KR102489971B1 - 색소 함유 알루마이트 처리 플라즈마 인디케이터 - Google Patents
색소 함유 알루마이트 처리 플라즈마 인디케이터 Download PDFInfo
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- KR102489971B1 KR102489971B1 KR1020197016661A KR20197016661A KR102489971B1 KR 102489971 B1 KR102489971 B1 KR 102489971B1 KR 1020197016661 A KR1020197016661 A KR 1020197016661A KR 20197016661 A KR20197016661 A KR 20197016661A KR 102489971 B1 KR102489971 B1 KR 102489971B1
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- Prior art keywords
- plasma
- dye
- treatment
- indicator
- red
- Prior art date
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- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 claims description 9
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- Condensed Matter Physics & Semiconductors (AREA)
- Plasma & Fusion (AREA)
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| JP2017000272 | 2017-01-04 | ||
| JPJP-P-2017-000272 | 2017-01-04 | ||
| JPJP-P-2017-108964 | 2017-06-01 | ||
| JP2017108964 | 2017-06-01 | ||
| PCT/JP2017/046587 WO2018128123A1 (ja) | 2017-01-04 | 2017-12-26 | 色素含有アルマイト処理プラズマインジケータ |
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| KR20190102185A KR20190102185A (ko) | 2019-09-03 |
| KR102489971B1 true KR102489971B1 (ko) | 2023-01-17 |
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| JP (1) | JP7058878B2 (ja) |
| KR (1) | KR102489971B1 (ja) |
| CN (1) | CN110114668A (ja) |
| MY (1) | MY193027A (ja) |
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| WO (1) | WO2018128123A1 (ja) |
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| JP7464219B2 (ja) | 2019-04-23 | 2024-04-09 | 株式会社サクラクレパス | 積層体及びインジケーター |
| WO2020218078A1 (ja) * | 2019-04-23 | 2020-10-29 | 株式会社サクラクレパス | 積層体及びインジケーター |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162504A (ja) | 2004-12-09 | 2006-06-22 | Olympus Corp | 生体関連物質検出用試験片の製造方法 |
| JP2008127673A (ja) | 2006-11-24 | 2008-06-05 | Fujifilm Corp | 微細構造体の製造方法および微細構造体 |
| JP2013506053A (ja) * | 2009-09-30 | 2013-02-21 | クラリアント・ファイナンス・（ビーブイアイ）・リミテッド | 陽極酸化されたアルミニウム表面の着色方法 |
| JP2016065204A (ja) * | 2014-09-16 | 2016-04-28 | 株式会社サクラクレパス | プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9002856D0 (en) * | 1990-02-08 | 1990-04-04 | Alcan Int Ltd | Fluid detection device |
| US5942438A (en) * | 1997-11-07 | 1999-08-24 | Johnson & Johnson Medical, Inc. | Chemical indicator for oxidation-type sterilization processes using bleachable dyes |
| US20010006610A1 (en) * | 1998-02-03 | 2001-07-05 | Michael J Miller | Contained indicators for determining sterilizations |
| JP5285283B2 (ja) * | 2008-01-24 | 2013-09-11 | 東京エレクトロン株式会社 | プラズマ処理容器の陽極酸化処理方法 |
| CN102925770B (zh) * | 2012-08-27 | 2014-07-09 | 安徽家园铝业有限公司 | 氧化着色电泳涂漆铝合金型材的生产方法 |
| JP6126042B2 (ja) | 2013-06-04 | 2017-05-10 | 株式会社サクラクレパス | プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケーター |
| TWI624890B (zh) * | 2013-08-22 | 2018-05-21 | Sakura Color Prod Corp | Indicator for electronic component manufacturing apparatus, and design and/or management method of the same |
| WO2015129660A1 (ja) | 2014-02-28 | 2015-09-03 | 株式会社サクラクレパス | 着色アルミニウム成形体及びその製造方法 |
| JP2015205995A (ja) * | 2014-04-21 | 2015-11-19 | 株式会社サクラクレパス | プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ |
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- 2017-12-26 JP JP2018560375A patent/JP7058878B2/ja active Active
- 2017-12-26 CN CN201780080935.7A patent/CN110114668A/zh active Pending
- 2017-12-26 WO PCT/JP2017/046587 patent/WO2018128123A1/ja active Application Filing
- 2017-12-29 TW TW106146512A patent/TWI735726B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162504A (ja) | 2004-12-09 | 2006-06-22 | Olympus Corp | 生体関連物質検出用試験片の製造方法 |
| JP2008127673A (ja) | 2006-11-24 | 2008-06-05 | Fujifilm Corp | 微細構造体の製造方法および微細構造体 |
| JP2013506053A (ja) * | 2009-09-30 | 2013-02-21 | クラリアント・ファイナンス・（ビーブイアイ）・リミテッド | 陽極酸化されたアルミニウム表面の着色方法 |
| JP2016065204A (ja) * | 2014-09-16 | 2016-04-28 | 株式会社サクラクレパス | プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190102185A (ko) | 2019-09-03 |
| MY193027A (en) | 2022-09-23 |
| CN110114668A (zh) | 2019-08-09 |
| JP7058878B2 (ja) | 2022-04-25 |
| TW201833395A (zh) | 2018-09-16 |
| JPWO2018128123A1 (ja) | 2019-11-07 |
| TWI735726B (zh) | 2021-08-11 |
| WO2018128123A1 (ja) | 2018-07-12 |
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