KR100787540B1 - A vacuum dry machine - Google Patents

Abstract

A vacuum dry apparatus for manufacturing a flat display device is provided to remove solvent coated on the panel through vacuum adsorption to improve the efficiency in drying of a panel without deforming materials or structures of the substrate. A chamber, of which right, left, front, and rear portions are opened, is installed within a housing. Window opening and closing units(200) are respectively installed at right and left sides of the chamber to open and close entrances of the housing. Gate opening and closing units(300) are respectively installed at front and rear surfaces of the chamber to open and close gates of the housing. A lift up-down unit moves a buffer plate, which is installed within the chamber, upwardly and downwardly. Discharge units(400) are respectively installed at an upper surface and a lower surface of the chamber. The discharge units adsorb solvent coated on a surface of an LCD panel loaded on the buffer plate while the chamber is maintained in a vacuum state.

Description

Vacuum Drying Machine for Flat Display Panel Manufacturing

1A to 1C are a plan view, a front view and a side view showing a vacuum drying apparatus for manufacturing a flat panel display panel according to the present invention.

Figure 2 is an extract of the chamber in the vacuum drying apparatus for manufacturing a flat panel display panel according to the present invention.

Figure 3b to Figure 3c is an exemplary view showing the installation state of the lift up-down device in the flat display panel manufacturing vacuum drying apparatus according to the present invention.

Figures 4a to 4d is an explanatory view of the main portion of the lift-up device unit in the vacuum drying apparatus for manufacturing a flat panel display panel according to the present invention.

5a to 5c is an exemplary view showing another installation state of the buffer plate in the vacuum drying apparatus for manufacturing a flat panel display panel according to the present invention and an operational relationship explanatory drawing.

Figure 6 is an excerpt view showing the structure of the lift support device in the lift-up device unit of the vacuum drying apparatus for manufacturing a flat panel display panel according to the present invention.

7a to 7e is an exemplary view showing a window opening and closing device is installed on both sides of the chamber in the vacuum display device for manufacturing a flat panel display panel according to the present invention.

8a to 8e is an exemplary view showing the gate opening and closing device installed on the front, rear, left and right surfaces of the chamber in the substrate manufacturing vacuum drying apparatus according to the present invention.

9a to 9e is an exemplary view showing an extracting the exhaust unit in the vacuum manufacturing apparatus for manufacturing a substrate according to the present invention.

Explanation of symbols on the main parts of the drawings

1: vacuum dryer 2: vacuum dryer housing 3: support leg

10: chamber assembly 11: upper chamber 12: lower chamber

15.16: reinforcement frame 20: guide pin 21: locate pin

24: pin mounting plate 25: guide block 100: lift up and down device

101: up down frame 102: motor base 103: lift plate

110; Servo motor 120: screw jack 130: lift support unit

150: buffer plate 200: window opening and closing unit 201: opening and closing door

207: door hinge 300: gate opening and closing unit 301: gate main plate

302: cylinder mounting plate 303: base plate 310: lifting cylinder

320: front and rear cylinder 330: opening and closing plate 350: sealing ring

400: exhaust device 401: suction pipe 410: T pipe

420.430: flow control valve 450: high vacuum valve 460: discharge line

The present invention inhales a photoresist containing a large amount of solvent (Solvent) applied to the surface of the liquid crystal display (LCD) in a system for manufacturing an LCD (Liquid Crystal Display) (in a vacuum state) It relates to a vacuum drying apparatus for manufacturing a flat panel display panel used for drying.

To describe this in more detail, inside and outside of the housing formed in the shape of a rectangular parallelepiped, the chamber is installed in the front, rear, left and right, respectively, the window opening and closing device on each of the left and right sides so as to open and close the entrance and exit formed on both sides, The gate opening and closing device is installed on the front and rear of the chamber, respectively, so that the gate can be opened and closed, and the buffer plate installed inside the chamber can be lifted up and down by the lift up and down device. The vacuum for manufacturing a substrate is provided to suck and dry a solvent (Solvent) applied to the surface of the liquid crystal display panel (Glass) placed on the upper side of the buffer plate while maintaining the interior of the chamber in a vacuum state by installing each exhaust device unit It is to provide a drying device.

In general, a liquid crystal display (LCD), which displays an image on a panel, adjusts the transmittance of liquid crystal cells arranged in a matrix form in the inside of the liquid crystal display panel to a supplied video data signal to display an image corresponding to the data signal. The liquid crystal display panel is provided in a state where the upper substrate and the lower substrate are bonded to each other.

In the liquid crystal display panel, an upper substrate includes an electrode (electrodes) for applying an electric field to the liquid crystal layer, a thin film transistor for switching data supplied to the liquid crystal cells from the outside, and supplying the supplied data to the liquid crystal cells. Signal wirings, signal wirings for supplying control signals of the thin film transistors, and the like are formed, and a color filter and the like are formed on the lower substrate.

In particular, an etching surface is displayed on the deposition layer using a chemical solution and a pattern may be formed by performing a photo-lithography process. In a color filter, a solvent is formed on the surface of a substrate (glass substrate). After the photoresist coating liquid containing a large amount of (Solvent) is applied, it is allowed to dry, so that a desired pattern can be easily formed in the photo-lithography process.

The present invention is to provide a vacuum drying apparatus for manufacturing a substrate that is used to dry a chemical (Photo Resist) applied to the surface of the glass substrate before performing a photo-lithography process for forming a pattern as described above.

As described above, a conventional drying apparatus used to dry a chemical liquid (Photo Resist) applied to the surface of the glass substrate, the glass substrate is placed on a plate loaded in the chamber, and the vacuum pump installed in the chamber is operated. By inhaling the chemical applied with the air inside the chamber to maintain the inside of the chamber in a vacuum state is to discharge the chemical to the outside.

However, it sucks and discharges the chemical liquid with one vacuum pump installed in the chamber, and sucks the chemical liquid while the glass substrate is simply placed on the upper side of the plate, so the suction power of the vacuum pump is weak so that the chemical liquid can be sucked smoothly and completely. There is no problem, and the bottom surface of the glass substrate which is simply placed on the upper side of the plate has a problem that the suction force is insignificant and the chemical liquid cannot be completely discharged. There is a problem that can not form a pattern precisely because the adhesive strength of.

As a proposal to solve the problem as described above somewhat, "vacuum drying apparatus" of Korean Patent Publication Nos. 10-2005-66017 and 10-2005-111871 are known.

In the former (Open Patent Publication No. 10-2005-66017) and the latter (Published Patent Publication No. 10-2005-111871), a vacuum pump is installed in a chamber in which a plate on which a glass substrate is placed is provided. The vacuum pump is operated to suck and discharge the chemical liquid applied together with the internal air of the chamber. However, a hot plate having a heating wire is installed inside the chamber to supply heat to the inside of the chamber, or a heating wire is provided inside the chamber. The heat plates are arranged to generate heat, and the substrate is loaded on top of the heat plates.

However, in order to shorten the time for vacuum drying the substrate, the heating plate is heated by a heating wire to evaporate the remaining coating liquid. However, the vacuum drying is performed through one suction port formed at one side of the chamber. Since the internal air is sucked in, the substrate has a problem that the drying state is changed according to the distance from the inlet.

In addition, the dry state of the upper and lower surfaces of the substrate placed on the upper side of the hot plate or the heating plate, that is, the evaporation state of the coating liquid is different, and the temperature of the upper surface which is not in contact with the bottom surface of the substrate in contact with the hot plate or the heating plate is different. There is a concern that a change (deformation) occurs in the structure of the substrate, and therefore, there is a problem that a pattern cannot be formed uniformly and precisely when the structure of the substrate is changed.

In particular, these conventional drying apparatuses perform drying while being simply settled on the upper side of the plate (or hot plate or heating plate) regardless of the characteristics of the substrate. Because of the large contact area, there is a problem in that drying cannot be efficiently performed and drying can not be performed efficiently depending on the characteristics of the substrate.

In addition, since the substrate must be placed inside the chamber by an artificial method and drawn out, not only the process can be automated but also the workability is inferior, and heat and gas remaining when the lid of the chamber is opened to replace the substrate When it is released to the outside, it is not only in contact with the skin of the operator's face or the like, but also may not be able to efficiently perform the work, and the skin may be damaged.

The present invention is to provide a further improved vacuum drying apparatus for manufacturing a substrate to solve the above problems.

The present invention is installed in the inside of the housing formed in the shape of a rectangular parallelepiped, the front, rear and left and right chambers are installed, respectively, the left and right sides of the chamber are provided with a window opening and closing device respectively to open and close the entrance and exit formed on both sides, the front of the chamber And the rear (rear) to install the gate opening and closing device respectively to open and close the gate, and to enable the buffer plate installed in the chamber up / down by the lift up and down device portion, the top and bottom of the chamber Vacuum drying for manufacturing a substrate to install and discharge the solvent applied to the surface of the liquid crystal display panel (Glass) placed on the upper side of the buffer plate while maintaining the interior of the chamber in a vacuum state by installing the exhaust unit, respectively. The purpose is to provide a device.

Another object of the present invention is to install and move the chamber inside the movable housing to easily move and transport according to the workplace, and to install a reinforcement frame on the upper side (upper side) and the lower side (bottom side) of the chamber. It is to provide a vacuum drying apparatus for manufacturing a substrate that can strengthen the bearing capacity.

Still another object of the present invention is to provide a vacuum drying apparatus for manufacturing a substrate, which is capable of greatly improving work efficiency by shortening the drying time by simultaneously performing multiple vacuum suctions through a plurality of suction holes on the upper side and the lower side of the substrate. I'm trying to.

Still another object of the present invention is to allow the plate installed inside the chamber to slide in and out of the chamber, and to automatically open and close the entrances and exits formed on both sides of the chamber, thereby loading and unloading the substrate. The present invention aims to provide a vacuum drying apparatus for manufacturing a substrate that can automatically perform loading and improve workability, and can basically exclude the damage of the operator's skin.

Still another object of the present invention is to install a pin using a magnet (permanent magnet) that can freely change its position on the upper surface of the plate on which the substrate is placed, and the substrate placed in the pin (Procimity Pin) By minimizing the contact area of the substrate and forming a space between the plate and the substrate, the air located between the plate and the substrate can be sucked and discharged smoothly. The present invention provides a vacuum drying apparatus for manufacturing a substrate, which enables easy loading and unloading of a substrate by raising and lowering the substrate, and allowing the upper and lower surfaces of the substrate to be dried uniformly and quickly.

Another object of the present invention, by simultaneously opening the gate and the inlet and outlet formed in the front, rear, left and right of the chamber by the opening and closing device to quickly discharge the internal air (gas) of the chamber to the outside to quickly replace the fresh air, the chamber It is to provide a vacuum drying apparatus for manufacturing a substrate that can prevent the interior of the contamination.

The above and other objects of the present invention,

In the buffer plate 150, the substrate is placed therein to suck the internal air of the chamber assembly 10 provided therein with a vacuum pump to suck and discharge the chemical liquid applied to the surface of the substrate;

It is formed in the shape of a rectangular parallelepiped, and the chamber assembly 10 is installed in the inside thereof, and the bottom of the vacuum drying apparatus housing 2 in which a normal support leg 3 and a caster 4 are installed in pairs to fix and move. ;

The inside is formed into a space, and the entrance and exit 13 and the entrance and exit hole 14 are formed to correspond to the internal space on the slope, and the upper chamber 12-1 and the lower chamber 12 are integrally formed on the upper and lower surfaces. A chamber assembly 10 mounted and fixed inside the vacuum drying apparatus housing 2;

A window opening and closing device unit 200 installed at each of the inlets and outlets 13 formed at the left and right sides of the chamber assembly 10 to open and close the inlet and outlet 13;

A gate opening and closing device unit 300 installed at each of the entrance and exit holes 14 formed at the front and rear of the chamber assembly 10 to open and close the entrance and exit hole 14;

A lift up and down device unit 100 for vertically raising and lowering the buffer plate 150 installed inside the chamber assembly 10;

And an exhaust device 400 which is selectively installed on both surfaces or one surface of the upper and lower surfaces of the chamber assembly 10 to simultaneously suction and exhaust the internal air of the chamber assembly 10 to the outside. It is achieved by the vacuum drying apparatus 1 characterized by the above-mentioned.

The above and other objects and features of the present invention will be more clearly understood by the following detailed description based on the accompanying drawings.

1A to 9E show specific implementations of the vacuum drying apparatus 1 according to the present invention, and FIGS. 1A to 1C are exemplary views of the vacuum drying apparatus 1 according to the present invention. 3 is an excerpt view of the chamber assembly 10, FIGS. 3A to 4D are excerpts and an excerpt view of the lift up-down apparatus unit 100, and FIGS. 5A to 5C are other installation states of the buffer plate 150, FIG. Is an excerpt of the lift shot device unit 130, 7a to 7e is an excerpt of the window opening and closing device 200 is installed on both sides of the chamber assembly 10, 8a to 8e is a chamber assembly (10) Excerpt of the gate opening and closing device 300 is installed on the front and rear of the), 9a to 9e is an excerpt of the exhaust device 400.

The vacuum drying apparatus 1 according to the present invention is formed in the shape of a rectangular parallelepiped, and a vacuum drying apparatus housing 2 having a chamber assembly 10 installed therein, which is mounted and fixed inside the vacuum drying apparatus housing 2. The chamber assembly 10, the lift up and down device unit 100 for vertically up and down the buffer plate 150 installed inside the chamber assembly 10, and the inlet and outlet 13 formed on both left and right sides of the chamber assembly 10. Top and bottom of the window opening and closing device portion 200, the gate opening and closing device portion 300, respectively installed in the entrance and exit hole 14 formed on the front and rear of the chamber assembly 10, respectively installed in the) Optionally installed on both sides or one side of the chamber assembly 10 was formed by largely divided into an exhaust device unit 400 for sucking and discharging the internal air of the chamber assembly 10 to the outside.

1A to 1C, the vacuum drying apparatus housing 2 is formed in the shape of a rectangular parallelepiped having an inner space, and the front, rear, left and right sides and the upper and lower sides thereof are open, and a pair of ordinary supporting legs (3) ) And the caster (4) was installed (mounted) at each corner and the middle, so that it can be easily moved by the caster (4), the height was adjusted by the support leg (3) to be installed stably. .

The chamber assembly 10 as illustrated in FIG. 2 is installed inside the vacuum drying apparatus housing 2 formed as described above to be supported by the up-down apparatus frame 101 as illustrated in FIGS. 3A to 3C. .

As shown in FIG. 2, the chamber assembly 10 installed in the vacuum drying apparatus housing 2 has a chamber 11 having a rectangular parallelepiped shape, the upper and lower sides of which are opened, and the front and rear sides are opened and closed. A ball 14 was formed, and a pair of inlets and outlets 13 were formed side by side on the left side and the right side.

An upper chamber 12-1 and a lower chamber 12-2 are integrally assembled and formed on a top surface and a bottom surface of the chamber 11 by using fixing means such as bolts, and an upper surface and a top surface of the upper chamber 12-1. On the bottom of the lower chamber 12-2, H beams were integrally formed as reinforcing frames 15 and 16.

Lift-up device 100 for vertically up and down the buffer plate 150 installed inside the chamber assembly 10 was formed (configured) as illustrated in Figures 3a to 3c.

On the bottom of the reinforcement frame 16 forming the chamber assembly 10, the up-down device frame 101 is integrally formed, and the support of the motor base 102 is installed at regular intervals in the lower side of the up-down device frame 101. It is fixed by the pillar 106, the upper flange 106-1 formed integrally on the upper end of each support pillar 106 was fixed to the bottom of the upper plate of the up-down device frame 101, of each support pillar 106 The motor base 102 was mounted (fixed) on the lower flange 106-2 integrally formed at the lower end.

A lift plate 103 is provided between the upper plate of the up-down device frame 101 and the motor base 102, and the guide tube 108 is disposed between the upper plate of the up-down device frame 101 and the upper surface of the motor base 102. ) And the support rod 107 fitted to the outside is arranged in a rectangular shape and fixed vertically using the support flange 109, and the guide tube 108 fitted to the outside of each support rod 107 is mounted on the motor base 102. ).

A buffer plate 150 is provided inside the chamber 11 forming the chamber assembly 10, and a pair of buffer plates 150 are provided as illustrated in FIG. 3A. In the lower side, between the lower chamber 12-2 and the lift plate 103, the plurality of lift and shot device units 130 are fixed so that the upper end of the lift rod 131 passes through the lower chamber 12-2 and becomes upward. Mounted at intervals (placed).

The lift shot device 130 is formed as specifically illustrated in FIG.

On the same vertical line between the lower chamber 12-1 and the lift plate 103, the bellows assembly in which the bellows 132 is integrally fixed to the flange 134 of the upper end of the bellows support tube 133 is fixed, and the lower chamber ( 12-2) is mounted (fixed) the housing 136 by fixing means such as a bolt screw, and the main holder 138 is mounted on the bottom of the lift plate 103 by fixing means such as bolts (fixed). )

The bellows holder 135 integrally formed at the upper end of the bellows 132 is mounted on the housing 136 of the lower chamber 12-2 by bolts, and the bellows support tube (138) is mounted on the main holder 138 of the lift plate 103. The housing 136 fixed to the lower end of the 133 is bolted (fixed) together with the lift pin holder 137, and the bellows 132 and the bellows support tube 133 are located at the center of the upper surface of the lift pin holder 137. The lower end of the lift bar 131 inserted therein was mounted (fixed) with bolts.

As shown in FIG. 4C, the mounting block 141 is coupled to the upper end of the lift bar 131 protruding upward through the distribution hole 12-3 of the lower chamber 12-1, and the mounting block 141. On both sides of the) through the guide bush 142 was mounted ceramic bearings 143 with bolts 144, the guide bar 140 is fixed to the bottom of the buffer plate 150 mounted with bolts 145, Both sides of the guide bar 140 of the buffer plate 150 are placed on the ceramic bearing 143.

In particular, the guide bar 140 mounted on the bottom surface of the buffer plate 150 may be integrally formed when the buffer plate 150 is molded.

As illustrated in FIGS. 3A to 3C, the lift plate 103 provided on the upper side of the motor base 102 in the up-down apparatus frame 101 and on which the lift release device portions 130 are mounted is the servo motor 110. By using a lifting device using) to raise / lower by a certain height.

Lifting device for lifting / lowering each lift plate 103 by a certain height was formed as follows.

In the lower plate forming the up-down device frame 101, a main spacer 111 is fixedly installed on the center line of the lift plate 103 as illustrated in FIG. 3C, and a universal joint 112 is provided at an input shaft of the main spacer 111. It is connected to the axial force shaft of the servo motor 110 by using the driving shaft (113, 114) connected to the output shaft on both sides, respectively, the end of each of the driving shaft (113, 114) of the lower plate of the up-down apparatus 101 It is connected to the input shaft of the interlocking spacer (115) (116) mounted on.
The interlocking propulsion shaft 117-1, 117-2 and the interlocking propulsion shaft 118-1, 118-2 are respectively connected to each output shaft of each interlocking spacer 115 and 116, respectively. 1) 117-2 and end portions of the interlocking propulsion shafts 118-1 and 118-2 were connected to the input shafts of the respective screw jacks 120 arranged and mounted in the lower plate of the up-down apparatus frame 101 in a square manner.

The output shaft of each screw jack 120 maintained in a vertical line, that is, the screw rod 121, passes through the motor base 102 and the lift plate 103, and the upper end thereof is fixed to the bottom of the upper plate of the up-down apparatus frame 102. Mounted through the bearing 127 to the mounting housing 125, the nut pipe 122 screwed to the screw rod 121 is mounted (fixed) to the lift plate 103, the upper and lower portions of the nut pipe 122 In the screw rod 121, the upper stopper 126 and the lower stopper 124 are respectively inserted into the upper stopper 126 to the mounting housing 125 (fixed) and the lower stopper 124 to the stopper bracket 123 It mounted to the upper surface of the motor base 102 by using (fixed).

A plurality of substrate support pins 160 were provided on the upper surface of each buffer plate 150 provided in the chamber 11 forming the chamber assembly 10. The substrate support pins 160 are specifically illustrated in FIG. 4A. As illustrated, the magnet pin 162 is fixed to the lower side of the prasitmeat pin 161 formed sharply by the fixing means such as a bolt to form a single body.

Since the substrate support pin 160 formed as described above can be easily attached / detached on the upper surface of the buffer plate 150 made of a metal material by the magnet pin 162, the installation position thereof can be freely changed.

Guides 151 are mounted at regular intervals by using blocks 152 at edges of the outer and rear ends of the buffer plates 150 so as to induce each of the substrates to be placed at regular intervals.

In addition, as illustrated in FIGS. 4A to 4D, the guide blocks 25 of one phase are fixed to the upper surface of the lower chamber 12-2 forming the chamber assembly 10 at regular intervals, and collinear. The pin pin 24 is fixed to the guide block 25 positioned at the guide pin 25, and the pin pin 24 is coupled to the probe pin 21 at the top by a bolt 23 through the fixing piece 22. 20) are mounted at regular intervals, and the buffer plate 150 moves up and down with the lift rod 131 by drilling the distribution hole 150-1 in the buffer plate 150 on the same line as each guide pin 20. At this time, the guide pin 20 was inserted into the distribution hole 150-1.

As illustrated in FIG. 2, the window opening and closing devices 200 respectively installed at the entrances and exits 13 formed on the left and right sides of the chamber assembly 10 are formed as illustrated in FIGS. 7A to 7E.

Opening and closing doors 201 were provided on the outside of each entrance and exit 13 formed on both the left and right sides of the chamber assembly 10, and the inner surface of each opening and closing door 201 was larger than the entrance and exit 13 as illustrated in FIG. 7E. The groove 340 is formed and the sealing ring 350 is embedded in the groove 340, but the head part 352 protrudes from the inner surface.
Hinge brackets 208 were mounted on the lower and lower chambers 12-2 of the opening and closing doors 201, respectively, and door hinges 207 were installed on the hinge brackets 208 with pins 209 to open and close the doors 201. ) Can be opened and closed.

A through hole 202 is drilled in the center of the opening / closing door 201 installed at the outside of each entrance and exit 13, and a support window 203 and a guide plate (203) are provided outside the see-through hole 202. 205) to see through the interior of the chamber (11).

In addition, as illustrated in FIG. 2, the gate opening / closing device parts 300 respectively installed in the entrance and exit holes 14 formed on the front and rear surfaces of the chamber assembly 10 are formed as illustrated in FIGS. 8A to 8E.

The gate main plate 301 is fixed to the upper chamber 12-1 and the lower chamber 12-2 on the front and rear surfaces of the chamber 1 forming the chamber assembly 10, but the gate main plate 301 is mounted. On the outer surface of the upper side), the concave groove 340 is formed to be larger than the inlet / outlet hole 14 of the chamber 11 in a cross-sectional view, and the sealing ring 350 is embedded, and the upper surface of the inner surface of the gate main plate 301 is formed. The gate 301-1 drilled in the hole is mounted to match the space formed on the front and rear surfaces of the chamber 1 so that the gate main plate 301 is mounted to maintain the sealed state in the chamber assembly 10.

In particular, as illustrated in FIG. 8E, the sealing ring 350 embedded in the groove 340 has a head portion 352 having a curved shape on the upper side of the body portion 351 having a rhombus shape in cross section. The head portion 352 is formed to protrude to the outside of the groove rim 340, and on both sides of the body portion 351 to form a binding blade piece 353 at regular intervals to be firmly mounted to the groove rim 340. To make it possible.

The LM guide 305 is fixed side by side on both sides of the outer surface of the gate main plate 301, and the guide block 306 is mounted on the inner surface of the guide block mounting plate 304 formed integrally at both ends of the support plate 303. The guide block 306 is coupled to slide along the LM guide 305, and the lifting cylinder 310 is mounted side by side using the cylinder bracket 312 on both sides of the outer surface of the gate main plate 301, but the lifting cylinder The rod 311 of the 310 is fixed to the support plate 303, and the absorber assembly 315 is mounted on the outer surface of the gate main plate 301 by the absorber bracket 316 to restrict the downward direction of the support plate 303. (Caught)

The cylinder mounting plate 302 is mounted (fixed) on the outer side of the support plate 303, and the front and rear cylinders 320 are mounted on the inner surface of the cylinder mounting plate 302 at regular intervals, and are spaced apart at regular intervals. The opening and closing plate 330 is mounted on the rod of the front and rear truth cylinder 320, and a pair of absorber assemblies 135 are mounted on the inner surface of the cylinder mounting plate 302 side by side with the absorber bracket 136 to open and close the opening plate. The reverse of (330) can be limited (controlled).

A pair of support guide pipes 132 are mounted side by side to the cylinder mounting plate 302, and the support guide rods 131 are mounted to the opening and closing plate 330 on the same line by the bracket 133, respectively. 131 is inserted into the support guide tube 132, and the support guide rod 131 moves from the support guide tube 132 when the opening and closing plate 330 moves forward and backward so that the opening and closing plate 330 is straight without shaking. I was going back and forth.

An exhaust device 400 that is selectively installed on both surfaces or one surface of the upper and lower surfaces of the chamber assembly 10 to suck the internal air of the chamber assembly 10 and discharge it to the outside is formed as follows.

In the lower chamber 12-2 forming the chamber assembly 10, the suction holes 12-3 are drilled in multiple rows, but a mesh plate 470 is mounted on each suction hole 12-3. The suction pipes 401 were respectively mounted on the lower ends of the suction holes 12-3, and the T connection pipes 410 were mounted on the lower ends of the suction pipes 401 by using the connection pipes 420, respectively.

The T connection pipes 410 mounted at the lower end of each suction pipe 401 are connected to each other by a connection pipe 430, and the outer end of the T connection pipe 410 located at one outermost side is sealed. The T connection pipe 410 located at the outermost side of the other side was connected to a discharge pipe 460 on which a blowing fan (not specifically shown) is installed by using the connection pipe 440 and the bending pipe 450.

Hereinafter, the operation relationship of the vacuum drying apparatus 1 according to the present invention.

In the vacuum drying apparatus 1 according to the present invention, the buffer plate 150 is raised by the up-down device unit 100 and the front (or back) of the entrance and exit holes 14 formed in the front and rear of the chamber 11. The opening and closing plate 330 of the gate opening and closing device 300 installed in the entrance and exit 14 is operated in a retracted and downward state.

As described above, the opening and closing hole 330 of the gate opening and closing device unit 300 is retracted and lowered so that the entrance and exit hole 14 is opened, and installed at the upper end of the lift rod 130 in the lift and release device unit 130 ( Although not shown in detail, the buffer plate 150 placed therein is drawn out to the outside of the chamber 12 by using a mechanism such as a robot apparatus.

When the buffer plate 150 is withdrawn to the outside of the chamber 12, as shown in FIGS. 4C and 5B, the ceramic bearings 143 mounted on the upper ends of the lift pins 131 are rolled (rotated) and buffered. Since both sides of the guide bar 140 mounted (formed) on the bottom surface of the plate 150 are supported, the buffer plate 150 can be easily and smoothly drawn out.

The buffer plate 150 drawn out to the outside of the chamber 12 is supplied with a substrate by a substrate supply device (not specifically shown) and placed therein. The substrate supplied is installed (arranged) on an upper surface of the buffer plate 150. It is supported by the substrate support plate 160 and is set to a constant position by the guide 151 installed on the outer periphery.

The buffer plate 150 on which the substrate is placed is introduced into the chamber 12 by using a mechanism such as a robot device (not specifically shown), and the buffer plate 150 on which the substrate is placed is inserted into the chamber 12. The gate opening / closing unit 300 and the up-down device 100 are operated at the same time to enter the interior, thereby closing the entrance and exit hole 14 and simultaneously lowering the buffer plate 150 on which the substrate is placed.

The gate opening and closing device 300 operates as follows.

As illustrated in FIG. 8D, in the state where the opening and closing plate 330 is downward and the gate 301-1 of the gate main plate 301 and the entrance and exit hole 14 of the chamber 12 are opened, the gate main plate is opened. When the lifting cylinder 310 mounted on the 301 is operated, its rod 311 is pulled out and the support plate 303 and the cylinder mounting plate 302 which are integrally coupled as illustrated in FIG. 8E are simultaneously raised and opened. The plate 330 is matched with the gate 301-1 of the gate main plate 301, in which a guide block 306 mounted on the guide mounting plate 304 is a guide rail mounted on the gate main plate 301. Since the sliding movement along the 305, the support plate 303 and the cylinder mounting plate 302 is vertically raised without shaking.

Advancing the opening and closing plate 330 by simultaneously operating the forward and backward cylinders 32 mounted on the cylinder mounting plate 302 while the opening and closing plate 330 matches the gate 301-1 of the gate main plate 301. The advancing opening and closing plate 330 closes the gate 301-1 of the gate main plate 301 as illustrated in FIGS. 8C to 8E, and the front surface of the opening and closing plate 330 is a gate main plate ( It is closely connected to the sealing ring 350 embedded in the 301 to maintain the sealed state.

In addition, the up-down apparatus 100 operates as follows to lower the buffer plate 150 that is upward.

When the servo motor 110 is operated, the main spacer 111 connected to the universal joint 112 is operated to rotate each start propulsion shaft 113, and when the start propulsion shaft 113 is rotated, each interlocking spacer 115. ) Are also operated to rotate the interlocking propulsion shaft 117-1, and when the interlocking propulsion shaft 117-1 is rotated in reverse, the respective screw jacks 106 are operated.

When the screw jacks 106 operate, the screw rod 121 rotates, and when the screw rod 121 rotates, the nut pipe 122 screwed thereto moves downward along the rotating screw rod 121. When the nut pipe 122 is downward, the lift plate 103 mounted on the nut pipe 122 is downward, and when the lift plate 103 is downward, the lift bullet device 130 is operated. .

When the lift shot device unit 130 is operated together with the lift plate 103, the bellows support pipe 133 and the lift pin 131 are downward and the bellows 132 is elongated (stretched). When downward, the substrate is lowered with the buffer plate 150 placed on the upper side of the guide bar 140, as illustrated in FIGS. 3A, 4A, and 4B. The substrate is lowered with the buffer plate 150. When the guide hole 153 drilled in the buffer plate 150 and the guide hole drilled in the substrate (not specifically shown) are inserted into the guide pin 20 fixed to the lower chamber 12-2, the state of the main body is maintained. Done.

As such, when the lift shot device unit 130 reverses downward and completely lowers the substrate together with the buffer plate 150, the exhaust device unit 400 operates.

Although not shown in detail, the exhaust unit 400 may operate on the surface of the substrate, that is, the surface of the liquid crystal display panel together with the air inside the chamber 12 by the strong suction force of the suction fan. The chemical solution (Photo Resist) containing a large amount of the solvent (Solvent) is sucked through the suction hole 12-3 equipped with the mesh plate 470, at which time the chamber 14 through the window 14 of the chamber 11 While the outside air of 12 is forcibly sucked, the window opening and closing device 200 is operated to close the window 14.

When the outside air of the chamber 12 is forcibly sucked through the window 14, the opening / closing door 201 opened outward is rotated inward with the door hinge 207 as an axis to close the opening door. The head part 352 of the sealing ring 150 embedded in the inner surface of the 201 is closely connected to the chamber 11, the upper chamber 12-1 and the lower chamber 12-2 to seal the window 14. Let's go.

The outside air, which is sucked into the chamber 12 through the window 14, and the air and the chemical liquid in the chamber 12 are sucked into the suction holes 12-3, and the suction pipe 401 and the connection pipe 420 are opened. Inhaled through each T connection pipe 410, the air and the chemical liquid sucked into each T connection pipe 410 is discharged to the outside through the connection pipe 440 and the bending pipe 450 and the discharge pipe 460 sequentially The chemical liquid applied to the outer surface of the substrate is dried.

By performing as described above to operate the gate opening and closing device 300 on both sides in the state that the chemical liquid applied to the outer surface of the substrate is completely dried to release the vacuum state of the chamber 12 and at the same time the up-down device 100 In operation, the buffer plate 150 on which the substrate is placed is raised.

When operating the forward and backward cylinder 320 of each gate opening and closing device 300, the opening and closing plate 330 is advanced to release the closed state of the gate 301-1, the opening and closing plate 330 When the reverse state is released to release the closed state of the gate 301-1, outside air flows into the chamber 12 through the gate 301-1 to release the internal vacuum state of the chamber 12.
When the outside air flows into the chamber 12 and the vacuum is released, the door hinge 207 opens and closes the door 201 of the window opening and closing device 200 that is closing the window 14 by the pressure of the outside air. It is flipped outward with respect to the axis, and thus the chamber 12 is completely out of the vacuum state.

When the inside of the chamber 12 is completely released in the vacuum state, the lifting cylinder 310 is operated. When the lifting cylinder 310 is operated, the cylinder mounting plate 302 together with the support plate 303 is downward. It is returned to its original state as illustrated in 8d.

In this way, the gate opening device 300 operates to release the vacuum state inside the chamber 12, and the up-down device 100 operates in reverse.

When the servo motor 110 of the up-down device unit 100 is operated in reverse, the main spacer 111 connected to the universal joint 112 operates in reverse to rotate each start-up propulsion shaft 113 in reverse, and each start When the propulsion shaft 113 rotates in reverse, the respective interlocking spacers 115 also operate to reversely rotate the interlocking propulsion shafts 117-1, and when the interlocking propulsion shafts 117-1 reverse, the respective screw jacks 106. Are reversed.

When the screw jacks 106 are operated in reverse, the screw rods 121 are reversely rotated, and when the screw rods 121 are reversely rotated, the nut pipe 122 screwed thereto is rotated in reverse direction. 121, the nut pipe 122 is upward, and the lift plate 103 mounted on the nut pipe 122 is upward, and the lift plate 103 is lifted when the nut pipe 122 is upward. ) Will also work in reverse.

When the lift cartridge device 130 is operated in reverse with the lift plate 103, the bellows support pipe 133 and the lift pin 131 are upward, the bellows 132 is compressed, and the lift pin 131 is upward. When the substrate is raised with the buffer plate 150 placed on the upper side of the guide bar 140, and when the substrate is raised with the buffer plate 150, the guide hole 153 drilled in the buffer plate 150 and The guide hole drilled in the substrate (not specifically shown) will be out of the guide pin 20 fixed to the lower chamber 12-2.

In the state in which the up-down device unit 100 is operated in reverse to raise the substrate placed thereon together with the buffer plate 150, a drawing device such as a robot installed on the discharge side is operated so that the substrate is placed in the buffer plate 150. Is drawn to the outside of the chamber 12, the substrate is held in the buffer plate 150 drawn out of the chamber 12 and transferred to the next process, the buffer plate 150 from which the substrate is removed is transferred to the chamber 12 Pass it through the inside of) and draw it out to the supply side.

In the state in which the buffer plate 150 is moved to the supply side, the gate opening device 300 installed on the discharge side is operated to close the discharge port.

The vacuum drying apparatus 1 according to the present invention continuously vacuums the medicine applied to the surface of the substrate while repeatedly performing the above process.

Although the present invention has been described in detail only with respect to the examples specifically described, it will be apparent to those skilled in the art that various modifications and changes can be made within the technical scope of the present invention, and such modifications and variations belong to the appended claims.

In the vacuum display device for manufacturing a flat panel display panel according to the present invention, inside and outside of the housing formed in the shape of a rectangular parallelepiped, the chamber is installed in the front and rear and left and right, respectively, the window opening and closing devices on each of the left and right sides of the chamber are formed on both sides. It can be opened and closed, and the gate opening and closing device is installed on the front and rear (back) of the chamber to open and close the gate, and the buffer plate installed inside the chamber can be up and down by the lift up and down device. In the upper and lower sides of the chamber, the exhaust unit is installed to suck the solvent applied to the surface of the liquid crystal display panel that is placed on the upper side of the buffer plate while maintaining the interior of the chamber in a vacuum state. It is to be dried.

In the vacuum display device for manufacturing a flat panel display panel according to the present invention, the chamber can be installed inside a housing having a shape of a rectangular parallelepiped, and a reinforcing frame is provided on the upper side (upper side) and the lower side (bottom side) of the chamber to provide a bearing force. It can be strengthened and can be dried by pure vacuum suction method by excluding the device that will change the material or structure of the substrate, and it can prevent the material or structure of the substrate from being deformed. Simultaneous vacuum suction through the suction hole can shorten the drying time and greatly improve the work efficiency, and allow the plate installed inside the chamber to slide in and out of the chamber. By automatically opening and closing the entrance and exit formed in the substrate loading and unloading automatically Workability can be improved.

In addition, the vacuum drying apparatus for manufacturing a flat panel display panel according to the present invention supports a substrate to be placed by installing a pin using a magnet (permanent magnet) that can freely change its position on the upper surface of the plate on which the substrate is placed. By minimizing the contact area of the substrate and forming a space between the plate and the substrate, the air located between the plate and the substrate can be sucked and discharged smoothly, and the plate on which the substrate is placed is lifted by the up-down device. By lowering, loading and unloading of the substrate can be easily carried out. In addition, the upper and lower surfaces of the substrate can be dried uniformly and quickly, and the gates and inlets formed at the front, rear, left, and right sides of the chamber are simultaneously opened by an opening and closing device. Quickly discharges the air inside of the car to the outside It can be replaced so as to prevent the interior of the chamber from being contaminated.

Claims (16)

In the buffer plate 150, the substrate is placed therein to suck the internal air of the chamber assembly 10 provided therein with a vacuum pump to suck and discharge the chemical liquid applied to the surface of the substrate; It is formed in the shape of a rectangular parallelepiped, and the chamber assembly 10 is installed in the inside thereof, and the bottom of the vacuum drying apparatus housing 2 in which a normal support leg 3 and a caster 4 are installed in pairs to fix and move. ; The inside is formed into a space, and the entrance and exit 13 and the entrance and exit hole 14 are formed to correspond to the internal space on the slope, and the upper chamber 12-1 and the lower chamber 12 are integrally formed on the upper and lower surfaces. A chamber assembly 10 mounted and fixed inside the vacuum drying apparatus housing 2; A sliding movement device for sliding each buffer plate 150 installed inside the chamber 11 into and out of the chamber 11 from an upper side of the lift rod 131; Lift up-down device unit 100 for vertically up and down each of the pair of buffer plates 150 installed in the chamber 11 of the chamber assembly 10; Substrate support pins 160 are provided on the upper surface of each buffer plate 150 installed in the chamber 11 forming the chamber assembly 10; A window opening and closing device unit 200 installed at each of the inlets and outlets 13 formed at the left and right sides of the chamber assembly 10 to open and close the inlet and outlet 13; A gate opening and closing device unit 300 installed at each of the entrance and exit holes 14 formed at the front and rear of the chamber assembly 10 to open and close the entrance and exit hole 14; And an exhaust device 400 which is selectively installed on both surfaces or one surface of the upper and lower surfaces of the chamber assembly 10 to simultaneously suction and exhaust the internal air of the chamber assembly 10 to the outside. A vacuum drying apparatus for manufacturing a substrate. The chamber assembly (10) of claim 1, further comprising: a chamber assembly (10) installed inside the vacuum drying apparatus housing (2); A chamber 11 formed in a rectangular parallelepiped shape, the upper and lower surfaces of which are opened, and the entrance and exit holes 14 formed on the front and rear surfaces thereof, and a pair of windows 14 formed side by side on the left and right sides; An upper chamber 12-1 and a lower chamber 12-2 integrally mounted to the top and bottom surfaces of the chamber 11; And a reinforcing frame (15) (16) integrally formed on the upper surface of the upper chamber (12-1) and the lower surface of the lower chamber (12-2). The method of claim 1, wherein the lift up-down device unit 100 for vertically up / down the buffer plate 150 installed in the chamber assembly 10; An up-down apparatus frame 101 integrally formed on the bottom surface of the reinforcement frame 16 forming the chamber assembly 10; A motor base 102 fixedly installed by a support pillar 106 provided at a predetermined interval in the inner lower side of the up-down apparatus frame 101; A lift plate 103 provided between the upper plate of the up-down apparatus frame 101 and the motor base 102; An elevating device for elevating / lowering the lift plate 103 provided at an upper side of the motor base 102 in the up-down device frame 101 and on which the lift-elevating device units 130 are mounted; The support rod 107 is arranged and fixed at regular intervals between the upper plate of the up-down device frame 101 and the upper surface of the motor base 102 by using the support flange 109, and the guide tube 108 is fitted to the outside. ; A buffer plate 150 provided in pairs in parallel with the chamber 11 forming the chamber assembly 10; At the lower side of each buffer plate 150, a plurality of them are mounted at regular intervals between the lower chamber 12-2 and the lift plate 103, and an upper end of the lift rod 131 penetrates the lower chamber 12-2. The lift drying device unit 130 is exposed to the upper side; vacuum drying apparatus for manufacturing the substrate, characterized in that formed. The method according to claim 1, The substrate support pin 160 provided on the upper surface of the buffer plate 150; And a magnet pin 162 fixed to the lower side of the prasitmeat pin 161, which has a sharp upper center, formed by a fixing means to form an integrated body. The sliding device of claim 1, wherein the sliding plate is configured to slide the buffer plate 150 in and out of the chamber 11; A mandrel of a pair of ceramic bearings 143 is mounted on both sides of an upper end of each lift bar 131 protruding upward of the lower chamber 12-2; A guide bar 1140 is formed on the bottom surface of the buffer plate 150; Both sides of the guide bar 140 is placed so as to be supported by the ceramic bearing 143 mounted on the upper end of each lift rod 131 so as to slide the buffer plate 150; a substrate manufacturing vacuum, characterized in that Drying equipment. The method according to claim 1, The window opening and closing device portion 200 for opening and closing the left and right entrance and exit 13 of the chamber assembly 10; An opening / closing door 201 is provided on the outside of each entrance / exit 13 formed on both left and right sides of the chamber assembly 10; The inner surface of each opening and closing door 201 is formed with a concave groove 340 larger than the inlet and outlet 13, the inside of the concave groove 340 buried the sealing ring 350 so that the head portion 352 protrudes than the inner surface ; The hinge bracket 208 is mounted on the lower end and the lower chamber 12-2 of each open / close door 201, and the door hinge 207 is installed on the hinge bracket 208 with a pin 209 to open / close the door 201. The vacuum drying apparatus for manufacturing a substrate, characterized in that to open and close). The method according to claim 1, The gate opening and closing device 300 for opening and closing the front and rear opening and exit 14 of the chamber assembly 10; The upper chamber 12-1 and the lower chamber 12 are sealed to the front and rear surfaces of the chamber 1 forming the chamber assembly 10 so that the gate 301-1 coincides with the entrance and exit hole 14 of the chamber 1. A gate main plate 301 mounted and fixed to 12-2); A sealing ring 350 embedded in the groove 340 formed on the inner and outer surfaces of the gate main plate 301; An LM guide 305 and a guide block 306 that are correspondingly mounted and coupled to the inner surface of the guide block mounting plate 304 integrally formed at both ends of the outer surface of the gate main plate 301 and both ends of the support plate 303; A lifting cylinder 310 mounted side by side on both sides of the outer surface of the gate main plate 301 and having a rod 311 fixed to the support plate 303; An absorber assembly 315 mounted on both sides of the outer surface of the gate main plate 301 to intercept downward of the support plate 303; Front and rear cylinders 320 are mounted to the cylinder mounting plate 302 mounted on the outside of the support plate 303 at regular intervals; An opening and closing plate 330 mounted to a rod of the front and rear cylinders 320 mounted at a predetermined interval on the cylinder mounting plate 302; On the inner surface of the cylinder mounting plate 302, a pair is mounted side by side and the absorber assembly 135 to control the reverse of the opening and closing plate 330; The pair of support guide pipes 132 are mounted side by side to the cylinder mounting plate 302, and the support guide rods 131 are mounted to the opening and closing plate 330 on the same line by the bracket 133, respectively. Guide rod 131 is inserted into the support guide tube 132; Vacuum drying apparatus for manufacturing a substrate comprising a. According to claim 1, Exhaust unit 400 for suctioning and discharging the internal air of the chamber assembly 10 to the outside simultaneously; A suction hole 12-3 which is drilled in multiple rows in the lower chamber 12-2 forming the chamber assembly 10; A mesh plate 470 mounted on an upper side of each suction hole 12-3; A suction pipe 401 and a T connection pipe 410 mounted at a lower end of each suction hole 12-3; T connection pipes 410 mounted on the lower end of each suction pipe 401 and located on the same line are connected to the connection pipes 430 so as to communicate with each other; The outer end of the T connection pipe 410 located at one outermost side is sealed; T connection pipe 410 located at the outermost side of the other side is connected to the discharge pipe 460 is installed blowing fan using the connection pipe 440 and the bending pipe 450; vacuum drying apparatus for manufacturing a substrate . The method of claim 2, wherein the reinforcing frame (15, 16) formed integrally on the upper surface of the upper chamber (12-1) and the lower surface of the lower chamber (12-2) is an H beam; vacuum drying for manufacturing a substrate Device. The apparatus of claim 3, wherein the lifting device of the up-down device unit 100 which raises / lowers each lift plate 103 provided in the up-down device frame 101 by a predetermined height; A main spacer 111 fixedly installed on a center line of the lift plate 103 in the lower plate forming the up-down device frame 101; A servo motor 110 connected to the input shaft of the main spacer 111 using the universal joint 112 and mounted on a lower plate forming the up-down device frame 101; Starting propulsion shafts 113 and 114 connected to respective output shafts of the main spacer 111; An interlocking spacer (115) (116) connected to an input shaft at an end of each of the maneuvering propulsion shafts (113) (114) and mounted on a lower plate of the up-down device frame (101); Interlocking propulsion shafts 117-1 and 117-2 and interlocking propulsion shafts 118-1 and 118-2 which are respectively connected to respective output shafts of the interlocking spacers 115 and 116; Each screw that is connected to the input shaft at the end of each of the interlocking propulsion shaft 117-1, 117-2 and the interlocking propulsion shaft 118-1, 118-2 and is disposed in a square on the lower plate of the up-down device frame 101 Jack 120; Mounting housing fixed through the screw rod 121 of each screw jack 120 to be maintained in a vertical line through the motor base 102 and the lift plate 103 and the upper end is fixed to the bottom of the upper plate of the up-down device frame 102 ( 125 mounted through the bearing 127; Mounting the nut pipe 122 screwed to the screw rod 121 to the lift plate 103; The upper stopper 126 and the lower stopper 124 are respectively inserted into the screw rod 121 at the upper and lower sides of the nut pipe 122, and the upper stopper 126 is mounted (fixed) to the mounting housing 125, and the lower stopper 124 is attached thereto. Is mounted on the upper surface of the motor base 102 by using a stopper bracket 123; Vacuum drying apparatus for producing a substrate, characterized in that it comprises a. Lift lifter unit 130 is mounted between the lower chamber 12-2 and the lift plate 103 at the lower side of each buffer plate 150; A housing 136 fixed to the bottom of the lower chamber 12-2 and a main holder 138 mounted to the bottom of the lift plate 103; The housing 136 of the lower chamber 12-2 has a bellows 132 to which a bellows holder 135 is formed integrally formed at an upper end thereof; The main holder 138 of the lift plate 103 has a bellows support tube 133 on which a housing 136 fixed to the bottom is mounted together with the lift pin holder 137; A lift rod 131 fixed to the center of the upper surface of the lift pin holder 137 and inserted into the bellows 132 and the bellows support pipe 133; A mounting block 141 coupled to an upper end of the lift bar 131 protruding upward through the lower chamber 12-1, and a guide bush 142 mounted at regular intervals on an outer circumference of the mounting block 141; And a mounting plate (140) mounted to the upper portion of the guide bush (142) via the ceramic bearing (143) and fixed to the buffer plate (150). The method according to claim 3, The substrate support pin 160 is provided on the upper surface of the buffer plate 150; Substrate magnet pin 162 is coupled to the lower side of the prattice pin (161) formed integrally; vacuum manufacturing apparatus for a substrate manufacturing, characterized in that. The method of claim 3, wherein the upper surface of the lower chamber (12-2) is further provided with a guide pin 20 at regular intervals, the buffer plate 150 on the same line with each of the guide pins 20 in the flow hole (150-1) A) and the guide pin 20 is inserted into the distribution hole 150-1 when the buffer plate 150 moves up and down together with the lift rod 131; and a vacuum drying apparatus for manufacturing a substrate. The method according to claim 5, The guide bar 141 formed on the bottom surface of the buffer plate 150 in the sliding movement device; The guide bar (141) is formed integrally with the bottom surface of the buffer plate 150 or formed by separating and integrally coupled by a bolt; vacuum drying apparatus for producing a substrate, characterized in that. The method according to claim 1 or 6, the through hole 202 in the center of the opening and closing door 201 is provided on the outside of the entrance and exit 13 of the chamber 12, the viewing window (outside the viewing hole (202) And a support ring (204) and a guide plate (205) for viewing the inside of the chamber (11). The method of claim 6 or 7, wherein the sealing ring 350 is embedded in the groove 340 formed in the open door 201 or the gate main plate (301); An upper portion of the body portion 351 having a rhombus shape in cross section integrally formed with a curved head portion 352; Bonding blade pieces (353) formed on both sides of the body portion 351 at regular intervals; vacuum drying apparatus for producing a substrate, characterized in that.

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