KR102443887B1 - 유체기기 - Google Patents
유체기기 Download PDFInfo
- Publication number
- KR102443887B1 KR102443887B1 KR1020160061849A KR20160061849A KR102443887B1 KR 102443887 B1 KR102443887 B1 KR 102443887B1 KR 1020160061849 A KR1020160061849 A KR 1020160061849A KR 20160061849 A KR20160061849 A KR 20160061849A KR 102443887 B1 KR102443887 B1 KR 102443887B1
- Authority
- KR
- South Korea
- Prior art keywords
- flow path
- fluid
- flow
- members
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H01L21/02—
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
- F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L41/00—Branching pipes; Joining pipes to walls
- F16L41/02—Branch units, e.g. made in one piece, welded, riveted
- F16L41/03—Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
-
- H01L21/67005—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Valve Housings (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2015-114088 | 2015-06-04 | ||
| JP2015114088A JP6751552B2 (ja) | 2015-06-04 | 2015-06-04 | 流体機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160143515A KR20160143515A (ko) | 2016-12-14 |
| KR102443887B1 true KR102443887B1 (ko) | 2022-09-15 |
Family
ID=56292443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020160061849A Active KR102443887B1 (ko) | 2015-06-04 | 2016-05-20 | 유체기기 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10260649B2 (https=) |
| EP (1) | EP3101319B1 (https=) |
| JP (1) | JP6751552B2 (https=) |
| KR (1) | KR102443887B1 (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE1024953B1 (fr) * | 2017-01-31 | 2018-08-30 | Out And Out Chemistry Sprl | Méthode pour connecter au moins deux vannes fluidiques et le système de communication fluidique mis en œuvre |
| BR112019023451B1 (pt) | 2017-05-10 | 2023-10-31 | Nordic Bioproducts Group Oy | Aditivo de alimentação animal compreendendo microcelulose contendo lignina e seu uso, e uso de microcelulose contendo lignina |
| US11493275B2 (en) | 2017-10-10 | 2022-11-08 | Tps Ip, Llc | Oven with renewable energy capacities |
| US11299925B2 (en) | 2017-10-11 | 2022-04-12 | Tps Ip, Llc | Oven with split doors |
| US11585701B2 (en) | 2017-10-27 | 2023-02-21 | Tps Ip, Llc | Intelligent oven |
| US10794508B2 (en) * | 2017-11-14 | 2020-10-06 | Tps Ip, Llc | Atmosphere control manifold |
| US10798947B2 (en) | 2017-12-08 | 2020-10-13 | Tps Ip, Llc | Oven with augmented reality functionality |
| US11346560B2 (en) | 2017-12-29 | 2022-05-31 | Tps Ip, Llc | Oven wall compositions and/or structures |
| JP7061794B2 (ja) * | 2018-08-10 | 2022-05-02 | アドバンス電気工業株式会社 | ダイヤフラム部材 |
| JP7321110B2 (ja) * | 2020-02-05 | 2023-08-04 | 愛三工業株式会社 | 電動式バルブ装置 |
| JP6850958B1 (ja) * | 2020-09-08 | 2021-03-31 | 昭和機器計装株式会社 | 集合配管ユニット |
| EP4345362A1 (de) * | 2022-09-27 | 2024-04-03 | Eugen Seitz AG | Verteiler eines fluidversorgungssystems |
| CN116658727A (zh) * | 2023-04-21 | 2023-08-29 | 北京机械设备研究所 | 一种柔性气源提供装置及其使用方法 |
| JP2025095881A (ja) | 2023-12-15 | 2025-06-26 | サーパス工業株式会社 | 流体機器システム |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008089085A (ja) | 2006-10-02 | 2008-04-17 | Ckd Corp | 流体機器のマニホールド構造体及びそれに用いられるボディブロック |
| JP4283884B2 (ja) * | 2002-10-21 | 2009-06-24 | シーケーディ株式会社 | ガス集積弁 |
| US20120222750A1 (en) | 2011-03-02 | 2012-09-06 | Henry Wong | Length-adjustable pressure-retaining piping components |
| JP2013080424A (ja) * | 2011-10-05 | 2013-05-02 | Horiba Stec Co Ltd | 流体制御システム |
| KR101425009B1 (ko) | 2007-05-25 | 2014-08-13 | 사파스고교 가부시키가이샤 | 유체기기 유니트 구조 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5275201A (en) * | 1992-07-23 | 1994-01-04 | Tri-Clover, Inc. | Manifold valve assembly with removable valve seat |
| JP3207782B2 (ja) * | 1997-04-16 | 2001-09-10 | アドバンス電気工業株式会社 | マニホールドバルブ |
| JP3766749B2 (ja) * | 1998-03-16 | 2006-04-19 | シーケーディ株式会社 | 電磁弁 |
| CA2332550C (en) * | 1998-05-18 | 2008-01-08 | The Swagelok Company | Modular surface mount manifold assemblies |
| US7036528B2 (en) | 1998-05-18 | 2006-05-02 | Swagelok Company | Modular surface mount manifold assemblies |
| DE50101712D1 (de) | 2001-08-08 | 2004-04-22 | Festo Ag & Co | Matrixartige Ventilanordnung |
| JP4296138B2 (ja) * | 2004-08-04 | 2009-07-15 | シーケーディ株式会社 | ガス供給集積ユニット |
| JP5079393B2 (ja) * | 2007-05-25 | 2012-11-21 | サーパス工業株式会社 | 流体機器ユニット構造 |
| DE102008026149A1 (de) | 2008-05-30 | 2009-12-03 | Gea Tuchenhagen Gmbh | Verrohrungssystem für Prozessanlagen der Nahrungsmittel- und Getränkeindustrie |
| PT2281132E (pt) * | 2008-05-30 | 2012-06-04 | Gea Tuchenhagen Gmbh | Dispositivo para a montagem de tubagens em instalações de processamento da indústria alimentar e de bebidas |
| JP5274518B2 (ja) * | 2009-06-30 | 2013-08-28 | Ckd株式会社 | ガス供給ユニット及びガス供給装置 |
| DE102010022624B4 (de) * | 2010-06-04 | 2013-06-27 | Festo Ag & Co. Kg | Ventilanordnung |
| US9188990B2 (en) * | 2011-10-05 | 2015-11-17 | Horiba Stec, Co., Ltd. | Fluid mechanism, support member constituting fluid mechanism and fluid control system |
-
2015
- 2015-06-04 JP JP2015114088A patent/JP6751552B2/ja active Active
-
2016
- 2016-05-20 KR KR1020160061849A patent/KR102443887B1/ko active Active
- 2016-05-25 US US15/163,714 patent/US10260649B2/en active Active
- 2016-05-31 EP EP16172133.7A patent/EP3101319B1/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4283884B2 (ja) * | 2002-10-21 | 2009-06-24 | シーケーディ株式会社 | ガス集積弁 |
| JP2008089085A (ja) | 2006-10-02 | 2008-04-17 | Ckd Corp | 流体機器のマニホールド構造体及びそれに用いられるボディブロック |
| KR101425009B1 (ko) | 2007-05-25 | 2014-08-13 | 사파스고교 가부시키가이샤 | 유체기기 유니트 구조 |
| US20120222750A1 (en) | 2011-03-02 | 2012-09-06 | Henry Wong | Length-adjustable pressure-retaining piping components |
| JP2013080424A (ja) * | 2011-10-05 | 2013-05-02 | Horiba Stec Co Ltd | 流体制御システム |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3101319B1 (en) | 2019-03-13 |
| US10260649B2 (en) | 2019-04-16 |
| JP2017002919A (ja) | 2017-01-05 |
| EP3101319A1 (en) | 2016-12-07 |
| KR20160143515A (ko) | 2016-12-14 |
| JP6751552B2 (ja) | 2020-09-09 |
| US20160356388A1 (en) | 2016-12-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
St.27 status event code: A-0-1-A10-A12-nap-PA0109 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| D13-X000 | Search requested |
St.27 status event code: A-1-2-D10-D13-srh-X000 |
|
| D14-X000 | Search report completed |
St.27 status event code: A-1-2-D10-D14-srh-X000 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
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| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U11-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |