KR102327772B1 - Opener of handler for testing semiconductor - Google Patents

Abstract

The present invention relates to an opener applied to a handler for testing semiconductor devices.
The opener according to the present invention, an open plate provided to be liftable; opening portions that are detachably installed on the opening plate and open respectively the inserts by manipulating the inserts of the test tray on which the semiconductor device can be loaded when the opening plate rises; and an elevator in which the open parts installed in the open plate can manipulate the inserts or release the operating state of the inserts by the open parts by elevating the open plate. includes
According to the present invention, the loss rate of raw materials can be significantly reduced, and replacement costs can be reduced.

Description

Handler for semiconductor device testing {OPENER OF HANDLER FOR TESTING SEMICONDUCTOR}

The present invention relates to an opener for opening an insert capable of loading a semiconductor device in a handler for testing a semiconductor device used when testing a semiconductor device.

A semiconductor device test handler (hereinafter abbreviated as 'handler') is an equipment that electrically connects semiconductor devices manufactured through a predetermined manufacturing process to a tester and classifies semiconductor devices according to test results.

The handler is disclosed through Korean Patent Publication No. 10-2011-0121063 (hereinafter referred to as 'prior art').

In general, a handler electrically connects a plurality of semiconductor devices to a tester in a state in which a plurality of semiconductor devices are loaded on a test tray in order to be tested together at a time.

The test tray has a plurality of inserts capable of loading semiconductor devices as in Korean Patent Laid-Open Publication No. 10-2014-0070863.

The insert has a lever device for holding the loaded semiconductor element. Therefore, when the semiconductor device is loaded into the insert or the semiconductor device is recovered from the insert, the lever device must be operated so that the semiconductor device can be loaded or retrieved. The prior art relates to an opener (referred to as an 'opener' in the prior art) for opening an insert so that a semiconductor device can be loaded or retrieved by operating a lever device.

Referring to FIG. 3 of the prior art, it can be seen that as the opening plate rises, the opening pin integrally formed on the opening plate pushes the inside of the operation lever (referred to as a holding member in the prior art) upward to open the insert. have. Of course, when the open plate descends, the inside of the operation lever is returned downward by the restoring force of the elastic spring to close the insert.

However, according to the prior art, there are the following problems.

First, if the top heights of the opening pins are different, the operation levers of some of the inserts may or may not be operated excessively when the inserts are opened. In this case, the operation lever may be damaged or a defect may occur in the opening of the insert. Therefore, such a problem is solved by cutting the raw material by a program designed so that the upper ends of the opening pins have the same height and forming the opening pins integrally with the open plate. However, since the open pin must be formed integrally with the open plate, there are many parts that need to be cut out in the process of processing.

Second, since the opening pin must be formed thin enough to be inserted into the insertion hole of the insert, it is difficult to cut raw materials to form the open pin, and careful handling is required. In particular, the smaller the semiconductor device is, the smaller the insert or the operation lever is. Since the corresponding open pin is also formed very thinly, the problem caused by the thinness of the open pin is further emphasized.

Third, even if the open pin is more rigid than the structure of the insert, the open pin is worn because the thin open pin is in strong contact with the countless manipulation levers according to the logistics flow corresponding to a large number of inserts. In particular, damage such as wear of the upper end and side of the opening pin, which has a lot of contact between the corresponding structures, or damage such as cutting or bending of the opening pin occurs. In addition, since the wear rates of the upper ends of the open pins are different, it is impossible to properly perform the role of the open pins. And this phenomenon of wear or bending of the open pin occurs not only in the case of operation in the equipment, but also in the processing or handling of the open pin.

Fourth, due to frequent replacement of the open plate, the operation rate of the handler decreases, and a huge replacement cost is required.

A first object of the present invention is to provide a technology in which the opening pin can be detachably installed on the opening plate without integrally forming the opening pin on the opening plate.

Furthermore, a second object of the present invention is to provide a technology in which the top heights of the opening pins can be installed to be the same while the opening pins are detachably installed on the opening plate.

The opening device of the handler for semiconductor device test according to the present invention for achieving the above object, the opening plate provided to be liftable; opening portions that are detachably installed on the opening plate and open respectively the inserts by manipulating the inserts of the test tray on which the semiconductor device can be loaded when the opening plate rises; and an elevator in which the open parts installed in the open plate can manipulate the inserts or release the operating state of the inserts by the open parts by elevating the open plate. includes

The opening plate is provided with two installation holes forming a pair for installing the opening parts, and the opening part includes a pair of opening pins forming a pair with each other, and the pair of opening pins are each The two described above are divided and inserted into a set of installation holes.

The opening pin may include a pin portion for operating the operation lever while the upper end of the opening plate is in contact with the operation lever of the insert when the opening plate rises; a reinforcing part to increase the rigidity of the fin part by extending the fin part to be thicker than the thickness of the fin part on the lower side of the fin part so as to shorten the length of the fin part; and a locking part extending thicker than the reinforcement part on the lower side of the reinforcement part to prevent upward separation of the opening pin when it is inserted into the installation hole. including, wherein the installation hole is formed to be divided into a first area into which the reinforcing part is inserted, and a second area which extends below the first area and into which the locking part is inserted, and the pin part is formed to be divided into the second area. The second area and the first area are sequentially passed through and exposed to the upper part of the open plate, and the locking part can be inserted into the second area but is prevented from being inserted into the first area.

Alternatively, the opening pin may include a pin portion for operating the operation lever while the upper end of the opening plate is in contact with the operation lever of the insert when the opening plate rises; and a locking part extending thicker than the pin part, and preventing the upper part of the opening pin, which would have been inserted into the installation hole, from being released by injection in a state in which the lower part of the pin part is inserted. Including, wherein the installation hole is formed to be divided into a first area through which the pin part can pass, and a second area extending from the first area to the lower side of the first area and into which the locking part is inserted, and the pin part The second area and the first area are sequentially passed through and exposed to the upper part of the open plate, and the locking part can be inserted into the second area, but is prevented from being inserted into the first area.

It further includes installation members for detachably installing the open parts to the opening plate, the opening plate has fixing grooves opened downwardly, the installation member includes: a fixing part inserted into the fixing groove; and a pressing part extending from the fixing part to press one side of the locking part upward when the fixing part is inserted into the fixing groove. includes

According to the present invention, since the opening pin is detachably installed on the opening plate, the following effects are obtained.

First, it is possible to save resources by significantly reducing the loss rate of raw materials for producing open plates.

Second, when the opening pin is damaged, only the corresponding opening pin needs to be replaced, so that the replacement cost can be greatly reduced.

Third, even if there is a defect in the processing or handling of the open pins, only the individual open pins need to be reprocessed, so the loss rate of raw materials can be further reduced.

1 is a conceptual plan view of a handler for testing a semiconductor device to which an opener can be applied according to an embodiment of the present invention.
2 is a schematic perspective view of an opener according to a first embodiment of the present invention;
FIG. 3 is a plan perspective view taken from the opener of FIG. 2 and an open area of one unit.
FIG. 4 is a bottom perspective view taken from the opening unit of FIG.
5 is a cross-sectional view taken along line AA of FIG. 3 .
6 is a cross-sectional view taken along line A'-A' of FIG. 3 .
7 is a schematic perspective view of an opener according to a second embodiment of the present invention;
FIG. 8 is a plan perspective view taken from the opening unit of FIG. 7 with an open area of one unit.
FIG. 9 is a bottom perspective view of an open part area of one unit in the opening device of FIG. 7 .
FIG. 10 is a cross-sectional view taken along line BB of FIG. 8 .

Hereinafter, preferred embodiments according to the present invention as described above will be described with reference to the accompanying drawings. For reference, for brevity of description, known or overlapping descriptions or reference numerals in drawings are omitted or compressed as much as possible.

1 is a conceptual plan configuration diagram of a handler to which an opener according to the present invention can be applied. For reference, the handler 100 of FIG. 1 has a structure in which semiconductor devices are electrically connected to the tester TESTER in a state in which the test tray TT is vertical.

The handler 100 of FIG. 1 includes a test tray TT, a first hand 110 , a first opener 120 , a first chamber 130 , a test chamber 140 , a connection device 150 , and a second It includes a chamber 160 , a second hand 170 and a second opener 180 .

In the test tray TT, a plurality of inserts on which a semiconductor device can be mounted are installed to be somewhat movable, and circulate along a closed path C determined by a plurality of transfer devices (not shown).

The first hand 110 loads the semiconductor devices to be tested loaded on the customer tray CTn on the loading plate LP into the test tray TT _{at the first position P 1 .} In this case, the first hand 110 functions as a loading device for loading semiconductor devices onto the test tray TT, and the first position P ₁ becomes a loading position.

In order to support the operation of moving _{the first hand 110 to the test tray TT in the first position P 1} after the first hand 110 withdraws the semiconductor device from the customer tray CTn, The inserts of the test tray TT in the first position P _{1 are opened.}

The first chamber 130 is provided to preheat or precool the semiconductor devices loaded on the test tray TT according to test environment conditions.

The test chamber 140 is provided to test the semiconductor devices of the test tray TT that have been preheated or precooled in the first chamber 130 and then transferred to a test position (TP).

The connection device 150 pushes the test tray TT at the test position TP in the test chamber 140 toward the tester TESTER coupled to the test chamber 140, and the semiconductor loaded on the test tray TT. The devices are electrically connected to the tester.

The second chamber 160 is provided to return the heated or cooled semiconductor devices loaded in the test tray TT transferred from the test chamber 140 to room temperature or close to room temperature.

The second hand 170 unloads to the empty customer tray CTe on the unloading plate UP while classifying the semiconductor devices loaded on the test tray TT on _{the second position P 2 by test grade.} Loading (Unloading). In this case, the second hand 180 functions as an unloading device for unloading semiconductor devices from the test tray TT, and the second position P ₂ becomes an unloading position.

_{The second opener 180 is a test tray in the second position P 1} to support the operation of the second hand 170 recovering the semiconductor device from the test tray TT and moving the customer tray CTe. Open the inserts of (TT).

In the handler 100 having the above configuration, the test tray TT passes through the first position P ₁ , the test position TP and the second position P ₂ , and again leads to the first position P ₁ . It moves circularly along the path (C).

And in the handler newly proposed by the present applicant recently, the test tray TT may cyclically move in the reverse direction of the circulation path C according to the test mode. In this case, the roles of the first hand 110 and the second hand 170 , the first chamber 130 and the second chamber 160 are switched, and the second position P ₂ becomes the loading position and the first The position P ₁ becomes the unloading position.

The present invention relates to the first opener 120 and the second opener 180 of the above configurations. Accordingly, embodiments of the opener OA that can be applied as the first opener 120 and the second opener 180 will be described in more detail.

<First embodiment>

FIG. 2 is a schematic perspective view of an opener OA according to a first embodiment of the present invention, and FIG. 3 is a plan view taken from the opener OA of FIG. It is a perspective view, and FIG. 4 is a bottom perspective view in which the area of the opening part 30 of one unit is extracted from the opening machine OA of FIG.

2 to 4 , the opener OA includes an open plate 20 , open portions 30 , and an elevator 40 .

The open plate 20 has a large area in which a plurality of open parts 30 can be installed. And the opening plate 20 is formed with installation holes 21, fixing grooves 22 and mounting grooves 23 so that a plurality of opening parts 30 can be installed. Two installation holes 21 , fixing grooves 22 , and two mounting grooves 23 each form a pair to correspond to one open portion 30 . These installation holes 21, fixing grooves 22 and mounting grooves 23 will be described later along with corresponding configurations.

Each of the opening portions 30 includes a pair of opening pins 31 forming a pair with each other, a pair of installation members 32 forming a pair with each other, and a pair of guide pins 33 forming a pair with each other. do.

The pair of opening pins 31 are divided and inserted into the installation holes 21 forming a set, and have the same shape and structure as each other.

5 is a cross-sectional view taken along line A-A of FIG. 3 , and FIG. 6 is a cross-sectional view taken along line A'-A' of FIG. 3 .

5 and 6 , the opening pin 31 includes a pin portion 31a, a reinforcing portion 31b, and a locking portion 31c.

Referring to FIGS. 3 to 6 , the pin part 31a is elongated in the front-rear direction when viewed in a plan view and has a thin thickness in the left-right direction when viewed from the front. When the opening plate 20 rises, the pin part 31a has an upper end in contact with the operation lever (not illustrated) of the insert (not illustrated) to push up the inside of the operation lever. exposed above the

The reinforcing part 31b is located below the fin part 31a, and the thickness in the left and right direction is thicker than the thickness in the left and right direction of the fin part 31b. Accordingly, the rigidity of the fin part 31a is increased by reducing the length in the vertical direction of the thin fin part 31a as much as possible, and the fin part 31a shortened due to the reduction in the processing area of the fin part 31a that is too thin and small to be finely machined. ) is relatively easy to process. That is, the pin portion 31a, the reinforcing portion 31b, and the locking portion 31c are integrally formed, and by placing the reinforcing portion 31b between the pin portion 31a and the locking portion 31c, the length of the pin portion 31a will be able to take it short. Therefore, the reinforcing part 31b maintains the function of the locking part 31c as described later and allows the pin part 31a to be exposed upward of the open plate 20, and the pin part in the entire opening pin 31 As in (31a), the length of the thin portion in the left and right direction is minimized. It is preferable that the reinforcing portion 31b is formed to a length such that the pin portion 31a has a minimum length capable of appropriately adjusting the operation lever. In addition, since the reinforcing part 31b has an elongated shape in the front-rear direction when viewed in a plan view, it also serves to prevent rotation of the opening pin 31a, and when the opening pin 31a is installed, the correct opening of the opening pin 31a guide each location.

The locking part 31c is expanded thicker than the reinforcement part 31b on the lower side of the reinforcement part 31b to prevent upward separation of the opening pin 31 when it is inserted into the installation hole 21 . The locking portion 31c has a short cylindrical shape in the vertical direction.

Next, the installation hole 21 corresponding to the structure of the opening pin 31 as above will be described.

The installation hole 21 is formed so that the opening plate 30 penetrates vertically, and is divided into a first region 21b and a second region 21c extending in the vertical direction.

The first region 21b is a region into which the reinforcement part 31b is inserted, and thus has the same shape as the reinforcement part 31b.

The second region 21c is located below the first region 21b and is expanded from the first region 21b to be a region into which the locking part 31c is inserted. The length in the vertical direction of the second region 21c is longer than the length in the vertical direction of the locking part 31c. Therefore, when the opening pin 31 is installed in a state where it is completely inserted into the installation hole 21, the lower surface of the locking part 31c does not protrude downward of the opening plate 20 as in the right part of FIG. It is made to enter the 2nd area|region 21c straight.

Looking at the above structure, the fin part 31a sequentially passes through the second region 21c and the first region 21b from the bottom to the top, and then is exposed to the upper part of the open plate 20, and the reinforcement part 31b ) is inserted into the first region 21b having the same shape as the reinforcing portion 31b, and the engaging portion 31c is inserted into the second region 21c in a state in which insertion into the first region 21b is prevented. do.

On the other hand, the pair of installation members 32 is coupled to the open plate 20 through the fixing groove 22 and presses one side of the engaging portion 31c upward, so that the opening pin 31 is connected to the open plate 20 . to be able to be fixedly installed on the The pair of installation members 32 have the same shape and structure as each other, and include a fixing part 32a and a pressing part 32b, respectively.

The fixing part (32a) is inserted while screwing to the female thread formed on the inner wall forming the fixing groove (22) by having a male thread.

The pressing part 32b is located on the lower side of the fixing part 32a, and is expanded than the fixing part 32a so that when the fixing part 32a is inserted into the fixing groove 22, one side of the locking part 31c is closed. press upwards.

Of course, a method of directly fixing the opening pin to the opening plate by forming a thread on the engaging portion of the opening pin may be considered. However, in such a direct fixing method, the height of the upper end of the individual pin parts may vary depending on how much the opening pin is rotated and fixed according to the operator. In addition, there is a risk of a drop in straightness during the machining process of making a thread, and there is a concern about damage and manufacturing tolerances during fastening.

On the other hand, when the opening pin 31 is fixed with the installation member 32 according to the first embodiment, the upper ends of the pin parts 31a may have the same height. Because, the second regions 21c of the installation holes 21 can all be processed to have the same depth by a predetermined processing program, and when the opening pin 31 is fixed with the installation member 32 , the installation member 32 . When the upper surface of the locking part 31c of the opening pin 31 is completely rotated until it can no longer rise, the upper surface of the locking part 31c is completely in close contact with the chin between the first area 21b and the second area 21c. Due to this, the upper ends of all the pin parts 31a can be uniformly and uniformly have the same height.

The fixing groove 22 corresponding to the above installation member 32 is formed to open downward, and a fixing region 22a into which the fixing part 32a is inserted and a pressing region 22b into which the pressing part 32b is inserted. is divided into

A female thread is formed on the inner wall constituting the fixing region 22a, so that the fixing portion 32a of the installation member 32 is screwed.

The pressing region 22b is provided below the fixing region 22a and is formed to prevent the pressing portion 32b from protruding from the lower end of the open plate 20 . Accordingly, if a separate coupling plate (not shown) exists between the open plate 20 and the elevator 40 , the horizontality between the open plate 20 and the coupling plate is not disturbed by the installation member 32 . won't

The guide pins 33 are provided to induce registration between the insert and the open part 30 , and are mounted on the open plate 20 through the mounting grooves 23 opened upward.

And, the elevator 40 raises and lowers the open plate 20 so that the open parts 30 installed on the open plate 20 manipulate the inserts or the operating state of the inserts by the open parts 30 can be released.

<Second embodiment>

7 is a schematic perspective view of an opener OA according to a second embodiment of the present invention, and FIG. 8 is a plan view taken from the opener OA of FIG. It is a perspective view, and FIG. 9 is a bottom perspective view in which the open part area of one unit is extracted from the opening machine of FIG.

7 to 9 , the opener OA includes an open plate 20 ′, open portions 30 ′ and an elevator 40 .

The open plate 20' is formed with installation holes 21', fixing grooves 22' and mounting grooves 23'.

Each of the opening portions 30' includes a pair of opening pins 31' forming a pair with each other, a pair of installation members 32' forming a pair with each other, and a pair of guide pins 33 forming a pair with each other. ') is included.

Since the fixing grooves 22', the mounting grooves 23', the pair of installation members 32' and the pair of guide pins 33' are the same as in the first embodiment, their description will be omitted. do.

A pair of opening pins 31' are divided and inserted into a pair of installation holes 21', and have the same shape and structure.

10 is a cross-sectional view taken along line B-B of FIG. 8 .

Referring to FIG. 10 , the opening pin 31' includes a pin part 31'a and a locking part 31'c.

The pin part 31'a is elongated in the vertical direction and includes two pin rods PB arranged side by side in the front-rear direction.

The locking part 31'c prevents upward separation of the opening pin 31' when it is inserted into the installation hole 21. This engaging portion 31'c has a hexahedral shape. Of course, the shape of the locking portion 31'c may be considered in various ways, but while preventing the rotation of the opening pin 31'a, the correct angular position can be guided when the opening pin 31'a is installed. It is preferable to be provided so as to have a polygonal shape in a plan view.

On the other hand, the two pin rods PB constituting the pin part 31'a are provided in a form in which the lower portion thereof is inserted to a certain depth into the locking portion 31'c, and for this purpose, the lower portion of the pin portion 31'a is provided. It is preferable that the locking part 31'c be insert-injected while being inserted into the locking part 31'c to a certain depth. Therefore, the pin part 31'a is made of a metal material, but the locking part 31'c is made of a synthetic resin material. And the upper portion of the pin portion 31'a is exposed above the open plate 20'. Of course, one or three or more pin rods PB may be provided.

The installation hole 21' is formed to be divided into a first area 21'b and a second area 21'c.

The first region 21'b has a space through which the pin part 31'a can pass, but the locking part 31'c cannot pass through. Specifically, the first region 21'b has two rod holes BH through which the pin rod PB is inserted. For reference, since the pin rod PB inserted into the rod hole BH is supported by the inner wall surfaces constituting the rod hole BH, rigidity is reinforced.

The second region 21'c has a space in which the locking part 31'c can be inserted by extending below the first region 21'b than the first region 21'b.

Accordingly, the upper portion of the pin portion 31'a sequentially passes through the second area 21'c and the first area 21'b and is exposed to the upper portion of the open plate 20', but the locking portion 31 Since the 'c) does not pass through the first region 21'b and is prevented from passing through, the state inserted into the first region 21'b is maintained.

The installation member 32' is coupled to the open plate 20' through the fixing groove 22' and presses one side of the locking part 31'c upward, so that the opening pin 31' is connected to the open plate 20. ') so that it can be fixedly installed. The pair of installation members 32' have the same shape and structure as each other, and include a fixing part 32'a and a pressing part 32'b, respectively.

The fixing part 32'a is inserted while screwing with the female thread formed on the inner wall forming the fixing groove 22' by having a male thread.

The pressing part 32'b is located on the lower side of the fixing part 32a, and is expanded than the fixing part 32'a so that the locking part when the fixing part 32'a is inserted into the fixing groove 22'. Press one side of (31'c) upward.

The fixing groove 22' corresponds to the above installation member 32' as in the first embodiment.

The guide pins 33' are provided to induce registration between the insert and the open part 30', and are mounted on the open plate 20' through mounting grooves opened upward as in the first embodiment.

In addition, the elevator 40 raises and lowers the open plate 20 ′ so that the open parts 30 ′ installed on the open plate 20 ′ manipulate the inserts or the operating state of the inserts by the open parts 30 ′ is released. make it possible

In the openers OA having the above configuration, only the opening pins 31 and 31' to which the corresponding pin parts 31a and 31'a belong are replaced even if the pin parts 31a and 31'a are damaged by wear, bending or cutting. By doing so, it can be easily restored to its original state.

And when only the installation members 32 and 32' are tightened as much as possible during production or replacement, the height of the upper end of the pin parts 31a and 31'a is accurately set.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings, but since the above-described embodiments have only been described with preferred examples of the present invention, the present invention is not limited to the above embodiments It should not be construed as being limited only to the above, and the scope of the present invention should be understood as the following claims and their equivalent concepts.

OA: opener
20, 20' : open plate
21, 21'' : Installation hole
21b, 21'b: first region 21c, 21'c: second region
22, 22' : fixed groove
30, 30': open part
31, 31' : open pin
31a, 31'a: pin part 31b: reinforcement part
31c, 31'c : Locking part
32, 32' : installation member
40: elevator

Claims (5)

an open plate provided to be liftable;
opening portions that are detachably installed on the opening plate and open respectively the inserts by manipulating the inserts of the test tray on which the semiconductor device can be loaded when the opening plate rises; and
an elevator in which the open parts installed on the open plate can manipulate the inserts or release the operating state of the inserts by the open parts by elevating the open plate; includes,
The opening plate is formed with two installation holes forming a pair in order to install the opening parts,
The opening portions form a pair with each other and include a pair of opening pins that can be opened by manipulating the insert,
Each of the pair of opening pins is characterized in that the two are divided and inserted into the installation holes forming a set.
A handler for semiconductor device testing. delete According to claim 1,
The opening pin is
a pin portion for manipulating the manipulation lever while the upper end contacts the manipulation lever of the insert when the open plate rises;
a reinforcing part to increase the rigidity of the fin part by extending the fin part to be thicker than the thickness of the fin part on the lower side of the fin part so as to shorten the length of the fin part; and
a locking part extending thicker than the reinforcement part on the lower side of the reinforcement part to prevent upward separation of the opening pin when it is inserted into the installation hole; including,
The installation hole is formed to be divided into a first area into which the reinforcing part is inserted and a second area where the locking part is inserted by extending from the first area below the first area,
The pin part passes through the second region and the first region sequentially and is exposed to the upper part of the open plate, and the locking part can be inserted into the second region but is prevented from being inserted into the first region. doing
A handler for semiconductor device testing. According to claim 1,
The opening pin is
a pin portion for manipulating the manipulation lever while the upper end contacts the manipulation lever of the insert when the open plate rises; and
a locking part that extends thicker than the pin part and prevents upward departure of the open pin which would have been inserted into the installation hole by being injected in a state in which the lower part of the pin part is inserted; including,
The installation hole is formed to be divided into a first area through which the pin part can pass, and a second area extending from the first area below the first area and into which the locking part is inserted,
The pin part passes through the second region and the first region sequentially and is exposed to the upper part of the open plate, and the locking part can be inserted into the second region but is prevented from being inserted into the first region. doing
A handler for semiconductor device testing. 5. The method of claim 3 or 4,
It further has installation members for detachably installing the open parts to the open plate,
Fixing grooves opened downward are formed in the open plate,
The installation member is
a fixing part inserted into the fixing groove; and
a pressing part extending from the fixing part to press one side of the locking part upward when the fixing part is inserted into the fixing groove; characterized by comprising
A handler for semiconductor device testing.

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