JP7402544B2 - バルブ装置、流体制御装置及びバルブ装置の製造方法 - Google Patents

バルブ装置、流体制御装置及びバルブ装置の製造方法 Download PDF

Info

Publication number
JP7402544B2
JP7402544B2 JP2021536647A JP2021536647A JP7402544B2 JP 7402544 B2 JP7402544 B2 JP 7402544B2 JP 2021536647 A JP2021536647 A JP 2021536647A JP 2021536647 A JP2021536647 A JP 2021536647A JP 7402544 B2 JP7402544 B2 JP 7402544B2
Authority
JP
Japan
Prior art keywords
diaphragm
flow path
bonnet
valve device
female thread
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021536647A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021019922A1 (https=
Inventor
章弘 原田
知宏 中田
尊 三浦
道雄 山路
忠幸 薬師神
圭介 石橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of JPWO2021019922A1 publication Critical patent/JPWO2021019922A1/ja
Application granted granted Critical
Publication of JP7402544B2 publication Critical patent/JP7402544B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
JP2021536647A 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法 Active JP7402544B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019141073 2019-07-31
JP2019141073 2019-07-31
PCT/JP2020/022873 WO2021019922A1 (ja) 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2021019922A1 JPWO2021019922A1 (https=) 2021-02-04
JP7402544B2 true JP7402544B2 (ja) 2023-12-21

Family

ID=74230602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021536647A Active JP7402544B2 (ja) 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法

Country Status (5)

Country Link
US (1) US11859733B2 (https=)
JP (1) JP7402544B2 (https=)
KR (1) KR102613338B1 (https=)
TW (1) TWI739516B (https=)
WO (1) WO2021019922A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12144294B2 (en) * 2017-03-17 2024-11-19 Don D. Duffin Irrigation saddle, adapter, and cap
CN119333602A (zh) * 2024-12-20 2025-01-21 上海聚克流体控制有限公司 一种低压驱动且能旋转的气动头隔膜阀
KR102796231B1 (ko) * 2024-12-31 2025-04-17 주식회사 토르 다이어프램 가스 밸브 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011067891A1 (ja) 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2014190387A (ja) 2013-03-26 2014-10-06 Fujikin Inc 流量制御装置用の流量制御弁
JP2016161022A (ja) 2015-02-27 2016-09-05 株式会社フジキン 流体制御器
JP2019100525A (ja) 2017-12-08 2019-06-24 株式会社キッツエスシーティー 流体制御バルブと流体制御バルブの組み立て方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
JPH08159308A (ja) * 1994-12-09 1996-06-21 Benkan Corp ダイヤフラム式自動弁
US5823509A (en) * 1997-07-11 1998-10-20 Amcast Industrial Corporation Diaphragm valve with means for adjustably setting the maxium valve opening
JP6072648B2 (ja) * 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP6336345B2 (ja) * 2014-06-30 2018-06-06 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011067891A1 (ja) 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2014190387A (ja) 2013-03-26 2014-10-06 Fujikin Inc 流量制御装置用の流量制御弁
JP2016161022A (ja) 2015-02-27 2016-09-05 株式会社フジキン 流体制御器
JP2019100525A (ja) 2017-12-08 2019-06-24 株式会社キッツエスシーティー 流体制御バルブと流体制御バルブの組み立て方法

Also Published As

Publication number Publication date
US20220290764A1 (en) 2022-09-15
JPWO2021019922A1 (https=) 2021-02-04
KR102613338B1 (ko) 2023-12-14
TWI739516B (zh) 2021-09-11
WO2021019922A1 (ja) 2021-02-04
TW202106997A (zh) 2021-02-16
KR20220018030A (ko) 2022-02-14
US11859733B2 (en) 2024-01-02

Similar Documents

Publication Publication Date Title
JP7402544B2 (ja) バルブ装置、流体制御装置及びバルブ装置の製造方法
EP2629169B1 (en) Balanced valve cartridge
US10883615B2 (en) Metal diaphragm valve
WO2019107123A1 (ja) バルブ装置、このバルブ装置を用いた流体制御装置および半導体製造装置
TWI545267B (zh) 導引式減壓閥
JP7161780B2 (ja) バルブ装置
JP7237370B2 (ja) バルブ装置
RU2627022C2 (ru) Устройство для взаимодействия с мембраной для увеличения циклического ресурса мембраны
JP2008309255A (ja) 逃がし弁
JP7157461B2 (ja) バルブ装置
WO2019107139A1 (ja) バルブ装置、このバルブ装置を用いた流体制御装置および半導体製造装置
JP7629524B2 (ja) バルブキャビティキャップ機構
JP2020020371A (ja) アクチュエータおよびこれを用いたバルブ装置
JP7016465B2 (ja) 流体制御装置
JP7207761B2 (ja) バルブ装置および流体制御装置
WO2023047754A1 (ja) バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
US20210388914A1 (en) Valve device and gas supply system
JP4549981B2 (ja) 流体制御機器
JP7308542B2 (ja) バルブ装置およびガス供給システム
JP7448368B2 (ja) 手動用ダイヤフラムバルブ
JP2021055783A (ja) バルブ装置及び流体供給ユニット
JP2020087113A (ja) パイロットガバナ
JP2020009311A (ja) 減圧弁

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20220117

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230309

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231017

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231020

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231109

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231128

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231204

R150 Certificate of patent or registration of utility model

Ref document number: 7402544

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150