KR102480947B1 - Withdrawal jig apparatus for heating module for heat treatment system of display panel - Google Patents

Abstract

The present invention is a heat treatment unit composed of a chamber in which n (where n is an integer equal to or greater than 2) slots having a front opening inlet and a rear opening exit are arranged in a multi-stage manner and a housing in which the chambers are accommodated, and , In the heat treatment system of a display panel including n main heating modules disposed in each slot to supply a heat source in each slot, a jig that enters the outlet of the slot and lifts the main heating module and then withdraws it The present invention relates to a pull-out jig device for a heating module for a heat treatment system of a display panel, which is implemented to further include a unit, so that the heating module disposed in each slot can be easily pulled out, so that maintenance such as replacement, repair, cleaning, etc. is easy.

Description

Draw-out jig device for heating module for heat treatment system of display panel {WITHDRAWAL JIG APPARATUS FOR HEATING MODULE FOR HEAT TREATMENT SYSTEM OF DISPLAY PANEL}

The present invention relates to a drawing jig device for a heating module for a heat treatment system of a display panel in which heat treatment units disposed in each slot are configured as one module to facilitate insertion, disposition, and withdrawal in each slot.

The display can be said to be an important interface for exchanging information between humans and electronic devices. The types of displays can be broadly classified into cathode-ray tube (CRT) and flat panel display (FPD). there is.

Among them, flat panel displays include Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Electro Luminescent Diode (ELD), Field Emission Display (FED), and micro-precision There is a liquid crystal on silicon (LCOS) using mechanical technology (Micro Electro Mechanical System, MEMS) and the like.

Although each of these flat panel displays has different manufacturing processes and materials, they commonly undergo a firing process through heat treatment. Crystallization into an amorphous silicon layer having a low electron mobility through heat treatment and crystallization into a polycrystalline silicon layer having a crystalline structure having a high electron mobility is usually performed at a temperature in the range of 250° C. to 750° C.

The apparatus for applying heat to the amorphous silicon layer has a structure in which a substrate is put into a furnace and heat is applied to the amorphous silicon layer with a heating means such as a heater. Heat treatment can be performed on one substrate There is a single-wafer type and a batch type in which a plurality of substrates are vertically multi-staged and heat-treated.

At this time, as a technology for maintenance of a heating module for heat treatment or a display panel heat treated by this,

Korean Patent Registration No. 10-1484734 (registered on January 14, 2015, hereinafter referred to as 'Document 1') 『Heat treatment system for flat display panel and heat treatment method thereof』 is presented,

Document 1 is composed of a box shape by installing an insulation board on the outside of a square support frame, a main body having a loading opening for carrying in or taking out a panel on the front side, and having a multi-layer support installed inside the support frame; A firing plate is installed on each of the pedestals, a heating pipe is piped on the upper surface of each firing plate, and seating members are sequentially arranged on the upper side of the heating pipe, and a panel placed on the upper surface of each seating member. Heat treatment unit for heat treatment with heat radiated from the heating tube; a shutter composed of a plurality of opening and closing doors positioned at the front side of each of the heat treatment units to seal the charging opening so that heat treatment is performed; an opening/closing unit that horizontally moves the opening/closing door of the shutter in the forward and backward directions to adhere to or separate from the charging opening; It consists of; a lifting unit that moves horizontally from the loading opening by the opening and closing unit and lifts or lowers the separated shutter with an elevating member to completely open the loading opening or restore the position of the door.

Document 1 having the above configuration is a technology related to a heat treatment system in which a seating member in which a panel is seated and subjected to heat treatment is inserted in a sliding manner, thereby facilitating insertion and removal and facilitating cleaning even when the panel is damaged during the heat treatment process.

Document 1. Korean Patent Registration No. 10-1484734 (registered on January 14, 2015)

In the present invention, a modularized heating module is disposed in each slot, and the process temperature in the slot can be uniformly secured through the heating module of the corresponding slot and the heating structure of the shutter, and in particular, each slot through a jig and a lift unit. It is an object of the present invention to provide a pull-out jig device for a heating module for a heat treatment system of a display panel, in which the heating module can be easily pulled out and maintenance such as replacement, repair, and cleaning is easy.

In order to solve the above problems, the withdrawal jig device for the heating module for the heat treatment system of the display panel according to the present invention,

A heat treatment unit composed of a chamber in which n (where n is an integer of 2 or more) slots having a front opening inlet and a rear opening outlet are arranged in a multi-stage manner and a housing in which the chambers are accommodated; In the display panel heat treatment system including n main heating modules disposed in each slot to supply a heat source within the slot,

It is characterized in that it further comprises a jig unit that enters the exit of the slot, lifts the main heating module, and then withdraws it.

The withdrawal jig device for the heating module for the heat treatment system of the display panel according to the present invention,

Heating modules arranged for each slot are easy to withdraw, so maintenance such as replacement, repair, and cleaning is easy.

In addition, as each slot has an individual heating and opening/closing structure, the effect of temperature between slots can be minimized, and a wide range of heat treatment process temperatures can be applied through various heating structures.

1 is a three-dimensional configuration diagram showing a heat treatment unit in a pull-out jig device for a heating module for a heat treatment system of a display panel according to the present invention;
Figure 2 is a combined front configuration diagram of Figure 1;
Figure 3 is a coupling rear configuration diagram of Figure 1;
4 is a three-dimensional configuration diagram showing a chamber;
5 is an enlarged configuration diagram of a main part of “A” in FIG. 4;
6 is a three-dimensional configuration diagram for showing a sub-heating means of a heat treatment unit;
7 is a three-dimensional configuration diagram for showing a main heating module, its power supply unit, and a holding bracket;
8 is a three-dimensional configuration diagram of the back of the heat treatment unit;
9 is a plane and front configuration diagram showing a jig unit;
10 is a plan configuration diagram showing a lift unit;
11 is a side configuration diagram showing a lift unit;
12 is a front configuration diagram showing a state in which a jig unit has entered a slot of a chamber;
13 is a front configuration diagram showing a state in which the main heating module is lifted by the jig unit.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, the terms or words used in this specification and claims should not be construed as being limited to the usual or dictionary meaning, and the inventor appropriately uses the concept of the term in order to explain his/her invention in the best way. It should be interpreted as a meaning and concept consistent with the technical idea of the present invention based on the principle that it can be defined. Therefore, the embodiments described in this specification and the configurations shown in the drawings are only one of the most preferred embodiments of the present invention and do not represent all of the technical spirit of the present invention, so various equivalents that can replace them at the time of this application. It should be understood that there may be waters and variations.

Based on FIG. 1, the direction of the shutter side is specified as front or front, and the door side is rear or rear. Based on FIG. 11, the floor board side is upper or upper, and the lift body side is lower or lower. It is decided to specify the direction as downward.

As shown in FIGS. 1 to 13, the pull-out jig device for the heating module for the heat treatment system of the display panel according to the present invention,

A chamber 21 in which n (n is an integer equal to or greater than 2) slots 211 having a front opening 211a and a rear opening outlet 211b are arranged in a multi-stage manner, and the chamber 21 Includes a heat treatment unit 20 composed of a housing 22 in which 21 is accommodated, and n main heating modules 30 disposed in each slot 211 to supply a heat source to each slot 211 In the heat treatment system of the display panel to

A jig unit 70 entering the outlet 211b of the slot 211 to lift and withdraw the main heating module 30 is further included.

At this time, as shown in FIGS. 1 to 8, the main heating module 30 includes a square support 31 disposed in the slot 211, a heating element 32 disposed above the square support 31, and the A boat 33 arranged in a zigzag shape on top of the heating element 32, a plurality of pins 34 provided along the longitudinal direction of the boat 33 to support the display panel inserted into the slot 211, and , It consists of a power supply unit 35 for applying power to the heating element 32, and four holding brackets 36 disposed in pairs spaced apart from each other at both ends of the square support 31.

And as shown in FIGS. 9, 12 and 13, when the jig unit 70 enters the outlet 211b of the slot 211, the square frame 71 spaced apart from the upper side of the main heating module 30 ), a plurality of moving rollers 72 provided on the lower surface of the square frame 71 to support the square frame 71 and performing a rolling motion along the bottom in the slot 211, and the square frame 71 A pair of hanger rods 73 coupled across each other in the form of interconnecting both ends but spaced apart in front and rear of the square frame 71, and four jig heads spaced apart on the lower side of each holding bracket 36 ( 74), and four jig head driving parts 75 mounted on each of the hanger rods 73 and moving each of the jig heads 74 up and down.

First, looking at the heat treatment unit 20 for heat treatment (firing) of the display panel in the heat treatment system of the display panel,

As shown in FIGS. 1 to 4, the chamber 21 has a rectangular enclosure structure, and each of the slots 211 is arranged in a multi-stage form inside the chamber 21, and each slot 211 is separated by a partition wall. They have spatial structures independent of each other. In addition, in the present invention, it is shown that n is 4, but this is only an example and will not be limited thereto.

And as shown in FIG. 1, the housing 22 of the heat treatment unit 20 is composed of a square bottom frame 221 and four post frames 222 erected in the upper four corners of the bottom frame 221. At this time, the post frame 222 may be further provided in the remaining area of the bottom frame 221 except for its four corner areas, that is, on the side connecting two adjacent corner areas.

And, as shown in FIG. 1, a plurality of support pieces 212 having ends having fastening holes 212a exposed to the outside are provided on the lower surface of the chamber 21 of the heat treatment unit 20, and the housing 22 The upper surface of the bottom frame 221 is provided with a plurality of corresponding support pieces 223 having corresponding fastening holes 223a corresponding to the fastening holes 212a while being in contact with each of the support pieces 212, Assembly between the bottom frame 221 and the chamber 21 is possible as bolts pass through the fastening holes 212a and are fastened to the corresponding fastening holes 223a.

And as shown in FIG. 6, in the heat treatment unit 20, at the entrance 211a of each slot 211 of the chamber 21, an opening and closing shutter 23 and an opening and closing driving means 24 for operating it, and the shutter ( 23) and a sub-heating means 25 for supplying a heat source into the slot 211.

The shutter 23 is formed to protrude from the shutter plate 231 having a larger size than the inlet 211a of the slot 211 and the inner wall of the shutter plate 231 to have a size corresponding to the inlet 211a. and a sealing plate 232 inserted into the inlet 211a.

The opening and closing driving means 24 is a pair of transverse bars 241 mounted on the front surface of the shutter plate 231 and mutually connecting both ends of the shutter plate 231 and the chamber 21 It consists of a hinge member 242 and a shutter driving unit 243 that rotates the horizontal bar 241 downward by pushing it and rotates it upward by pulling it in the opposite direction. It may be made of a pneumatic cylinder structure in which a piston coupled to rotate is built-in, advances and retreats the piston by selective supply of air, and is installed to rotate on both side walls of the chamber 21. Therefore, the shutter 23 is rotated forward with respect to each hinge member 242 by the shutter driving unit 243 and unfolded horizontally, so that the entrance 211a of the slot 211 is opened, and on the contrary, to the rear The inlet 211a of the slot 211 is closed by being rotated and set up vertically while returning to the original position.

The sub-heating means 25 is a heating rod 251 disposed along the circumference of the sealing plate 232 on the inner wall of the shutter plate 231 and a power supply for applying power to the heating rod 251. It may be made of a line 252, and the power supply line 252 is disposed in a form passing through the center of the hinge member 242 and interconnects the hinge member 242 and the shutter plate 232. It can be done.

And as shown in FIGS. 4 and 8, each slot 211 of the chamber 21 has an outlet 211b opened to the rear, and the outlet of each slot 211 at the rear of the chamber 21 ( 211b) A door 213 for opening and closing is provided.

The entrance 211a of the slot 211 has a space size that allows the display panel to enter and exit, and the exit 211b of the slot 211 has a space size that allows the main heating module 30 to enter and exit. have space size. Eventually, when the exit 211b of each slot 211 is opened by opening the door 213, the main heating module 30 can be entered and exited.

Further, the door 231 is pivotally coupled to the post frame 222 of the housing 22, and around the door 231 is coupled with the chamber 21 to lock the door 231. A locking member is provided.

On the other hand, looking at the main heating module 30 for supplying a heat source to each slot 211 in the heat treatment system of the display panel,

The heating element 32 is made of a rectangular plate structure in which heating wires are wired in a zigzag form therein, and a plurality of such heating elements 32 are provided and disposed on the upper portion of the square support 31 in a lattice form.

And as shown in FIG. 7, each of the pins 34 is disposed along the longitudinal direction of the boat 33, and the shape is a thin, vertically long circular column and is made of quartz, and the end is the lower surface of the display panel. It is preferably in the form of a dome to prevent damage that may occur when in contact with.

In addition, the power supply unit 35 includes a plurality of supports 351 erected at both ends of the square support 31 at regular intervals, and a connector spaced apart from both ends of the square support 31 toward the rear. It consists of a module 352 and a plurality of bus-bars 353 starting from the connector module 352 and being supported and penetrated by each support body 351 to be electrically connected to the heating element 32. . At this time, a power supply cable for applying external power is connected to the connector module 352 .

Therefore, the display panel is inserted into each slot 211 of the chamber 21 through its inlet 211, and the drawn display panel is seated and supported on each pin 34, and is supplied from the power supply unit 35 by external control. When power is applied, the heating element 32 heats up, and a heat treatment process is performed on the display panel.

And as shown in FIG. 7, each of the holding brackets 36 is disposed at both ends of the square support 31 spaced apart from each other in pairs, and when viewed from the front, the left and right two holding brackets 36 face each other. It is composed of an approximately triangular shape protruding into. In particular, in the main heating module 30, when the jig unit 70 enters the slot 211 by the roller 72, the jig head 74 reaches the lower side of each holding bracket 36. It is preferable to be configured so that there are no interfering elements until

On the other hand, looking at the jig unit 70 for entering and exiting the main heating module 30 into and out of the slot 211 in the heat treatment system of the display panel,

As shown in FIG. 9, the square frame 71 is made up of four frames that are connected to each other, and each of the hanger rods 73 is spaced apart from the front and rear of the square frame 71, and each of the hanger rods 73 is spaced apart from each other. The jig head 74 is made of a rectangular plate structure.

And, as shown in FIGS. 9 and 12, each jig head driving unit 75 has an elevating piston 751 whose end is connected to the jig head 74, and the elevating piston 751 is built in to selectively supply air. It is composed of a lifting pneumatic cylinder body 752 mounted on the lower surface of the hanger rod 73 and lifting the lifting piston 751 up and down by the. In particular, the jig head 74 is eccentrically connected to one side at the end of the elevating piston 751, and at this time, one side means the corresponding holding bracket 36 side.

Therefore, as shown in FIG. 13, when the elevating piston 751 rises, the jig head 74 also rises and is caught by the holding bracket 36, thereby removing the main heating module 30 from the bottom within the slot 211. will be lifted

In addition, the elevating pneumatic cylinder body 752 may be implemented to be able to change its position along the left and right longitudinal directions of the hanger rod 73. To this end, the lower surface of the hanger rod 73 is concave along its longitudinal direction. It is formed and has a T-shaped cross section, and a protrusion mounted on the upper end of the elevating pneumatic cylinder body 752 and coupled to the T-shaped groove at the top and sliding along the T-shaped groove. . At this time, the projection set by sliding left and right along the T-shaped groove may be implemented to be pressurized and fixed by the end of the bolt when the bolt fastened to the hanger rod 73 is tightened.

On the other hand, the present invention further includes a lift unit 80,

As shown in FIGS. 10 and 11 , the lift unit 80 includes a lift body 81 disposed at the exit 211b side of the slot 211 in the chamber 21, and the lift body 81 ), a pair of rails 83 erected on both left and right ends of the upper surface of the floor board 82 and disposed long in front and rear, and a floor board 82 disposed on the upper surface of the lift body 81. It consists of a plurality of moving casters 86 provided.

In addition, as shown in FIG. 11, the lift unit 80 has a floor board drive unit 84 that lifts the floor board 82 up and down, and is built on both left and right ends of the upper surface of the floor board 82, respectively. A pair of fences 85 disposed on the outside of the rail 83 are further provided. The floorboard drive unit 84 is installed in the lift body 81 and is folded in an x-shape and then applied to a pneumatic or hydraulic cylinder. It can be implemented as a cross-type lift structure that is unfolded by This is an example and can be modified and changed in various ways within the range that satisfies the condition for moving the floor board 82 up and down.

In addition, a support member that moves up and down during rotation is further provided on the lower surface of the lift body 81 to fix the lift body 81 moved by the caster 86 to increase the length of the support member. The lift body 81 can be fixed by making the casters 86 spaced apart from the ground.

Therefore, when the jig unit 70 that is drawn out after lifting the main heating module 30 comes out of the slot 211, each of the rollers 72 moves along each of the rails 83. With respect to the main heating module 30 moved out of the slot 211 in this way, a worker who has entered and exited the floor board 82 performs maintenance work such as replacement, repair, and cleaning.

In the above description of the present invention, the "take-out jig device for the heating module for the heat treatment system of the display panel" having a specific shape and structure has been mainly described with reference to the accompanying drawings, but the present invention is subject to various modifications and changes by those skilled in the art. It is possible, and such modifications and changes should be construed as belonging to the protection scope of the present invention.

20: heat treatment unit
21: chamber
211: slot
211a: entrance
211b: exit
212: support piece
212a: fastening hole
213: door
22: housing
221: bottom frame
222: post frame
223: counter support piece
223a: corresponding fastening hole
23: Shutter
231: shutter plate
232: sealing plate
24: opening and closing driving means
241: side bar
242: hinge member
243: shutter driving unit
25: sub-heating means
251: heating rod
252: power supply line
30: main heating module
31: square support
32: heating element
33: boat
34: pin
35: power supply
351: support
352: connector module
353: bus bar
36: locking bracket
70: jig unit
71: square frame
72: roller
73: hanger rod
74: jig head
75: jig head driving part
751: lifting piston
752: elevating pneumatic cylinder body
80: lift unit
81: lift body
82: floor board
83: rail
84: floor board driving unit
85: Fence
86: Caster

Claims (5)

A chamber 21 in which n (n is an integer equal to or greater than 2) slots 211 having a front opening 211a and a rear opening outlet 211b are arranged in a multi-stage manner, and the chamber 21 Includes a heat treatment unit 20 composed of a housing 22 in which 21 is accommodated, and n main heating modules 30 disposed in each slot 211 to supply a heat source to each slot 211 In the heat treatment system of the display panel to
Further comprising a jig unit 70 entering the outlet 211b of the slot 211 to lift and withdraw the main heating module 30,
The main heating module 30 has a square support 31 disposed in the slot 211, a heating element 32 disposed above the square support 31, and a zigzag shape on the heating element 32. A boat 33 disposed, a plurality of pins 34 provided along the longitudinal direction of the boat 33 to support the display panel inserted into the slot 211, and power to the heating element 32 It consists of a power supply unit 35 for application and four locking brackets 36 disposed in pairs spaced apart from each other at both ends of the square support 31,
When the jig unit 70 enters the outlet 211b of the slot 211, a square frame 71 spaced apart from the upper side of the main heating module 30 and a lower surface of the square frame 71 are provided. A plurality of movable rollers 72 performing a rolling motion along the bottom of the slot 211 while supporting the square frame 71, and coupled across both ends of the square frame 71 in a form of interconnecting the square frame 71 A pair of hanger rods 73 spaced apart from each other in the front and back of (71), four jig heads 74 spaced apart from each other on the lower side of each of the holding brackets 36, and mounted on each of the hanger rods 73 And a pull-out jig device for a heating module for a heat treatment system of a display panel, characterized in that it consists of four jig head driving parts (75) for lifting each jig head (74).
delete According to claim 1,
Each jig head driving part 75 has an elevating piston 751 whose end is connected to the jig head 74, and the elevating piston 751 is built in to move the elevating piston 751 up and down by selectively supplying air. It is composed of an elevating pneumatic cylinder body 752 mounted on the lower surface of the hanger rod 73, and when the elevating piston 751 rises, the jig head 74 also rises along with the hanging bracket 36. Take-out jig device for the heating module for the heat treatment system of the display panel, characterized in that by being caught on the main heating module 30 is lifted from the bottom in the slot 211.
According to claim 1 or 3,
In the chamber 21, a lift body 81 disposed on the side of the outlet 211b of the slot 211, a floor board 82 disposed above the lift body 81, and the floor board 82 The jig unit 70 that lifts and withdraws the main heating module 30 by further including a lift unit 80 composed of a pair of rails 83 that are erected on the left and right ends of the upper surface of the ) is pulled out of the slot 211, the pull-out jig device for the heating module for the heat treatment system of the display panel, characterized in that each of the rollers 72 are moved along each of the rails 83.
According to claim 4,
The lift unit 80 includes a floor board drive unit 84 that lifts the floor board 82 up and down, and is built on both left and right ends of the upper surface of the floor board 82, but is installed on the outside of each rail 83. A pull-out jig device for a heating module for a heat treatment system of a display panel, characterized in that a pair of fences 85 are further provided.

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