TWI739516B - 閥裝置、流體控制裝置及閥裝置的製造方法 - Google Patents

閥裝置、流體控制裝置及閥裝置的製造方法 Download PDF

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Publication number
TWI739516B
TWI739516B TW109123974A TW109123974A TWI739516B TW I739516 B TWI739516 B TW I739516B TW 109123974 A TW109123974 A TW 109123974A TW 109123974 A TW109123974 A TW 109123974A TW I739516 B TWI739516 B TW I739516B
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TW
Taiwan
Prior art keywords
aforementioned
diaphragm
flow path
valve device
female thread
Prior art date
Application number
TW109123974A
Other languages
English (en)
Chinese (zh)
Other versions
TW202106997A (zh
Inventor
原田章弘
中田知宏
三浦尊
山路道雄
藥師神忠幸
石橋圭介
Original Assignee
日商富士金股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商富士金股份有限公司 filed Critical 日商富士金股份有限公司
Publication of TW202106997A publication Critical patent/TW202106997A/zh
Application granted granted Critical
Publication of TWI739516B publication Critical patent/TWI739516B/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
TW109123974A 2019-07-31 2020-07-15 閥裝置、流體控制裝置及閥裝置的製造方法 TWI739516B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019141073 2019-07-31
JP2019-141073 2019-07-31

Publications (2)

Publication Number Publication Date
TW202106997A TW202106997A (zh) 2021-02-16
TWI739516B true TWI739516B (zh) 2021-09-11

Family

ID=74230602

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109123974A TWI739516B (zh) 2019-07-31 2020-07-15 閥裝置、流體控制裝置及閥裝置的製造方法

Country Status (5)

Country Link
US (1) US11859733B2 (https=)
JP (1) JP7402544B2 (https=)
KR (1) KR102613338B1 (https=)
TW (1) TWI739516B (https=)
WO (1) WO2021019922A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12144294B2 (en) * 2017-03-17 2024-11-19 Don D. Duffin Irrigation saddle, adapter, and cap
CN119333602A (zh) * 2024-12-20 2025-01-21 上海聚克流体控制有限公司 一种低压驱动且能旋转的气动头隔膜阀
KR102796231B1 (ko) * 2024-12-31 2025-04-17 주식회사 토르 다이어프램 가스 밸브 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08159308A (ja) * 1994-12-09 1996-06-21 Benkan Corp ダイヤフラム式自動弁
WO2011067891A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2016161022A (ja) * 2015-02-27 2016-09-05 株式会社フジキン 流体制御器
JP2019100525A (ja) * 2017-12-08 2019-06-24 株式会社キッツエスシーティー 流体制御バルブと流体制御バルブの組み立て方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
US5823509A (en) * 1997-07-11 1998-10-20 Amcast Industrial Corporation Diaphragm valve with means for adjustably setting the maxium valve opening
JP5775110B2 (ja) 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
JP6072648B2 (ja) * 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP6336345B2 (ja) * 2014-06-30 2018-06-06 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08159308A (ja) * 1994-12-09 1996-06-21 Benkan Corp ダイヤフラム式自動弁
WO2011067891A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2016161022A (ja) * 2015-02-27 2016-09-05 株式会社フジキン 流体制御器
JP2019100525A (ja) * 2017-12-08 2019-06-24 株式会社キッツエスシーティー 流体制御バルブと流体制御バルブの組み立て方法

Also Published As

Publication number Publication date
JP7402544B2 (ja) 2023-12-21
TW202106997A (zh) 2021-02-16
US11859733B2 (en) 2024-01-02
JPWO2021019922A1 (https=) 2021-02-04
WO2021019922A1 (ja) 2021-02-04
KR20220018030A (ko) 2022-02-14
US20220290764A1 (en) 2022-09-15
KR102613338B1 (ko) 2023-12-14

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