KR102351205B1 - 플라즈모닉 입자 표면 코팅을 갖는 가요성 기재 및 이의 제조 방법 - Google Patents

플라즈모닉 입자 표면 코팅을 갖는 가요성 기재 및 이의 제조 방법 Download PDF

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KR102351205B1
KR102351205B1 KR1020197018262A KR20197018262A KR102351205B1 KR 102351205 B1 KR102351205 B1 KR 102351205B1 KR 1020197018262 A KR1020197018262 A KR 1020197018262A KR 20197018262 A KR20197018262 A KR 20197018262A KR 102351205 B1 KR102351205 B1 KR 102351205B1
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particles
plasmonic material
polymeric substrate
major surface
layer
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KR20190095309A (ko
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명찬 강
에반 쿤 런 유우지 하지메
더글라스 엘 엘모어
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쓰리엠 이노베이티브 프로퍼티즈 캄파니
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C61/00—Shaping by liberation of internal stresses; Making preforms having internal stresses; Apparatus therefor
    • B29C61/02—Thermal shrinking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/0072—After-treatment of articles without altering their shape; Apparatus therefor for changing orientation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/02—Thermal after-treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/06—Coating with compositions not containing macromolecular substances
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2323/00—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers
    • C08J2323/02—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers not modified by chemical after treatment
    • C08J2323/04—Homopolymers or copolymers of ethene
    • C08J2323/06—Polyethene

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Toxicology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
KR1020197018262A 2016-12-19 2017-12-12 플라즈모닉 입자 표면 코팅을 갖는 가요성 기재 및 이의 제조 방법 Expired - Fee Related KR102351205B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662436072P 2016-12-19 2016-12-19
US62/436,072 2016-12-19
PCT/US2017/065735 WO2018118511A1 (en) 2016-12-19 2017-12-12 Flexible substrate having a plasmonic particle surface coating and method of making the same

Publications (2)

Publication Number Publication Date
KR20190095309A KR20190095309A (ko) 2019-08-14
KR102351205B1 true KR102351205B1 (ko) 2022-01-17

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KR1020197018262A Expired - Fee Related KR102351205B1 (ko) 2016-12-19 2017-12-12 플라즈모닉 입자 표면 코팅을 갖는 가요성 기재 및 이의 제조 방법

Country Status (6)

Country Link
US (1) US11479844B2 (enExample)
EP (1) EP3554808A1 (enExample)
JP (1) JP7115807B2 (enExample)
KR (1) KR102351205B1 (enExample)
CN (1) CN110087867B (enExample)
WO (1) WO2018118511A1 (enExample)

Families Citing this family (4)

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CN111999784B (zh) * 2020-09-07 2024-03-22 科竟达生物科技有限公司 聚合物用作生物芯片的基底的用途
CN114324438B (zh) * 2020-10-10 2023-07-21 北京大学 一种室温纳米谷极化荧光的等离激元激发方法
CN113237866B (zh) * 2021-05-27 2023-11-21 昆明理工大学 一种固态表面增强拉曼散射基底及其制备方法和应用
CN119020730B (zh) * 2024-08-20 2025-08-15 成都赋仁生物科技有限公司 多金属等离激元功能化的单分子阵列芯片及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140249526A1 (en) 2013-03-01 2014-09-04 The Regents Of The University Of Michigan Stretchable composite conductors for flexible electronics, stretchable plasmonic devices, optical filters, and implantable devices and methods for manufacture thereof
WO2017007750A1 (en) 2015-07-08 2017-01-12 3M Innovative Properties Company Article and method of making the same

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280625A (ja) * 1987-05-14 1988-11-17 Kanto Auto Works Ltd 合成樹脂シ−ト及びその製造方法
MY114512A (en) * 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US5821001A (en) * 1996-04-25 1998-10-13 Ppg Industries, Inc. Coated articles
US7738096B2 (en) * 2004-10-21 2010-06-15 University Of Georgia Research Foundation, Inc. Surface enhanced Raman spectroscopy (SERS) systems, substrates, fabrication thereof, and methods of use thereof
US20060148104A1 (en) * 2004-10-29 2006-07-06 Massachusetts Institute Of Technology Detection of ion channel or receptor activity
US7274458B2 (en) * 2005-03-07 2007-09-25 3M Innovative Properties Company Thermoplastic film having metallic nanoparticle coating
JP2010502466A (ja) * 2006-09-11 2010-01-28 スリーエム イノベイティブ プロパティズ カンパニー 機械的ファスナを有する研磨物品
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
WO2010132612A2 (en) * 2009-05-13 2010-11-18 The Regents Of The University Of California Metal-coated shrinkable polystyrene and methods for using same
KR101117220B1 (ko) 2010-02-11 2012-03-20 연세대학교 산학협력단 플라즈모닉 광학 장치의 병렬 프로브의 제조방법
JP5438245B2 (ja) * 2010-05-03 2014-03-12 スリーエム イノベイティブ プロパティズ カンパニー ナノ構造の作製方法
TWI423750B (zh) * 2010-09-24 2014-01-11 光宏精密股份有限公司 非導電性載體形成電路結構之製造方法
US9073179B2 (en) * 2010-11-01 2015-07-07 3M Innovative Properties Company Laser method for making shaped ceramic abrasive particles, shaped ceramic abrasive particles, and abrasive articles
US10934617B2 (en) * 2010-11-16 2021-03-02 Cuptronic Technology Ltd. Metal coating of objects using plasma polymerisation pretreatment
EP2675575B1 (en) 2011-02-16 2021-11-03 3M Innovative Properties Company Electrostatic abrasive particle coating apparatus and method
KR101448111B1 (ko) * 2013-09-17 2014-10-13 한국기계연구원 표면 증강 라만 분광용 기판 및 이의 제조방법
JP6337127B2 (ja) * 2014-08-27 2018-06-06 富士フイルム株式会社 光電場増強デバイスおよび光電場増強デバイスの製造方法
KR101621437B1 (ko) * 2014-09-03 2016-05-19 한국광기술원 다층 박막 구조와 나노 구조가 결합된 플라즈모닉 센서

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140249526A1 (en) 2013-03-01 2014-09-04 The Regents Of The University Of Michigan Stretchable composite conductors for flexible electronics, stretchable plasmonic devices, optical filters, and implantable devices and methods for manufacture thereof
WO2017007750A1 (en) 2015-07-08 2017-01-12 3M Innovative Properties Company Article and method of making the same

Also Published As

Publication number Publication date
WO2018118511A1 (en) 2018-06-28
EP3554808A1 (en) 2019-10-23
KR20190095309A (ko) 2019-08-14
JP7115807B2 (ja) 2022-08-09
CN110087867B (zh) 2021-07-09
CN110087867A (zh) 2019-08-02
US20200087775A1 (en) 2020-03-19
JP2020514108A (ja) 2020-05-21
US11479844B2 (en) 2022-10-25

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