JPWO2021019922A1 - - Google Patents

Info

Publication number
JPWO2021019922A1
JPWO2021019922A1 JP2021536647A JP2021536647A JPWO2021019922A1 JP WO2021019922 A1 JPWO2021019922 A1 JP WO2021019922A1 JP 2021536647 A JP2021536647 A JP 2021536647A JP 2021536647 A JP2021536647 A JP 2021536647A JP WO2021019922 A1 JPWO2021019922 A1 JP WO2021019922A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021536647A
Other languages
Japanese (ja)
Other versions
JP7402544B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021019922A1 publication Critical patent/JPWO2021019922A1/ja
Application granted granted Critical
Publication of JP7402544B2 publication Critical patent/JP7402544B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
JP2021536647A 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法 Active JP7402544B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019141073 2019-07-31
JP2019141073 2019-07-31
PCT/JP2020/022873 WO2021019922A1 (ja) 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2021019922A1 true JPWO2021019922A1 (https=) 2021-02-04
JP7402544B2 JP7402544B2 (ja) 2023-12-21

Family

ID=74230602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021536647A Active JP7402544B2 (ja) 2019-07-31 2020-06-10 バルブ装置、流体制御装置及びバルブ装置の製造方法

Country Status (5)

Country Link
US (1) US11859733B2 (https=)
JP (1) JP7402544B2 (https=)
KR (1) KR102613338B1 (https=)
TW (1) TWI739516B (https=)
WO (1) WO2021019922A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12144294B2 (en) * 2017-03-17 2024-11-19 Don D. Duffin Irrigation saddle, adapter, and cap
CN119333602A (zh) * 2024-12-20 2025-01-21 上海聚克流体控制有限公司 一种低压驱动且能旋转的气动头隔膜阀
KR102796231B1 (ko) * 2024-12-31 2025-04-17 주식회사 토르 다이어프램 가스 밸브 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08159308A (ja) * 1994-12-09 1996-06-21 Benkan Corp ダイヤフラム式自動弁
WO2011067891A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2014190387A (ja) * 2013-03-26 2014-10-06 Fujikin Inc 流量制御装置用の流量制御弁
JP2016161022A (ja) * 2015-02-27 2016-09-05 株式会社フジキン 流体制御器
JP2019100525A (ja) * 2017-12-08 2019-06-24 株式会社キッツエスシーティー 流体制御バルブと流体制御バルブの組み立て方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
US5823509A (en) * 1997-07-11 1998-10-20 Amcast Industrial Corporation Diaphragm valve with means for adjustably setting the maxium valve opening
JP6072648B2 (ja) * 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP6336345B2 (ja) * 2014-06-30 2018-06-06 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08159308A (ja) * 1994-12-09 1996-06-21 Benkan Corp ダイヤフラム式自動弁
WO2011067891A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2014190387A (ja) * 2013-03-26 2014-10-06 Fujikin Inc 流量制御装置用の流量制御弁
JP2016161022A (ja) * 2015-02-27 2016-09-05 株式会社フジキン 流体制御器
JP2019100525A (ja) * 2017-12-08 2019-06-24 株式会社キッツエスシーティー 流体制御バルブと流体制御バルブの組み立て方法

Also Published As

Publication number Publication date
JP7402544B2 (ja) 2023-12-21
TW202106997A (zh) 2021-02-16
US11859733B2 (en) 2024-01-02
TWI739516B (zh) 2021-09-11
WO2021019922A1 (ja) 2021-02-04
KR20220018030A (ko) 2022-02-14
US20220290764A1 (en) 2022-09-15
KR102613338B1 (ko) 2023-12-14

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