KR102339176B1 - 열처리 오븐의 히터 전원 공급장치 - Google Patents

열처리 오븐의 히터 전원 공급장치 Download PDF

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Publication number
KR102339176B1
KR102339176B1 KR1020200069556A KR20200069556A KR102339176B1 KR 102339176 B1 KR102339176 B1 KR 102339176B1 KR 1020200069556 A KR1020200069556 A KR 1020200069556A KR 20200069556 A KR20200069556 A KR 20200069556A KR 102339176 B1 KR102339176 B1 KR 102339176B1
Authority
KR
South Korea
Prior art keywords
chamber
power supply
heat treatment
heater
treatment oven
Prior art date
Application number
KR1020200069556A
Other languages
English (en)
Korean (ko)
Inventor
김민철
사토루 나카니시
Original Assignee
한국고요써모시스템(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국고요써모시스템(주) filed Critical 한국고요써모시스템(주)
Priority to KR1020200069556A priority Critical patent/KR102339176B1/ko
Priority to JP2020118405A priority patent/JP7072021B2/ja
Priority to CN202010655358.3A priority patent/CN113774206B/zh
Priority to TW109123958A priority patent/TWI740577B/zh
Application granted granted Critical
Publication of KR102339176B1 publication Critical patent/KR102339176B1/ko

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    • H01L51/56—
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates
    • H01L51/0026—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R25/00—Coupling parts adapted for simultaneous co-operation with two or more identical counterparts, e.g. for distributing energy to two or more circuits
    • H01R25/16—Rails or bus-bars provided with a plurality of discrete connecting locations for counterparts
    • H01R25/161—Details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/02—Details
    • H02G3/08—Distribution boxes; Connection or junction boxes
    • H02G3/088—Dustproof, splashproof, drip-proof, waterproof, or flameproof casings or inlets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/02—Details
    • H02G3/08—Distribution boxes; Connection or junction boxes
    • H02G3/16—Distribution boxes; Connection or junction boxes structurally associated with support for line-connecting terminals within the box

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Architecture (AREA)
  • Thermal Sciences (AREA)
  • Furnace Details (AREA)
  • Resistance Heating (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Mathematical Physics (AREA)
KR1020200069556A 2020-06-09 2020-06-09 열처리 오븐의 히터 전원 공급장치 KR102339176B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020200069556A KR102339176B1 (ko) 2020-06-09 2020-06-09 열처리 오븐의 히터 전원 공급장치
JP2020118405A JP7072021B2 (ja) 2020-06-09 2020-07-09 熱処理オーブンのヒーター電源供給装置
CN202010655358.3A CN113774206B (zh) 2020-06-09 2020-07-09 热处理炉的加热器供电装置
TW109123958A TWI740577B (zh) 2020-06-09 2020-07-15 熱處理爐的加熱器供電裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200069556A KR102339176B1 (ko) 2020-06-09 2020-06-09 열처리 오븐의 히터 전원 공급장치

Publications (1)

Publication Number Publication Date
KR102339176B1 true KR102339176B1 (ko) 2021-12-14

Family

ID=78778059

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200069556A KR102339176B1 (ko) 2020-06-09 2020-06-09 열처리 오븐의 히터 전원 공급장치

Country Status (4)

Country Link
JP (1) JP7072021B2 (zh)
KR (1) KR102339176B1 (zh)
CN (1) CN113774206B (zh)
TW (1) TWI740577B (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100731910B1 (ko) * 2006-01-11 2007-06-25 코닉시스템 주식회사 진공챔버 내에서 사용하기 적합한 기판 스테이지
KR101833039B1 (ko) * 2016-11-29 2018-03-02 아진산업(주) 프리프레그 예열장치
KR20190042831A (ko) * 2017-10-17 2019-04-25 주식회사 이에스티 정전척 및 진공 챔버의 피드스루 기밀 구조
KR102094763B1 (ko) 2018-12-12 2020-03-31 한국고요써모시스템(주) 시즈히터를 발열체로 구비하는 열처리 오븐

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176000U (ja) * 1983-05-13 1984-11-24 日立金属株式会社 オ−ルケ−ス型真空熱処理炉用端子
JPH0238438Y2 (zh) * 1985-03-28 1990-10-17
JPS6283200U (zh) * 1985-11-14 1987-05-27
JP2000208236A (ja) * 1999-01-08 2000-07-28 Daido Steel Co Ltd 炉壁へのセラミックヒ―タ取付構造
JP3640609B2 (ja) * 2000-10-16 2005-04-20 アルプス電気株式会社 プラズマ処理装置，プラズマ処理システムおよびこれらの性能確認システム，検査方法
JP2002203662A (ja) * 2000-10-31 2002-07-19 Sumitomo Osaka Cement Co Ltd ヒータエレメント及び加熱装置並びに基板加熱装置
JP5686467B2 (ja) * 2010-10-15 2015-03-18 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
JP3179663U (ja) * 2012-08-31 2012-11-08 株式会社美鈴工業 ヒータの給電構造
WO2014149962A1 (en) * 2013-03-14 2014-09-25 Applied Materials, Inc. Apparatus for coupling a hot wire source to a process chamber
KR101462849B1 (ko) * 2013-06-26 2014-11-19 에스엔유 프리시젼 주식회사 박막급속열처리장치
JP2015081685A (ja) * 2013-10-21 2015-04-27 住友金属鉱山株式会社 溶解炉の配電構造
US11158526B2 (en) * 2014-02-07 2021-10-26 Applied Materials, Inc. Temperature controlled substrate support assembly
JP6684943B2 (ja) * 2014-07-24 2020-04-22 東京エレクトロン株式会社 基板処理装置および基板処理方法
US20170295613A1 (en) * 2016-04-07 2017-10-12 Lg Electronics Inc. Heater assembly
CN108759083A (zh) * 2018-07-18 2018-11-06 江苏隆鑫环保科技有限公司 一种空气加热器
JP7016306B2 (ja) * 2018-08-23 2022-02-04 Ｄｏｗａサーモテック株式会社 熱処理装置
CN111212489A (zh) * 2018-11-21 2020-05-29 南韩商H&世温股份有限公司 加热器组件

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100731910B1 (ko) * 2006-01-11 2007-06-25 코닉시스템 주식회사 진공챔버 내에서 사용하기 적합한 기판 스테이지
KR101833039B1 (ko) * 2016-11-29 2018-03-02 아진산업(주) 프리프레그 예열장치
KR20190042831A (ko) * 2017-10-17 2019-04-25 주식회사 이에스티 정전척 및 진공 챔버의 피드스루 기밀 구조
KR102094763B1 (ko) 2018-12-12 2020-03-31 한국고요써모시스템(주) 시즈히터를 발열체로 구비하는 열처리 오븐

Also Published As

Publication number Publication date
CN113774206B (zh) 2023-08-04
CN113774206A (zh) 2021-12-10
JP7072021B2 (ja) 2022-05-19
JP2021197352A (ja) 2021-12-27
TWI740577B (zh) 2021-09-21
TW202146827A (zh) 2021-12-16

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