KR102446462B1 - 고온 프로세스 애플리케이션에서 측정 파라미터를 획득하기 위한 캡슐화된 계장화 기판 장치 - Google Patents

고온 프로세스 애플리케이션에서 측정 파라미터를 획득하기 위한 캡슐화된 계장화 기판 장치 Download PDF

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KR102446462B1
KR102446462B1 KR1020197001070A KR20197001070A KR102446462B1 KR 102446462 B1 KR102446462 B1 KR 102446462B1 KR 1020197001070 A KR1020197001070 A KR 1020197001070A KR 20197001070 A KR20197001070 A KR 20197001070A KR 102446462 B1 KR102446462 B1 KR 102446462B1
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substrate
assembly
enclosure
sensors
disposed
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KR20190008578A (ko
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메이 순
얼 젠센
징 조우
란 리우
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케이엘에이 코포레이션
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    • H01L22/30—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/27—Structural arrangements therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H01L21/67098—
    • H01L21/67242—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7618—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel

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  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
KR1020197001070A 2016-06-15 2017-06-14 고온 프로세스 애플리케이션에서 측정 파라미터를 획득하기 위한 캡슐화된 계장화 기판 장치 Active KR102446462B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662350688P 2016-06-15 2016-06-15
US62/350,688 2016-06-15
US15/277,792 2016-09-27
US15/277,792 US10460966B2 (en) 2016-06-15 2016-09-27 Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
PCT/US2017/037548 WO2017218701A1 (en) 2016-06-15 2017-06-14 Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications

Publications (2)

Publication Number Publication Date
KR20190008578A KR20190008578A (ko) 2019-01-24
KR102446462B1 true KR102446462B1 (ko) 2022-09-21

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Country Status (7)

Country Link
US (2) US10460966B2 (https=)
JP (2) JP6920357B2 (https=)
KR (1) KR102446462B1 (https=)
CN (2) CN112820718B (https=)
SG (1) SG11201807420YA (https=)
TW (1) TWI751172B (https=)
WO (1) WO2017218701A1 (https=)

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US11315811B2 (en) 2018-09-06 2022-04-26 Kla Corporation Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the same
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US11054317B2 (en) * 2018-09-28 2021-07-06 Applied Materials, Inc. Method and apparatus for direct measurement of chucking force on an electrostatic chuck
US12074044B2 (en) * 2018-11-14 2024-08-27 Cyberoptics Corporation Wafer-like sensor
US11636948B2 (en) 2019-05-21 2023-04-25 Q Med Innovations, Inc. Instrument kit tracking system
KR102438344B1 (ko) * 2019-10-14 2022-09-01 세메스 주식회사 웨이퍼형 센서 유닛 및 웨이퍼형 센서 유닛의 제조 방법
KR102382971B1 (ko) * 2019-11-05 2022-04-05 이트론 주식회사 반도체 공정 진단을 위한 온도 센서 장치 및 이의 제조 방법
US11668601B2 (en) 2020-02-24 2023-06-06 Kla Corporation Instrumented substrate apparatus
US11589474B2 (en) 2020-06-02 2023-02-21 Applied Materials, Inc. Diagnostic disc with a high vacuum and temperature tolerant power source
US11924972B2 (en) 2020-06-02 2024-03-05 Applied Materials, Inc. Diagnostic disc with a high vacuum and temperature tolerant power source
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US12535363B2 (en) * 2022-07-28 2026-01-27 Applied Materials, Inc. Radical sensor substrate
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Publication number Publication date
TW201810479A (zh) 2018-03-16
CN109314066A (zh) 2019-02-05
US11823925B2 (en) 2023-11-21
US20200203200A1 (en) 2020-06-25
JP7194786B2 (ja) 2022-12-22
TWI751172B (zh) 2022-01-01
CN112820718B (zh) 2024-12-20
CN112820718A (zh) 2021-05-18
US10460966B2 (en) 2019-10-29
JP2019523884A (ja) 2019-08-29
SG11201807420YA (en) 2018-12-28
CN109314066B (zh) 2021-01-15
WO2017218701A1 (en) 2017-12-21
KR20190008578A (ko) 2019-01-24
JP6920357B2 (ja) 2021-08-18
US20170365495A1 (en) 2017-12-21
JP2021170034A (ja) 2021-10-28

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