TWI764962B - 黏著劑膜、處理基材之方法及形成黏著劑膜之方法 - Google Patents

黏著劑膜、處理基材之方法及形成黏著劑膜之方法 Download PDF

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TWI764962B
TWI764962B TW106144037A TW106144037A TWI764962B TW I764962 B TWI764962 B TW I764962B TW 106144037 A TW106144037 A TW 106144037A TW 106144037 A TW106144037 A TW 106144037A TW I764962 B TWI764962 B TW I764962B
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substrate
light
heat conversion
conversion layer
adhesive
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TW106144037A
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Chinese (zh)
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TW201835202A (zh
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楊鏞釋
鄭圭振
黃教聖
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美商3M新設資產公司
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    • C09J7/403—Adhesives in the form of films or foils characterised by release liners characterised by the structure of the release feature
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    • H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
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  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Dicing (AREA)
TW106144037A 2016-12-15 2017-12-14 黏著劑膜、處理基材之方法及形成黏著劑膜之方法 TWI764962B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
??10-2016-0171410 2016-12-15
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