KR20080002841U - Pusher block for match plate of test handler - Google Patents

Abstract

The present invention relates to a pusher block for a match plate of a test handler. According to the present invention, a pusher for closely contacting a semiconductor device to a test socket of a tester, and a body to which the pusher is mounted, the pusher is a semiconductor device. A semiconductor device having any physical standard to be newly tested by having a fixed structure for being fixed to the body at the rear end of the front end to which the front end in contact with the front end and the rear end attached to the body belongs. In this case, a technology that can flexibly respond to replacement of the pusher and increase the utilization rate of resources is disclosed.

Test handler, match plate, pusher

Description

PUSHER BLOCK FOR MATCH PLATE OF TEST HANDLER}

1 is a perspective view of a test tray and a matchplate according to the prior art.

2 is a schematic diagram of a tester.

3 is an exploded perspective view of the pusher block according to the first embodiment of the present invention.

4 is a cross-sectional view taken along line II of FIG. 3.

5 is an exploded perspective view of the pusher block according to the second embodiment of the present invention.

FIG. 6 is a cross-sectional view taken along line J ₁ -J ₁ of FIG. 5.

FIG. 7 is a cross-sectional view taken along line J ₂ -J ₂ of FIG. 5.

8 is an exploded perspective view of the pusher block according to the third embodiment of the present invention.

9 is a cross-sectional view taken along the line K-K in FIG.

FIG. 10 is a reference view for explaining a pusher block of FIG. 8.

11 is an exploded perspective view of the pusher block according to the fourth embodiment of the present invention.

12 is a cross-sectional view taken along line L-L of FIG.

FIG. 13 is a reference diagram for explaining a pusher block of FIG. 11.

* Description of the symbols for the main parts of the drawings *

300, 500, 800, 1100: Pusher block

310, 510, 810, 1110: body

311: female thread groove

311a: stopper

511, 811: Pusher Insertion Groove

811a: guide groove 811b: locking jaw

512: female thread hole

1111: Pusher mounting groove

1112: spring seating groove 1113: cover insertion groove

320, 520, 820, 1120: pusher

321, 521, 821, 1121: shear

322, 522, 822, 1122: rear end

322a: jamming jaw

522a: Ball Insertion Groove

822a: jamming

1122a: Spring latching groove

530: Ball Plunger

830: coil spring

1130: sun spring

1140: cover

The present invention relates to a pusher block for a match plate of a test handler.

The test handler refers to a device for classifying the tested semiconductor devices according to their specifications after supplying the semiconductor devices to the tester before the shipment of the produced semiconductor devices.

Such a test handler has already been disclosed through a number of public documents such as Korean Patent Laid-Open Publication No. 2003-0029266 (designated test handler).

In general, the test handler loads the semiconductor devices loaded in the customer tray into the test tray, supplies the semiconductor devices loaded in the test tray to the tester, and unloads the tested semiconductor devices from the test tray to the customer tray. have.

As described above, the test handler needs a match plate for docking the test tray to the high fix board of the tester to supply the semiconductor devices loaded in the test tray to the tester.

FIG. 1 schematically shows two test trays 11 arranged in two stages up and down and two match plates 12 corresponding thereto, and FIG. 2 shows a test head having two high fix boards 21. 20 is schematically shown. The match plate 12 is moved to the test tray 11 as the press unit 13 is advanced toward the test tray 11 by the operation of the power source 14 (represented by a cylinder in the drawing) while being fitted to the press unit 13. Docked with (11). As the match plate 12 continues to move forward by the continuous operation of the power source 14, the test tray 11 also moves forward to the test head 20, and ultimately, the test tray 11 is connected to the high fix board 21. It will dock. When the test tray 11 is docked to the high fix board 21, the operation of the power source 14 is stopped. At this time, the pusher 12a, which is provided in the form of a matrix on the match plate 12, is a test tray ( While supporting the semiconductor device loaded on the insert 11a of 11), while maintaining the pushed state toward the test socket 21a side of the high-fix board 21, the semiconductor device is maintained in a state properly matched to the test socket 21. do.

As shown in the enlarged portion of FIG. 1, the pusher 12a is coupled to the main body 12c of the match plate 12 in a state of being fixedly mounted to the body 12b by the male screw bolt 12d. . When the pusher 12a is described in more detail with respect to the fixing structure fixed to the body 12b, the pusher 12a is formed with a female screw groove 12a-1 penetrating from the front end face to the rear end face, and the body 12b. The female screw groove (not shown) is formed in the position corresponding to the female screw groove 12a-1 of the Edo pusher, and the pusher 12a is fixed to the body 12b by the male screw bolt 12d (hereinafter). The combination of the pusher and the body is called the pusher block).

On the other hand, in order to test a semiconductor device having a different size (thickness or planar) from the semiconductor device under test, the insert 11a and the high-fix board of the test tray 11 are generally in order to correspond to the physical specifications of the new semiconductor device. 21, the test socket 21a must be replaced, and the pusher 12a of the matchplate 12 must be replaced (typically without replacing the insert, test socket, or pusher, and corresponding test tray, high fix board, Replace the matchplate). In particular, when the planar area of the new semiconductor device is narrowed, the area of the front end face of the pusher in contact with the semiconductor device must be narrowed. In this case, the conventional thread structure 12a-1 is provided by the conventional fixing structure shown in FIG. The pusher block replacement (usually replacement of the matchplate) was essential because the existing body 12b could not be utilized. In addition, a pusher block in which a pusher and a body are integrally used according to the type of semiconductor device is used. In this case, when the physical specifications of the semiconductor device to be tested are changed, the pusher block replacement (usually a match plate) is also essential.

Also, as shown in the enlarged portion of FIG. 1, the pusher 12a is detached from the body 12b because the pusher 12a is fixed to the body 12b by screwing at two points. It is possible, but in this case, screw detachment work must be performed at two points, which results in a waste of time and manpower involved in the replacement of the pusher 12a and a decrease in the operation rate of the test handler. In order to prevent this deterioration, the matchplates are usually replaced without replacing only the pushers or only the pusher blocks. In this case, a large sum of additional costs is inevitable, resulting in a waste of resources.

A first object of the present invention for solving the above problems is to provide a pusher block that can be applied to a semiconductor device to be newly tested only by replacement of the pusher, even if the size of the semiconductor device to be tested, in particular, the reduction in planar area.

And a second object of the present invention is to provide a pusher block capable of easily detaching the pusher to the body in a one-touch manner by fixing the pusher to the body by the elastic force.

Match plate pusher block of the test handler according to the present invention for achieving the above object, the pusher for closely contacting the semiconductor device to the test socket of the tester; And a body to which the pusher is mounted; It includes, The pusher has a pusher fixing structure to be fixed to the body at the rear end of the front end and the rear end is attached to the body that is in contact with the semiconductor element, the body, the pusher It is characterized by having a body fixing structure corresponding to the fixing structure.

The body fixing structure is a female screw groove formed in the body, the pusher fixing structure is characterized in that the male thread formed on the rear end of the pusher can correspond to the female screw groove. Wherein at least one stopper for determining the end position of the screw rotation of the pusher and at least one locking jaw caught by the at least one stopper are selectively provided in the body fixing structure or the pusher fixing structure, respectively It features.

And a ball plunger installed to protrude a ball into one side inner wall surface of the pusher insertion groove formed in the body, wherein the body fixing structure includes the pusher insertion groove and the pusher insertion groove into which the rear end of the pusher is inserted. And a ball plunger storage mounting hole provided to mount the ball plunger so that the ball of the ball plunger protrudes to one side inner wall surface, and the pusher fixing structure is provided when the rear end of the pusher is inserted into the pusher insertion groove. It is another feature that the ball insertion groove into which the ball of the ball plunger mounted to the body through the ball plunger storage fitting hole can be inserted.

The body fixing structure includes at least one locking jaw formed into an inner side of the pusher insertion groove and the pusher insertion groove into which the rear end of the pusher is inserted, and the pusher fixing structure includes the rear end of the pusher in the pusher insertion groove. When inserted and rotated, it is another feature that the at least one locking projection is caught by the at least one locking jaw. The body fixing structure is further characterized by further having at least one guide groove for guiding the at least one locking projection when the rear end of the pusher is inserted into the pusher insertion groove. It is further characterized in that it further comprises a spring provided inside the pusher insertion groove to elastically support the rear end of the pusher inserted into the pusher insertion groove.

And a line spring installed in the pusher insertion groove formed in the body, wherein the body fixing structure is the pusher insertion groove into which the rear end of the pusher and the line spring can be inserted, and the pusher fixed. The structure is further characterized in that the rear end of the pusher is a locking groove to which the line spring is caught when the pusher insertion groove is inserted.

In addition, the pusher block for the match plate of the test handler according to the present invention for achieving the above object, the pusher for closely contacting the semiconductor device to the test socket of the tester; A body on which the pusher is mounted; And an elastic pressing member for elastically pressing the pusher mounted to the body to fix the pusher to the body. Characterized in that it comprises a.

The elastic pressing member is a ball plunger is installed so that the ball protrudes into one side inner wall surface of the pusher insertion groove formed in the body, the pusher, the ball of the ball plunger is inserted into the portion to be inserted into the pusher insertion groove. Another feature is that the ball insertion groove is formed.

The elastic pressing member is a spring provided in the pusher insertion groove formed in the body to elastically support the rear end of the pusher, the body, at least one locking jaw toward the inner side of the pusher insertion groove Is formed, the pusher is characterized in that at least one engaging projection is formed by the at least one engaging jaw is rotated after being inserted into the pusher insertion groove.

The elastic pressing member is a line spring provided in the pusher insertion groove formed in the body, the pusher is characterized in that the locking groove is formed to be caught by the line spring when inserted into the pusher insertion groove.

In addition, the pusher block for the match plate of the test handler according to the present invention for achieving the above object, the pusher for closely contacting the semiconductor device to the test socket of the tester; A body on which the pusher is mounted; And an elastic pressing member installed on the pusher to elastically press a portion of the body to fix the pusher to the body. Characterized in that it comprises a.

In addition, the present invention for achieving the above object, includes a test plate for the test handler that is provided with a plurality of pusher block for the test plate of the test handler in the matrix state.

Hereinafter, with reference to Figure 3 below with respect to preferred embodiments of the pusher block for the match plate of the test handler according to the present invention (hereinafter abbreviated as 'pusher block'), but for the sake of brevity of description Overlapping descriptions will be omitted or compressed if possible.

First Embodiment

3 is an exploded perspective view of the pusher block 300 according to the first embodiment of the present invention, Figure 4 is a partial cross-sectional view of the pusher block 300 of Figure 3 cut in the I-I direction viewed from the A direction. As shown in FIGS. 3 and 4, the pusher block 300 according to the present embodiment includes a body 310 and a pusher 320.

The body 310 has a female threaded groove 311 for screwing the pusher 320 therein, and an upper side of the female threaded groove 311 is extended, and the extended portion has an inner side of the female threaded groove 311. A protruding stopper 311a is formed. Here, the female thread groove 311 and the stopper 311a are fixed structures provided on the body 310 side to correspond to the fixed structure of the pusher 320.

The pusher 320 has a front end surface (upper surface, which is used in the following meaning) in contact with a semiconductor device. The front end portion 321 and the female thread groove 311 of the body 310 having a rectangular column shape including the front end surface are included. ) Can be divided into a rear end portion 322 of a cylindrical shape. And the rear end portion 322 of the pusher 320 is formed with a male thread on its outer surface to be screwed into the female thread groove 311 of the body 310, the rear end portion 322 to the upper side of the male thread. The locking jaw 322a protruding outward is formed so that when the screw is rotated by a predetermined amount, it is caught by the stopper 311a of the body 310. Here, the locking jaw 322a and the stopper 311a are used to determine the degree of rotation of the pusher 320, that is, the end position of the rotation of the pusher 320, and the locking jaw 322a is formed on the body 310 and the stopper is formed. The configuration in which the 311a is formed in the pusher 320 is also possible, and any configuration may be substituted as long as it is a configuration for determining the rotation end position of the pusher 320.

In the pusher block 300 according to this embodiment, when the pusher 320 is replaced, the operator simply detaches the pusher 320 from the body 310 by rotating the pusher 320 relative to the body 310. You can do it. Of course, the locking jaw 322a and the stopper 311a rotate the pusher 320 by a predetermined degree so that the end of rotation of the pusher 320 is aligned so that the rectangular front face of the pusher 320 coincides with the rectangular plane of the semiconductor device. The location will be determined.

In the present embodiment, the female thread groove 311 and the stopper 311a are formed in the body 310 and the male thread and the locking jaw 322a are formed in the pusher 320. In contrast, the male thread and the locking jaw are formed in the body. It is also possible to provide projections and form female thread grooves and stoppers in the pushers.

In the above embodiment, since the male thread provided as a fixed structure on the pusher 320 is provided at the rear end portion 322 of the pusher 320 in order to detach the pusher 320 to the body 310, Any physical specification of the front end portion 321 including the front end face of the pusher 320 in contact with the fixed structure has nothing to do with it. Thus, if only the rear end 322 of the pusher 320 has a standardized specification, any pusher 320 may be a body 310 regardless of the physical specification of the front end 321 including the front end surface of the pusher 320. It can be properly fixed to.

Second Embodiment

Figure 5 is an exploded perspective view of the pusher block according to a second embodiment of the subject innovation, Figure 6 is a part sectional view taken along the combined pusher block 500 of FIG. 5 in a direction B ₁ cut from J ₁ -J ₁ direction.

Referring to FIG. 5, the pusher block 500 according to the present embodiment includes a body 510, a pusher 520, and a ball plunger 530 provided as an elastic pressure member.

In the body 510, a female screw hole 512 is formed at one side of the square column pusher insertion groove 511 and the pusher insertion groove 511. Here, the female screw hole 512 is provided as a ball plug storage fitting hole for mounting the ball plunger 530 to the body 510. Here, the pusher insertion groove 511 and the female screw hole 512 are fixed structures provided on the body 510 side to correspond to the fixed structure of the pusher 520.

The pusher 520 may be divided into a front end portion 521 and a pusher insertion groove 511 having a rectangular column shape to which a front end surface belongs, and divided into a rear end 522 having a ball insertion groove 522a formed at one side thereof.

The ball plunger 530 has a male thread formed on the outer surface of the body 532 in which a spring (not shown) is mounted therein so as to be screwed into the female threaded hole 512, and a spring (not shown) at the end thereof. An elastically supported ball 531 is provided. In the state where the ball plunger 530 is inserted into the female screw hole 512 by screwing, the end of the ball 531 protrudes into the pusher insertion groove 511. FIG. 7 is a cross-sectional view of the pusher block 500 of FIG. 5 viewed from the direction J ₂ -J ₂ and viewed from the direction B _{2. The} end of the ball 531 of the ball plunger 530 protrudes into the pusher insertion groove 511. It is well expressed that it is inserted into the ball insertion groove 522a of the pusher 520. And as is well known, the ball 531 of the ball plunger 530 is elastically supported by a spring (not shown), it is possible to move back and forth in the longitudinal direction (J ₂ -J ₂ direction on the drawing) of the ball plunger 530. .

According to the pusher block 500 as described above, the operator applies force to the ball 531 that is elastically supported to overcome the elastic force to force the pusher 520 into the pusher insertion groove 511 or to remove the force. As a result, the pusher 520 can be easily detached from the body 510. When the pusher 520 is mounted to the body 510, the ball 531 of the ball plunger 530 is referred to as shown in FIG. Since the end is inserted into the ball insertion groove 522a of the pusher 520, the pusher 520 may be fixed to the body 510 unless a special external force is applied. That is, the operator can easily detach the pusher 520 to the body 510 in a one-touch manner.

The present embodiment relates to an example in which the pusher 520 is fixed to the body 510 using an elastic pressure member, and the ball plunger 530 is used as the elastic pressure member.

In the present embodiment, the pusher insertion groove 511 and the female screw hole 512 are formed in the body 510, the ball insertion groove 522a is formed in the pusher 320, and the ball plunger 530 is fixed to the body. It is also possible to provide a body projection having a ball insertion groove formed in the body, to form a body projection insertion groove and a female screw hole in the pusher, and to fix the ball plunger to the pusher.

Even in this embodiment, the pusher 520 in which the ball inserting groove 522a provided as the fixed structure in the pusher 520 is inserted into the pusher inserting groove 511 in detaching the pusher 520 to the body 510. Since it is provided at the rear end portion 522, any physical specification of the front end portion 521 including the front end surface of the pusher 520 in contact with the semiconductor element has no relation to the fixed structure. Thus, if only the rear end 522 of the pusher 520 has a standardized specification, any pusher 520 may be a body 510 regardless of the physical specification of the front end 521 including the front end surface of the pusher 520. It can be properly fixed to.

Third Embodiment

FIG. 8 is an exploded perspective view of the pusher block 800 according to the third embodiment of the present invention, and FIG. 9 is a cross-sectional view of the pusher block 800 of FIG. 8 taken from the K-K direction and viewed from the C direction.

8 and 9, the pusher block 800 according to the present embodiment includes a body 810, a pusher 820, and a coil spring 830 provided as an elastic pressure member.

A cylindrical pusher insertion groove 811 is formed in the body 810, and a guide groove 811a is formed in an up and down direction on one side inner wall of the pusher insertion groove 811, as shown in FIG. 9. Likewise, the lower end thereof extends in the circumferential direction of the cylindrical pusher insertion groove 811, and the end of the extended portion extends upward to form the locking step 811b. Here, the pusher insertion groove 811, the guide groove 811a, and the locking jaw 811b are fixed structures provided on the body 810 side to correspond to the fixed structure of the pusher 820.

The pusher 820 may be divided into a square-shaped front end portion 821 and a cylindrical rear end portion 822 inserted into the pusher insertion groove 811, and the rear end portion 822 is guided outward. A locking protrusion 822a having a protrusion degree corresponding to the depth of the groove 811a is formed.

In addition, the coil spring 830 is mounted on the bottom of the pusher insertion groove 811 to elastically support the rear end surface of the pusher 820 as shown in FIG. 9. For reference, the force for properly maintaining the state in which the pusher 820 matches the semiconductor device to the test socket, that is, the force that the pusher 820 pushes the semiconductor device to the test socket does not exceed 2 Kg. ) Is sufficient to have only a modulus of elasticity enough to support the pusher 820 not to be retracted toward the coil spring 830 even in the force of 2Kg.

In such an embodiment, in order for the worker to mount the pusher 820 to the body 810, the operator of the pusher 820 overcomes the elastic force of the coil spring 830 while the locking protrusion 822a is aligned with the guide groove 811a. After the rear end 822 is inserted into the pusher insertion groove 811 and the locking projection 822a is caught by the lower end of the guide groove 811a, as shown in the plan view of FIG. The pusher 820 is rotated in the direction of the locking step 811b (see arrow direction in FIG. 10) in the rotational zero state as shown in (a) of FIG. 10 so as to be in the rotational state as shown in FIG. An elastic force of the coil spring 830 acts to push the pusher 820 upward so that the locking protrusion 822a of the pusher 820 is caught by the locking jaw 811b. In this case, the coil spring 830 continually supports the rear end surface of the pusher 820 to prevent arbitrary rotation or departure of the pusher 820. In addition, if the worker wants to remove the pusher 820 from the body 810, it is possible to easily remove the pusher 820 from the body 810 by operating in the reverse operation described above.

The present embodiment relates to an example in which the pusher 820 is fixed to the body 810 using an elastic pressure member, and a coil spring 830 is used as the elastic pressure member.

In the present embodiment, the pusher insertion groove 811, the guide groove 811a, and the locking jaw 811b are formed in the body 810, and the locking protrusion 822a is formed in the pusher 820, and the coil spring 830 is the body. On the contrary, it is also possible to provide a body protrusion with a locking protrusion on the body, to form a body protrusion insertion groove, a guide groove and a locking jaw in the pusher, and to mount the coil spring on the pusher.

Even in this embodiment, in order to detach the pusher 820 to the body 810, a locking projection 822a provided as a fixed structure to the pusher 820 is provided at the rear end 822 of the pusher 820. Therefore, any physical specification of the front end portion 821 including the front end surface of the pusher 820 in contact with the semiconductor device has no relation to the fixed structure. Thus, if only the rear end 822 of the pusher 820 has a standardized specification, any pusher 820 may be a body 810 regardless of the physical specification of the front end 821 including the front face of the pusher 820. It can be properly fixed to.

Fourth Embodiment

FIG. 11 is an exploded perspective view of the pusher block 1100 according to the fourth embodiment of the present invention, and FIG. 12 is a cross-sectional view of the pusher block 1100 of FIG. 11 taken from the L-L direction and viewed from the D direction.

11 and 12, the pusher block 1100 according to the present embodiment includes a body 1110, a pusher 1120, a line spring 1130 provided as an elastic pressure member, and a cover 1140. And the like.

The body 1110 has a pusher insertion groove formed therein, and the pusher insertion groove is formed to be pushed into the pusher mounting groove 1111 and the pusher mounting groove 1111 to extend further than the pusher mounting groove 1111. 1112 and the upper side of the spring seating groove 1112 are divided stepwise into a cover insertion groove 1113 which is further extended than the spring seating groove 1112. Here, the pusher insertion groove including the pusher mounting groove 1111, the spring seating groove 1112, and the cover insertion groove 1113 is a fixed structure provided on the side of the body 1110 so as to correspond to the fixing structure of the pusher 1120. .

The pusher 1120 may be divided into a square pillar-shaped front end portion 1121 to which a front end surface in contact with the semiconductor element belongs, and a rear end portion 1122 of a square column shape inserted into the body 1110 side, and a rear end portion 1122. The spring engaging groove 1122a is formed in the circumferential direction thereof, and the rear edge is tapered as referred to in the portion M of FIG.

The line spring 1130 is generally provided in a U shape and is seated in the spring seating groove 1112. As shown in FIG. 11, the open portion and the opposite portion thereof are in the longitudinal direction of the body 1110 (LL in FIG. 11). Direction). And both ends of the sun spring (1130) is to maintain a predetermined distance (d) with the inner wall surface of the spring seating groove 1112, for this purpose, the spring seating groove 1112 is a portion corresponding to both ends of the sun spring (1130) It is slightly extended to maintain a predetermined distance d from both ends of the sun spring 1130, which is why the sun spring 1130 when the pusher 1120 is mounted in the pusher mounting groove 1111 as described below. This is to enable both ends of the elastic deformation. For reference, the distance e between both ends of the sun spring 1130 should be narrower than the thickness width of the pusher 1120, but should be appropriately inserted into the locking groove 1122a.

The cover 1140 is inserted into the cover insertion groove 1113 and fixed with a screw or the like, and a rectangular pusher through hole 1141 is formed at a position and a size corresponding to the pusher mounting groove 1111.

The pusher block 1100 having the above structure is assembled with the sun spring 1130 and the cover 1140 installed in the body 1110, and the pusher 1120 is detachable to the body 1110 in such a state. Is fixed.

That is, when the operator mounts the pusher 1120 to the body 1110 in the pusher block 1100 according to the present embodiment, the rear end portion 1122 of the pusher 1120 is pushed through the hole 1141 of the cover 1140. And the pusher 1120 in the state (a) of FIG. 13 as shown in the cross-sectional view of FIG. 13 conceptually shown in the state in which the pusher mounting groove 1111 of the body 1110 is positioned. When pushed with a force (F) of strength that can overcome the elastic force of the, both ends of the line spring (1130) is elastically deformed while spreading out on the tapered surface pusher (1120) pusher mounting groove (1111) In the state in which the pusher 1120 is fully inserted into the pusher mounting groove 1111 and is seated, both ends of the sun spring 1130 are elastically restored as shown in (b) of FIG. 13 to push the pusher 1120. The pusher 1120 is stably mounted to the body 1110 unless a special external force is applied by being inserted into the spring catching groove 1122a of the Will remain intact.

The present embodiment relates to an example in which the pusher 1120 is fixed to the body 1110 using an elastic pressure member, and the line spring 1130 is used as the elastic pressure member.

In the present embodiment, a pusher insertion groove including a pusher mounting groove 1111, a spring seating groove 1112, and a cover insertion groove 1113 is formed in the body 1110, and a spring locking groove 1122a is formed in the pusher 820. And the line spring (1130) and the cover (1140) is installed on the body, on the contrary, the body projection insertion groove consisting of a body projection mounting groove, a spring seating groove and a cover insertion groove in the pusher to provide a body projection formed with a spring locking groove It is also possible to form a wire spring and install the spring and cover on the pusher.

Even in this embodiment, in order to detach the pusher 1120 to the body 1110, a spring engaging groove 1122a provided as a fixing structure in the pusher 1120 is provided at the rear end 1122 of the pusher 1120. Therefore, any physical specification of the front end portion 1121 including the front end surface of the pusher 1120 in contact with the semiconductor device has no relation to the fixed structure. Thus, if only the rear end 1122 of the pusher 1120 has a standardized specification, any pusher 1120 may be the body 1110 irrespective of the physical specification of the front end 1121 including the front face of the pusher 1120. It can be properly fixed to.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings, but since the described embodiments have only been described as a preferred example of the present invention, the present invention has been described only in the above embodiments. It should not be understood to be limited, and the scope of the present invention should be understood as the following claims and equivalent concepts.

As described in detail above, the present invention has the following effects.

First, since the physical structure and the fixed structure of the front end of the pusher are irrelevant because there is a fixed structure for coupling and fixing to the body only at the rear end of the pusher, if only the rear end with the fixed structure is standardized, the pusher has any physical specifications. It can be mounted on. Accordingly, even when the physical device is converted to any physical standard, only the pusher needs to be replaced without replacing the body, thereby increasing resource utilization.

Second, since the pusher is fixed by the elastic force, the operator can detach the pusher to the body in one-touch way without using any tools by simply applying the strength of the force to overcome the elastic force. This reduces the waste of manpower and time and increases the utilization of the test handler.

Claims (14)

A pusher for bringing the semiconductor device into close contact with the test socket of the tester; And A body on which the pusher is mounted; Including; The pusher is, Has a pusher fixing structure to be fixed to the body at the rear end of the front end and the rear end mounted to the body to which the front end in contact with the semiconductor device, The body, Characterized in that it has a body fixing structure corresponding to the pusher fixing structure Pusher block for test plates on test handlers. The method of claim 1, The body fixing structure, A female thread groove formed in the body, The pusher fixing structure, It is formed on the rear end of the pusher is characterized in that the male thread that can correspond to the female thread groove Pusher block for test plates on test handlers. The method of claim 2, At least one stopper for determining the end position of the screw rotation of the pusher and at least one locking jaw caught by the at least one stopper are selectively provided in the body fixing structure or the pusher fixing structure respectively. Pusher block for test plates on test handlers. The method of claim 1, Further comprising a ball plunger is installed so that the ball protrudes to one side inner wall surface of the pusher insertion groove formed in the body, The body fixing structure, A ball plunge storage fitting hole provided to mount the ball plunger so that the ball of the ball plunger protrudes into an inner wall surface of the pusher insertion groove and the pusher insertion groove into which the rear end of the pusher is inserted, The pusher fixing structure, And the ball insertion groove into which the ball of the ball plunger mounted to the body through the ball plunger storage fitting hole can be inserted when the rear end of the pusher is inserted into the pusher insertion groove. Pusher block for test plates on test handlers. The method of claim 1, The body fixing structure, At least one locking jaw formed into an inner side of the pusher insertion groove and the pusher insertion groove into which the rear end of the pusher is inserted, The pusher fixing structure, The rear end of the pusher is inserted into the pusher insertion groove is rotated after the at least one or more locking projections which is caught by the at least one locking jaw characterized in that Pusher block for test plates on test handlers. The method of claim 5, The body fixing structure, And at least one guide groove for guiding the at least one locking projection when the rear end of the pusher is inserted into the pusher insertion groove. Pusher block for test plates on test handlers. The method of claim 5, And a spring provided in the pusher insertion groove to elastically support the rear end portion of the pusher inserted into the pusher insertion groove. Pusher block for test plates on test handlers. The method of claim 1, Further comprising a line spring is installed in the pusher insertion groove formed in the body, The body fixing structure, The pusher insertion groove into which the rear end of the pusher and the line spring can be inserted and mounted; The pusher fixing structure, The rear end of the pusher is characterized in that the locking groove that the line spring is caught when the pusher insertion groove is inserted Pusher block for test plates on test handlers. A pusher for bringing the semiconductor device into close contact with the test socket of the tester; A body on which the pusher is mounted; And An elastic pressing member for elastically pressing the pusher mounted to the body to fix the pusher to the body; Characterized in that it comprises Pusher block for test plates on test handlers. The method of claim 9, The elastic pressing member, Is a ball plunger is installed so that the ball protrudes to one side inner wall surface of the pusher insertion groove formed in the body, In the pusher, And a ball insertion groove in which the ball of the ball plunger is inserted into a portion inserted into the pusher insertion groove. Pusher block for test plates on test handlers. The method of claim 9, The elastic pressing member, A spring provided in the pusher insertion groove formed in the body to elastically support the rear end of the pusher; In the body, At least one locking jaw is formed in an inner side of the pusher insertion groove, In the pusher, At least one locking projection that is caught by the at least one locking jaw is formed when it is rotated after being inserted into the pusher insertion groove Pusher block for test plates on test handlers. The method of claim 9, The elastic pressing member, A sun spring provided in the pusher insertion groove formed in the body, In the pusher, When it is inserted into the pusher insertion groove characterized in that the engaging groove is formed on the line spring is formed Pusher block for test plates on test handlers. A pusher for bringing the semiconductor device into close contact with the test socket of the tester; A body on which the pusher is mounted; And An elastic pressing member installed on the pusher to elastically press a portion of the body to fix the pusher to the body; Characterized in that it comprises Pusher block for test plates on test handlers. The pusher block for the match plate of the test handler according to any one of claims 1 to 13 is provided in a matrix behavior Matchplate for test handlers.

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