KR102613338B1 - 밸브 장치, 유체 제어 장치 및 밸브 장치의 제조 방법 - Google Patents

밸브 장치, 유체 제어 장치 및 밸브 장치의 제조 방법 Download PDF

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Publication number
KR102613338B1
KR102613338B1 KR1020227000534A KR20227000534A KR102613338B1 KR 102613338 B1 KR102613338 B1 KR 102613338B1 KR 1020227000534 A KR1020227000534 A KR 1020227000534A KR 20227000534 A KR20227000534 A KR 20227000534A KR 102613338 B1 KR102613338 B1 KR 102613338B1
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KR
South Korea
Prior art keywords
diaphragm
flow path
bonnet
valve device
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227000534A
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English (en)
Korean (ko)
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KR20220018030A (ko
Inventor
아키히로 하라다
토모히로 나카타
타케루 미우라
미치오 야마지
타다유키 야쿠시진
케이스케 이시바시
Original Assignee
가부시키가이샤 후지킨
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Publication of KR20220018030A publication Critical patent/KR20220018030A/ko
Application granted granted Critical
Publication of KR102613338B1 publication Critical patent/KR102613338B1/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
KR1020227000534A 2019-07-31 2020-06-10 밸브 장치, 유체 제어 장치 및 밸브 장치의 제조 방법 Active KR102613338B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019141073 2019-07-31
JPJP-P-2019-141073 2019-07-31
PCT/JP2020/022873 WO2021019922A1 (ja) 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法

Publications (2)

Publication Number Publication Date
KR20220018030A KR20220018030A (ko) 2022-02-14
KR102613338B1 true KR102613338B1 (ko) 2023-12-14

Family

ID=74230602

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227000534A Active KR102613338B1 (ko) 2019-07-31 2020-06-10 밸브 장치, 유체 제어 장치 및 밸브 장치의 제조 방법

Country Status (5)

Country Link
US (1) US11859733B2 (https=)
JP (1) JP7402544B2 (https=)
KR (1) KR102613338B1 (https=)
TW (1) TWI739516B (https=)
WO (1) WO2021019922A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102796231B1 (ko) * 2024-12-31 2025-04-17 주식회사 토르 다이어프램 가스 밸브 장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12144294B2 (en) * 2017-03-17 2024-11-19 Don D. Duffin Irrigation saddle, adapter, and cap
CN119333602A (zh) * 2024-12-20 2025-01-21 上海聚克流体控制有限公司 一种低压驱动且能旋转的气动头隔膜阀

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
JPH08159308A (ja) * 1994-12-09 1996-06-21 Benkan Corp ダイヤフラム式自動弁
US5823509A (en) * 1997-07-11 1998-10-20 Amcast Industrial Corporation Diaphragm valve with means for adjustably setting the maxium valve opening
JP5669384B2 (ja) * 2009-12-01 2015-02-12 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP5775110B2 (ja) 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
JP6072648B2 (ja) * 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP6336345B2 (ja) * 2014-06-30 2018-06-06 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法
JP6530929B2 (ja) * 2015-02-27 2019-06-12 株式会社フジキン 流体制御器
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102796231B1 (ko) * 2024-12-31 2025-04-17 주식회사 토르 다이어프램 가스 밸브 장치

Also Published As

Publication number Publication date
JP7402544B2 (ja) 2023-12-21
TW202106997A (zh) 2021-02-16
US11859733B2 (en) 2024-01-02
TWI739516B (zh) 2021-09-11
JPWO2021019922A1 (https=) 2021-02-04
WO2021019922A1 (ja) 2021-02-04
KR20220018030A (ko) 2022-02-14
US20220290764A1 (en) 2022-09-15

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