KR102622884B1 - 전기적 접속장치 - Google Patents

전기적 접속장치 Download PDF

Info

Publication number
KR102622884B1
KR102622884B1 KR1020217029622A KR20217029622A KR102622884B1 KR 102622884 B1 KR102622884 B1 KR 102622884B1 KR 1020217029622 A KR1020217029622 A KR 1020217029622A KR 20217029622 A KR20217029622 A KR 20217029622A KR 102622884 B1 KR102622884 B1 KR 102622884B1
Authority
KR
South Korea
Prior art keywords
electrode
connector
liquid metal
wiring board
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020217029622A
Other languages
English (en)
Korean (ko)
Other versions
KR20210126717A (ko
Inventor
쇼 하라코
노보루 오타베
히로시 카미야
요시유키 후카미
쇼고 미즈타니
Original Assignee
가부시키가이샤 니혼 마이크로닉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니혼 마이크로닉스 filed Critical 가부시키가이샤 니혼 마이크로닉스
Publication of KR20210126717A publication Critical patent/KR20210126717A/ko
Application granted granted Critical
Publication of KR102622884B1 publication Critical patent/KR102622884B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50Fixed connections
    • H01R12/51Fixed connections for rigid printed circuits or like structures
    • H01R12/52Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70Coupling devices
    • H01R12/91Coupling devices allowing relative movement between coupling parts, e.g. floating or self aligning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755Material aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889Interfaces, e.g. between probe and tester
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70Coupling devices
    • H01R12/71Coupling devices for rigid printing circuits or like structures
    • H01R12/712Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
    • H01R12/716Coupling device provided on the PCB
    • H01R12/718Contact members provided on the PCB without an insulating housing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R3/00Electrically-conductive connections not otherwise provided for
    • H01R3/08Electrically-conductive connections not otherwise provided for for making connection to a liquid

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020217029622A 2019-03-11 2019-12-13 전기적 접속장치 Active KR102622884B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019043733A JP7263060B2 (ja) 2019-03-11 2019-03-11 電気的接続装置
JPJP-P-2019-043733 2019-03-11
PCT/JP2019/048940 WO2020183832A1 (ja) 2019-03-11 2019-12-13 電気的接続装置

Publications (2)

Publication Number Publication Date
KR20210126717A KR20210126717A (ko) 2021-10-20
KR102622884B1 true KR102622884B1 (ko) 2024-01-09

Family

ID=72426375

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217029622A Active KR102622884B1 (ko) 2019-03-11 2019-12-13 전기적 접속장치

Country Status (6)

Country Link
US (1) US12244083B2 (enExample)
JP (1) JP7263060B2 (enExample)
KR (1) KR102622884B1 (enExample)
CN (1) CN113544519B (enExample)
TW (1) TWI718826B (enExample)
WO (1) WO2020183832A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7142225B2 (ja) 2020-09-03 2022-09-27 パナソニックIpマネジメント株式会社 食品管理システム、及び冷蔵庫
CN113410219A (zh) * 2021-07-17 2021-09-17 北京梦之墨科技有限公司 一种led贴膜屏及其制作方法
US20240297119A1 (en) * 2021-12-22 2024-09-05 Intel Corporation Liquid metal connection device and method
US20240006400A1 (en) * 2022-07-02 2024-01-04 Intel Corporation Liquid metal based first level interconnects
US12431260B2 (en) * 2022-09-23 2025-09-30 Caterpillar Inc. High-velocity air-fuel coatings for conductor corrosion resistance
CN119485917B (zh) 2023-08-09 2025-12-16 宏启胜精密电子(秦皇岛)有限公司 具有内埋电阻的电路板及其制造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006349692A (ja) 2006-08-01 2006-12-28 Japan Electronic Materials Corp プローブカード
JP2009295707A (ja) 2008-06-04 2009-12-17 Hide Jinbo プローブ検査方法
US20130000117A1 (en) 2011-06-30 2013-01-03 Rajashree Baskaran Liquid metal interconnects
KR101590234B1 (ko) 2011-10-14 2016-01-29 유겐가이샤 고마쓰 이가타 세이사쿠쇼 조형용 재료, 기능제, 조형 제품 및 제품

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112484A (en) * 1977-03-11 1978-09-30 Daiden Co Ltd Device for connecting electric wire
JPS59111341A (ja) * 1982-12-17 1984-06-27 Hitachi Ltd Ic素子試験用治工具
JPS61124071A (ja) * 1984-11-20 1986-06-11 富士通株式会社 電気的接続装置
JPS62105379A (ja) * 1985-11-01 1987-05-15 株式会社日立製作所 コネクタ装置
JPS62295371A (ja) * 1986-06-13 1987-12-22 株式会社日立製作所 コネクタ
JPS6314274A (ja) 1986-07-03 1988-01-21 Nec Corp 患者予約最適化方式
JPS63141274A (ja) * 1986-12-01 1988-06-13 株式会社日立製作所 コネクタ装置
JPH01221877A (ja) * 1988-02-29 1989-09-05 Toshiba Corp 検査用ソケット
SU1758740A1 (ru) 1989-12-05 1992-08-30 Львовский политехнический институт им.Ленинского комсомола Жидкостное токосъемное устройство
JPH03241851A (ja) * 1990-02-20 1991-10-29 Sumitomo Electric Ind Ltd 半導体装置用保存治具
JPH0495845A (ja) * 1990-08-10 1992-03-27 Matsushita Electric Ind Co Ltd 配向膜の液晶配向能評価方法
JPH04127066A (ja) * 1990-09-18 1992-04-28 Fujitsu Ltd 信号端子接続方法および信号端子接続装置
JPH05203670A (ja) * 1992-01-24 1993-08-10 Fujitsu Ltd コンタクトプローブ
JP3115966B2 (ja) * 1993-09-20 2000-12-11 富士通株式会社 コネクタ
JPH08236179A (ja) * 1995-02-27 1996-09-13 Fujitsu Ltd 電気的接続装置及びその形成方法
JPH0836179A (ja) 1994-07-26 1996-02-06 Hitachi Ltd 液晶表示装置
JP3715438B2 (ja) * 1998-07-21 2005-11-09 富士通株式会社 電子装置およびその製造方法
US20060145715A1 (en) 2005-01-06 2006-07-06 Salmon Peter C Wafer level test head
US7586747B2 (en) * 2005-08-01 2009-09-08 Salmon Technologies, Llc. Scalable subsystem architecture having integrated cooling channels
JP2010003573A (ja) 2008-06-20 2010-01-07 Panasonic Electric Works Co Ltd 接点開閉装置
JP2010218977A (ja) * 2009-03-18 2010-09-30 Panasonic Electric Works Co Ltd 接点開閉装置
JP2010218981A (ja) 2009-03-18 2010-09-30 Panasonic Electric Works Co Ltd 接点開閉装置
JP2012249155A (ja) * 2011-05-30 2012-12-13 Nikon Corp 電子機器
CN203466320U (zh) * 2013-09-20 2014-03-05 番禺得意精密电子工业有限公司 电连接器
TWI603089B (zh) 2016-08-04 2017-10-21 創意電子股份有限公司 測試裝置與其探針連接器
JP2018064063A (ja) 2016-10-14 2018-04-19 イリソ電子工業株式会社 回路基板及び回路装置
CN107104298B (zh) 2017-04-28 2019-06-11 番禺得意精密电子工业有限公司 电连接器及其制造方法
CN109239578A (zh) 2018-09-26 2019-01-18 华进半导体封装先导技术研发中心有限公司 晶圆测试装置及晶圆测试方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006349692A (ja) 2006-08-01 2006-12-28 Japan Electronic Materials Corp プローブカード
JP2009295707A (ja) 2008-06-04 2009-12-17 Hide Jinbo プローブ検査方法
US20130000117A1 (en) 2011-06-30 2013-01-03 Rajashree Baskaran Liquid metal interconnects
KR101590234B1 (ko) 2011-10-14 2016-01-29 유겐가이샤 고마쓰 이가타 세이사쿠쇼 조형용 재료, 기능제, 조형 제품 및 제품

Also Published As

Publication number Publication date
US12244083B2 (en) 2025-03-04
KR20210126717A (ko) 2021-10-20
WO2020183832A1 (ja) 2020-09-17
CN113544519B (zh) 2024-09-10
TW202040136A (zh) 2020-11-01
TWI718826B (zh) 2021-02-11
JP7263060B2 (ja) 2023-04-24
JP2020148479A (ja) 2020-09-17
US20220149549A1 (en) 2022-05-12
CN113544519A (zh) 2021-10-22

Similar Documents

Publication Publication Date Title
KR102622884B1 (ko) 전기적 접속장치
US20210041482A1 (en) Electrical contactor and electrical connecting apparartus
JP4861860B2 (ja) プリント基板検査用治具及びプリント基板検査装置
JP2008145238A (ja) 電気接続器及びこれを用いた電気的接続装置
JP7707372B2 (ja) 電気的接続構造及び電気的接続装置
US11372022B2 (en) Electrical contactor and electrical connecting apparatus
US20050036374A1 (en) Probe card substrate
JP4611367B2 (ja) 半導体集積回路用ソケット
JP7393873B2 (ja) 電気的接触子及びプローブカード
JP2000065892A (ja) 導通検査用治具
JP2002270320A (ja) 半導体パッケージ用ソケット
KR20090073745A (ko) 프로브 카드
KR102645618B1 (ko) 전기적 접촉자 및 전기적 접속 장치
JP2016217856A (ja) 電気的接触子
JP2007109414A (ja) 集積回路用ソケット
JP2000321303A (ja) プローブカード及びコンタクタ
JP2003084040A (ja) 半導体検査装置の製造方法および半導体検査装置
JP2005127961A (ja) テスト用基板及びそれを使用したテスト装置
KR20250028440A (ko) 전기적 접촉자
JP2024061087A (ja) 電気的接触子、電気的接続構造及び電気的接続装置
JP2609860B2 (ja) プリント基板検査治具用ピン
KR20250050102A (ko) 프로브 카드용 캔틸레버형 프로브
WO2025126799A1 (ja) プローブ
JP2023017686A (ja) プローブカード構造
JP2006107854A (ja) Icソケット

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20210914

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20230726

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20231123

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20240104

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20240105

End annual number: 3

Start annual number: 1

PG1601 Publication of registration