KR102473316B1 - 레이저발진기 - Google Patents

레이저발진기 Download PDF

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Publication number
KR102473316B1
KR102473316B1 KR1020180168928A KR20180168928A KR102473316B1 KR 102473316 B1 KR102473316 B1 KR 102473316B1 KR 1020180168928 A KR1020180168928 A KR 1020180168928A KR 20180168928 A KR20180168928 A KR 20180168928A KR 102473316 B1 KR102473316 B1 KR 102473316B1
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KR
South Korea
Prior art keywords
chamber
discharge
resonator
space
supported
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KR1020180168928A
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English (en)
Korean (ko)
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KR20190094092A (ko
Inventor
켄타 타나카
조이치 카와무라
마사후미 요로즈
야스히로 오카다
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Publication of KR20190094092A publication Critical patent/KR20190094092A/ko
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Publication of KR102473316B1 publication Critical patent/KR102473316B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
KR1020180168928A 2018-02-02 2018-12-26 레이저발진기 KR102473316B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2018-016925 2018-02-02
JP2018016925A JP7023573B2 (ja) 2018-02-02 2018-02-02 レーザ発振器

Publications (2)

Publication Number Publication Date
KR20190094092A KR20190094092A (ko) 2019-08-12
KR102473316B1 true KR102473316B1 (ko) 2022-12-01

Family

ID=67546450

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180168928A KR102473316B1 (ko) 2018-02-02 2018-12-26 레이저발진기

Country Status (4)

Country Link
JP (1) JP7023573B2 (zh)
KR (1) KR102473316B1 (zh)
CN (1) CN110137787B (zh)
TW (1) TWI684309B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022013224A (ja) * 2020-07-03 2022-01-18 住友重機械工業株式会社 レーザ発振器
JP7499627B2 (ja) 2020-07-06 2024-06-14 住友重機械工業株式会社 レーザ装置
JPWO2022201843A1 (zh) * 2021-03-24 2022-09-29
CN116404502A (zh) * 2023-06-07 2023-07-07 北京精亦光电科技有限公司 一种准分子激光器放电腔结构

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013187443A (ja) * 2012-03-09 2013-09-19 Sumitomo Heavy Ind Ltd レーザ発振器

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US4317090A (en) * 1979-07-20 1982-02-23 Mitsubishi Denki Kabushiki Kaisha Laser oscillator
JPS60254684A (ja) * 1984-05-31 1985-12-16 Mitsubishi Electric Corp レ−ザ−発振装置
JPS61151358U (zh) * 1985-01-31 1986-09-18
JPS61199685A (ja) * 1985-03-01 1986-09-04 Mitsubishi Electric Corp レ−ザ発振器
JPS628585A (ja) * 1985-07-05 1987-01-16 Mitsubishi Electric Corp レ−ザ光源装置
JPS6245189A (ja) * 1985-08-23 1987-02-27 Mitsubishi Electric Corp レ−ザ発振器
JPH038380A (ja) * 1989-06-06 1991-01-16 Amada Co Ltd レーザ発振器の内部ミラー保護方法およびその装置
JPH05167131A (ja) * 1991-12-12 1993-07-02 Toshiba Corp ガスレーザ発振器
US6819699B1 (en) * 1999-03-05 2004-11-16 Komatsu Ltd. Arf excimer laser device, scanning type exposure device and ultraviolet laser device
JP2003298154A (ja) 2002-03-29 2003-10-17 Mitsubishi Electric Corp レーザ発振器及び光学部品のクリーニング方法
KR20080091137A (ko) * 2005-12-09 2008-10-09 가부시키가이샤 니콘 레이저 광원 장치, 그리고 노광 방법 및 장치
JP4979277B2 (ja) * 2006-06-07 2012-07-18 三菱電機株式会社 レーザ発振装置
DE112007002855B4 (de) * 2006-12-11 2015-01-15 Mitsubishi Electric Corp. Festkörperlaser und Wellenlängenumwandlungslaser
JP4565045B2 (ja) * 2008-07-17 2010-10-20 ファナック株式会社 ガスレーザ共振器
CN101630808B (zh) * 2009-04-28 2011-01-26 武汉光谷科威晶激光技术有限公司 一种激光器谐振腔结构
CN105449495A (zh) * 2015-11-03 2016-03-30 北京热刺激光技术有限责任公司 负极板安装在平行支架上的射频激光器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013187443A (ja) * 2012-03-09 2013-09-19 Sumitomo Heavy Ind Ltd レーザ発振器

Also Published As

Publication number Publication date
JP7023573B2 (ja) 2022-02-22
KR20190094092A (ko) 2019-08-12
TWI684309B (zh) 2020-02-01
JP2019134122A (ja) 2019-08-08
CN110137787A (zh) 2019-08-16
TW201935786A (zh) 2019-09-01
CN110137787B (zh) 2022-05-27

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