the second buffer chamber may be provided as a fixed type.

Before the test tray moves from the inside of the first buffer chamber to the inside of the moving chamber, the thermal state inside the first buffer chamber is changed through the sealed passage formed between the first buffer chamber and the moving chamber. It is transferred to the inside of the chamber, and the temperature inside the moving chamber is assimilated to the temperature inside the first buffer chamber.

A handler for testing electronic components according to a second aspect of the present invention includes a receiving chamber capable of accommodating a test tray loaded with electronic components; It is equipped to receive a test tray from the receiving chamber or give a test tray to the receiving chamber, and electrically tests the electronic components on a tester coupled to the test window so that the electrical characteristics of the electronic components loaded on the test tray can be tested. A connector that connects or disconnects and is provided on one side of the receiving chamber; and a plurality of movers for moving test trays between the receiving chamber and the connector; It includes: a first chamber portion for controlling the temperature of electronic components loaded on the test tray; and a second chamber part that is integrally coupled with the first chamber part and arranged side by side, but is separated from the first chamber part by a separation wall, and is used to return the temperature of the electronic components loaded on the test tray to room temperature. ; Includes, some of the plurality of movers move the test tray from the first chamber portion to the connector, and other portions move the test tray from the connector to the second chamber portion.

The first chamber portion and the second chamber portion are arranged side by side in the vertical direction.

According to the present invention, the following effects are achieved.

First, by configuring a mobile chamber that can access the test window, multiple test windows can be provided in the form of a cell, thereby minimizing the size of the handler compared to the processing capacity.

Second, since one mobile chamber can be connected to multiple test chambers (or connectors) while moving, the number of transporters to route the test tray to each test chamber is greatly reduced, further minimizing the size and lowering the production cost. It can also bring savings.

Third, since cells can be increased or decreased with the same structure, it becomes easier to manufacture handlers according to customer requests. In other words, no separate design is required to add or subtract capacity.

Fourth, because one mobile chamber can access each test chamber (or connector), dividing the mobile chamber into two areas and setting their functions differently allows testing in various temperature environments while reducing the size of the handler. It can be further minimized.

Fifth, it may be an optimized equipment for equipment that requires a test time longer than the environment creation time in the mobile chamber.

1 is a conceptual plan view of a conventional handler for testing electronic components.
Figure 2 is a conceptual plan view of a handler according to the first embodiment of the present invention.
Figure 3 is a schematic front cross-sectional view of the moving chamber applied to the handler of Figure 2.
Figure 4 is a conceptual perspective view of the elevator cam applied to the moving chamber of Figure 3.
Figure 5 is a reference diagram for explaining the operation of the lifting cam of Figure 4.
FIG. 6 is a conceptual front view of an elevator applied to the handler of FIG. 2.
FIG. 7 is a reference diagram for explaining the operation of the elevator of FIG. 6.
FIG. 8 is a conceptual plan view of a conveyor applied to the handler of FIG. 2.
FIG. 9 is a conceptual front cross-sectional view of the test chamber applied to the handler of FIG. 2.
FIG. 10 is a conceptual side cross-sectional view of a connector applied to the handler of FIG. 2.
FIG. 11 is a reference diagram for explaining the operation of the connector of FIG. 10.
FIG. 12 is a conceptual perspective view of a mobile device applied to the handler of FIG. 2.
FIG. 13 is a reference diagram for explaining the operation of the mobile device of FIG. 12.
FIG. 14 is a conceptual front cross-sectional view of the circuit breaker applied to the handler of FIG. 2.
FIG. 15 is a reference diagram for explaining the operation and function of the circuit breaker of FIG. 12.
Figure 16 is a conceptual plan view of a handler according to a second embodiment of the present invention.
Figure 17 is a conceptual plan view of a handler according to a modification of the second embodiment of the present invention.
Figure 18 is a conceptual plan view of a handler according to a third embodiment of the present invention.
Figure 19 is a reference diagram showing how the handlers of Figure 18 are installed and used in parallel.
Figure 20 is a conceptual plan view of a handler according to a fourth embodiment of the present invention.

Preferred embodiments according to the present invention will be described with reference to the accompanying drawings, but for brevity of explanation, descriptions of overlapping or identical configurations will be omitted or compressed as much as possible.

<First embodiment>

1. General description of composition

Figure 2 is a conceptual plan view of the handler 200 according to the first embodiment of the present invention.

The handler 200 according to this embodiment includes a moving chamber 210, an elevator 220, a transfer machine 230, eight test chambers 241 to 248, eight connectors 251 to 258, and two first Movers (261a, 261b), two second movers (262a, 262b), loading machine (271), unloading machine (272), first opener (281), second opener (282), drive tester (DT) ), and includes two circuit breakers (291, 292).

The mobile chamber 210 moves back and forth along a certain movement path MC in the front and rear direction. A test tray (TT) can be accommodated in this moving chamber 210.

The elevator 220 elevates the mobile chamber 210. This is because the mobile chamber 210 can deliver the test tray (TT) to the test chambers 241 to 248 or the unloading position (UP) or receive it from the test chambers 241 to 248 or the loading position (LP) at an appropriate location. It is to ensure that

The transfer device 230 moves the moving chamber 210 on the moving path MC.

Eight test chambers (241 to 248) are divided into four on the left and right sides of the movement path (MC) and are provided to maintain the electronic components of the received test tray (TT) at test temperature conditions.

Eight connectors 251 to 258 electrically connect electronic components of the test tray TT accommodated in the test chambers 241 to 248 to a tester (not shown). Additionally, each of the connectors 251 to 258 is provided to receive a test tray (TT) from the mobile chamber 210 or to provide a test tray (TT) to the mobile chamber 210. Accordingly, the eight connectors 251 to 258 are divided into four units and arranged on both left and right sides of the movement path (MC).

The two first movers 261a and 261b and the two second movers 262a and 262b are installed in the move chamber 210 and move together with the move chamber 210. Here, the first movers (261a, 261b) bring the test tray (TT) on which the loading of electronic components has been completed from the loading position (LP) to the moving chamber 210, or move the test tray (TT) accommodated in the moving chamber 210. It performs the function of sending to each test chamber (241 to 248). And the second movers 262a and 262b perform the function of bringing the test trays (TT) in the test chambers 241 to 248 to the moving chamber 210 or sending them to the unloading position (UP).

The loading machine 271 moves the electronic components in the customer tray (CT ₁ ) to the test tray (TT) in the loading position (LP).

The unloading machine 272 moves electronic components from the test tray (TT) at the unloading position (UP) to the empty customer trays (CT ₂ and CT ₃ ).

The first opener 281 opens the test tray (TT) at the loading position (LP) so that electronic components can be properly loaded on the test tray (TT).

The second opener 282 opens the test tray (TT) in the unloading position UP so that electronic components can be properly extracted from the test tray (TT).

A drive tester (DT) is designed to simply test whether electronic components are electrically driven.

Two circuit breakers (291, 292) are installed in the mobile chamber 210 and perform the function of blocking the test tray (TT) moving from the mobile chamber 210 to the test chambers 241 to 248 from external air.

2. Description of individual components

go. Description of the moving chamber (210)

As shown in the schematic front cross-sectional view of FIG. 3, the mobile chamber 210 is divided into a lower first chamber portion 211 and an upper second chamber portion 212 by a separation wall (DW). Here, the dividing wall (DW) is preferably made of an insulating material to block thermal movement.

The first chamber portion 211 is provided to pre-adjust the temperature of the electronic components loaded on the test tray (TT) so that they can respond to the test temperature and environmental conditions. This first chamber portion 211 may optionally have a heater (HT) for creating a high-temperature environment and a cooling module (CM) for creating a low-temperature environment, or both, depending on the utilization conditions of the handler 200. Here, considering the movement of air according to the temperature state of the air, it is preferable that the heater (HT) is provided at the lower part of the first chamber part 211, and the cooling module (CM) is located at the upper part of the first chamber part 211. It is desirable to have it provided. Here, the cooling module (CM) may be provided with an evaporator (1), a circulation fan (2), and a housing (3), and the internal air of the first chamber part (211) is supplied to the housing (3) by the circulation fan (2). After flowing into the inside of the evaporator (1), it circulates to be discharged from the housing (3), thereby cooling the electronic components of the test tray (TT). Here, the driving motor 2a of the circulation fan 2 is preferably provided outside the first chamber portion 211 to prevent damage due to heat or condensation.

For reference, depending on implementation, the moving chamber 210 may be implemented so that the first chamber portion 211 functions as a heating chamber and the second chamber portion 212 functions as a cooling chamber. In this case, considering the principle that heat rises and cold air falls and that the lower part is generally closed with many structures due to the structure of the equipment and the upper part is open with no other structures, the first chamber part 211 that raises the temperature It is desirable to place it on the lower side, and the second chamber portion 212, which lowers the temperature, is placed on the upper side. Additionally, in the case of a room temperature test, the upper second chamber portion 212 may be designed to be as open as possible, but for return to a constant temperature or cooling to a constant temperature, the second chamber portion 212 may also block external air. It may be considered desirable to have a sealed structure.

In addition, the first chamber portion 211 receives the test tray (TT) from the loading position (LP) on the left side of the movement path (MC) or is divided into test chambers 241 to 248 divided into the left and right sides of the movement path (MC). ) A left moving hole (LH ₁ ) is formed on the left wall so that the test tray (TT) can be selectively sent to the test tray (TT), and a right moving hole (RH ₁ ) is formed on the right wall. Of course, in order to block the inside of the first chamber part 211 from external air, the first chamber part 211 has a left opening/closing door (LD) and a right moving hole (RH ₁ ) for opening and closing the left moving hole (LH ₁ ). ) has a right opening/closing door (RD) for opening and closing. Here, each opening and closing door (LD, RD) may be configured to open and close the moving holes (LH ₁ , RH ₁ ) while moving up and down by a separate driving source such as a cylinder (CD). Of course, depending on the implementation, an opening and closing door may be provided to open and close with a hinge structure, but a lifting structure is more preferable to prevent the width of the equipment from expanding.

And the first chamber portion 211 has a pair of support rails 211a and an elevator cam 211b.

A pair of support rails 211a supports both front and rear ends of the test tray TT accommodated in the first chamber portion 211 and guides the movement of the test tray TT in the left and right directions.

The lifting cam 211b elevates the pair of support rails 211a. To this end, as shown in FIG. 4, the lifting cam 211b includes a driving shaft (DS), a driven shaft (PS), a transmission belt (TB), and a rotation motor (RM).

Cam protrusions (CP) having centers (O') that are offset from the centers (O) of each axis are formed on the drive shaft (DS) and the driven shaft (PS). A pair of support rails 211a are supported in a supported state by cam projections (CP).

The transmission belt (TB) transmits the rotational force of the drive shaft (DS) to the driven shaft (PS). This transmission belt (TB) may preferably be provided as a timing belt for accurate interlocking of the drive shaft (DS) and the driven shaft (PS).

The rotation motor (RM) rotates the drive shaft (DS). Therefore, when the rotation motor (RM) operates, the drive shaft (DS) and the driven shaft (PS) rotate and the cam projection (CP) also rotates, and as shown in FIG. 5, the support rail (211a) moves by a predetermined height (H). You get to go up and down. Of course, as the support rail (211a) is raised and lowered, the test tray (TT) mounted on the support rail (211a) is also raised and lowered.

The second chamber portion 212 changes the electronic components for which testing has been completed to a temperature close to room temperature, or at least changes the temperature to a temperature that makes it possible to properly unload the electronic components without damaging the electronic components or the unloading machine 272. It is prepared to do so.

The second chamber portion 212 may also be provided with a sealed structure depending on the utilization conditions of the handler 200, and may be equipped with optional or both a heater to increase the temperature of the electronic components and a cooling module to lower the temperature of the electronic components. It may be possible. However, in this embodiment, in order to change the temperature of the electronic components for which the test has been completed to close to room temperature, the electronic components are exposed to the outside air and are composed of only the simplest cooling structure that lowers the temperature of the electronic components through a blower fan (VP). there is.

This second chamber portion 212 also receives the test tray (TT) from the test chambers 241 to 248 on the left and right sides of the movement path (MC) or receives the test tray (TT) from the unloading position (UP) on the right front. A left moving hole (LH ₂ ) and a right moving hole (RH ₂ ) are formed on the left and right walls, respectively, to allow sending. And the second chamber portion 212 in this embodiment has a separate opening and closing door to open and close the left moving hole (LH ₂ ) and the right moving hole (RH ₂ ) so that the electronic components inside can be exposed to the outside air. communication holes (CH) are formed on the front and back walls so that the interior is more exposed to the outside air.

Likewise, the second chamber portion 212 also includes a pair of front and rear support rails 212a and a support rail (212a) that support the received test tray (TT) and guide the movement of the test tray (TT) moving in the left and right directions. It has a lifting cam (212b) for lifting 212a).

Above, the first chamber part 211 functions as a supply chamber for supplying test trays (TT) to the test chambers 241 to 248, and the second chamber part 212 supplies test trays (TT) from the test chambers 241 to 248. It functions as a recovery chamber to recover TT). Additionally, the first chamber portion 211 functions as a soak chamber for applying temperature stimulation to electronic components, and the second chamber portion 212 functions as a desoak chamber for removing temperature stimulation from electronic components. Of course, the upper and lower positions of both chamber parts 211 and 212 may be changed.

me. Description of elevator (220)

The elevator 220 elevates the mobile chamber 210. The reason for this is to enable the mobile chamber 210 to give or receive the test tray (TT) at an appropriate location. This elevator 220 may be composed of an elevator cylinder 221 installed on the moving frame 231 of the transfer machine 230, as shown in FIG. 6.

Therefore, when the lifting cylinder 221 operates, as shown in FIG. 7, the moving holes (LH ₁ , RH ₁ ) of the first chamber portion 211 are at the same height as the opening and closing holes (OH) of the test chambers 241 to 248. Alternatively, the moving holes (LH ₂ , RH ₂ ) of the second chamber portion 211 are at the same height as the opening and closing holes (OH) of the test chambers 241 to 248. Accordingly, the test tray TT can move from the first chamber portion 211 to the test chambers 241 to 248 or from the test chambers 241 to 248 to the second chamber portion 212. Of course, the lifting cylinder 221 may be provided in one or more numbers.

In addition, as a way to adjust the appropriate position, the structure may be designed to raise and lower the openers 281 and 282 on both sides instead of the moving chamber 210. However, in such a case, since one or more lifting cylinders must be provided for each opener (281, 282), it is more desirable to implement the moving chamber (210) to be raised and lowered in terms of production cost, optimization of equipment size, and control aspects.

Of course, if the vertical height of the test chambers 241 to 248 is longer than the vertical height of the mobile chamber 210, and a structure in which electronic components are raised and lowered within the test chamber is applied, the mobile chamber 210 or the opener 281, 282), it may not be possible to construct a separate elevator to raise and lower the vehicle. That is, if the connector to be described later is implemented to selectively position the test tray (TT) at the height of the first chamber part 211 or the second chamber part 212, a separate moving chamber 210 or an opener ( 281, 282), there is no need to provide an elevator to raise and lower the vehicle.

all. Description of transfer machine (230)

The transfer device 230 moves the moving chamber 210 on the moving path MC. Here, the movement path (MC) is a long path in the front-back direction that can move back and forth between the loading position (LP) or unloading position (UP) on the left and right and the test chambers 241 to 248. As shown in FIG. 8, the transfer machine 230 includes a moving frame 231, a rotation shaft 232, a transfer motor 233, and a pair of guide rails 234.

The moving frame 231 is coupled to the rotating shaft 232 by a bolt coupling method, so that it can be moved forward and backward according to the rotation of the rotating shaft 232. The above-mentioned elevator 220 is installed in this moving frame 231, and the moving chamber 210 is coupled to the elevator 220, so that the moving chamber 210 and the elevator move according to the movement of the moving frame 231. (220) moves together.

The rotation axis 232 is provided in a long shape in the front-to-back direction to provide a movement path (MC).

The transfer motor 233 rotates the forward/reverse rotation shaft 232.

A pair of guide rails 234 guide the forward and backward movement of the moving frame 231.

la. Description of test chambers 241 to 248

Eight test chambers 241 to 248 are divided into four on the left and right sides of the movement path (MC).

As shown in the schematic front cross-sectional view of FIG. 9, the test chambers 241 have an opening/closing hole (OH) on the movement path (MC) for movement of the test tray (TT) coming from or going to the movement chamber 210. ) is formed. And of course, an intermittent door (CG) is provided to control the openings (OH) for insulation.

Meanwhile, a test window (TW) is formed on the lower side of the test chamber 241, and a tester (TESTER) is coupled to the test window (TW). Generally, one test chamber (241 to 248) is provided with one test window (TW), so a total of eight test windows (TW) are provided in the handler 200 according to this embodiment. The test window (TW) here refers to the test site (test area), that is, the area where the test chamber and the tester meet each other.

Of course, the test chamber 241 may optionally have a heater (HT) for creating a high-temperature environment and a cooling module (CM) for creating a low-temperature environment, or both, depending on the usage conditions of the handler 200. Of course, it is desirable to further provide an air circulation fan (PAN) for even distribution of heat or cold air.

Additionally, the test chamber 241 has an electromagnet (EM) installed on the opening/closing hole (OH) side. When power is applied to this electromagnet (EM), the circuit breaker 291 operates.

Since the test chambers 242 to 248 are the same as the test chamber 241 or are symmetrical with respect to the movement path (MC) as a reference line, their description will be omitted.

Since the handler 200 according to the present invention is provided in the form of a cell with testers 241 to 248 divided into left and right sides, even when a handler with expanded processing capacity is required, the transferor 230, which will be described later, is configured to be longer and the tester chamber is It can be designed simply by additionally providing.

Of course, if the equipment is provided for room temperature testing in which electronic components do not need to be maintained at a certain temperature during testing, there will be no need to provide a test chamber. In other words, it is sufficient to have the test chamber 241 only in equipment that needs to test electronic components in a specified temperature range. Of course, even when implemented as room temperature test equipment, the test chamber may be provided in an open form.

mind. Description of connectors 251 to 258

The eight connectors (251 to 258) pressurize the electronic components loaded on the test tray (TT) in the test chambers (241 to 248) toward the tester (to be precise, the test socket side of the tester), thereby connecting the electronic components to the tester (to be exact). Connect electrically to TESTER). For this purpose, as shown in FIG. 10, the connector 251 is provided with a gripping member (GE) and a pressure source (PS).

The gripping member GE is provided inside the test chamber 241 and has gripping grooves GH for gripping both ends of the test tray TT. Here, the grip grooves GH are formed long in the left and right directions, so they can guide the movement of the test tray TT moving in the left and right directions.

The pressure source (PS) may be provided as a motor, and lowers or raises the test tray (TT) held by the gripping member (GE) by raising and lowering the gripping member (GE). At this time, as shown in (a) of FIG. 11, when the connector 251 lowers the test tray (TT), the electronic components are pressed toward the tester (TESTER) coupled below, so that the tester (TESTER) and the electronic components are electrically connected. connected. And, as shown in (b) of 11, when the connector 251 raises the test tray TT, the electrical connection between the tester and the electronic components is disconnected.

Of course, the test tray (TT) is moved in the state shown in (b) of FIG. 11.

For reference, the pressure source PS is preferably provided outside the test chamber 241 (in this embodiment, on the upper side of the test chamber) so as not to be affected by the temperature environment inside the test chamber 241.

Since the connectors of symbols 252 to 258 are the same as the connectors of symbol 251 or are symmetrical with respect to the movement path (C) as a reference line, their description is omitted.

bar. Description of mobile devices (261a, 261b, 262a, 262b)

The first movers 261a and 261b are installed in the first chamber portion 211, and the first mover 261a is responsible for moving the test tray TT in the left direction of the movement path C, and is 261b. The first mover is responsible for moving the test tray (TT) in the right direction of the movement path (C).

The second movers 262a and 262b are installed in the second chamber portion 212. The second mover 262a is responsible for moving the test tray TT in the left direction of the movement path C, and the second mover 262b is responsible for moving the test tray TT in the left direction of the movement path C. The second mover is responsible for moving the test tray (TT) in the right direction of the movement path (C).

As shown in FIG. 12, the first mover 261a includes a grip pusher (GS) and a mover (MS).

The gripper (GS) has a grippin (GP) at its left end for gripping the test tray (TT), and a rack gear (RG) is formed in the left and right directions. As shown in Figures 13 (a) and (b), the gripping pin (GP) is inserted into the gripping hole (GH) of the test tray (TT) when the test tray (TT) is raised by the operation of the lifting cam (211b). The test tray (TT) is gripped, and when the test tray (TT) descends, it comes out of the grip hole (GH).

The movement source (MS) moves the test tray (TT) held by the gripper (GS) in the left and right directions by moving the gripper (GS) in the left and right directions. For this purpose, the mobile source (MS) has a pinion gear (PG) that engages with the rack gear (RG) of the grip pusher (GS). It may be preferably considered that this moving source MS is provided outside the moving chamber 210 to prevent thermal damage. And, when the moving source MS operates in the state (a) of FIG. 13, the pusher GS moves to the left as shown in (c) of FIG. 13 and the test tray TT also moves to the left.

Since the first mobile unit 261b and the second mobile units 262a and 262b have substantially the same structure, their description is omitted.

buy. Description of the loading machine (271) and unloading machine (272)

It is sufficient for the loading machine 271 and the unloading machine 272 to have a structure for moving electronic components. The loading machine 271 and the unloading machine 272 are tools that grip and move electronic components and then place them at a required point, and may have various gripping structures depending on the type of electronic component. Since the technology for various gripping structures according to the types of electronic components is already well known through Korean Patent Publication Nos. 10-2002-0049848 and 10-2003-0016060, etc., detailed description thereof will be omitted. Depending on the implementation, an example may be taken in which electronic components are loaded on a test tray and supplied to the handler, and in this case, the loading machine 271 may be omitted. Additionally, if the test tray loaded with electronic components for which testing has been completed is implemented to be withdrawn from the handler and sorted in separate equipment, the unloading machine 272 may also be omitted.

ah. Description of openings (281, 282)

It is enough for the openers 281 and 282 to perform the function of opening the test tray (TT) in order to load electronic components into the test tray (TT) or extract electronic components from the test tray (TT). Of course, the openers 281 and 282 may also have various opening structures depending on the seating structure of the electronic component depending on the type of electronic component. Since the technology for various open structures according to the types of electronic components is already well known through Korean Patent Publication Nos. 10-2009-0008062 and 10-2011-0136312, detailed descriptions thereof will be omitted.

For reference, in a horizontal handler where testing is performed with the test tray in a horizontal state, an opener may or may not be provided depending on the type of electronic component.

ruler. Description of Drive Tester (DT)

The drive tester (DT) is used to test whether the electronic parts drive properly when power is applied to the electronic parts. The loader 271 tests the electronic parts held by the loader 271 using the drive tester. It is sufficient if it is provided in a location where it can be electrically connected to (DT). In this embodiment, the drive tester DT is provided in front of the loading position LP to minimize the operating radius of the loading machine 271.

car. Description of circuit breakers (291, 292)

The circuit breakers 291 and 292 block the test tray (TT) moving from the moving chamber 210 to the test chambers 241 to 248 from external air (more specifically, they block electronic components moving with the test tray from external air). It is sufficient to provide it in any form as long as it can be ordered.

In this embodiment, the breakers 291 and 292 are installed in the moving chamber 210 to surround the moving holes LH ₁ and RH ₁ in the first chamber portion 211 of the moving chamber 210. Of course, depending on the implementation, it may be desirable to install eight circuit breakers in the test chambers 241 to 248.

As shown in Figure 14, the circuit breaker 291 in this embodiment may be composed of a corrugated pipe (WT) and a coupling ring (CR).

One side of the corrugated pipe (WT) is coupled to the moving chamber 210, is provided in a form that can be contracted and expanded in the left and right directions, and forms a passage through which the test tray (TT) can pass.

The coupling ring (CR) is made of a magnetic material and is provided at the left end of the corrugated pipe (WT). This coupling ring 291b is magnetically coupled to the right wall of the test chamber 241 when the electromagnet (EM) in the test chamber 241 is magnetized, as shown in FIG. 15. Accordingly, between the opening and closing hole (OH) of the test chamber 241 and the moving hole (LH ₁ ) of the moving chamber 210, the moving path (MW) of the test tray (TT) is sealed with the outside air by the corrugated pipe (WT). is formed This circuit breaker 291 functions to prevent loss of heat or cold as much as possible. In particular, by preventing the occurrence of condensation due to the test tray (TT, including loaded electronic components) assimilated to low temperature in the process of moving from the first chamber portion 211 to the test chambers 241 to 248 in the low temperature test, Damage to electronic components due to condensation can be prevented.

Since the breaker of code 292 is different only in direction and has the same structure as the breaker of code 291, its description will be omitted.

For reference, if we take an example in which the first chamber part 211 functions as a heating chamber and the second chamber part 212 has a sealed structure to function as a cooling chamber, the circuit breaker operates in the first chamber part 211. A total of four should be provided, one each on the left and right sides of the second chamber portion 212 and the left and right sides of the second chamber portion 212. In other words, when only testing at room temperature, a circuit breaker including a corrugated pipe may not be necessary, but when testing must be done at a set temperature, a circuit breaker including a corrugated pipe may be necessary. This can cause damage to electronic components, including semiconductor devices, due to the principle that condensation occurs when a cooled object meets air at room temperature. Therefore, circuit breakers are provided in both chamber parts 211 and 212, respectively, as needed. Alternatively, circuit breakers may be provided in both chamber portions 211 and 212. For example, in the case of room temperature testing, there is no need for a circuit breaker and there is no need for the mobile chamber to be divided into two chamber parts, and even if it is divided into two chamber parts, they can all be provided as open types. In this case, the mobile chamber will only perform the function of relaying the test tray without any temperature control function. And in the case of a low-temperature test, both chamber parts must have a sealed structure, and circuit breakers must be installed in both chamber parts to prevent condensation.

3. References

go. Code A is a loader cart, and code B is an unloader cart.

The loader cart (A) can load multiple customer trays and is detachably mounted on the handler 200. Of course, the customer tray (CT ₁ ) loaded on the loader card (A) contains electronic components to be tested. At this time, the technology in which the loader cart (A) is mounted on the handler 200 and the technology in which the customer trays (CT ₁ ) are circulated in the rotor cart (A) are proposed by the present applicant through Korean Patent Application No. 10-2016-0026482. Therefore, the detailed explanation is omitted.

The unloader cart (B) can also load multiple customer trays (CT ₂ ) and is detachably mounted on the handler 100. Customer trays (CT ₂ ) containing tested electronic components are loaded on this unloader cart (B).

Of course, instead of the loader cart (A) or the unloader cart (B), it may be considered to provide a loading stacker or an unloading stacker that is basically mounted on the handler, and other supply or recovery means may be provided. Any number of requests can be considered.

me. The unloader bin box (C) is equipped with customer trays (CT ₃ ) for loading electronic components that have been determined to be defective.

all. Depending on selection, the handler 200 may be equipped with a buffer table (BT) for temporarily loading electronic components or an identifier (BR, for example, a barcode reader) to identify electronic components.

la. As mentioned above, the test tray (TT) has a grip hole (GH) into which a grip pin (GP) can be inserted, and can have various loading structures depending on the type of electronic component. Regarding these various types of test trays (TT), they are presented in prior patent documents such as Korean Patent Publication Nos. 10-2011-0136312 and 10-2008-0040654, so their descriptions are omitted.

bar. Meanwhile, in this embodiment, the first chamber part 211 is used as a soak chamber to apply thermal stress, and the second chamber part 212 is used as a desoak chamber to remove the applied thermal stress. It is being used as. And both a heater (HT) and a cooling module (CM) are provided in the first chamber portion 211.

However, depending on the implementation, both the first chamber part and the second chamber part may be configured in a structure in which the inside can be sealed. In this case, for example, the first chamber part is equipped with a heater, and the second chamber part is provided with a heater. The part can also be equipped with a cooling module. Taking this example, in the high temperature test the first chamber part functions as a soak chamber and the second chamber part functions as a desoak chamber, and in the low temperature test the second chamber part functions as the soak chamber and the first chamber part functions as the soak chamber. It will function as a desoak chamber.

4. Operation description

The loader 271 moves electronic components from the customer tray (CT ₁ ) placed at the top of the loader cart (A) to the test tray (TT) at the loading position (LP). At this time, the first opener 281 maintains the test tray (TT) in an open state. Additionally, the loading machine 281 electrically connects the electronic components held while moving the electronic components to the drive tester DT, thereby testing whether the electronic components are electrically driven. If electronic components that are determined to have problems with electrical operation during this process are loaded on the buffer table (BT), good electronic components are moved to the test tray (TT). Of course, in the process of moving the electronic components by the loading machine 271, the electronic components are identified by the identifier (DA), making individual history management of the electronic components possible.

And when the loading of the electronic component into the test tray (TT) at the loading position (LP) is completed, the first mover of symbol 261a operates to move the test tray (TT) at the loading position (LP) to the first chamber portion (211). Move it inside. Accordingly, the electronic components loaded on the test tray TT begin to assimilate to the internal temperature environment of the first chamber portion 211. At the same time, the moving chamber 210 moves to the currently empty test chamber (241/242/243/244/245/246/247/248), and the first mover (261a or 261b) operates to move the test tray (TT). Move from the first chamber portion 211 to the test chamber (241/242/243/244/245/246/247/248). At this time, the circuit breaker (291/292) is a sealed movement path ( MW) is formed. And the test tray (TT) received in the test chambers (241 to 248) is held in a state held by the holding member (GE), and the pressure source (PS) operates to move the test tray (TT) toward the tester (TESTER). It goes down. When the lowering of the test tray (TT) is completed, the electronic components loaded on the test tray (TT) and the tester (TESTER) are electrically connected, and in this state, the electronic components are tested.

Meanwhile, when the test for electronic components is completed, the connectors (251/252/253/254/255/256/257/258) raise the test tray (TT), and the second mover (262a or 262b) operates. Then, the test tray (TT) is moved to the second chamber portion (212). At this time, since the moving chamber 210 is in a lowered state by the elevator 220, the moving holes (LH ₂ /RH ₂ ) of the second chamber portion 212 are connected to the test chamber (241/242/243/244/ It is located in a position corresponding to the opening and closing hole (OH) of 245/246/247). Subsequently, when the test tray (TT) is completed moving into the second chamber portion 212, the moving chamber 210 moves forward and is located on the left side of the unloading position UP, and in this state, the position of symbol 262b The second mover operates to move the test tray (TT) to the unloading position (UP). Next, the unloader 272 operates to move the electronic components from the test tray (TT) in the unloading position (UP) to the empty customer tray (CT ₂ ) placed on the upper side of the unloader cart (B). At this time, electronic components determined to be defective are loaded into the customer tray (CT ₃ ) in the unloader bin box (C).

<Second Embodiment>

Figure 16 is a conceptual plan view of the handler 300 according to the second embodiment of the present invention.

The handler 300 according to this embodiment includes a moving chamber 310, an elevator 320, a transfer machine 330, eight test chambers (341 to 348), eight connectors (351 to 358), and two first Movers (361a, 361b), two second movers (362a, 362b), loading/unloading device (370), first opener (381), second opener (382), drive tester (DT), two Includes circuit breakers (391, 392). Among these, a mobile chamber 310, an elevator 320, a transfer unit 330, eight test chambers (341 to 348), eight connectors (351 to 358), two first mobile units (361a, 361b), 2 The second movers (362a, 362b), the first opener (381), the second opener (382), the drive tester (DT), and the two breakers (391, 392) are each equipped with a handler ( 200) of the mobile chamber 210, the elevator 220, the transfer unit 230, eight test chambers (241 to 248), eight connectors (251 to 258), two first mobile units (261a, 261b), Since the structure and function are the same as the two second movers (262a, 262b), the first opener (281), the second opener (282), the drive tester (DT), and the two circuit breakers (291, 292), The explanation is omitted.

However, in the handler 300 according to this embodiment, there is no distinction between the loading position (LP) and the unloading position (UP), and is divided into a first position (1P) and a second position (2P). Additionally, the first position 1P and the second position 2P can be switched to a loading position or an unloading position depending on the operating state of the loading/unloading machine 370. That is, the loading/unloading machine 370 loads the electronic components to be tested into the empty test tray (TT) at the first position (1P) or the second position (2P), or loads the electronic components to be tested into the empty test tray (TT) at the first position (1P) or the second position (2P). Electronic components are unloaded from the test tray (TT) on which the tested electronic components are loaded at the position (2P).

In the handler 300 according to this embodiment, the drive tester DT is preferably disposed in front of the moving chamber 310 in order to minimize the movement path of the loading/unloading machine 370. Of course, the number of drive testers may be two or more.

In addition, depending on implementation, it may be considered to divide the loading/unloading machine into a first picking machine and a second picking machine, and in this case, a control method or operation that prevents operational interference between the first picking machine and the second picking machine. A separate design of areas is necessary.

<Modification to the second embodiment>

Figure 17 is a conceptual plan view of a handler 400 according to a modification of the second embodiment of the present invention.

In the modified example of Figure 17, there is no separate unloader cart, but three unloader bin boxes (C ₁ , C ₂ , C ₃ ) are arranged in a line in the left and right directions on a plane, so that the unloading from the test tray (TT) is carried out. It is possible to classify good and defective electronic components. In addition, it would be possible to further classify good products into their respective grades.

<Third Embodiment>

Figure 18 is a conceptual plan view of the handler 500 according to the third embodiment of the present invention.

The handler 500 according to this embodiment includes a receiving chamber 510, an elevator 520, a test chamber 540, a connector 550, a first mover (561a, 561b), a second mover (562a, 562b), It includes a loading/unloading machine 570 and an opening machine 580.

In this embodiment, the receiving chamber 510 is located in front of the test chamber 540.

However, as in the first embodiment, the receiving chamber 510 has a structure in which the first chamber portion and the second chamber portion are arranged vertically side by side, divided by a separation wall. That is, the first chamber portion and the second chamber portion are integrally combined to form one receiving chamber 510. In this embodiment, the receiving chamber 510 cannot move back and forth and can only be lifted up and down by the elevator 520.

The remaining components are elevator 520, test chamber 540, connector 550, first mover (561a, 562b), second mover (562a, 562b), loading/unloading machine (570), and opener (580). is the elevator 320, test chambers 341 to 348, connectors 351 to 358, first movers 361a and 361b, and second movers 362a and 362b of the handler 300 in the second embodiment, Since it is the same as the loading/unloading machine 370 and the opening machine 380, description thereof will be omitted.

For reference, Figure 19 shows multiple handlers 500 of Figure 18 being installed and used.

Likewise, in this embodiment, when the vertical height of the receiving chamber 510 and the test chamber 540 and the structure for elevating the test tray (TT) within the test chamber 540 are applied, the elevator 520 may be omitted. possible.

<Fourth Embodiment>

This embodiment is an example that facilitates the movement of the test tray (TT) and enables electronic components to reach the temperature required for testing more quickly.

Figure 20 is a conceptual plan view of the handler 600 according to the fourth embodiment of the present invention.

The handler 600 according to this embodiment includes a moving chamber 610, an elevator 620, a transfer machine 630, eight test chambers 641 to 648, eight connectors 651 to 658, and two first Movers (661a, 661b), two second movers (662a, 662b), loading and unloading device (670), first opener (681), second opener (682), drive tester (DT), two Includes circuit breakers (691, 692). In addition, the handler 600 according to this embodiment is provided with a first buffer chamber (BC1) between the first opener 681 and the test chamber of symbol 641, and the second opener 681 and the test chamber of symbol 645. A second buffer chamber (BC2) is provided between the test chambers.

Among the above configurations, a mobile chamber 610, an elevator 620, a transfer unit 630, eight test chambers (641 to 648), eight connectors (651 to 658), and two first mobile units (661a, 661b) ), two second movers (662a, 662b), a first opener (681), a second opener (682), a drive tester (DT), and two circuit breakers (691, 692), respectively, in the first embodiment. of the moving chamber 210, the elevator 220, the transporter 230, eight test chambers (241 to 248), eight connectors (251 to 258), two first movers (261a, 261b), two Since the configuration and role are substantially the same as the second movers (262a, 262b), the first opener (281), the second opener (282), the drive tester (DT), and the two circuit breakers (291, 292), the The explanation is omitted.

The loading and unloading machine 670 moves the electronic components in the customer tray (CT ₁ ) to the test tray (TT) in the loading position (LP), and removes the empty components from the test tray (TT) in the unloading position (UP). Move the electronic components to the customer tray (CT ₂ , CT ₃ ). This loading and unloading machine 670 also plays the same role as the loading machine 271 and unloading machine 272 of the first embodiment. That is, depending on whether the specification supports fast testing or slow testing, loading and unloading are performed with one loading and unloading machine 670 as in the present embodiment, or with a loading machine (670) as in the first embodiment. The equipment can be designed by appropriately selecting whether to divide the operation into 271) and unloading machine 272.

The first buffer chamber BC1 accommodates the test tray TT on which the electronic components to be tested are loaded at the loading position LP and then waits before being moved to the moving chamber 610. Of course, as in Korean Patent Publication No. 10-2008-0082591, a plurality of test trays (TT) can be accommodated in the first buffer chamber (BC1), and the accommodated test trays (TT) can be implemented to move in translation.

Additionally, the first buffer chamber BC1 may be implemented to provide a temperature environment according to test conditions. In this case, in the case of a high temperature test, the inside of the first buffer chamber (BC1) is maintained at a high temperature, and in the case of a low temperature test, the inside of the first buffer chamber (BC1) is maintained at a low temperature.

In the second buffer chamber BC2, the test tray TT loaded with electronic components for which testing has been completed from the mobile chamber 610 is received and waits before moving to the unloading position UP. This second buffer chamber BC2 may be implemented to remove thermal stimulation from electronic components loaded on the test tray TT from the moving chamber 610. Likewise, the second buffer chamber BC2 may also be provided to accommodate one or more test trays TT.

If the temperature of the electronic components is controlled through the first buffer chamber (BC1) and the second buffer chamber (BC2), which are provided as fixed chambers, the time that the electronic components stay in the moving chamber 610 is saved and the time spent in the moving chamber 610 is saved. ) can improve the utilization rate. Therefore, the test tray (TT) can be moved more quickly than the first embodiment in which the temperature of the electronic components is controlled only by the moving chamber 210, which is movable to perform the function of carrying the electronic components, thereby increasing the processing capacity. It could rise.

Next, the operation of the handler 600 according to the above embodiment will be described.

When the loader cart (A) loaded with customer trays (CT ₁ ) loaded with electronic components is mounted on the handler 600, the loading and unloading machine 670 loads the customer tray (CT ₁ ) placed on the uppermost side of the loader cart (A). ) Move the electronic components from the loading position (LP) to the test tray (TT). In this process, the loading and unloading machine 670 goes through a identifier (BR) and a drive tester (DT). Accordingly, the electronic components are identified by the identifier (BR) and are first tested by the drive tester (DT). Electronic components are initially filtered out based on whether they are defective according to the first test. At this time, electronic components determined to be defective are loaded on the buffer table (BT).

When the loading of electronic components into the test tray (TT) at the loading position (LP) is completed, the test tray (TT) is moved to the first buffer chamber (BC1) to wait, and then moved to the moving chamber (610). . Subsequently, the test tray (TT) moves to the empty test chambers (641 to 648) together with the moving chamber (610) and is then supplied to the test chambers (641 to 648), and the test tray (TT) is stored in the test chambers (641 to 648). A secondary test is performed on the electronic components loaded on the TT). When the secondary test for electronic components is completed, the test tray (TT) is moved back to the moving chamber 610 and then moved to the second buffer chamber (BC2) to wait and then moved to the unloading position (UP). And when all electronic components are unloaded from the test tray (TT) in the unloading position (UP) by the loading and unloading machine 670, the test tray (TT) is moved from the unloading position (UP) to the loading position (LP). is moved to Of course, the electronic components unloaded from the test tray (TT) at the unloading position (UP) by the loading and unloading machine 670 are moved to the empty customer tray (CT ₂ ) placed on the upper side of the unloader cart (B). Electronic components that are defective or are determined to be defective are moved to the customer tray (CT ₃ ) in the unloader bin box (C).

For reference, since the electronic component confirmation and operation test process is added during loading, and the time for which thermal stimulation is applied to the electronic component is longer than the time for removing the thermal stimulation from the electronic component, the first buffer chamber (BC1) is the first buffer chamber (BC1). 2 It may be considered more desirable to implement it to accommodate a larger number of test trays (TT) than the buffer chamber (BC2).

As in this embodiment, if the first buffer chamber (BC1) and the second bumper chamber (BC2) are provided, the degree of freedom in designing the moving chamber 610 increases according to control.

For example, as will be described later, during a low temperature test, the temperature of the moving chamber 610 can be assimilated by the first buffer chamber BC1.

During the low temperature test, the inside of the first buffer chamber BC1 is set to a temperature of -40 degrees. When the moving chamber 610 is located on the side of the first buffer chamber (BC1), the blocker 691 operates to open a passage between the first buffer chamber (BC1) and the moving chamber 610. At this point, the door of the moving chamber 610 and the door of the first buffer chamber BC1 are closed.

The temperature of the air in the passage is sensed by sensing, and the doors of the first buffer chamber (BC1) and the moving chamber 610 operate in two stages.

First, a process is required to assimilate the internal temperature of the passage opened by the circuit breaker 691 with the internal temperature of the first buffer chamber (BC1). To this end, low-temperature gas sufficient to assimilate the temperature of the passage is additionally injected into the first buffer chamber BC1. After that, the door of the first buffer chamber (BC1) is slightly opened to the first stage, and the low-temperature gas additionally injected into the interior of the first buffer chamber (BC1) passes through the passage opened by the circuit breaker 691 at the required low temperature (-40°C). It contributes to assimilation to temperatures (or, in some cases, slightly lower than -40 degrees). That is, the passage opened by the circuit breaker 691 causes cold air to move at a high speed by the required amount corresponding to the low-temperature gas additionally injected into the first chamber (BC1) through the slightly open opening. It is quickly assimilated to internal temperature. Of course, at this time, the door of the moving chamber 610 remains closed.

When the passage opened by the circuit breaker 691 is assimilated to the required low temperature by sensing, the door of the first buffer chamber (BC1) is completely opened in the second stage, and the temperature is sufficient to assimilate to the internal temperature of the moving chamber 610. Since a sufficient amount of low-temperature gas is required, additional low-temperature gas is supplied to the first buffer chamber BC1. After a sufficient amount of low-temperature gas is injected, the door of the moving chamber 610 is opened and the interior of the moving chamber 610 begins to be assimilated to the internal temperature of the buffer chamber BC1. Of course, even at this time, the internal temperature of the moving chamber 610 is sensed. In addition, the inside of the moving chamber 610 quickly drops to the required low temperature due to the convection phenomenon caused by the difference in air pressure and temperature. Here too, the door of the moving chamber 610 may be opened in two or more steps. Here, too, with the door of the first buffer chamber BC1 slightly open, the temperature inside the moving chamber 610 may first be assimilated to the required low temperature, and then the door of the first buffer chamber BC1 may be completely opened. Depending on implementation, the door of the moving chamber 610 may be implemented to be completely opened in the first step.

And when the inside of the moving chamber 610 is assimilated to the required low temperature, the test tray TT is moved from the first buffer chamber BC1 to the moving chamber 610.

That is, according to this example, before the test tray (TT) moves from the inside of the first buffer chamber (BC1) to the inside of the moving chamber 610, a breaker is installed between the first buffer chamber (BC1) and the moving chamber 610. The thermal state inside the first buffer chamber (BC1) is quickly transferred to the inside of the moving chamber 610 through the sealed passage formed by 691, so that the temperature inside the moving chamber 610 is increased to the first buffer chamber (BC1). It is assimilated into the internal temperature of BC1).

In this way, if the internal temperature of the moving chamber 610 is assimilated to the internal temperature of the first buffer chamber BC1, there is no need to configure a separate cooler or blowing fan in the moving chamber 610. In this example, it may be desirable to apply the same temperature control method as the temperature control method in the first buffer chamber (BC1) and the moving chamber 610 between the test chambers 641 to 648 and the moving chamber 610. You can. Of course, if this example is followed, the insulation of the mobile chamber 610 can be implemented to be further strengthened.

For reference, in the above example, cooling is explained by injecting low-temperature gas (e.g., LN2 gas), but the inside of the first buffer chamber (BC1) is cooled by supplying cold air through a cooling system using a separate compressor and evaporator. Cooling can also be considered.

Furthermore, the above example of temperature control uses a low-temperature test as an example, but the same can be applied to a high-temperature test as well.

As described above, the specific description of the present invention has been made by way of examples with reference to the accompanying drawings. However, since the above-described embodiments are only explained by referring to preferred examples of the present invention, the present invention is limited to the above-described embodiments. It should not be understood as limited, and the scope of rights of the present invention should be understood as the scope of the claims and equivalents described later.

200: Handler
210: mobile chamber
211: first chamber part 212: second chamber part
220: elevator
230: transfer machine
241 to 248: test chamber
251 to 258: connector
261a, 261b: first mobile device
262a, 262b: second mobile device
271: Loading machine
272: Unloading machine
291, 292: circuit breaker

Claims (12)

delete delete delete delete delete delete delete delete delete delete delete A receiving chamber capable of accommodating a test tray loaded with electronic components;
It is equipped to receive a test tray from the receiving chamber or give a test tray to the receiving chamber, and electrically tests the electronic components on a tester coupled to the test window so that the electrical characteristics of the electronic components loaded on the test tray can be tested. A connector that connects or disconnects and is provided on one side of the receiving chamber; and
a plurality of movers for moving test trays between the receiving chamber and the connector; Includes,
The receiving chamber is,
A first chamber part for controlling the temperature of electronic components loaded on the test tray; and
a second chamber part that is integrally coupled with the first chamber part and arranged side by side, the interior of which is separated from the first chamber part by a separation wall, and is configured to return the temperature of the electronic components loaded on the test tray to room temperature; Including,
Some of the plurality of movers move the test tray from the first chamber portion to the connector, and other portions move the test tray from the connector to the second chamber portion,
The first chamber portion and the second chamber portion are arranged side by side in the vertical direction.
Handler for testing electronic components.

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