KR20170030110A - Opener of handler for testing semiconductor - Google Patents

Abstract

The present invention relates to an opener applied to a handler for testing a semiconductor device. The opener according to the present invention includes an opening plate which can be elevated; opening parts which is detachably mounted on the opening plate and operates the inserts of a test tray on which the semiconductor elements can be loaded when the opening plate rises, and opens the inserts individually; and an elevator which elevates and lowers the opening plate such that the opening parts provided on the opening plate operates the inserts or release the operation state of the inserts. According to the present invention, the loss rate of raw materials can be greatly reduced, and the replacement cost can be reduced.

Description

[0001] OPEN OF HANDLER FOR TESTING SEMICONDUCTOR [0002]

The present invention relates to an opener for opening an insert capable of loading a semiconductor element in a handler for testing semiconductor devices used for testing semiconductor devices.

A handler for testing a semiconductor device (hereinafter referred to as a 'handler') is a device for sorting semiconductor devices according to a test result after electrically connecting semiconductor devices manufactured through a predetermined manufacturing process to a tester.

The handler is disclosed in Korean Patent Publication No. 10-2011-0121063 (hereinafter referred to as "Prior Art").

Generally, a handler electrically connects a plurality of semiconductor devices to a tester in a state in which they are loaded in a test tray so that a plurality of semiconductor devices can be tested together at a time.

The test tray has a plurality of inserts capable of stacking semiconductor devices as disclosed in Korean Patent Publication No. 10-2014-0070863.

The insert has a lever device for holding the loaded semiconductor device. Therefore, when the semiconductor device is loaded on the insert or the semiconductor device is recovered from the insert, the lever device must be operated so that the semiconductor device can be loaded or recovered. Background Art [0002] The prior art relates to an opener (referred to as "opener" in the prior art) for opening the insert so that the lever device can be operated to load or recover semiconductor devices.

 With reference to FIG. 3 of the prior art, it can be seen that the open pin is raised and the open pin integrally formed in the open plate pushes the inside of the operating lever (referred to as a holding member in the prior art) upward to open the insert have. Of course, when the open plate is lowered, the inside of the operation lever is returned downward by the restoring force of the elastic spring, and the insert is closed.

However, the above-described conventional techniques have the following problems.

First, if the top heights of the open pins are different, the operating levers of some of the inserts may not be overly manipulated or manipulated upon opening of the inserts. In this case, the operating lever may be broken or the opening of the insert may be defective. Accordingly, such problems are solved by cutting the raw material by a program designed so that the tops of the open pins have the same height to integrally form the open pin on the open plate. However, since the open pin needs to be integrally formed in the open plate, there are many parts to be cut in the process. Even if a problem occurs only in one open pin, the entire open plate needs to be replaced.

Second, it is difficult to cut the raw material to form the opening pin because the opening pin has to be formed thin enough to be inserted into the insertion hole of the insert, and care is required in handling the opening pin. Particularly, the smaller the size of a semiconductor device, the smaller the insert and the operating lever are, and the corresponding open pin is also very thin, so that the problem of thinning of the open pin becomes more remarkable.

Third, although the open pin is more rigid than the insert's structure, the open pin is worn out because the thin open pin strongly contacts the many operating levers in accordance with the logistics flow corresponding to the plurality of inserts. In particular, the upper and the side portions of the open pin having a lot of contact between the corresponding structures are worn out, or damage such as cutting or bending of the open pin occurs. In such a case, the entire open plate needs to be replaced. In addition, since the abrasion rates at the tops of the open pins are different from each other, the open pin can not be properly performed. In addition, the phenomenon of worn or bent of the open pin occurs not only when the apparatus is operated in the apparatus but also when the open pin is processed or handled.

Fourth, frequent replacement of the open plate lowers the operation rate of the handler and requires a large replacement cost.

A first object of the present invention is to provide a technique by which an open pin can be detachably installed on an open plate without integrally forming the open pin on the open plate.

A second object of the present invention is to provide a technique in which the opening pins can be removably installed on the opening plate, and the opening pins can have the same height.

In order to accomplish the above object, an opener of a handler for testing a semiconductor device according to the present invention includes: Open portions detachably mounted on the open plate and operating the inserts of the test tray on which the semiconductor elements can be loaded when the open plate rises, thereby opening the inserts individually; And an elevator for elevating and lowering the open plate such that the open portions provided on the open plate allow the inserts to be manipulated or the inserts to be operated by the open portions can be released; .

Wherein the open plate is provided with two sets of mounting holes for providing the open portions, the open portion includes a pair of open pins forming a pair of the open pins, The above two are inserted into the mounting holes forming a pair.

Wherein the open pin comprises: a fin portion for operating the operation lever while the upper end thereof contacts the operation lever of the insert when the open plate rises; A reinforcing portion which is formed on the lower side of the fin portion to be thicker than the thickness of the fin portion to shorten the length of the fin portion to increase the rigidity of the fin portion; And a locking part extending below the reinforcing part to be thicker than the reinforcing part to prevent the opening pin from being separated upward when the locking part is inserted into the mounting hole; Wherein the mounting hole is formed so as to be divided into a first area into which the reinforcing part is inserted and a second area with a lower part of the first area extending from the first area and into which the engaging part is inserted, 2 region and the first region and exposed to the upper portion of the open plate, and the latching portion can be inserted into the second region, but is prevented from being inserted into the first region.

Alternatively, the opening pin may include: a fin portion for operating the operation lever while the upper end thereof contacts the operation lever of the insert when the open plate rises; And an engaging portion that extends more thicker than the fin portion and that prevents the opening pin from being released upward when the lower portion of the pin portion is inserted and is injected into the mounting hole; Wherein the mounting hole is formed to be divided into a first region through which the pin portion can pass and a second region below the first region which is extended from the first region and into which the latch portion is inserted, The second region and the first region, and is exposed to the upper portion of the open plate, and the latching portion can be inserted into the second region, but is prevented from being inserted into the first region.

Further comprising mounting members for detachably mounting the opening portions to the opening plate, wherein the opening plate is formed with fixing grooves opened downward, the mounting member including: a fixing portion inserted into the fixing groove; And a pressing portion that extends beyond the fixing portion and presses one side of the locking portion upward when the fixing portion is inserted into the fixing groove; .

According to the present invention, since the opening pin is detachably installed on the opening plate, the following effects can be obtained.

First, resources can be saved by greatly reducing the loss rate of raw materials to produce open plates.

Second, when the open pin is damaged, only the corresponding open pin can be replaced, so that the replacement cost can be greatly reduced.

Thirdly, even if a failure occurs in machining or handling of the opening pin, only the individual opening pin can be reworked, so that the loss rate of the raw material can be further reduced.

1 is a conceptual plan structural view of a handler for testing a semiconductor device to which an opener according to an embodiment of the present invention can be applied.
2 is a schematic perspective view of an opener according to a first embodiment of the present invention.
Fig. 3 is a plan perspective view showing an open partial region of one unit in the opener of Fig. 2; Fig.
4 is a bottom perspective view showing an open partial region of one unit in the opener of Fig.
5 is a cross-sectional view taken along the line AA in Fig.
6 is a sectional view taken along the line A'-A 'in FIG.
7 is a schematic perspective view of an opener according to a second embodiment of the present invention.
FIG. 8 is a plan perspective view showing an open partial region of one unit in the opener of FIG. 7; FIG.
Fig. 9 is a bottom perspective view showing an open partial area of one unit in the opener of Fig. 7; Fig.
10 is a cross-sectional view taken along the line BB in Fig.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. For the sake of simplicity of explanation, it is preferable to omit or compress the notation of the known or duplicated description or drawings as much as possible.

1 is a conceptual plan view of a handler to which an opener according to the present invention may be applied. For reference, the handler 100 of FIG. 1 has a structure in which semiconductor devices are electrically connected to a tester (TESTER) in a state where the test tray TT is vertical.

The handler 100 of FIG. 1 includes a test tray TT, a first hand 110, a first opener 120, a first chamber 130, a test chamber 140, a connecting device 150, A chamber 160, a second hand 170 and a second opener 180.

The test tray TT is provided with a plurality of inserts to which a semiconductor element can be mounted, which is somewhat flowable, and circulates along a closed path C defined by a plurality of transfer devices (not shown).

The first hand 110 loads the semiconductor elements to be tested loaded in the customer tray CTn on the loading plate LP into the test tray TT in the first position P ₁ . In this case, the first hand 110 functions as a loading device for loading the semiconductor elements into the test tray TT, and the first position P ₁ becomes the loading position.

The first opener 120 is arranged to support the operation of moving the first hand 110 to the test tray TT in the first position P ₁ after withdrawing the semiconductor element from the customer tray CTn, the insert is opened in the test tray (TT) in the first position (P _1).

The first chamber 130 is provided to preheat or precool the semiconductor devices loaded in the test tray TT according to test environment conditions.

The test chamber 140 is provided to test the semiconductor elements of the test tray TT that have been preheated or precooled in the first chamber 130 and then conveyed to a test position TP.

The connecting device 150 pushes the test tray TT in the test position TP in the test chamber 140 toward the tester TESTER coupled to the test chamber 140, Connect the devices to the tester electrically.

The second chamber 160 is provided to return the heated or cooled semiconductor elements loaded on the test tray TT transferred from the test chamber 140 to a room temperature or a room temperature.

The second hand 170 is moved to the empty customer tray CTe on the unloading plate UP while classifying the semiconductor elements loaded in the on test tray TT by the test grade in the second position P ₂ Unloading. In this case, the second hand 180 functions as an unloading device for unloading the semiconductor elements from the test tray TT, and the second position P ₂ becomes the unloading position.

The second opener 180 is connected to the test tray TT in the second position P ₁ to assist the second hand 170 in retrieving the semiconductor device from the test tray TT to move the customer tray CTe. Gt; TT < / RTI >

Test in the handler 100 with the configuration as above, the tray (TT) is the first position (P _1), testing position (TP) and a second position (P ₂₎ to pass again the first position (P ₁₎ leading to the circulation And cyclically moves along the path (C).

Recently, in the handler newly proposed by the present applicant, the test tray TT may circulate in the reverse direction of the circulation path C in accordance with the test mode. In this case, the roles of the first hand 110 and the second hand 170, the first chamber 130 and the second chamber 160 are switched, the second position P ₂ becomes the loading position, The position P ₁ becomes the unloading position.

The first opener 120 and the second opener 180 of the above configurations of the present invention. Embodiments of the opener OA, which can be applied as the first opener 120 and the second opener 180, will now be described in more detail.

≪ Embodiment 1 >

FIG. 2 is a schematic perspective view of an opener OA according to a first embodiment of the present invention, and FIG. 3 is a plan view of an opener (OA) And FIG. 4 is a bottom perspective view showing an open area 30 of one unit in the opener OA of FIG.

2 to 4, the opener OA includes an open plate 20, open portions 30, and an elevator 40. As shown in FIG.

The open plate 20 has a large area in which a plurality of open portions 30 can be installed. Mounting holes 21, fixing grooves 22 and mounting grooves 23 are formed in the opening plate 20 so that a plurality of opening portions 30 can be installed. Two sets of mounting holes 21, fixing grooves 22 and mounting grooves 23 each correspond to one opening portion 30. The mounting holes 21, the fixing grooves 22, and the mounting grooves 23 will be described later with a corresponding configuration.

The open portions 30 include a pair of open pins 31, a pair of attachment members 32 forming a pair, and a pair of guide pins 33 forming a pair do.

The pair of open pins 31 are inserted into the mounting holes 21 forming the pair and have the same shape and structure.

FIG. 5 is a cross-sectional view taken along line A-A of FIG. 3, and FIG. 6 is a cross-sectional view taken along line A'-A 'of FIG.

5 and 6, the open pin 31 includes a fin portion 31a, a reinforcing portion 31b, and an engaging portion 31c.

Referring to FIGS. 3 to 6, the fin 31a is elongated in the front-rear direction when seen in plan view, and has a thin thickness in the left-right direction when viewed from the front. When the open plate 20 is lifted up, the fin 31a is brought into contact with the open plate 20 to perform an operation of pushing up the inside of the operation lever while the upper end of the pin 31a contacts the operation lever (not shown) of the insert As shown in FIG.

The reinforcing portion 31b is located on the lower side of the fin portion 31a and the thickness in the lateral direction is wider than the thickness in the left and right direction of the fin portion 31b. The length of the thin fin portion 31a in the vertical direction is minimized to increase the rigidity of the fin portion 31a and the machining area of the fin portion 31a which is too thin and small to be machined is somewhat reduced, ) Is relatively easy to process. That is, the fin 31a, the reinforcing portion 31b and the engaging portion 31c are integrally formed. By providing the reinforcing portion 31b between the pin portion 31a and the engaging portion 31c, the length of the pin portion 31a Can be taken short. The reinforcing portion 31b maintains the function of the engaging portion 31c as described below and allows the pin portion 31a to be exposed above the opening plate 20, The length of the thinner portion in the left-right direction is minimized as shown in Fig. It is preferable that the reinforcing portion 31b is formed to have a length such that the fin portion 31a has a minimum length capable of appropriately adjusting the operation lever. Since the reinforcing portion 31b has an elongated shape in the front and rear direction when viewed in plan view, the reinforcing portion 31b also serves to prevent rotation of the opening pin 31a. When the opening pin 31a is installed, Guide each location.

  The engaging portion 31c is extended below the reinforcing portion 31b to be thicker than the reinforcing portion 31b so as to prevent the opening pin 31 from deviating upwardly when it is inserted into the mounting hole 21. [ The engaging portion 31c has a short cylindrical shape in the vertical direction.

Next, the mounting hole 21 corresponding to the above-described structure of the opening pin 31 will be described.

The mounting hole 21 is formed so that the opening plate 30 penetrates vertically and is divided into a first region 21b and a second region 21c which extend in the vertical direction.

The first region 21b is a region into which the reinforcing portion 31b is inserted and has the same shape as the reinforcing portion 31b.

The second region 21c is located below the first region 21b and extends beyond the first region 21b to be inserted into the latching portion 31c. The length of the second region 21c in the vertical direction is longer than the length of the latching portion 31c in the vertical direction. Therefore, when the opening pin 31 is completely inserted into the mounting hole 21, the lower surface of the latching portion 31c does not protrude downward from the opening plate 20 as in the right side portion of Fig. 5, 2 region 21c.

 The pin portion 31a is sequentially exposed from the lower portion toward the upper portion of the open plate 20 after sequentially passing through the second region 21c and the first region 21b and the reinforcing portion 31b Is inserted into the first region 21b having the same shape as that of the reinforcement portion 31b and the engaging portion 31c is inserted into the second region 21c in a state of being prevented from being inserted into the first region 21b do.

The pair of mounting members 32 are engaged with the open plate 20 through the fixing grooves 22 and the one side of the latching portion 31c is pressed upward so that the open pin 31 is pressed against the open plate 20, As shown in FIG. The pair of attachment members 32 have the same shape and structure, and include a fixing portion 32a and a pressing portion 32b, respectively.

The fixing portion 32a has a male thread so that it is inserted into the female thread formed on the inner wall of the fixing groove 22 while being screwed.

The pressing portion 32b is located below the fixing portion 32a and extends beyond the fixing portion 32a so that when the fixing portion 32a is inserted into the fixing groove 22, And presses it upward.

Of course, a method of directly fixing the opening pin to the opening plate by forming a thread in the latching portion of the opening pin or the like can also be considered. However, in such a direct fixing method, the height of the tops of the individual pin portions may be changed depending on how much the open pin is rotated and fixed depending on the operator. In addition, there is a possibility that the straightness is lowered during the processing process of making the thread, and there is a fear of breakage and manufacturing tolerance in the fastening.

On the other hand, when the open pin 31 is fixed to the mounting member 32 according to the first embodiment, the tops of the fin portions 31a can uniformly have the same height. This is because the second regions 21c of the mounting holes 21 can be machined to have the same depth by a predetermined machining program and the mounting member 32 can be fixed to the mounting member 32 when fixing the opening pin 31 to the mounting member 32. [ The upper surface of the engagement portion 31c of the release pin 31 is completely brought into close contact with the jaw between the first region 21b and the second region 21c. Therefore, the upper ends of all the fin portions 31a can be uniformly made to have the same height.

The fixing groove 22 corresponding to the mounting member 32 is formed to open downward and includes a fixing region 22a into which the fixing portion 32a is inserted and a pressing region 22b into which the pressing portion 32b is inserted. .

On the inner wall of the fixed region 22a, a female screw thread is formed, so that the fixing portion 32a of the fitting member 32 is screwed.

The pressing region 22b is provided below the fixing region 22a and is formed to prevent the pressing portion 32b from projecting to the lower end of the opening plate 20. [ Accordingly, if there is a separate coupling plate (not shown) between the open plate 20 and the elevator 40, the horizontal distance between the open plate 20 and the coupling plate is disturbed by the installation member 32 .

The guide pins 33 are provided to guide the matching between the insert and the open portion 30 and are mounted on the open plate 20 through the mounting grooves 23 opened upward.

And the elevator 40 lifts the open plate 20 so that the open portions 30 provided on the open plate 20 can manipulate the inserts or the operation state of the inserts by the open portions 30 can be released.

≪ Embodiment 2 >

FIG. 7 is a schematic perspective view of the opener OA according to the second embodiment of the present invention, and FIG. 8 is a plan view of the opener OA of FIG. 7, And FIG. 9 is a bottom perspective view showing an open partial area of one unit in the opener of FIG.

7 to 9, the opener OA includes an open plate 20 ', an open portion 30' and an elevator 40.

The open plate 20 'is formed with mounting holes 21', fixing grooves 22 'and mounting grooves 23'.

Each of the open portions 30 'includes a pair of open pins 31', a pair of attachment members 32 'forming a pair, and a pair of guide pins 33' ').

The fixing grooves 22 ', the mounting grooves 23', the pair of mounting members 32 'and the pair of guide pins 33' are the same as those in the first embodiment, do.

The pair of open pins 31 'are inserted into the pair of mounting holes 21' and have the same shape and structure.

10 is a cross-sectional view taken along the line B-B in Fig.

Referring to Fig. 10, the open pin 31 'includes a pin portion 31'a and an engagement portion 31'c.

The pin portion 31'a is provided with two pin bars PB which are elongated in the vertical direction and arranged side by side in the front-rear direction.

The latching portion 31'c prevents the release pin 31 'from being released upward when the latching portion 31'c is inserted into the mounting hole 21. [ The latching portion 31'c has a hexahedron shape. Of course, the shape of the latching portion 31'c may be variously considered, but it is also possible to prevent the rotation of the opening pin 31'a and to guide the correct position when the opening pin 31'a is installed It is preferable that it is provided so as to have a polygonal shape in plan view.

On the other hand, the two pin rods PB constituting the pin portion 31'a are provided such that the lower portion thereof is inserted into the engaging portion 31'c at a certain depth. For this purpose, the lower portion of the pin portion 31'a It is preferable that the latching portion 31'c is insert-injected while being inserted into the constant depth latching portion 31'c. Therefore, the pin portion 31'a is made of a metal material, but the latching portion 31'c is made of a synthetic resin material. The upper portion of the fin portion 31'a is exposed above the open plate 20 '. Of course, one or more pin rods PB may be provided.

The mounting hole 21 'is divided into a first region 21'b and a second region 21'c.

The first region 21'b has a space in which the pin portion 31'a can pass but the engaging portion 31'c can not pass through. Specifically, the first region 21'b has two rod holes BH through which the pin rod PB can be inserted and passed. For reference, the pin PB inserted in the rod hole BH is supported by the inner wall surfaces constituting the rod hole BH, so that the rigidity is reinforced.

The second area 21'c has a space below the first area 21'b where the engaging part 31'c can be inserted by being extended beyond the first area 21'b.

The upper portion of the pin portion 31'a sequentially passes through the second region 21'c and the first region 21'b and is exposed to the upper portion of the open plate 20 ' 'c does not pass through the first region 21'b and is prevented from passing therethrough, so that it remains inserted in the first region 21'b.

  The mounting member 32 'is coupled to the opening plate 20' through the fixing groove 22 'and presses one side of the locking portion 31'c upwardly so that the opening pin 31' '). The pair of mounting members 32 'have the same shape and structure as each other, and include a fixing portion 32'a and a pressing portion 32'b, respectively.

The fixed portion 32'a is inserted into the female thread formed on the inner wall of the fixing groove 22 'while having a male screw thread.

The pressing portion 32'b is located below the fixing portion 32a and extends beyond the fixing portion 32'a so that when the fixing portion 32'a is inserted into the fixing groove 22 ' (31'c) upward.

The fixing groove 22 'corresponds to the upper mounting member 32' as in the first embodiment.

The guide pins 33 'are provided to guide the matching between the insert and the open portion 30' and are mounted to the open plate 20 'through mounting grooves opened upward as in the first embodiment.

The elevator 40 moves the open plate 20 'up and down so that the open portions 30' provided on the open plate 20 'operate the inserts or the operation state of the inserts by the open portions 30' I will.

The openers OA having the above configuration can be replaced only by the open pins 31 and 31 'to which the corresponding pin portions 31a and 31'a belong even if the pin portions 31a and 31'a are damaged by abrasion, So that it can be easily restored to its original state.

When the installation members 32 and 32 'are only tightened at the time of production or replacement, the upper ends of the fin portions 31a and 31'a are accurately set.

Although the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, And the scope of the present invention is to be understood as the scope of the following claims and their equivalents.

OA: opener
20, 20 ': Open plate
21, 21 '': Mounting hole
21b, 21'b: first region 21c, 21'c: second region
22, 22 ': Fixing groove
30, 30 ': opening portion
31, 31 ': opening pin
31a, 31'a: pin portion 31b: reinforcement portion
31c, 31'c:
32, 32 ': mounting member
40: Lift

Claims (5)

An open plate that can be raised and lowered;
Open portions detachably mounted on the open plate and operating the inserts of the test tray on which the semiconductor elements can be loaded when the open plate rises, thereby opening the inserts individually; And
An elevator for elevating and lowering the open plate such that the open portions provided on the open plate allow the inserts to be manipulated or the operation of the inserts by the open portions to be released; ≪ RTI ID = 0.0 >
Opener of a handler for testing semiconductor devices. The method according to claim 1,
The open plate is formed with two mounting holes for mounting the open portions,
Wherein the open portion includes a pair of open fins forming a pair,
And the pair of the open pins are inserted into the mounting holes of the pair of the two pairs.
Opener of a handler for testing semiconductor devices. The method according to claim 1,
The open pin
A pin portion for operating the operation lever while an upper end thereof contacts the operation lever of the insert when the open plate rises;
A reinforcing portion which is formed on the lower side of the fin portion to be thicker than the thickness of the fin portion to shorten the length of the fin portion to increase the rigidity of the fin portion; And
A locking portion that is extended below the reinforcing portion to be thicker than the reinforcing portion to prevent the opening pin from being released upward when the locking pin is inserted into the mounting hole; Lt; / RTI >
Wherein the mounting hole is divided into a first area in which the reinforcing part is inserted and a second area in which the engaging part is inserted so as to extend from the first area below the first area,
The pin portion sequentially passes through the second region and the first region and is exposed to the upper portion of the open plate, and the latch portion is inserted into the second region, but is prevented from being inserted into the first region. doing
Opener of a handler for testing semiconductor devices. The method according to claim 1,
The open pin
A pin portion for operating the operation lever while an upper end thereof contacts the operation lever of the insert when the open plate rises; And
A locking part extending more thickly than the pin part and preventing the opening pin from being released upward when the lower part of the pin part is inserted and injected into the mounting hole; Lt; / RTI >
Wherein the mounting hole is divided into a first area through which the pin can pass and a second area below the first area that extends beyond the first area and into which the locking part is inserted,
The pin portion sequentially passes through the second region and the first region and is exposed to the upper portion of the open plate, and the latch portion is inserted into the second region, but is prevented from being inserted into the first region. doing
Opener of a handler for testing semiconductor devices. The method according to claim 3 or 4,
Further comprising installation members for detachably installing the open portions on the open plate,
The opening plate is formed with fixing grooves opened downward,
The mounting member
A fixing part inserted into the fixing groove; And
A pressing portion which is extended from the fixing portion and presses one side of the locking portion upward when the fixing portion is inserted into the fixing groove; ≪ RTI ID = 0.0 >
Opener of a handler for testing semiconductor devices.

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