KR102652732B1 - 점착 필름 - Google Patents

점착 필름 Download PDF

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KR102652732B1
KR102652732B1 KR1020160171410A KR20160171410A KR102652732B1 KR 102652732 B1 KR102652732 B1 KR 102652732B1 KR 1020160171410 A KR1020160171410 A KR 1020160171410A KR 20160171410 A KR20160171410 A KR 20160171410A KR 102652732 B1 KR102652732 B1 KR 102652732B1
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South Korea
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light
substrate
weight
heat conversion
conversion layer
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Korean (ko)
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KR20180069322A (ko
Inventor
양용석
황교성
정규진
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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Priority to KR1020160171410A priority Critical patent/KR102652732B1/ko
Priority to PCT/IB2017/057947 priority patent/WO2018109711A1/en
Priority to TW106144037A priority patent/TWI764962B/zh
Priority to JP2019531941A priority patent/JP7107623B2/ja
Priority to US16/468,355 priority patent/US11434393B2/en
Priority to CN201780077325.1A priority patent/CN110072959B/zh
Publication of KR20180069322A publication Critical patent/KR20180069322A/ko
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Publication of KR102652732B1 publication Critical patent/KR102652732B1/ko
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    • C09J7/00Adhesives in the form of films or foils
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    • C09J133/04Homopolymers or copolymers of esters
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    • C09J133/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
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    • C09J133/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
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    • C09J133/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
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    • C09J133/04Homopolymers or copolymers of esters
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    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • C09J7/403Adhesives in the form of films or foils characterised by release liners characterised by the structure of the release feature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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    • C09J2301/20Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself
    • C09J2301/208Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself the adhesive layer being constituted by at least two or more adjacent or superposed adhesive layers, e.g. multilayer adhesive
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    • H01L2221/6834Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
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    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68381Details of chemical or physical process used for separating the auxiliary support from a device or wafer

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Dicing (AREA)
KR1020160171410A 2016-12-15 2016-12-15 점착 필름 Active KR102652732B1 (ko)

Priority Applications (6)

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