KR20220071406A - Withdrawal jig apparatus for heating module for heat treatment system of display panel - Google Patents

Abstract

The present invention relates to a withdrawal jig device for a heating module for a heat treatment system of a display panel, which comprises: a heat treatment unit including a chamber in which n (n is an integer equal to or greater than 2) slots having a front-open inlet and a rear-open outlet are arranged in a multi-stage manner, and a housing in which the chamber is accommodated; and n main heating modules which are arranged in each slot in order to supply heat into each slot, wherein the withdrawal jig device further includes a jig unit which enters the outlet of the slot to lift up and then withdraw the main heating modules, thereby facilitating maintenance such as replacement, repair, cleaning and the like by facilitating withdrawal of the heating modules arranged in each slot.

Description

Draw-out jig device for heating module for heat treatment system of display panel

The present invention relates to a pull-out jig device for a heating module for a heat treatment system of a display panel in which a heat treatment unit disposed in each slot is configured as a single module to facilitate insertion, arrangement, and withdrawal/detachment in each slot.

The display can be said to be an important interface for exchanging information between humans and electronic devices. These types of displays can be broadly classified into cathode-ray tubes (CRT) and flat panel displays (FPD). have.

Among them, flat panel displays include Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Electro Luminescent Diode (ELD), Field Emission Display (FED), and ultra-small precision. There are Liquid Crystal On Silicon (LCOS), etc. using a Micro Electro Mechanical System (MEMS).

Although each of these flat panel displays has different manufacturing processes and materials, they commonly undergo a sintering process through heat treatment. Crystallization into an amorphous silicon layer having a low electron mobility through a heat treatment operation and crystallization into a polycrystalline silicon layer having a crystalline structure having a high electron mobility is usually performed at a temperature in the range of 250°C to 750°C.

As a device for applying heat to the amorphous silicon layer, it has a structure in which a substrate is put into the interior of a heating furnace and heat is applied to the amorphous silicon layer with a heating means such as a heater to perform heat treatment. There is a single-wafer type in which a plurality of substrates are vertically embedded and a batch type in which heat treatment is performed.

At this time, as a technology for maintenance of a heating module for heat treatment or a display panel heat treated thereby,

Korean Patent Registration No. 10-1484734 (Registered on Jan. 14, 2015, hereinafter referred to as 'Document 1') "A heat treatment system for a flat panel display panel and a heat treatment method therefor" is presented,

Document 1 is a box-shaped structure by installing an insulating plate on the outside of a rectangular support frame, a charging opening portion for loading or unloading a panel is formed on the front side, and a body in which a support is installed in multiple layers on the inside of the support frame; A firing plate is installed on each of the pedestals, a heating tube is piped on the upper surface of each firing plate, and seating members are sequentially disposed on the upper side of the heating tube, and a panel placed on the upper surface of each seating member a heat treatment unit for heat treatment with heat radiated from the heating tube; a shutter comprising a plurality of opening and closing doors positioned on the front side of each of the heat treatment units to seal the charging opening so that heat treatment is performed; an opening/closing unit for horizontally moving the opening/closing door of the shutter in close contact with or leaving the charging opening; and a lifting unit for completely opening the charging opening or restoring the position of the opening and closing door by lifting or lowering the shutter separated by horizontal movement from the charging opening by the opening and closing unit with the lifting member.

Document 1 having the above configuration relates to a heat treatment system in which a panel is seated and a seating member subjected to heat treatment is fitted in a sliding manner, so that entry-exit is easy, and cleaning is easy even if the panel is damaged in the heat treatment process.

Document 1. Korean Patent Registration No. 10-1484734 (Registered on Jan. 14, 2015)

In the present invention, a modularized heating module is disposed in each slot, and the process temperature in the slot can be uniformly secured through the heating structure of the shutter together with the heating module of the corresponding slot, and in particular, for each slot through a jig and a lift unit An object of the present invention is to provide a pull-out jig device for a heating module for a heat treatment system of a display panel that is easy to take out and maintain such as replacement, repair, and cleaning.

In order to solve the above-mentioned problems, the extraction jig device for the heating module for the heat treatment system of the display panel according to the present invention is,

A heat treatment unit comprising a chamber in which n (wherein, n is an integer equal to or greater than 2) slots having a front open inlet and a rear open outlet, arranged in a multi-stage manner, and a housing in which the chamber is accommodated; In the heat treatment system of a display panel including n main heating modules disposed in each slot to supply a heat source in the slot,

It characterized in that it further comprises a jig unit which enters the outlet of the slot and withdraws after lifting the main heating module.

A pull-out jig device for a heating module for a heat treatment system of a display panel according to the present invention,

It has the greatest effect in that it is easy to take out the heating module arranged in each slot, so maintenance such as replacement, repair, and cleaning is easy.

In addition, since each slot has an individual heating and opening/closing structure, the effect of temperature between slots can be minimized, and a wide range of heat treatment process temperatures can be applied through various heating structures.

1 is a three-dimensional configuration diagram showing a heat treatment unit in an extraction jig device for a heating module for a heat treatment system of a display panel according to the present invention;
Figure 2 is a front view of the coupling of Figure 1;
Figure 3 is a configuration diagram of the rear coupling of Figure 1,
4 is a three-dimensional configuration diagram showing the chamber;
5 is an enlarged configuration diagram of the main part of "A" of FIG. 4;
6 is a three-dimensional configuration diagram for showing the sub-heating means of the heat treatment unit;
7 is a three-dimensional configuration diagram to show the main heating module, its power supply, and a locking bracket;
8 is a rear three-dimensional configuration view of the heat treatment unit;
9 is a plan view and a front view showing the jig unit;
10 is a plan view showing the lift unit;
11 is a side view showing the lift unit;
12 is a front configuration view showing a state in which the jig unit has entered the slot of the chamber;
13 is a front configuration view showing a state in which the main heating module is lifted by the jig unit.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to their ordinary or dictionary meanings, and the inventor should properly understand the concept of the term in order to best describe his invention. Based on the principle that it can be defined, it should be interpreted as meaning and concept consistent with the technical idea of the present invention. Therefore, the configuration shown in the embodiments and drawings described in this specification is only the most preferred embodiment of the present invention and does not represent all of the technical spirit of the present invention, so various equivalents that can be substituted for them at the time of the present application It should be understood that there may be water and variations.

1, the shutter side is front or front, and the door side is rear or rear, the direction is specified. Decide to specify the direction as downward.

1 to 13, the extraction jig device for the heating module for the heat treatment system of the display panel according to the present invention,

A chamber 21 in which n slots 211 (wherein n is an integer equal to or greater than 2) having a front opening 211a and a rear opening outlet 211b are arranged in a multi-stage arrangement, and the chamber Includes a heat treatment unit 20 comprising a housing 22 in which 21 is accommodated, and n main heating modules 30 disposed in each slot 211 to supply a heat source in each slot 211 . In the heat treatment system of the display panel,

It enters the outlet 211b of the slot 211 and further includes a jig unit 70 for lifting and withdrawing the main heating module 30 .

At this time, as shown in FIGS. 1 to 8, the main heating module 30 includes a rectangular support 31 disposed in the slot 211, and a heating element 32 disposed on the top of the rectangular support 31, and the A boat 33 disposed on the heating element 32 in a zigzag shape, and a plurality of pins 34 provided along the longitudinal direction of the boat 33 to support the display panel drawn into the slot 211 and , a power supply unit 35 for applying power to the heating element 32, and four engaging brackets 36 disposed in pairs at both ends of the rectangular support 31 to be spaced apart from the front and rear.

And as in FIGS. 9, 12 and 13, the jig unit 70 is a rectangular frame 71 that is spaced apart from the upper side of the main heating module 30 when entering the outlet 211b of the slot 211. ), and a plurality of moving rollers 72 provided on the lower surface of the rectangular frame 71 to perform a rolling motion along the bottom in the slot 211 while supporting the rectangular frame 71, and the rectangular frame 71. A pair of hanger rods 73 that are coupled transversely in the form of interconnecting both ends and spaced apart from the front and rear of the square frame 71, and four jig heads spaced apart from the lower side of each locking bracket 36 ( 74), and four jig head driving units 75 mounted on each of the hanger rods 73 for elevating the respective jig heads 74.

First, looking at the heat treatment unit 20 for heat treatment (sintering) of the display panel in the heat treatment system of the display panel,

1 to 4 , the chamber 21 has a rectangular enclosure structure, in which each slot 211 is arranged in a multi-stage form, and a partition wall is formed between each slot 211 . They have independent spatial structures. In addition, in the present invention, it is illustrated that n is 4, but this is only an example and will not be limited thereto.

And, as shown in FIG. 1, the housing 22 of the heat treatment unit 20 includes a rectangular bottom frame 221 and four post frames 222 erected in the upper four corners of the bottom frame 221. In this case, the bottom frame 221 may further include the post frame 222 in the remaining area except for the four corner areas, that is, on the side connecting the two adjacent corner areas.

And, as shown in Fig. 1, the lower surface of the chamber 21 of the heat treatment unit 20 is provided with a plurality of support pieces 212 whose ends having fastening holes 212a are exposed to the outside, and the housing 22 A plurality of corresponding support pieces 223 having corresponding fastening holes 223a corresponding to the fastening holes 212a are provided on the upper surface of the bottom frame 221 of the respective support pieces 212, As the bolt is fastened through the fastening hole 212a to the corresponding fastening hole 223a, the assembly between the bottom frame 221 and the chamber 21 is possible.

And, as shown in Figure 6, in the heat treatment unit 20, each slot 211 inlet 211a of the chamber 21, the shutter 23 for opening and closing and an opening/closing driving means 24 for operating the same, and the shutter ( 23) and a sub-heating means 25 for supplying a heat source into the slot 211 is provided.

The shutter 23 has a shutter plate 231 having a size larger than the inlet 211a of the slot 211, and is formed to protrude from an inner wall of the shutter plate 231 and has a size corresponding to the inlet 211a. and a sealing plate 232 inserted into the inlet 211a.

The opening/closing driving means 24 includes a transverse bar 241 mounted on the front surface of the shutter plate 231 and a pair of interconnecting both ends of the shutter plate 231 and the chamber 21 . It consists of a hinge member 242 and a shutter driving part 243 that rotates the transverse bar 241 downward by pushing it and reversely pulls it to rotate upward. A piston to which is rotated is built-in, and the piston advances and retreats by selective supply of air, and may have a pneumatic cylinder structure that is installed on both side walls of the chamber 21 to rotate. Accordingly, the shutter 23 is rotated forward with respect to each hinge member 242 by the shutter driver 243 to be horizontally spread, so that the inlet 211a of the slot 211 is opened, and vice versa. The inlet 211a of the slot 211 is closed by being rotated to the original position and erected vertically.

The sub-heating means 25 includes a heating rod 251 disposed along the circumference of the sealing plate 232 on the inner wall of the shutter plate 231 and a power supply for applying power to the heating rod 251 . It may consist of a line 252, and the power supply line 252 is disposed to pass through the center of the hinge member 242 and interconnects the hinge member 242 and the shutter plate 232. can be done

And as shown in FIGS. 4 and 8 , each slot 211 of the chamber 21 has an outlet 211b opened at the rear, and the outlet of each slot 211 is located on the rear surface of the chamber 21 . 211b) A door 213 for opening and closing is provided.

The inlet 211a of the slot 211 has a space size sufficient to allow the display panel to enter and exit, and the outlet 211b of the slot 211 is large enough to allow the main heating module 30 to enter and exit. has space size. As a result, when the outlet 211b of each slot 211 is opened by opening the door 213, the main heating module 30 can be entered and exited.

In addition, the door 231 is pivotally coupled to the post frame 222 of the housing 22 and is bound to the chamber 21 around the door 231 to lock the door 231 . A locking member is provided.

On the other hand, looking at the main heating module 30 for supplying a heat source in each slot 211 in the heat treatment system of the display panel,

The heating element 32 is made of a rectangular plate structure in which the heating wire is wired in a zigzag form therein, and a plurality of such heating elements 32 are provided and arranged in a grid shape on the upper portion of the rectangular support 31 .

And, as shown in FIG. 7 , each of the pins 34 is arranged along the longitudinal direction of the boat 33 , and the shape is a thin, vertically long circular column shape, and is made of quartz, but the end is the lower surface of the display panel. It is preferable to have a dome shape so as to prevent damage that may occur when it comes into contact with the skin.

And the power supply unit 35 includes a plurality of supports 351 that are erected to be disposed at a predetermined distance in front and rear at both ends of the square support 31, and a connector disposed to be spaced apart from both ends of the square support 31 to the rear side. It consists of a module 352 and a plurality of bus-bars 353 starting from the connector module 352 and passing through to be supported by each support body 351 and electrically connected to the heating element 32 . . At this time, a power supply cable for applying external power is connected to the connector module 352 .

Accordingly, the display panel is introduced into each slot 211 of the chamber 21 through its inlet 211, and the introduced display panel is seated and supported on each pin 34, and is supplied from the power supply unit 35 by external control. When power is applied, a heat treatment process is performed on the display panel while the heating element 32 is heated.

And, as shown in FIG. 7, each of the locking brackets 36 is arranged in pairs at both ends of the square support 31 to be spaced apart back and forth. It has an approximately triangular shape protruding from the In particular, in the main heating module 30, when the jig unit 70 enters the slot 211 by the roller 72, the jig head 74 reaches the lower side of each locking bracket 36. It is preferable to be configured so that there is no interfering element until done.

On the other hand, looking at the jig unit 70 for entering and leaving the main heating module 30 in and out of the slot 211 in the heat treatment system of the display panel,

As shown in FIG. 9 , the rectangular frame 71 is formed by four frames connected to each other by being disposed on the front and rear left and right sides, and each of the hanger rods 73 is spaced apart from the front and rear of the rectangular frame 71 , and each The jig head 74 is made of a rectangular plate structure.

And, as shown in FIGS. 9 and 12, each of the jig head driving parts 75 has an elevating piston 751 having an end connected to the jig head 74, and the elevating piston 751 is built-in to selectively supply air The lifting piston 751 is lifted up and down by the , and it consists of a lifting pneumatic cylinder body 752 mounted on the lower surface of the hanger rod 73 . In particular, the jig head 74 is eccentrically connected to one side of the end of the lifting piston 751, and at this time, one side refers to the corresponding engaging bracket 36 side.

Therefore, as shown in FIG. 13, when the lifting piston 751 is raised, the jig head 74 is also raised while being caught by the locking bracket 36, thereby removing the main heating module 30 from the bottom in the slot 211. will lift

And the lifting and lowering pneumatic cylinder body 752 may be implemented so that the position can be changed along the left and right longitudinal direction of the hanger rod 73. For this, the lower surface of the hanger rod 73 is concave along its longitudinal direction. It is formed and has a T-shaped cross section, and it is mounted on the upper end of the elevating pneumatic cylinder body 752 and is coupled to the T-shaped groove on the upper part and male and female are coupled to each other to slide along the T-shaped groove. . At this time, the protrusion positioned by sliding left and right along the T-shaped groove can be implemented to be fixed by pressure by the end of the bolt when the bolt fastened to the hanger rod 73 is tightened.

On the other hand, the present invention further includes a lift unit (80),

10 and 11 , the lift unit 80 includes a lift body 81 disposed on the outlet 211b side of the slot 211 in the chamber 21, and the lift body 81 ), a pair of rails 83 erected on both ends of the upper surface of the floor board 82 and arranged long in the front and rear, and on the lower surface of the lift body 81 It consists of a plurality of casters 86 for movement provided.

In addition, as shown in FIG. 11, the lift unit 80 has a floor board driving part 84 for raising and lowering the floor board 82, and the upper surface of the floor board 82 is erected at both ends on the left and right sides. A pair of fences 85 disposed on the outside of the rail 82 are further provided. The floorboard driving part 84 is installed in the lift body 81 and is folded in an x-shape to be installed in a pneumatic or hydraulic cylinder. It can be implemented as a cross-type lift structure that is spread by This is an example, and various modifications and changes may be made within a range that satisfies the conditions for elevating the floor board 82 up and down.

And on the lower surface of the lift body 81, for fixing the lift body 81 moved by the casters 86, a support member that moves up and down during rotation is further provided to increase the length of the support member. It can be implemented so that the lift body 81 can be fixed by such that the casters 86 are spaced apart from the ground.

Accordingly, when the jig unit 70 drawn out after lifting the main heating module 30 comes out of the slot 211 , the rollers 72 are moved along the respective rails 83 . For the main heating module 30 moved outside from the slot 211 in this way, a worker entering and leaving the floor board 82 performs maintenance work such as replacement, repair, and cleaning.

In the above description of the present invention, with reference to the accompanying drawings, the "draw-out jig device for a heating module for a heat treatment system of a display panel" having a specific shape and structure has been mainly described, but the present invention can be variously modified and changed by those skilled in the art. It is possible, and such modifications and variations should be construed as falling within the protection scope of the present invention.

20: heat treatment unit
21 : chamber
211: slot
211a : entrance
211b: exit
212: support piece
212a: fastening hole
213 : door
22: housing
221: bottom frame
222: post frame
223: corresponding support piece
223a: corresponding fastening hole
23 : shutter
231: shutter plate
232: sealing plate
24: opening/closing driving means
241: side bar
242: hinge member
243: shutter driving unit
25: sub-heating means
251: heating rod
252: power supply line
30: main heating module
31: square support
32: heating element
33 : Boat
34 : pin
35: power supply
351: support
352: connector module
353 : busbar
36: catch bracket
70: jig unit
71: square frame
72: roller
73: hanger rod
74: jig head
75: jig head driving part
751: lifting piston
752: elevating pneumatic cylinder body
80: lift unit
81: lift body
82: floor board
83: rail
84: floor board driving unit
85 : fence
86 : Caster

Claims (5)

A chamber 21 in which n (where n is an integer greater than or equal to 2) slots 211 having a front opening 211a and a rear opening outlet 211b are arranged in a multi-stage arrangement, and the chamber Includes a heat treatment unit 20 comprising a housing 22 in which 21 is accommodated, and n main heating modules 30 disposed in each slot 211 to supply a heat source in each slot 211 . In the heat treatment system of the display panel,
Take-out for a heating module for a heat treatment system of a display panel, characterized in that it enters the outlet 211b of the slot 211 and further comprises a jig unit 70 that lifts the main heating module 30 and then withdraws it. jig device.
The method of claim 1,
The main heating module 30 includes a rectangular support 31 disposed in the slot 211, a heating element 32 disposed on the upper portion of the rectangular support 31, and a zigzag shape on the heating element 32 upper portion. The boat 33 is disposed, a plurality of pins 34 provided along the longitudinal direction of the boat 33 to support the display panel drawn into the slot 211 , and power to the heating element 32 . Consists of a power supply unit 35 to be applied, and four engaging brackets 36 disposed in pairs at both ends of the rectangular support 31 to be spaced apart from each other before and after,
The jig unit 70 is provided on the lower surface of the square frame 71 spaced apart from the upper side of the main heating module 30 when entering the outlet 211b of the slot 211, and the square frame 71. A plurality of moving rollers 72 that roll along the floor in the slot 211 while supporting the rectangular frame 71 and the both ends of the rectangular frame 71 are cross-coupled to each other in a form to interconnect the rectangular frame A pair of hanger rods 73 spaced apart from the front and rear of (71), four jig heads 74 spaced apart from the lower side of each locking bracket 36, and mounted on each of the hanger rods 73 and a pull-out jig device for a heating module for a heat treatment system of a display panel, characterized in that it comprises four jig head driving units (75) for elevating each of the jig heads (74).
3. The method of claim 2,
Each of the jig head driving units 75 has an elevating piston 751 having an end connected to the jig head 74, and the elevating piston 751 is built-in, and the elevating piston 751 is moved up and down by selective supply of air. Consists of a lifting pneumatic cylinder body 752 mounted on the lower surface of the hanger rod 73 and lifted with a jig, and when the lifting piston 751 rises, the jig head 74 also rises while the locking bracket 36. A pull-out jig device for a heating module for a heat treatment system of a display panel, characterized in that the main heating module (30) is lifted from the bottom in the slot (211) by being caught on the display panel.
4. The method of claim 2 or 3,
In the chamber 21 , the lift body 81 is disposed on the side of the outlet 211b of the slot 211 , the floor board 82 disposed above the lift body 81 , and the floor board 82 . ) by further including a lift unit 80 consisting of a pair of rails 83 that are erected on both ends of the upper surface and are long in the front and rear, the jig unit 70 to lift the main heating module 30 and then take it out ), the pull-out jig device for a heating module for a heat treatment system of a display panel, characterized in that the respective rollers (72) are moved along the respective rails (83) when they are pulled out from the slot (211).
5. The method of claim 4,
The lift unit 80 includes a floor board driving part 84 for raising and lowering the floor board 82 up and down, and is erected on both ends of the upper surface of the floor board 82 on the left and right sides of the upper surface of the floor board 82, and on the outside of each rail 82 A pull-out jig device for a heating module for a heat treatment system of a display panel, characterized in that a pair of fences (85) are further provided.

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